| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 08/29/2002 | US20020117671 Method Of Manufacturing Thin Film Transistor |
| 08/29/2002 | US20020117666 Method of forming thin film transistors on predominantly <100> polycrystalline silicon films |
| 08/29/2002 | US20020117665 Bipolar transistor |
| 08/29/2002 | US20020117664 Growth of compound semiconductor structures on patterned oxide films and process for fabricating same |
| 08/29/2002 | US20020117661 Silicon-based film and photovoltaic element |
| 08/29/2002 | US20020117657 Heterojunction bipolar transistor (HBT) having an improved emitter-base junction |
| 08/29/2002 | US20020117647 Vapor deposition approach from metalorganic precursors, such as metal ( beta -diketonates) |
| 08/29/2002 | US20020117635 Patterned wafer inspection method and apparatus therefor |
| 08/29/2002 | US20020117630 Laser illumination apparatus |
| 08/29/2002 | US20020117619 Inspecting system using electron beam and inspecting method using same |
| 08/29/2002 | US20020117617 Direct detection of low-energy charged particles using metal oxide semiconductor circuitry |
| 08/29/2002 | US20020117535 Rework and underfill nozzle for electronic components |
| 08/29/2002 | US20020117473 Capable of becoming rare earth hydroxide in reaction with water vapor; noncracking, nonswelling, nonchipping; disk drives |
| 08/29/2002 | US20020117472 Cleaning of multicompositional etchant residues |
| 08/29/2002 | US20020117471 Method of plasma heating and etching a substrate |
| 08/29/2002 | US20020117470 Method for controlling the sheet resistance of thin film resistors |
| 08/29/2002 | US20020117399 Barrier composed of highly resistive materials include metal oxides, and tantalum nitride, coated onto the sidewalls and bottom of via hole intented for copper metallization |
| 08/29/2002 | US20020117383 Tray accommodation unit |
| 08/29/2002 | US20020117330 Resilient contact structures formed and then attached to a substrate |
| 08/29/2002 | US20020117267 Electric component compression bonding machine and method |
| 08/29/2002 | US20020117231 Device and method for shaping terminal leads |
| 08/29/2002 | US20020117202 System and method of operation of a digital mass flow controller |
| 08/29/2002 | US20020117192 Vertical batch type wafer cleaning apparatus |
| 08/29/2002 | US20020117188 Wafer presence sensor for detecting quartz wafers |
| 08/29/2002 | US20020117113 Substrate processing apparatus |
| 08/29/2002 | US20020117112 Vacuum processing apparatus |
| 08/29/2002 | US20020117105 Method of heat-treating fluoride crystal, method of producing optical part, and optical apparatus |
| 08/29/2002 | US20020117104 Nitride-based semiconductor element and method of forming nitride-based semiconductor |
| 08/29/2002 | US20020117103 Method of growing a semiconductor multi-layer structure |
| 08/29/2002 | US20020117082 Process for forming a low dielectric constant fluorine and carbon-containing silicon oxide dielectric material characterized by improved resistance to oxidation |
| 08/29/2002 | US20020116882 Semiconductor substrate processing tool and fabrications facilities intergration plate |
| 08/29/2002 | US20020116836 Method and apparatus for heating and cooling substrates |
| 08/29/2002 | DE10206140A1 Verfahren zum Ausbilden einer Vertiefung in einem Halbleitersubstrat A method of forming a recess in a semiconductor substrate |
| 08/29/2002 | DE10205559A1 Verflochtene Verbindungen für integrierte Schaltungen Intertwined connections for integrated circuits |
| 08/29/2002 | DE10203354A1 Verfahren zum Bilden eines Verbindungsmusters in einer Halbleitervorrichtung A method for forming an interconnection pattern in a semiconductor device |
| 08/29/2002 | DE10164283A1 Magnetspeichervorrichtung und Magnetsubstrat A magnetic memory device and magnet substrate |
| 08/29/2002 | DE10160093A1 Halbleitervorrichtung und Verfahren zu ihrer Herstellung Semiconductor device and process for their preparation |
| 08/29/2002 | DE10135782A1 Halbleiterspeichervorrichtung A semiconductor memory device |
| 08/29/2002 | DE10132133A1 Statische Halbleiterspeichervorrichtung mit T-Typ-Bitleitungsstruktur Static semiconductor memory device with T-type bit line |
| 08/29/2002 | DE10120029A1 Presskontaktierung von Mikrochips Press contact of microchips |
| 08/29/2002 | DE10113187C1 Verfahren zur Herstellung eines Grabenkondensators einer Speicherzelle eines Halbleiterspeichers A process for the preparation of a grave capacitor of a memory cell of a semiconductor memory |
| 08/29/2002 | DE10108369A1 Verfahren und Vorrichtung zum Ablösen eines Halbleiterwafers von einem Träger Method and apparatus for peeling a semiconductor wafer from a carrier |
| 08/29/2002 | DE10103456C1 Vorrichtung mit mindestens einem Halbleiterbauteil und einer Leiterplatte und Verfahren zur Herstellung einer elektromechanischen Verbindung zwischen beiden A device with at least one semiconductor device and a circuit board and method for producing an electro-mechanical connection between the two |
| 08/28/2002 | EP1235351A1 Programmable logic device and programming method |
| 08/28/2002 | EP1235350A2 Semiconductor switching device |
| 08/28/2002 | EP1235314A2 Method and apparatus for optimizing the output beam characteristics of a laser |
| 08/28/2002 | EP1235282A2 Method for fabricating a nitride film |
| 08/28/2002 | EP1235279A2 Semiconductor device using nitride compound and method for fabricating the same |
| 08/28/2002 | EP1235278A2 Heterojunction bipolar transistor (HBT) having an improved emitter-base junction |
| 08/28/2002 | EP1235276A1 Semiconductor device and process for fabrication thereof |
| 08/28/2002 | EP1235274A1 Temperature monitoring device for microprocessor cooling devices |
| 08/28/2002 | EP1235272A2 Leadframe, resin-molded semiconductor device including the leadframe, method of making the leadframe and method for manufacturing the device |
| 08/28/2002 | EP1235271A2 Native field effect transistor and method of manufacturing same |
| 08/28/2002 | EP1235270A2 Process of evaluating manufacturing and/or process deficiencies, method of evaluating apparatus tendencies, as well as associated components |
| 08/28/2002 | EP1235269A2 Wafer testing and marking process for semiconductor components with fusing structures |
| 08/28/2002 | EP1235268A1 Methods of inspecting and manufacturing silicon wafer, method of manufacturing semiconductor device, and silicon wafer |
| 08/28/2002 | EP1235267A1 Two-metal tab tape, double-sided csp tape, bga tape, and method for manufacturing the same |
| 08/28/2002 | EP1235266A1 Chip bonding device |
| 08/28/2002 | EP1235265A1 Method for etching a hardmask layer and a metal layer |
| 08/28/2002 | EP1235264A2 Direct etch for thin film resistor using a hard mask |
| 08/28/2002 | EP1235263A2 Gas switching during an etch process to modulate the characteristics of the etch |
| 08/28/2002 | EP1235262A1 Heat treatment device |
| 08/28/2002 | EP1235260A2 Method for manufacturing polycristalline semiconductor layers and thin-film transistors, and laser annealing apparatus |
| 08/28/2002 | EP1235259A2 Method of heat treating a semiconductor film by laser irradiation |
| 08/28/2002 | EP1235258A1 Method for cleaning substrate and method for manufacturing semiconductor device |
| 08/28/2002 | EP1235257A1 Semiconductor-manufacturing apparatus |
| 08/28/2002 | EP1235256A2 A method of growing a semiconductor multi-layer structure |
| 08/28/2002 | EP1235227A2 Programmable sub-surface aggregating metallization structure |
| 08/28/2002 | EP1235226A2 Nonvolatile memory |
| 08/28/2002 | EP1235164A2 Method and apparatus for scalable interconnect solution |
| 08/28/2002 | EP1235115A2 Stage device and movement guidance method |
| 08/28/2002 | EP1235113A2 Illumination system with reduced energy load |
| 08/28/2002 | EP1235112A2 Objective subsystem for illumination system |
| 08/28/2002 | EP1235110A2 Optical beam guide system and method of preventing contamination of optical components thereof |
| 08/28/2002 | EP1235109A1 Method for exposing at least one or at least two semiconductor wafers |
| 08/28/2002 | EP1235108A1 Antireflective coating material and semiconductor product with an ARC layer |
| 08/28/2002 | EP1235103A2 An optical proximity correction method utilizing gray bars as sub-resolution assist features |
| 08/28/2002 | EP1235092A2 Projection optical system, projection apparatus and projection exposure method |
| 08/28/2002 | EP1235091A2 Projection optical system and exposure apparatus with the same |
| 08/28/2002 | EP1234800A1 Aqueous dispersion, process for its production and use thereof |
| 08/28/2002 | EP1234342A1 Method and apparatus for self-doping contacts to a semiconductor |
| 08/28/2002 | EP1234340A1 Formation of contacts on thin films |
| 08/28/2002 | EP1234337A2 Semiconductor circuit arrangement and a method for producing same |
| 08/28/2002 | EP1234336A1 Radiation resistant integrated circuit design |
| 08/28/2002 | EP1234335A1 Method of manufacturing a semiconductor device using a halo implantation |
| 08/28/2002 | EP1234332A2 Dram cell structure with tunnel barrier |
| 08/28/2002 | EP1234330A2 Method relating to anodic bonding |
| 08/28/2002 | EP1234329A1 Method for producing a bipolar transistor and method for producing an integrated circuit arrangement with such a bipolar transistor |
| 08/28/2002 | EP1234328A2 Method for rapid thermal processing of substrates |
| 08/28/2002 | EP1234327A1 Reactor for processing a semiconductor wafer |
| 08/28/2002 | EP1234325A1 Process for fabricating a uniform gate oxide of a vertical transistor |
| 08/28/2002 | EP1234324A1 High temperature oxide deposition for eeprom devices |
| 08/28/2002 | EP1234323A2 Monitoring system for a conveying device that conveys flat articles, especially wafers |
| 08/28/2002 | EP1234322A2 Method and apparatus for supercritical processing of multiple workpieces |
| 08/28/2002 | EP1234314A1 Inductor on integrated circuit and methods for manufacture |
| 08/28/2002 | EP1234216A1 Method and apparatus for aligning a crystalline substrate |
| 08/28/2002 | EP1234171A2 Defect knowledge library |
| 08/28/2002 | EP1234133A1 Compact gate valve |
| 08/28/2002 | EP1234063A2 Chemical fluid deposition for the formation of metal and metal alloy films on patterned and unpatterned substrates |
| 08/28/2002 | EP1234010A2 Use of cesium hydroxide in a dielectric cmp slurry |