| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/24/2002 | US6456533 Higher program VT and faster programming rates based on improved erase methods |
| 09/24/2002 | US6456532 Semiconductor memory device |
| 09/24/2002 | US6456525 Short-tolerant resistive cross point array |
| 09/24/2002 | US6456523 Ferromagnetic double quantum well tunnel magneto-resistance device |
| 09/24/2002 | US6456522 Integrated memory having memory cells and buffer capacitors |
| 09/24/2002 | US6456518 Bi-level digit line architecture for high density drams |
| 09/24/2002 | US6456482 Microelectronic capacitor with capacitor plate layer formed of tungsten rich tungsten oxide material |
| 09/24/2002 | US6456480 Processing apparatus and a processing method |
| 09/24/2002 | US6456474 Semiconductor integrated circuit |
| 09/24/2002 | US6456374 Exposure apparatus and a device manufacturing method using the same |
| 09/24/2002 | US6456364 Semiconductor manufacturing apparatus, and device manufacturing method |
| 09/24/2002 | US6456363 Exposure control apparatus and method |
| 09/24/2002 | US6456362 Integrating waveguide for use in lithographic projection apparatus |
| 09/24/2002 | US6456361 Method and instrument for measuring vacuum ultraviolet light beam, method of producing device and optical exposure apparatus |
| 09/24/2002 | US6456360 Projection exposure apparatus and method |
| 09/24/2002 | US6456183 Inductor for integrated circuit |
| 09/24/2002 | US6456137 Semiconductor circuit, delay adjustment method therefor and layout method therefor |
| 09/24/2002 | US6456117 Shield circuit and integrated circuit in which the shield circuit is used |
| 09/24/2002 | US6456114 Power conserving CMOS semiconductor integrated circuit |
| 09/24/2002 | US6456113 Scan flip-flop circuit having scan logic output terminal dedicated to scan test |
| 09/24/2002 | US6456082 Method for polysilicon crystalline line width measurement post etch in undoped-poly process |
| 09/24/2002 | US6456019 Real time measurement of leakage current in high voltage electron guns |
| 09/24/2002 | US6456013 Thin film transistor and display device |
| 09/24/2002 | US6456010 Discharge plasma generating method, discharge plasma generating apparatus, semiconductor device fabrication method, and semiconductor device fabrication apparatus |
| 09/24/2002 | US6455982 Object levitating apparatus, an object transporting apparatus equipped with said apparatus, and an object levitating process |
| 09/24/2002 | US6455956 Two-dimensional electric motor |
| 09/24/2002 | US6455945 Semiconductor device having a fragment of a connection part provided on at least one lateral edge for mechanically connecting to adjacent semiconductor chips |
| 09/24/2002 | US6455940 Semiconductor device including lead wiring protected by dual barrier films |
| 09/24/2002 | US6455939 Substantially hillock-free aluminum-containing components |
| 09/24/2002 | US6455937 Arrangement and method for improved downward scaling of higher conductivity metal-based interconnects |
| 09/24/2002 | US6455934 Polymeric dielectric layers having low dielectric constants and improved adhesion to metal lines |
| 09/24/2002 | US6455933 Underfill of a bumped or raised die utilizing a barrier adjacent to the side wall of flip chip |
| 09/24/2002 | US6455926 High density cavity-up wire bond BGA |
| 09/24/2002 | US6455921 Fabricating plug and near-zero overlap interconnect line |
| 09/24/2002 | US6455920 Semiconductor device having a ball grid array and a fabrication process thereof |
| 09/24/2002 | US6455919 Internally ballasted silicon germanium transistor |
| 09/24/2002 | US6455918 Integrated circuitry |
| 09/24/2002 | US6455917 Method of manufacturing semiconductor capacitor |
| 09/24/2002 | US6455916 Integrated circuit devices containing isolated dielectric material |
| 09/24/2002 | US6455915 Integrated inductive circuits |
| 09/24/2002 | US6455912 Process for manufacturing shallow trenches filled with dielectric material having low mechanical stress |
| 09/24/2002 | US6455911 Silicon-based semiconductor component with high-efficiency barrier junction termination |
| 09/24/2002 | US6455906 Depositing tungsten silicide barrier layer on wordline stack, processing wordline stack such that tungsten nitride extrusions extend from exposed surface of barrier layer, selectively etching tungsten nitride extrusions |
| 09/24/2002 | US6455904 Loadless static random access memory device and method of manufacturing same |
| 09/24/2002 | US6455903 Dual threshold voltage MOSFET by local confinement of channel depletion layer using inert ion implantation |
| 09/24/2002 | US6455901 Semiconductor integrated circuit |
| 09/24/2002 | US6455900 Semiconductor device |
| 09/24/2002 | US6455899 Semiconductor memory device having improved pattern of layers and compact dimensions |
| 09/24/2002 | US6455898 Electrostatic discharge input protection for reducing input resistance |
| 09/24/2002 | US6455897 Semiconductor device having electrostatic discharge protection circuit |
| 09/24/2002 | US6455895 Overvoltage protector having same gate thickness as the protected integrated circuit |
| 09/24/2002 | US6455894 Semiconductor device, method of manufacturing the same and method of arranging dummy region |
| 09/24/2002 | US6455893 MOS transistor with high voltage sustaining capability and low on-state resistance |
| 09/24/2002 | US6455892 Silicon carbide semiconductor device and method for manufacturing the same |
| 09/24/2002 | US6455891 Semiconductor device and method for manufacturing the same |
| 09/24/2002 | US6455890 Structure of fabricating high gate performance for NROM technology |
| 09/24/2002 | US6455889 Semiconductor memory device having memory cells each having a conductive body of booster plate and a method for manufacturing the same |
| 09/24/2002 | US6455888 Memory cell structure for elimination of oxynitride (ONO) etch residue and polysilicon stringers |
| 09/24/2002 | US6455887 Nonvolatile devices with P-channel EEPROM device as injector |
| 09/24/2002 | US6455886 Structure and process for compact cell area in a stacked capacitor cell array |
| 09/24/2002 | US6455885 Inductor structure for high performance system-on-chip using post passivation process |
| 09/24/2002 | US6455884 Radiation hardened semiconductor memory with active isolation regions |
| 09/24/2002 | US6455883 Nonvolatile semiconductor memory |
| 09/24/2002 | US6455882 Semiconductor device having a hydrogen barrier layer |
| 09/24/2002 | US6455879 Low resistance contact semiconductor diode |
| 09/24/2002 | US6455878 Semiconductor LED flip-chip having low refractive index underfill |
| 09/24/2002 | US6455875 Thin film transistor having enhanced field mobility |
| 09/24/2002 | US6455874 Thin film transistor and fabrication method thereof |
| 09/24/2002 | US6455871 SiGe MODFET with a metal-oxide film and method for fabricating the same |
| 09/24/2002 | US6455862 Lithographic projection apparatus |
| 09/24/2002 | US6455821 System and method to control temperature of an article |
| 09/24/2002 | US6455814 Backside heating chamber for emissivity independent thermal processes |
| 09/24/2002 | US6455805 Tray mask plate for laser-trimming apparatus |
| 09/24/2002 | US6455785 Bump connection with stacked metal balls |
| 09/24/2002 | US6455783 Multilayer printed wiring board and method for manufacturing the same |
| 09/24/2002 | US6455717 For forming films during preparation of semiconductor structures using chemical vapor deposition |
| 09/24/2002 | US6455710 Method for the preparation of pure citalopram |
| 09/24/2002 | US6455575 Phosphonooxymethyl ethers of taxane derivatives |
| 09/24/2002 | US6455479 Stripping composition |
| 09/24/2002 | US6455446 High-temperature high-pressure processing method for semiconductor wafers, and an anti-oxidizing body used for the method |
| 09/24/2002 | US6455445 Silicone polymer insulation film on semiconductor substrate and method for forming the film |
| 09/24/2002 | US6455444 Semiconductor device having a multilayer interconnection structure |
| 09/24/2002 | US6455443 Method of fabricating low-dielectric constant interlevel dielectric films for BEOL interconnects with enhanced adhesion and low-defect density |
| 09/24/2002 | US6455441 Sputtered insulating layer for wordline stacks |
| 09/24/2002 | US6455440 Method for preventing polysilicon stringer in memory device |
| 09/24/2002 | US6455439 Method of forming a mask |
| 09/24/2002 | US6455438 Fabrication method for a semiconductor device |
| 09/24/2002 | US6455437 Method and apparatus for monitoring the process state of a semiconductor device fabrication process |
| 09/24/2002 | US6455436 Method of fabricating semiconductor device |
| 09/24/2002 | US6455435 Method for fabricating a wiring plane on a semiconductor chip with an antifuse |
| 09/24/2002 | US6455434 Prevention of slurry build-up within wafer topography during polishing |
| 09/24/2002 | US6455433 Method for forming square-shouldered sidewall spacers and devices fabricated |
| 09/24/2002 | US6455432 Method for removing carbon-rich particles adhered on a copper surface |
| 09/24/2002 | US6455431 Descumming organic residue from semiconductor having patterned photoresist layer in manner which does not impact critical dimension of patterned layer by contacting with plasma etchant where reactive plasma species are generated from ammonia |
| 09/24/2002 | US6455430 Method of embedding contact hole by damascene method |
| 09/24/2002 | US6455429 Method of producing large-area membrane masks |
| 09/24/2002 | US6455428 Method of forming a metal silicide layer |
| 09/24/2002 | US6455427 Method for forming void-free metallization in an integrated circuit |
| 09/24/2002 | US6455426 Method for making a semiconductor device having copper conductive layers |
| 09/24/2002 | US6455425 Selective deposition process for passivating top interface of damascene-type Cu interconnect lines |