Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2002
09/12/2002WO2002071462A1 Plasma processor and plasma processing method
09/12/2002WO2002071460A2 Method for producing structures on the nanometric scale
09/12/2002WO2002071459A1 Heat treatment method and heat treatment system
09/12/2002WO2002071458A2 Growth of compound semiconductor structures on patterned oxide films
09/12/2002WO2002071456A2 Magnetic layer processing
09/12/2002WO2002071455A2 Lift pin alignment and operation methods and apparatus
09/12/2002WO2002071454A2 Method for improving adhesion
09/12/2002WO2002071453A1 Automatic continue wafer processing system and methof for using the same
09/12/2002WO2002071452A2 Method for patterning silicides in the submicrometer range and components so produced
09/12/2002WO2002071449A2 COMPLEMENTARY ACCUMULATION-MODE JFET INTEGRATED CIRCUIT TOPOLOGY USING WIDE (> 2eV) BANDGAP SEMICONDUCTORS
09/12/2002WO2002071448A2 Single transistor ferroelectric memory cell
09/12/2002WO2002071447A2 Ruthenium silicide wet etch
09/12/2002WO2002071446A2 Method and apparatus for active temperature control of susceptors
09/12/2002WO2002071410A2 Higher program threshold voltage and faster programming rates based on improved erase methods
09/12/2002WO2002071167A2 Manufacturing system and method for processing materials
09/12/2002WO2002071155A1 Thermosetting anti-reflective coatings comprising aryl urethanes of hydroxypropyl cellulose
09/12/2002WO2002071154A2 Method of uniformly coating a substrate
09/12/2002WO2002071153A2 Method for uniformly coating a substrate
09/12/2002WO2002071139A1 Electrochemical pixel device
09/12/2002WO2002071137A1 Display device
09/12/2002WO2002070985A1 Line profile asymmetry measurement using scatterometry
09/12/2002WO2002070788A1 Method and apparatus for providing electrical and fluid communication to a rotation microelectronic workpiece during electrochemical processing
09/12/2002WO2002070779A1 Apparatus and method for sequential deposition of films
09/12/2002WO2002070191A1 Fluxing underfill compositions
09/12/2002WO2002070185A1 Method for inspecting connections produced by ultrasonic wire bonds
09/12/2002WO2002070142A1 Method and apparatus for improved temperature control in atomic layer deposition
09/12/2002WO2002061821A9 Method of preparing indium phosphide heterojunction bipolar transistors
09/12/2002WO2002054454A3 Diamond coatings on reactor wall and method of manufacturing thereof
09/12/2002WO2002053320A3 Wafer support for chemical mechanical planarization
09/12/2002WO2002045148A3 Cleaning solution for semiconductor wafers in the back-end-of-line
09/12/2002WO2002043466A3 Non-thermionic sputter material transport device, methods of use, and materials produced thereby
09/12/2002WO2002031859A3 Stepped upper electrode for plasma processing uniformity
09/12/2002WO2002027390A3 A method of forming electrodes or pixel electrodes and a liquid crystal display device
09/12/2002WO2002023588A3 Capacitively coupled plasma reactor
09/12/2002WO2002015249A3 Integrated shallow trench isolation process
09/12/2002WO2002015241A8 Systems and methods for forming processing streams
09/12/2002WO2002013268A3 Module, especially a wafer module
09/12/2002WO2002011190A3 Precursors for incorporating nitrogen into a dielectric layer
09/12/2002WO2001068304A3 Flip chip-in-leadframe package and process
09/12/2002WO2001067570A3 Buried mesa semiconductor device
09/12/2002WO2001055767A9 Microlithographic reduction projection catadioptric objective
09/12/2002WO2001045565A3 Modeling and testing of an integrated circuit
09/12/2002WO2001035440A9 Method and apparatus for electron beam column assembly with precise alignment using displaced semi-transparent membranes
09/12/2002WO2001022163A3 Radiation sensitive copolymers, photoresist compositions thereof and deep uv bilayer systems thereof
09/12/2002WO2001015171A3 Flash memory architecture employing three layer metal interconnect
09/12/2002US20020129334 Interface based design using a tabular paradigm
09/12/2002US20020129328 Method for designing optical system, optical system and projection exposure apparatus
09/12/2002US20020129325 Engineering-change method of semiconductor circuit
09/12/2002US20020129324 Integrated structure layout and layout of interconnections for an instruction execution unit of an integrated circuit chip
09/12/2002US20020129323 Connection device and test system
09/12/2002US20020128784 Method and apparatus for measurements of patterned structures
09/12/2002US20020128733 Moving/guiding apparatus and exposure apparatus using the same
09/12/2002US20020128515 Organic electroluminescent device, method of manufacturing the same, and electronic apparatus
09/12/2002US20020128410 Organic anti-reflective coating polymers, anti-reflective coating composition comprising the same and preparation methods thereof
09/12/2002US20020128388 Siloxane polymer and an organic absorbing compound that strongly absorbs light at given wavelength, such as 9-anthracene carboxy-methyl triethoxysilane; for deep ultraviolet photolithography
09/12/2002US20020128353 Epoxy resin; acidic fluxing agent; anhydride; latent curing agent component comprising a complex of a portion of the acidic fluxing agent and a salt of a nitrogen-containing component.
09/12/2002US20020128164 Resist stripper
09/12/2002US20020127962 Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk
09/12/2002US20020127958 Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of microelectronic substrates
09/12/2002US20020127956 Method of sealing wafer backside for full-face electrochemical plating
09/12/2002US20020127955 Method and apparatus for uniformly planarizing a microelectronic substrate
09/12/2002US20020127954 Process for the chemical-mechanical polishing of isolation layers produced using the STI technology, at elevated temperatures
09/12/2002US20020127951 Method and apparatus for monitoring polishing state, polishing device, process wafer, semiconductor device, and method of manufacturing semiconductor device
09/12/2002US20020127950 Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same
09/12/2002US20020127893 Particle distribution interposer and method of manufacture thereof
09/12/2002US20020127890 Semiconductor devices and the manufacturing method of the same
09/12/2002US20020127888 Method of forming a metal gate
09/12/2002US20020127887 Method of manufacturing a semiconductor device
09/12/2002US20020127885 High-pressure anneal process for integrated circuits
09/12/2002US20020127884 Multiple oxide thicknesses for merged memory and logic applications
09/12/2002US20020127883 Bis (tertiarybutylamino) silane and ozone based doped and undoped oxides
09/12/2002US20020127882 Method of forming a silicon oxide layer using pulsed nitrogen plasma implantation
09/12/2002US20020127880 Production method of semiconductor device
09/12/2002US20020127879 Impurities at a molecular level, such as oxygen, basic substances, ozone, and organic substances, can be prevented from adhering to a substrate; for use in photolithography
09/12/2002US20020127878 Method for spin coating a high viscosity liquid on a wafer
09/12/2002US20020127876 Treatment of low-k dielectric films to enable patterning of deep submicron features
09/12/2002US20020127875 Point of use mixing and aging system for chemicals used in a film forming apparatus
09/12/2002US20020127874 Method of fabricating low dielectric constant film
09/12/2002US20020127873 Oxidizing method and oxidation system
09/12/2002US20020127872 Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer
09/12/2002US20020127871 Coating method and coating apparatus
09/12/2002US20020127870 Method of manufacturing a semiconductor device including etching of a peripheral area before chemical-mechanical polishing
09/12/2002US20020127869 Semiconductor device and semiconductor device manufacturing method
09/12/2002US20020127868 Integrated circuits and methods for their fabrication
09/12/2002US20020127867 Semiconductor devices having a hydrogen diffusion barrier layer and methods of fabricating the same
09/12/2002US20020127866 Method of manufacturing a capacitor of a semiconductor device
09/12/2002US20020127864 Methods for creating elements of predetermined shape and apparatus using these elements
09/12/2002US20020127863 Method of fabricating recessed locos isolation for semiconductor device
09/12/2002US20020127860 Filter apparatus and method therefor
09/12/2002US20020127859 Causing an aqueous, acidic etching formulatino to contact the polysilicon film to remove polysilion to expose oxide film; removing the exposed oxide film from the semiconductor wafer substrate
09/12/2002US20020127858 Apparatus and method for plasma processing high-speed semiconductor circuits with increased yield
09/12/2002US20020127857 Active matrix substrate and method for producing the same
09/12/2002US20020127856 Nitride-based semiconductor element and method of forming nitride-based semiconductor
09/12/2002US20020127854 Method for forming capacitor of semiconductor device
09/12/2002US20020127853 Electrode for plasma processes and method for manufacture and use thereof
09/12/2002US20020127852 Method of manufacturing semiconductor integrated circuit device and semiconductor manufacturing apparatus
09/12/2002US20020127851 Method of producing semiconductor device
09/12/2002US20020127850 Integrated circuit with stop layer and method of manufacturing the same
09/12/2002US20020127849 Method of manufacturing dual damascene structure
09/12/2002US20020127848 Semiconductor device and method of manufacturing the same