| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/24/2002 | US6454909 Method and apparatus for forming a film on an object to be processed |
| 09/24/2002 | US6454908 Vacuum treatment system |
| 09/24/2002 | US6454899 Apparatus for filling trenches |
| 09/24/2002 | US6454898 Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners |
| 09/24/2002 | US6454869 Liquid or supercritical carbon dioxide |
| 09/24/2002 | US6454866 Wafer support system |
| 09/24/2002 | US6454865 Low mass wafer support system |
| 09/24/2002 | US6454864 Two-piece chuck |
| 09/24/2002 | US6454863 Compact process chamber for improved process uniformity |
| 09/24/2002 | US6454855 Method for producing coated workpieces, uses and installation for the method |
| 09/24/2002 | US6454854 Semiconductor wafer and production method therefor |
| 09/24/2002 | US6454852 High efficiency silicon wafer optimized for advanced semiconductor devices |
| 09/24/2002 | US6454819 Polymer particles having a siloxane bond-coupling section and a metal compound section on said polymer particles; metalloxane bond-containing section, alumina, ceria, or zirconia particle; strength, heat resistance |
| 09/24/2002 | US6454641 Hydrostatic fluid bearing support with adjustable inlet heights |
| 09/24/2002 | US6454637 Edge instability suppressing device and system |
| 09/24/2002 | US6454635 Method and apparatus for a wafer carrier having an insert |
| 09/24/2002 | US6454563 Wafer treatment chamber having thermal reflector |
| 09/24/2002 | US6454519 Dual cassette load lock |
| 09/24/2002 | US6454517 Wafer carrier device |
| 09/24/2002 | US6454516 Semiconductor substrate aligner apparatus and method |
| 09/24/2002 | US6454515 Semiconductor wafer accommodating jig, handling method and production system |
| 09/24/2002 | US6454514 Microelectronic workpiece support and apparatus using the support |
| 09/24/2002 | US6454512 Person-guided vehicle |
| 09/24/2002 | US6454508 Dual cassette load lock |
| 09/24/2002 | US6454472 Semiconductor manufacturing apparatus for photolithographic process |
| 09/24/2002 | US6454367 Apparatus for processing workpieces |
| 09/24/2002 | US6454332 Apparatus and methods for handling a substrate |
| 09/24/2002 | US6454327 Wafer blade equipped with edge bumper |
| 09/24/2002 | US6454160 Method for hermetically encapsulating microsystems in situ |
| 09/24/2002 | US6454159 Method for forming electrical connecting structure |
| 09/24/2002 | US6454158 Wire bonding apparatus and wire bonding method of semiconductor device |
| 09/24/2002 | US6454153 Apparatuses for forming wire bonds from circuitry on a substrate to a semiconductor chip, and methods of forming semiconductor chip assemblies |
| 09/24/2002 | US6454100 Semiconductor element carrying equipment |
| 09/24/2002 | US6453916 Low angle solvent dispense nozzle design for front-side edge bead removal in photolithography resist process |
| 09/24/2002 | US6453915 Reactive gas mixture of fluoride-containing compound and hydrogen gas; ammonium-based solvent; third cleaning operation using a solution of ozone in deionized water; fluorocompound can be carbon tetrafluoride and trifluoromethane |
| 09/24/2002 | US6453914 Acid blend for removing etch residue |
| 09/24/2002 | US6453742 System and method for calibrating semiconductor processing equipment |
| 09/24/2002 | US6453574 Method for aligning a cassette pod to an overhead hoist transport system |
| 09/24/2002 | US6453553 Method for making an anisotropic conductive coating with conductive inserts |
| 09/24/2002 | US6453550 Method for forming modular sockets using flexible interconnects and resulting structures |
| 09/24/2002 | US6453543 Transport and transfer device |
| 09/24/2002 | US6453537 Cooling method for electronic components |
| 09/24/2002 | US6453496 Apparatus for removing contaminant particles on a photomask |
| 09/23/2002 | CA2359608A1 Electroplating methods for fabricating microelectronic interconnects and microelectronic structures fabricated thereby |
| 09/19/2002 | WO2002074029A1 Multilayer printed wiring board |
| 09/19/2002 | WO2002074027A1 Improved laser metallisation circuit formation and circuits formed thereby |
| 09/19/2002 | WO2002073712A1 Pattering method |
| 09/19/2002 | WO2002073706A1 Display apparatus and its manufacturing method |
| 09/19/2002 | WO2002073702A1 Integrated toroidal coil inductors for ic devices |
| 09/19/2002 | WO2002073700A1 Gate and cmos structure and mos structure |
| 09/19/2002 | WO2002073699A2 Nanofabrication |
| 09/19/2002 | WO2002073698A2 A 2f2 memory device system and method |
| 09/19/2002 | WO2002073697A1 Semiconductor integrated circuit device and process for producing the same |
| 09/19/2002 | WO2002073696A1 Process for producing semiconductor integrated circuit device |
| 09/19/2002 | WO2002073695A2 Thyristor configuration and surge suppressor comprising a thyristor configuration of this type |
| 09/19/2002 | WO2002073694A2 Memory cell comprising a trench and method for production thereof |
| 09/19/2002 | WO2002073693A1 Semiconductor device |
| 09/19/2002 | WO2002073692A2 Apparatus and method for electrical isolation |
| 09/19/2002 | WO2002073691A1 In-situ cap and method of fabricating same for an integrated circuit device |
| 09/19/2002 | WO2002073689A2 Integrated barrier layer structure for copper contact level metallization |
| 09/19/2002 | WO2002073688A2 Lithography method for forming semiconductor devices on a wafer and apparatus |
| 09/19/2002 | WO2002073687A2 Method of removing oxide from copper bond pads |
| 09/19/2002 | WO2002073686A1 Method of manufacturing semiconductor device |
| 09/19/2002 | WO2002073685A2 Multi-layer circuit assembly and process for preparing the same |
| 09/19/2002 | WO2002073684A1 Method for structuring a flat substrate consisting of a glass-type material |
| 09/19/2002 | WO2002073683A1 Components with nested leads |
| 09/19/2002 | WO2002073682A1 Method for etching a hardmask layer and a metal layer |
| 09/19/2002 | WO2002073681A1 Method and composition for polishing by cmp |
| 09/19/2002 | WO2002073680A2 Method of making layered superlattice material with ultra-thin top layer |
| 09/19/2002 | WO2002073679A1 Vapor growth method for metal oxide dielectric film and pzt film |
| 09/19/2002 | WO2002073678A1 Method for oxidation of a silicon substrate |
| 09/19/2002 | WO2002073677A1 Method and evaporating solution for rinsing a developed photoresist layer |
| 09/19/2002 | WO2002073676A1 Plasma treatment device |
| 09/19/2002 | WO2002073675A1 Cleaning method for substrate treatment device and substrate treatment device |
| 09/19/2002 | WO2002073674A1 Method for etching organic insulating film and dual damasene process |
| 09/19/2002 | WO2002073672A1 Substrate treating device |
| 09/19/2002 | WO2002073669A2 Method of making layered superlattice material with improved microstructure |
| 09/19/2002 | WO2002073668A2 Method of deep trench formation with improved profile control and surface area |
| 09/19/2002 | WO2002073667A2 Formation of a frontside contact on silicon-on-insulator substrate |
| 09/19/2002 | WO2002073666A1 Atmospheric pressure plasma etching reactor |
| 09/19/2002 | WO2002073665A2 Workpiece distribution and processing in a high throughput stacked frame |
| 09/19/2002 | WO2002073664A1 Automatic continue wafer processing system and method for using the same |
| 09/19/2002 | WO2002073663A1 Arrangement and method for the rear-faced contacting of a semiconductor substrate |
| 09/19/2002 | WO2002073661A2 Extraction method of defect density and size distributions |
| 09/19/2002 | WO2002073660A2 System and method to control radial delta temperature |
| 09/19/2002 | WO2002073657A2 Semiconductor memory location comprising a trench capacitor and method for the production thereof |
| 09/19/2002 | WO2002073654A1 Plasma chamber support having dual electrodes |
| 09/19/2002 | WO2002073653A1 Focused ion beam system and machining method using it |
| 09/19/2002 | WO2002073651A1 Thermal regulation of an ion implantation system |
| 09/19/2002 | WO2002073620A2 Reference for mram cell |
| 09/19/2002 | WO2002073474A1 Method and apparatus for design validation of complex ic without using logic simulation |
| 09/19/2002 | WO2002073329A2 Valve control system for atomic layer deposition chamber |
| 09/19/2002 | WO2002073318A2 Method and device for vibration control |
| 09/19/2002 | WO2002073313A1 Structured organic materials and devices using low-energy particle beams |
| 09/19/2002 | WO2002073312A1 Alternating phase shift masking for multiple levels of masking resolution |
| 09/19/2002 | WO2002073309A2 Packaged radiation sensitive coated workpiece process for making and method of storing same |
| 09/19/2002 | WO2002073308A1 High resolution resists for next generation lithographies |
| 09/19/2002 | WO2002073307A2 Thermally cured underlayer for lithographic application |
| 09/19/2002 | WO2002073249A1 Diffraction lens element and lighting system using the lens element |
| 09/19/2002 | WO2002073122A2 Cyclic error reduction in average interferometric position measurements |