| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/06/2002 | WO2002069038A2 Novel polymers and photoresist compositions comprising same |
| 09/06/2002 | WO2002068944A1 Method and apparatus for measuring physical properties of micro region |
| 09/06/2002 | WO2002068730A1 Plating device and plating method |
| 09/06/2002 | WO2002068727A2 Copper-plating solution, plating method and plating apparatus |
| 09/06/2002 | WO2002068717A1 Method for etching electronic components containing tantalum |
| 09/06/2002 | WO2002068714A1 Electrostatic chuck |
| 09/06/2002 | WO2002068713A1 Vaporizer |
| 09/06/2002 | WO2002068712A2 Removal of etchant residues |
| 09/06/2002 | WO2002068711A1 Heat treating device |
| 09/06/2002 | WO2002068710A1 Method for producing parts and a vacuum processing system |
| 09/06/2002 | WO2002068709A1 A chemical vapor deposition process and apparatus thereof |
| 09/06/2002 | WO2002068350A1 Oxygen doping of silicon oxyfluoride glass |
| 09/06/2002 | WO2002068321A2 Forming tool for forming a contoured microelectronic spring mold |
| 09/06/2002 | WO2002068320A2 Devices having substrates with openings passing through the substrates and conductors in the openings, and methods of manufacture |
| 09/06/2002 | WO2002068145A1 Controlled attenuation capillary |
| 09/06/2002 | WO2002068129A1 Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof |
| 09/06/2002 | WO2002068127A2 Manifolded fluid delivery system |
| 09/06/2002 | WO2002052617B1 Method and device for treating semiconductor substrates |
| 09/06/2002 | WO2002048425A3 Method and system for icosaborane implantation |
| 09/06/2002 | WO2002046864A3 Automated wafer handling with graphic user interface |
| 09/06/2002 | WO2002045476A9 Apparatus and method for electrochemically depositing metal on a semiconductor workpiece |
| 09/06/2002 | WO2002043118A3 Wafer-level transfer of membranes in semiconductor processing |
| 09/06/2002 | WO2002040145A3 Spheres and method of forming a plurality of spheres |
| 09/06/2002 | WO2002038386B1 A process and an apparatus for the formation of patterns in films using temperature gradients |
| 09/06/2002 | WO2002033755A3 Method of fabricating heterojunction photodiodes integrated with cmos |
| 09/06/2002 | WO2002033734A3 Ion processing element with composite media |
| 09/06/2002 | WO2002031866A3 Infrared end-point system for cmp |
| 09/06/2002 | WO2002031858A3 Gas distribution apparatus for semiconductor processing |
| 09/06/2002 | WO2002031219A8 Electrostatically clamped edge ring for plasma processing |
| 09/06/2002 | WO2002031011A3 Fractionation of resins using a static mixer and a liquid-liquid centrifuge |
| 09/06/2002 | WO2002027061A8 Process chamber lid |
| 09/06/2002 | WO2002023601A3 Method for contact etching using a hardmask and advanced resist technology |
| 09/06/2002 | WO2002016063A3 Method for producing composite components by powder injection molding and composite powder appropriate for use in said method |
| 09/06/2002 | WO2002013226A3 Spatial light modulator driven photocathode source electron beam pattern generator |
| 09/06/2002 | WO2001086715A3 Method for soldering a first metal layer, which has a thickness of less than 5 $g(m)m, to a second metal layer, and a corresponding soldering device and semiconductor chip assembly device |
| 09/06/2002 | WO2001086701A3 Method of high selectivity sac etching |
| 09/06/2002 | WO2001064389A3 Vertical counter balanced test head manipulator |
| 09/06/2002 | WO2001047045A9 Solution processing |
| 09/06/2002 | WO2001039374A9 Starter device for normally off fets |
| 09/06/2002 | WO2001037322A9 System and method for product yield prediction using a logic characterization vehicle |
| 09/06/2002 | WO2001026150A9 System and method for repairing interconnect links |
| 09/06/2002 | WO2001001460A9 Temperature controlled wafer chuck |
| 09/06/2002 | CA2438730A1 Semiconductor developing agent |
| 09/05/2002 | US20020124235 Method of forming mask for charged particle beam exposure and processing program of pattern data for forming mask for charged particle beam exposure |
| 09/05/2002 | US20020124229 Lcr extraction method and computer program for performing lcr extraction in lsi design process |
| 09/05/2002 | US20020124218 Method of testing a semiconductor integrated circuit and method and apparatus for generating test patterns |
| 09/05/2002 | US20020124217 Testing apparatus and testing method for an integrated circuit, and integrated circuit |
| 09/05/2002 | US20020123872 Method and apparatus for simulating manufacturing, electrical and physical characteristics of a semiconductor device |
| 09/05/2002 | US20020123818 Production managing system of semiconductor device |
| 09/05/2002 | US20020123816 Process monitoring device for sample processing apparatus and control method of sample processing apparatus |
| 09/05/2002 | US20020123811 Production management system and program |
| 09/05/2002 | US20020123586 Semiconductors; improved etch selectivity; preventing undercutting; lithography |
| 09/05/2002 | US20020123299 Slurry for use with fixed-abrasive polishing pads in polishing semiconductor device conductive structurs that include copper and tungsten and polishing methods |
| 09/05/2002 | US20020123248 Methods of metal doping a chalcogenide material |
| 09/05/2002 | US20020123247 Control of Vmin transient voltage drift by maintaining a temperature less than or equal to 350°C after the protective overcoat level |
| 09/05/2002 | US20020123246 Method for fabricating a III nitride film, an underlayer for fabricating a III nitride film and a method for fabricating the same underlayer |
| 09/05/2002 | US20020123245 Used to prevent the exposure light for exposing the resist from reflecting at a film lying under the resist |
| 09/05/2002 | US20020123244 Impurity ion segregation precluding layer, fabrication method thereof, isolation structure for semiconductor device using the impurity ion segregation precluding layer and fabricating method thereof |
| 09/05/2002 | US20020123243 Low k dielectric composite layer for integrated circuit structure which provides void-free low k dielectric material between metal lines while mitigating via poisoning |
| 09/05/2002 | US20020123242 Simplified process for producing nanoporous silica |
| 09/05/2002 | US20020123241 Process for forming pattern and method for producing liquid crystal display apparatus employing process for forming pattern |
| 09/05/2002 | US20020123240 Electronic device manufacture |
| 09/05/2002 | US20020123239 Method and apparatus for preparing nitride semiconductor surfaces |
| 09/05/2002 | US20020123238 Surfaces of the single fibers comprising said fibrous structural material are coated with a pre-treating agent containing a polyhydric compound as main component |
| 09/05/2002 | US20020123236 Heat treatment apparatus and method |
| 09/05/2002 | US20020123235 Ruthenium silicide wet etch |
| 09/05/2002 | US20020123234 Method and composition for plasma etching of a self-aligned contact opening |
| 09/05/2002 | US20020123233 Method for stacking semiconductor die within an implanted medical device |
| 09/05/2002 | US20020123231 Etching gas composition for silicon oxide and method of etching silicon oxide using the same |
| 09/05/2002 | US20020123230 Gas distribution apparatus for semiconductor processing |
| 09/05/2002 | US20020123229 Plasma processing method |
| 09/05/2002 | US20020123228 Method to improve the reliability of gold to aluminum wire bonds with small pad openings |
| 09/05/2002 | US20020123227 Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation |
| 09/05/2002 | US20020123226 Method and composition for plasma etching of a self-aligned contact opening |
| 09/05/2002 | US20020123225 Control of Vmin transient voltage drift by using a PECVD silicon oxynitride film at the protective overcoat level |
| 09/05/2002 | US20020123224 Chemical mechanical polishing slurry |
| 09/05/2002 | US20020123223 Method of manufacturing a semiconductor device and a device obtained by means of said method |
| 09/05/2002 | US20020123222 Method of fabricating a salicide layer |
| 09/05/2002 | US20020123221 Chemical vapor deposition methods and methods of etching a contact opening over a node location on a semiconductor substrate |
| 09/05/2002 | US20020123220 Immersing a substrate having copper conductive regions in a solution comprising palladium to deposit palladium; immersing in solution of sodium citrate and EDTA; rinsing; electroless plating cobalt-tungsten-phosphorus alloy film; rinsing |
| 09/05/2002 | US20020123219 Method of forming a via of a dual damascene with low resistance |
| 09/05/2002 | US20020123218 Semiconductor device and mehtod of manufacturing the same |
| 09/05/2002 | US20020123217 Damascene processing employing low si-sion etch stop layer/arc |
| 09/05/2002 | US20020123216 Method of manufacturing semiconductor device |
| 09/05/2002 | US20020123215 Process for producing barrier film and barrier film thus produced |
| 09/05/2002 | US20020123214 Control of Vmin transient voltage drift by using silicon formed with deuterium-based process gases |
| 09/05/2002 | US20020123213 Stereolithographically fabricated conductive elements, semiconductor device components and assemblies including such conductive elements, and methods |
| 09/05/2002 | US20020123212 Semiconductor device manufacturing method |
| 09/05/2002 | US20020123211 Implantation process using substoichiometric, oxygen doses at different energies |
| 09/05/2002 | US20020123210 Semiconductor device and method for manufacturing the same |
| 09/05/2002 | US20020123208 Method of fabricating a self-aligned shallow trench isolation |
| 09/05/2002 | US20020123207 Methods of manufacturing semiconductor devices |
| 09/05/2002 | US20020123206 Method of forming an insulating layer in a trench isolation type semiconductor device |
| 09/05/2002 | US20020123205 Semiconductor device and method of manufacturing the same |
| 09/05/2002 | US20020123204 Method of making a hybrid substrate having a thin silicon carbide membrane layer |
| 09/05/2002 | US20020123203 Ferroelectric memory configuration and a method for producing the configuration |
| 09/05/2002 | US20020123202 Semiconductor device and method for manufacturing the same |
| 09/05/2002 | US20020123201 Method of manufacturing CMOS thin film transistor |
| 09/05/2002 | US20020123200 Plasma processing apparatus |
| 09/05/2002 | US20020123199 Method of manufacturing a bipolar transistor semiconductor device |