| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/04/2002 | US6400029 Self-limiting method of reducing contamination in a contact opening, method of making contacts and semiconductor devices therewith, and resulting structures |
| 06/04/2002 | US6400027 Semiconductor device having micro-wires designed for reduced capacitive coupling |
| 06/04/2002 | US6400026 For producing a high output such as a power mos transistor and an insulating gate bipolar transistor. |
| 06/04/2002 | US6400024 Method of providing a vertical interconnect between thin film microelectronic devices |
| 06/04/2002 | US6400023 Integration of low-k SiOF for damascene structure |
| 06/04/2002 | US6400022 Semiconductor device and fabrication process therefor and capacitor structure |
| 06/04/2002 | US6400021 Wafer level package and method for fabricating the same |
| 06/04/2002 | US6400020 Aggregate of semiconductor devices including semiconductor packages arranged on a first tape and wound on a reel and also including a spacer tape provided with spacers |
| 06/04/2002 | US6400017 Semiconductor device and method for manufacturing same |
| 06/04/2002 | US6400016 Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
| 06/04/2002 | US6400008 Surface mount ic using silicon vias in an area array format or same size as die array |
| 06/04/2002 | US6400005 Magnetic insert into mold cavity to prevent resin bleeding from bond area of pre-mold (open cavity) plastic chip carrier during molding process |
| 06/04/2002 | US6400002 Methods of forming field effect transistors and related field effect transistor constructions |
| 06/04/2002 | US6400000 Semiconductor device with a diode, and method of manufacturing such a device |
| 06/04/2002 | US6399999 Semiconductor device with extra control wiring for improving breakdown voltage |
| 06/04/2002 | US6399996 Schottky diode having increased active surface area and method of fabrication |
| 06/04/2002 | US6399995 Solid state image sensing device |
| 06/04/2002 | US6399994 Semiconductor device for surface-shape recognition |
| 06/04/2002 | US6399993 Semiconductor device and method for fabricating the same |
| 06/04/2002 | US6399992 Semiconductor device and method of making the same |
| 06/04/2002 | US6399991 Semiconductor integrated circuit |
| 06/04/2002 | US6399988 Thin film transistor having lightly doped regions |
| 06/04/2002 | US6399987 MOS transistor having self-aligned well bias area |
| 06/04/2002 | US6399986 Semiconductor device and method of fabricating the same |
| 06/04/2002 | US6399985 Semiconductor device |
| 06/04/2002 | US6399984 Species implantation for minimizing interface defect density in flash memory devices |
| 06/04/2002 | US6399983 Reduction of shorts among electrical cells formed on a semiconductor substrate |
| 06/04/2002 | US6399982 Rough (high surface area) electrode from Ti and TiN capacitors and semiconductor devices including same |
| 06/04/2002 | US6399981 Integrated circuitry memory devices |
| 06/04/2002 | US6399980 Fabrication of a T-shaped capacitor |
| 06/04/2002 | US6399979 Memory cell having a vertical transistor with buried source/drain and dual gates |
| 06/04/2002 | US6399978 Formation of 5F2 cell with partially vertical transistor and gate conductor aligned buried strap with raised shallow trench isolation region |
| 06/04/2002 | US6399977 Reducing oxidation stress in the fabrication of devices |
| 06/04/2002 | US6399976 Shrink-wrap collar for DRAM deep trenches |
| 06/04/2002 | US6399974 Semiconductor memory device using an insulator film for the capacitor of the memory cell and method for manufacturing the same |
| 06/04/2002 | US6399973 Technique to produce isolated junctions by forming an insulation layer |
| 06/04/2002 | US6399972 Cell based integrated circuit and unit cell architecture therefor |
| 06/04/2002 | US6399971 Semiconductor device and method for fabricating the same |
| 06/04/2002 | US6399970 FET having a Si/SiGeC heterojunction channel |
| 06/04/2002 | US6399969 Heterojunction bipolar transistor including collector/base heterojunction achieving high operation efficiency |
| 06/04/2002 | US6399967 Device for selectively detecting light by wavelengths |
| 06/04/2002 | US6399963 Semiconductor light emitting element and its manufacturing method |
| 06/04/2002 | US6399961 Field effect transistor having dielectrically isolated sources and drains and method for making same |
| 06/04/2002 | US6399960 Semiconductor device with semiconductor circuit comprising semiconductor units, and method for fabricating it |
| 06/04/2002 | US6399959 Thin film transistor with reduced metal impurities |
| 06/04/2002 | US6399958 Apparatus for visual inspection during device analysis |
| 06/04/2002 | US6399957 Method and apparatus for inspecting appearance of objects by irradiating illumination light on the objects |
| 06/04/2002 | US6399954 Charged-particle beam lithography apparatus and system capable of readily detecting abnormality in controlling on-off operation |
| 06/04/2002 | US6399953 Scanning electronic microscope and method for automatically observing semiconductor wafer |
| 06/04/2002 | US6399933 Active matrix display device and method of manufacturing the same |
| 06/04/2002 | US6399926 Heat-treating apparatus capable of high temperature uniformity |
| 06/04/2002 | US6399923 Heating furnace including vertically spaced-apart double-sided far-infrared-radiation panel heaters defining multi-stage drying chambers |
| 06/04/2002 | US6399922 Single-substrate-heat-treating apparatus for semiconductor process system |
| 06/04/2002 | US6399921 System and method for thermal processing of a semiconductor substrate |
| 06/04/2002 | US6399902 Inline flux measurement system |
| 06/04/2002 | US6399900 Contact structure formed over a groove |
| 06/04/2002 | US6399897 Multi-layer wiring substrate |
| 06/04/2002 | US6399895 Component hybridizing system allowing for defective planarity |
| 06/04/2002 | US6399772 Vapor deposition |
| 06/04/2002 | US6399733 Silicones |
| 06/04/2002 | US6399677 Comprising an epoxy resin, a curing agent, and an inorganic filler in the form of porous silica having a specific surface area of 6 to 200 m2/g, a true specific gravity of 2.0 to 2.2, and a mean particle size of 2-50 micro m |
| 06/04/2002 | US6399666 Insulative matrix material |
| 06/04/2002 | US6399552 Mixture of fluoride reducing agent, organic acid and water |
| 06/04/2002 | US6399551 Mixture containing chelate compound and solvent |
| 06/04/2002 | US6399522 Vapor deposition using plasma gases; pretreatment using nitrogen and nitrogen oxide gas flow |
| 06/04/2002 | US6399521 Heat resistant barrier; mixed oxide |
| 06/04/2002 | US6399520 Irradiating with microwaves |
| 06/04/2002 | US6399519 Method for establishing ultra-thin gate insulator having annealed oxide and oxidized nitride |
| 06/04/2002 | US6399518 Resist coating and developing processing apparatus |
| 06/04/2002 | US6399517 Etching method and etching apparatus |
| 06/04/2002 | US6399516 Plasma etch techniques for fabricating silicon structures from a substrate |
| 06/04/2002 | US6399515 Using patterned photoresist |
| 06/04/2002 | US6399514 High temperature silicon surface providing high selectivity in an oxide etch process |
| 06/04/2002 | US6399513 For forming integrated circuits |
| 06/04/2002 | US6399512 Method of making metallization and contact structures in an integrated circuit comprising an etch stop layer |
| 06/04/2002 | US6399511 Plasma etch process in a single inter-level dielectric etch |
| 06/04/2002 | US6399510 Bi-directional processing chamber and method for bi-directional processing of semiconductor substrates |
| 06/04/2002 | US6399509 Patterning; in situ cleaning |
| 06/04/2002 | US6399508 Multilayer structure |
| 06/04/2002 | US6399507 Stable plasma process for etching of films |
| 06/04/2002 | US6399506 Etching back the oxide layer using a nitrogenous compound as a processing gas |
| 06/04/2002 | US6399505 Method and system for copper interconnect formation |
| 06/04/2002 | US6399504 Cleaning semiconductor surface; using aqueous solution of ammonium fluoride, ammonium hydroxide and hydrogen fluoride mixtures |
| 06/04/2002 | US6399503 Method of preventing dishing phenomenon atop a dual damascene structure |
| 06/04/2002 | US6399502 Etching, depositing dielectric, polishing |
| 06/04/2002 | US6399501 Method and apparatus for detecting polishing endpoint with optical monitoring |
| 06/04/2002 | US6399498 Method and apparatus for polishing work |
| 06/04/2002 | US6399497 Semiconductor manufacturing process and semiconductor device |
| 06/04/2002 | US6399496 Depositing copper alloy seed layer on electronic device; bonding |
| 06/04/2002 | US6399495 Copper interconnections for metal-insulator-metal capacitor in mixed mode signal process |
| 06/04/2002 | US6399494 Method of making a semiconductor device |
| 06/04/2002 | US6399493 Method of silicide formation by silicon pretreatment |
| 06/04/2002 | US6399492 Ruthenium silicide processing methods |
| 06/04/2002 | US6399491 Method of manufacturing a barrier metal layer using atomic layer deposition |
| 06/04/2002 | US6399490 Highly conformal titanium nitride deposition process for high aspect ratio structures |
| 06/04/2002 | US6399489 Barrier layer deposition using HDP-CVD |
| 06/04/2002 | US6399488 Method of manufacturing a contact plug in a semiconductor device |
| 06/04/2002 | US6399487 Method of reducing phase transition temperature by using silicon-germanium alloys |
| 06/04/2002 | US6399486 Multilayer blanketing, patterning, etching |
| 06/04/2002 | US6399485 Semiconductor device with silicide layers and method of forming the same |