Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2002
09/05/2002US20020121651 Method of making a metallization line layout
09/05/2002US20020121650 Resin-encapsulated semiconductor device and method for manufacturing the same
09/05/2002US20020121647 Modulation doped thyristor and complementary transistor combination for a monolithic optoelectronic integrated circuit
09/05/2002US20020121646 Increasing the brightness of III-nitride light emitting devices
09/05/2002US20020121642 Vertical geometry ingan led
09/05/2002US20020121641 Passivated silicon carbide devices with low leakage current and method of fabricating
09/05/2002US20020121640 Active matrix electro-luminescent display with an organic leveling layer
09/05/2002US20020121639 Thin film transistor and manufacturing method thereof, and active matrix display device and manufacturing method thereof
09/05/2002US20020121615 Methods and devices for detecting and canceling magnetic fields external to a charged-particle-beam (CPB) optical system, and CPB microlithography apparatus and methods comprising same
09/05/2002US20020121613 Adjustable conductance limiting aperture for ion implanters
09/05/2002US20020121518 Lot management production method and product carrying container
09/05/2002US20020121505 Plasma etching apparatus
09/05/2002US20020121501 Reduction of sodium contamination in a semiconductor device
09/05/2002US20020121500 Method of etching with NH3 and fluorine chemistries
09/05/2002US20020121445 Mask plate design
09/05/2002US20020121437 Titanium target assembly for sputtering and method for preparing the same
09/05/2002US20020121436 Target sidewall design to reduce particle generation during magnetron sputtering
09/05/2002US20020121435 Vertically configured chamber used for multiple processes
09/05/2002US20020121344 Plasma generating device and plasma processing apparatus comprising such a adevice
09/05/2002US20020121342 Lid assembly for a processing system to facilitate sequential deposition techniques
09/05/2002US20020121341 Corrugated liner sections, preferably made of a thermoplastic material such as polyethylene, detachably assembled within ditch
09/05/2002US20020121312 Lift pin alignment and operation methods and apparatus
09/05/2002US20020121290 With a low concentration surfactant (e.g., a solution containing approximately 1 to 400 parts per million of surfactant) and then dried (e.g., via spin drier or an IPA drier).
09/05/2002US20020121289 Spray bar
09/05/2002US20020121286 Rinsing solution and rinsing and drying methods for the prevention of watermark formation on a surface
09/05/2002US20020121249 Vaporizer
09/05/2002US20020121242 Heat-treatment apparatus, heat-treatment method using the same and method of producing a semiconductor device
09/05/2002US20020121238 Process for preparing single crystal silicon having improved gate oxide integrity
09/05/2002US20020121156 Silicon-aluminum mixed oxide powder containing 0.1 to 99.9 wt. % Al2O3 and Si-O- Al-bonds; used for the chemical- mechanical polishing of semiconductor substrates.
09/05/2002US20020121109 Glass substrate processing method
09/05/2002US20020121072 Solder coated lid
09/05/2002DE10207523A1 Halbleiterbauelement und Verfahren zu seiner Herstellung Semiconductor device and process for its preparation
09/05/2002DE10207521A1 Integrierte Halbleiterschaltung und Verfahren zu ihrer Herstellung A semiconductor integrated circuit and methods for their preparation
09/05/2002DE10206837A1 Fördersystem Conveyor system
09/05/2002DE10201864A1 CMOS-Halbleitervorrichtung und -verfahren zur Herstellung derselben CMOS semiconductor device and method of manufacturing the same
09/05/2002DE10163834A1 Kontaktierungseinrichtung Contacting
09/05/2002DE10162569A1 Halbleitervorrichtung Semiconductor device
09/05/2002DE10160092A1 Integrierte Halbleiterschaltungsvorrichtung A semiconductor integrated circuit device
09/05/2002DE10156264A1 Informationsbereitstellungsvorrichtung, Informationsbereitstellungssystem und Werbeverfahren An information providing apparatus, information providing system and method advertising
09/05/2002DE10151700A1 Feldeffekt-Halbleiterbauelement Field effect semiconductor device
09/05/2002DE10134665C1 Operating method for semiconductor element has differential resistance switched to lesser value above given current limit
09/05/2002DE10113612A1 Sub-objective for illumination system has two lens groups, second lens group with at least first lens with negative refractive index and at least second lens with positive refractive index
09/05/2002DE10110234A1 Verfahren zur Herstellung von Strukturen im Nanometerbereich A process for producing structures in the nanometer range
09/05/2002DE10110222A1 Verfahren zur Submikrometer-Strukturierung von Siliziden sowie dadurch hergestellte Bauteile A method for submicron patterning of silicides and components produced thereby
09/05/2002DE10110048A1 Verfahren zum Prüfen von durch Ultraschall-Drahtbonden hergestellten Verbindungen Method for testing produced by ultrasonic wire bonding connections
09/05/2002DE10106836A1 Integrierte Schaltungsanordnung aus einem flächigen Substrat Integrated circuit arrangement of a planar substrate
09/05/2002DE10106804A1 Informationsredundante nichtflüchtige Halbleiterspeicherzelle sowie Verfahren zu deren Herstellung und Programmierung Informationsredundante non-volatile semiconductor memory cell and to processes for their preparation and programming
09/05/2002DE10106729A1 Process for conductive lines in a conductor plane in a semiconductor element forms two contacting lines one above the other
09/05/2002DE10106359C1 Laterales Halbleiterbauelement in Dünnfilm-SOI-Technik Lateral semiconductor component in thin film SOI technology
09/05/2002DE10105872A1 Arrangement used in the manufacture of matrix displays comprises a substrate having a recess, and a chip provided in the recess with a layer formed on the peripheral surface of the recess and/or chip
09/05/2002DE10105686A1 Verfahren zum Herstellen einer Kondensatoranordnung für eine Halbleiterspeichereinrichtung A method for manufacturing a capacitor arrangement for a semiconductor memory device
09/05/2002DE10105673A1 Production of a stacked integrated ferroelectric semiconductor storage device or a DRAM cell comprises depositing an oxygen barrier between a capacitor electrode and an electrically conducting plug, and carrying out a rapid thermal step
09/05/2002DE10102721A1 Transistor structure used as a lateral VMOS transistor comprises an n-doped substrate layer, a p+-doped layer, an epitaxially grown n-doped layer, a p-doped p-sink, p+-doped pockets and a polysilicon layer
09/04/2002EP1237241A2 Semiconductor laser and method of manufacturing
09/04/2002EP1237201A2 Insulated gate semiconductor device and method of manufacturing the same
09/04/2002EP1237200A2 High voltage semiconductor device and method for manufacturing the same
09/04/2002EP1237199A2 Thin gallium-arsenide-antimonide base heterojunction bipolar transistor (HBT) having improved gain
09/04/2002EP1237196A1 Semiconductor device
09/04/2002EP1237195A2 Semiconductor device and manufacturing method thereof
09/04/2002EP1237194A2 Ferroelectric memory device and method for fabricating the same
09/04/2002EP1237193A2 Semiconductor memory device
09/04/2002EP1237192A2 Twin monos memory cell and corresponding fabrication method
09/04/2002EP1237191A2 High-Density Electronic Circuit Modules
09/04/2002EP1237190A2 Monolithic microwave integrated circuit and method for manufacturing the same
09/04/2002EP1237188A2 Lead frame
09/04/2002EP1237187A2 Resin-encapsulated semiconductor device and method for manufacturing the same
09/04/2002EP1237185A2 A method for manufacturing isolating structures
09/04/2002EP1237184A1 Mold release film for sealing semiconductor element and sealing method for semiconductor element using it
09/04/2002EP1237183A1 Method for stabilizing oxide-semiconductor interface by using group 5 element and stabilized semiconductor
09/04/2002EP1237182A2 Aggregate dielectric layer to reduce nitride consumption
09/04/2002EP1237180A2 Vacuum apparatus and transfer apparatus
09/04/2002EP1237179A1 Local etching method
09/04/2002EP1237178A1 Self-supporting adaptable metrology device
09/04/2002EP1237177A2 Apparatus and method for etching semiconductor wafers
09/04/2002EP1237164A1 Method for controlling the sheet resistance of thin film resistors
09/04/2002EP1237160A2 Sense amplifier control circuit of semiconductor memory device
09/04/2002EP1237099A1 Ip base lsi designing system and designing method
09/04/2002EP1237064A1 Reference voltage generation circuit
09/04/2002EP1237063A1 Reference voltage generation circuit
09/04/2002EP1237046A2 Method of identifying an extreme interaction pitch region, methods of designing mask patterns and manufacturing masks, device manufacturing methods and computer programs
09/04/2002EP1237044A2 Lithographic tool with dual isolation system and method for configuring the same
09/04/2002EP1237043A2 Projection optical system, projection exposure apparatus, and projection exposure method
09/04/2002EP1237041A2 Method of fabricating mask for extreme ultraviolet radiation
09/04/2002EP1236811A2 Chemical vapor deposition apparatus and chemical deposition method
09/04/2002EP1236540A2 Wafer abrasive machine
09/04/2002EP1236519A1 Apparatus and method for depositing a substance with a focused beam on a substrate
09/04/2002EP1236275A1 Variable load switchable impedance matching system
09/04/2002EP1236237A2 Fuel cell and power chip technology
09/04/2002EP1236227A2 Method and production of a sensor
09/04/2002EP1236226A2 Cobalt silicide etch process and apparatus
09/04/2002EP1236225A1 Method for establishing ultra-thin gate insulator using anneal in ammonia
09/04/2002EP1236224A1 Gate dielectrics and method of making with binary non-crystaline analogs of silicon dioxide
09/04/2002EP1236221A1 Dose monitor for plasma doping system
09/04/2002EP1236131A2 Modification of integrated circuits
09/04/2002EP1236017A2 X-ray tomography bga ( ball grid array ) inspections
09/04/2002EP1235953A1 Mini batch furnace
09/04/2002EP1235947A1 Method and apparatus for substrate biasing in multiple electrode sputtering systems
09/04/2002EP1235653A1 Improvements in drying and cleaning objects using controlled aerosols and gases
09/04/2002EP1194953A4 Controllably degradable composition of heteroatom carbocyclic or epoxy resin and curing agent
09/04/2002EP1133593B1 Growth method for a crystalline structure