Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2002
06/13/2002US20020072208 Methods of forming dram assemblies, transistor devices, and openings in substrates
06/13/2002US20020072207 Semiconductor device and manufacturing method thereof
06/13/2002US20020072206 Patterned buried insulator
06/13/2002US20020072203 Thin film-structure and a method for producing the same
06/13/2002US20020072202 Method and system for mounting semiconductor device, semiconductor device separating system, and method for fabricating IC card
06/13/2002US20020072201 Method for electrostatic force bonding and a system thereof
06/13/2002US20020072200 Integrated circuit having a device wafer with a diffused doped backside layer
06/13/2002US20020072199 Semiconductor processing methods of forming transistors, semiconductor processing methods of forming dynamic random access memory circuitry, and related integrated circuitry
06/13/2002US20020072198 Method of forming a trench type isolation layer
06/13/2002US20020072197 Method for self-aligned shallow trench isolation and method of manufacturing non-volatile memory device using the same
06/13/2002US20020072196 Shallow trench isolation for thin silicon/silicon-on-insulator substrates by utilizing polysilicon
06/13/2002US20020072195 Semiconductor device having a marking recess and method of manufacturing the same
06/13/2002US20020072194 Aligner having shared rotation shaft
06/13/2002US20020072193 Method of aligning a photolithographic mask to a crystal plane
06/13/2002US20020072192 Method of forming ferroelectric capacitor in semiconductor device
06/13/2002US20020072191 Depositing amorphous metal oxide on a semiconductor where a sunken or raised section is set and crystallizing by irradiation with a laser
06/13/2002US20020072190 Method of fabricating a cylinder capacitor having a reverse electrode structure
06/13/2002US20020072189 Via capacitor
06/13/2002US20020072187 Methods for deuterium sintering
06/13/2002US20020072186 High voltage MOS devices and methods of forming MOS devices
06/13/2002US20020072185 Method of forming gate structure
06/13/2002US20020072184 Semiconductor device and method for manufacturing the same
06/13/2002US20020072183 A semiconductor memory device having a trench capacitor
06/13/2002US20020072182 Method of forming germanium doped polycrystalline silicon gate of MOS transistor and method of forming CMOS transistor device using the same
06/13/2002US20020072181 Fabrication of transistor having elevated source-drain and metal silicide
06/13/2002US20020072180 Semiconductor device and process for producing the same
06/13/2002US20020072179 Field effect transistor and method of fabrication
06/13/2002US20020072177 Method for transistor gate dielectric layer with uniform nitrogen concentration
06/13/2002US20020072176 Process for fabricating an MOS device having highly-localized halo regions
06/13/2002US20020072175 Method of manufacturing flash memory
06/13/2002US20020072174 High coupling split-gate transistor and method for its formation
06/13/2002US20020072173 Semiconductor device and fabrication process therefor
06/13/2002US20020072172 Method of fabricating a storage node
06/13/2002US20020072171 Method for fabricating a trench capacitor
06/13/2002US20020072170 Merged self-aligned source and ONO capacitor for split gate non-volatile memory
06/13/2002US20020072169 CMOS device and method of manufacturing the same
06/13/2002US20020072168 Method of fabricating CMOS with different gate dielectric layers
06/13/2002US20020072167 Flash memory device and method of making same
06/13/2002US20020072165 Substrate processing apparatus and semiconductor device manufacturing method
06/13/2002US20020072164 Processing chamber with multi-layer brazed lid
06/13/2002US20020072163 Module and method of making same
06/13/2002US20020072162 Defect knowledge library
06/13/2002US20020072161 Method of manufacturing semiconductor device
06/13/2002US20020072160 Method of forming a metal line in a semiconductor memory device
06/13/2002US20020072159 Semiconductor device and manufacturing method thereof
06/13/2002US20020072158 Method of manufacturing thin film transistor
06/13/2002US20020072157 Semiconductor device having a semiconductor thin film containing low concentration of unbound hydrogen atoms and method of manufacturing the same
06/13/2002US20020072156 Method of forming gate electrode in semiconductor devices
06/13/2002US20020072155 Method of fabricating a DRAM unit
06/13/2002US20020072153 Method and apparatus for distributing mold material in a mold for packaging microelectronic devices
06/13/2002US20020072152 Semiconductor package and semiconductor package fabrication method
06/13/2002US20020072151 Method of producing mounting structure and mounting structure produced by the same
06/13/2002US20020072149 Method for manufacturing a semiconductor device
06/13/2002US20020072148 Method for mounting a semiconductor chip on a substrate, and semiconductor device adapted for mounting on a substrate
06/13/2002US20020072146 Light control device, method for driving same and pickup device using the light control device
06/13/2002US20020072145 Semiconductor device
06/13/2002US20020072144 Integrated CMOS capacitive pressure sensor
06/13/2002US20020072142 Introducing deep-level ion species at an elevated temperature
06/13/2002US20020072140 Growing an oxide buffer layer on a silicon wafer before growning a compliant substrate
06/13/2002US20020072138 Method of making opto-electronic devices using sacrificial devices
06/13/2002US20020072136 Method for manufacturing semiconductor device utilizing semiconductor testing equipment
06/13/2002US20020072135 Manufacturing method of semiconductor integrated circuit device
06/13/2002US20020072133 Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image
06/13/2002US20020072132 Semiconductor integrated circuit
06/13/2002US20020072130 Process for producing semiconductor article using graded expital growth
06/13/2002US20020072025 Substrate processing apparatus and substrate processing method
06/13/2002US20020072016 Etching with a energized process gas, and before, during, or after exposing to an energized cleaning gas, exposing substrate to energized treating gas of a halogen species and a hydrogen species to enhance cleaning
06/13/2002US20020072012 Charged beam exposure method and charged beam exposure apparatus
06/13/2002US20020072009 Photosensitive polymer containing Si, Ge or Sn and resist composition comprising the same
06/13/2002US20020072003 Photolithography for making semiconductors; scatterometry; neural networks; variation of the process parameters affects the diffraction signature of a patterned structure being processed
06/13/2002US20020072001 Altering parameter(s) of a process module configured to perform a lithography step to reduce within-wafer variation of a critical metric, such as critical dimension
06/13/2002US20020072000 Exposure apparatus, exposure method and semiconductor device fabricated with the exposure method
06/13/2002US20020071996 Lithographic projection apparatus; includes beam shaping device, positioning device for moving the beam, and a sensor dependent on the number of charged particles impinging on a mark region of a mask
06/13/2002US20020071995 A coating is provided over a fresh layer of resist, such as chemically amplified resist (CAR), the overcoat stabilizes process control and makes it possible to precoat the CAR on wafer or mask blanks some time prior to exposure
06/13/2002US20020071994 Dividing the mask into partial areas, forming partial masks which have apertures with patterns identical with plurality of partial areas, exposing the patterns of masks on a mask substrate by electron beam proximity exposure method
06/13/2002US20020071910 Controlling means for the operation time of assisting driving mechanism to overlap with the operation time of said main driving mechanism; process solution on the substrate is equally and concentrically spread to edges; semiconductors
06/13/2002US20020071756 Dual wafer edge gripping end effector and method therefor
06/13/2002US20020071750 Methods and apparatus for positive wafer process status identification during semiconductor wafer processing
06/13/2002US20020071745 Apparatus and method for grasping and transporting wafers
06/13/2002US20020071744 Compact apparatus and method for storing and loading semiconductor wafer carriers
06/13/2002US20020071642 Installation structure and method for optical parts and electric parts
06/13/2002US20020071330 Semiconductor device
06/13/2002US20020071320 Memory cell configuration and method for fabricating it
06/13/2002US20020071318 Semiconductor device
06/13/2002US20020071315 Nonvolatile memory having embedded word lines
06/13/2002US20020071308 Semiconductor memory device having memory cells each capable of storing three or more values
06/13/2002US20020071304 Nonvolatile ferroelectric memory having shunt lines
06/13/2002US20020071239 09186692 a semiconductor capacitive device
06/13/2002US20020071237 Capacitor having sidewall spacer protecting the dielectric layer and method of fabricating the same
06/13/2002US20020071230 ESD protection devices
06/13/2002US20020071129 Axis determination apparatus, film-thickness measurement apparatus, deposition apparatus, axis determination method, and film-thickness measurement method
06/13/2002US20020071128 Endpoint detector and method for measuring a change in wafer thickness in chemical-mechanical polishing of semiconductor wafers and other microelectronic substrates
06/13/2002US20020071127 Positioning apparatus for probe card and TAB
06/13/2002US20020071106 Exposure apparatus and method
06/13/2002US20020071105 Exposure apparatus and exposure method
06/13/2002US20020071087 Liquid crystal display device and method thereof
06/13/2002US20020071063 Structure of storage capacitor on common
06/13/2002US20020071046 Solid-state image apparatus, driving method therefor, and camera system
06/13/2002US20020070983 Automated wafer handling with graphic user interface
06/13/2002US20020070913 Transistor circuit, display panel and electronic apparatus
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