Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2002
08/27/2002US6440845 Method of fabricating interconnect of capacitor
08/27/2002US6440844 Semiconductor device with copper wiring and its manufacture method
08/27/2002US6440843 Semiconductor device and method for manufacturing the same
08/27/2002US6440842 Method of forming a dual damascene structure by patterning a sacrificial layer to define the plug portions of the structure
08/27/2002US6440841 Method of fabricating vias
08/27/2002US6440840 Damascene process to eliminate copper defects during chemical-mechanical polishing (CMP) for making electrical interconnections on integrated circuits
08/27/2002US6440839 Selective air gap insulation
08/27/2002US6440838 Dual damascene structure employing laminated intermediate etch stop layer
08/27/2002US6440837 Method of forming a contact structure in a semiconductor device
08/27/2002US6440836 Method for forming solder bumps on flip chips and devices formed
08/27/2002US6440835 Method of connecting a conductive trace to a semiconductor chip
08/27/2002US6440833 Method of protecting a copper pad structure during a fuse opening procedure
08/27/2002US6440832 Hybrid MOS and schottky gate technology
08/27/2002US6440831 Ionized metal plasma deposition process having enhanced via sidewall coverage
08/27/2002US6440830 Metal-oxide-semiconductor field effect transistors (mosfets) having copper metallization on a polysilicon gate
08/27/2002US6440829 N-profile engineering at the poly/gate oxide and gate oxide/SI interfaces through NH3 annealing of a layered poly/amorphous-silicon structure
08/27/2002US6440828 Process of fabricating semiconductor device having low-resistive contact without high temperature heat treatment
08/27/2002US6440827 Method for fabricating a semiconductor component having a wiring which runs piecewise in the substrate, and also a semiconductor component which can be fabricated by this method
08/27/2002US6440826 NiSi contacting extensions of active regions
08/27/2002US6440825 Method of controlling outdiffusion in a doped three-dimensional film
08/27/2002US6440824 Method of crystallizing a semiconductor thin film, and method of manufacturing a thin-film semiconductor device
08/27/2002US6440823 Low defect density (Ga, Al, In)N and HVPE process for making same
08/27/2002US6440822 Method of manufacturing semiconductor device with sidewall metal layers
08/27/2002US6440821 Method and apparatus for aligning wafers
08/27/2002US6440820 Process flow for ARS mover using selenidation wafer bonding after processing a media side of a rotor wafer
08/27/2002US6440819 Method for differential trenching in conjunction with differential fieldox growth
08/27/2002US6440818 Method of reducing leakage current of a semiconductor wafer
08/27/2002US6440817 Methods of forming integrated circuitry
08/27/2002US6440816 Alignment mark fabrication process to limit accumulation of errors in level to level overlay
08/27/2002US6440815 Dielectric capacitor and its manufacturing method
08/27/2002US6440814 Electrostatic discharge protection for sensors
08/27/2002US6440813 Process of manufacturing a DRAM cell capacitor having increased trench capacitance
08/27/2002US6440812 Angled implant to improve high current operation of bipolar transistors
08/27/2002US6440811 Utilizing existing polysilicon and masking steps
08/27/2002US6440810 Method in the fabrication of a silicon bipolar transistor
08/27/2002US6440809 Method of preventing fluorine ions from residing in a gate to result in boron ion penetration into a gate oxide
08/27/2002US6440808 Damascene-gate process for the fabrication of MOSFET devices with minimum poly-gate depletion, silicided source and drain junctions, and low sheet resistance gate-poly
08/27/2002US6440807 Surface engineering to prevent EPI growth on gate poly during selective EPI processing
08/27/2002US6440806 Method for producing metal-semiconductor compound regions on semiconductor devices
08/27/2002US6440805 Method of forming a semiconductor device with isolation and well regions
08/27/2002US6440804 Static random access memory manufacturing method
08/27/2002US6440803 Method of fabricating a mask ROM with raised bit-line on each buried bit-line
08/27/2002US6440802 Process for fabricating semiconductor device and photolithography mask
08/27/2002US6440801 Structure for folded architecture pillar memory cell
08/27/2002US6440800 Method to form a vertical transistor by selective epitaxial growth and delta doped silicon layers
08/27/2002US6440799 Semiconductor structures, methods of implanting dopants into semiconductor structures and methods of forming CMOS constructions
08/27/2002US6440798 Method of forming a mixed-signal circuit embedded NROM memory and MROM memory
08/27/2002US6440797 Nitride barrier layer for protection of ONO structure from top oxide loss in a fabrication of SONOS flash memory
08/27/2002US6440796 Poly spacer split gate cell with extremely small cell size
08/27/2002US6440795 Hemispherical grained silicon on conductive nitride
08/27/2002US6440794 Method for forming an array of DRAM cells by employing a self-aligned adjacent node isolation technique
08/27/2002US6440793 Vertical MOSFET
08/27/2002US6440792 DRAM technology of storage node formation and no conduction/isolation process of bottle-shaped deep trench
08/27/2002US6440791 Self aligned bit-line contact opening and node contact opening fabrication process
08/27/2002US6440790 Method of making semiconductor device having an insulating film positioned between two similarly shaped conductive films
08/27/2002US6440789 Photoresist spacer process simplification to eliminate the standard polysilicon or oxide spacer process for flash memory circuits
08/27/2002US6440788 Implant sequence for multi-function semiconductor structure and method
08/27/2002US6440787 Manufacturing method of semiconductor device
08/27/2002US6440785 Method of manufacturing a semiconductor device utilizing a laser annealing process
08/27/2002US6440784 Thin film transistor and a fabricating method thereof
08/27/2002US6440783 Method for fabricating a thin film transistor display
08/27/2002US6440782 Radiation-hard silicon cryo-CMOS process suitable for charge-coupled devices, and a device made according to this process
08/27/2002US6440781 Method of adding bias-independent aluminum bridged anti-fuses to a tungsten plug process
08/27/2002US6440780 Method of layout for LSI
08/27/2002US6440778 Optical semiconductor element package and manufacturing method thereof
08/27/2002US6440777 Method of depositing a thermoplastic polymer in semiconductor fabrication
08/27/2002US6440774 Electronic device, method of manufacturing the same, and apparatus for manufacturing the same
08/27/2002US6440772 Bow resistant plastic semiconductor package and method of fabrication
08/27/2002US6440771 Method for constructing a wafer interposer by using conductive columns
08/27/2002US6440769 Photovoltaic device with optical concentrator and method of making the same
08/27/2002US6440765 Method for fabricating an infrared-emitting light-emitting diode
08/27/2002US6440764 Cooling a metalorganic vapor phase epitaxy (movpe) deposited, as-containing, p-type contact layer
08/27/2002US6440763 Methods for manufacture of self-aligned integrally gated nanofilament field emitter cell and array
08/27/2002US6440760 Method of measuring etched state of semiconductor wafer using optical impedence measurement
08/27/2002US6440758 Method for fabricating semiconductor laser device by aligning semiconductor laser chips based on light emission measurements
08/27/2002US6440756 Reduction of plasma charge-induced damage in microfabricated devices
08/27/2002US6440754 Thin film ferroelectric capacitors having improved memory retention through the use of essentially smooth bottom electrode structures
08/27/2002US6440753 Metal hard mask for ILD RIE processing of semiconductor memory devices to prevent oxidation of conductive lines
08/27/2002US6440752 Passivation layer by annealing the structure in an oxygen atmosphere to form an oxide layer on the top electrode; platinum, iridium, aluminum, titanium
08/27/2002US6440751 Method of manufacturing thin film and thin film capacitor
08/27/2002US6440646 Positive resist composition suitable for lift-off technique and pattern forming method
08/27/2002US6440641 Deposited thin film build-up layer dimensions as a method of relieving stress in high density interconnect printed wiring board substrates
08/27/2002US6440640 Thin resist with transition metal hard mask for via etch application
08/27/2002US6440638 Method and apparatus for resist planarization
08/27/2002US6440636 Polymeric compound and resin composition for photoresist
08/27/2002US6440635 Having both negative and positive characteristics with wider exposure dosage windows; glycoluril powderlink? crosslinker
08/27/2002US6440632 Forming pattern; exposure to light
08/27/2002US6440621 Method of detecting film defects using chemical exposure of photoresist films
08/27/2002US6440620 Electron beam lithography focusing through spherical aberration introduction
08/27/2002US6440614 Having drawn thereupon main pattern with specific arrangement that is transferred onto preset element formation area on wafer and additional pattern formed around main pattern to adjust exposure quantity; lithography
08/27/2002US6440591 Ferroelectric thin film coated substrate, producing method thereof and capacitor structure element using thereof
08/27/2002US6440570 Stable thin film oxide standard
08/27/2002US6440550 Deposition of fluorosilsesquioxane films
08/27/2002US6440504 Vacuum processing apparatus having first means for evacuating vacuum vessel from atmospheric pressure to vacuum and second means for evacuating inside of vacuum vessel during generation of plasma, and vessel is movable between them
08/27/2002US6440495 Chemical vapor deposition of ruthenium films for metal electrode applications
08/27/2002US6440382 Method for producing water for use in manufacturing semiconductors
08/27/2002US6440326 Photoresist removing composition
08/27/2002US6440320 Substrate processing method and apparatus
08/27/2002US6440319 Method and apparatus for predicting process characteristics of polyurethane pads
08/27/2002US6440295 Method for electropolishing metal on semiconductor devices