| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/17/2002 | US6451638 Semiconductor and process for fabricating the same |
| 09/17/2002 | US6451636 Semiconductor device and display device having laser-annealed semiconductor element |
| 09/17/2002 | US6451635 Photolithography system and a method for fabricating a thin film transistor array substrate using the same |
| 09/17/2002 | US6451634 Method of fabricating a multistack 3-dimensional high density semiconductor device |
| 09/17/2002 | US6451633 Method for manufacturing semiconductor integrated circuit |
| 09/17/2002 | US6451632 Method for manufacturing thin-film transistor substrate, liquid crystal display unit |
| 09/17/2002 | US6451631 Thin film crystal growth by laser annealing |
| 09/17/2002 | US6451630 Source and drain electrodes, and the gate electrode are simultaneously formed, so the number of photolithography processes can be reduced, improving productivity and yield |
| 09/17/2002 | US6451629 Leadframe alteration to direct compound flow into package |
| 09/17/2002 | US6451628 Method fabricating a semiconductor device with a decreased mounting area |
| 09/17/2002 | US6451627 Semiconductor device and process for manufacturing and packaging a semiconductor device |
| 09/17/2002 | US6451625 Method of fabricating a flip-chip ball-grid-array package with molded underfill |
| 09/17/2002 | US6451623 Carrier reel, carriage method using the carrier reel, and method for manufacturing electronic device |
| 09/17/2002 | US6451621 Using scatterometry to measure resist thickness and control implant |
| 09/17/2002 | US6451620 Method for etching organic film, method for fabricating semiconductor device and pattern formation method |
| 09/17/2002 | US6451515 Substrate treating method |
| 09/17/2002 | US6451512 UV-enhanced silylation process to increase etch resistance of ultra thin resists |
| 09/17/2002 | US6451511 Method for forming-photoresist mask |
| 09/17/2002 | US6451510 Ammonium perfluoroalkyl sulfonic acid or ammonium, amine or quaternary ammonium salt is used as anionic surfactant |
| 09/17/2002 | US6451504 Silicon nitride overcoated with silicon oxide photoresist;oxidation |
| 09/17/2002 | US6451503 Antihalation compositions |
| 09/17/2002 | US6451496 Cresol or xylenol resin that has been esterified with 1,2-naphthoquinonediazide-4 or 5-sulfonic acid |
| 09/17/2002 | US6451492 Optical system |
| 09/17/2002 | US6451489 Phase shift photomask |
| 09/17/2002 | US6451436 Excellent in resistance to oxygen plasma and etching; reaction product between fine particles of silica and a halogenated silane or a hydrolyzate thereof exhibits a dielectric constant as low as 3;mechanical strength and chemical resistance |
| 09/17/2002 | US6451391 Laser ablation using a target material with almost or the same composition as that of desired thin film, without requiring o2 gas and substrate heating, transparent electrodes, ferro-electric films in nonvolatile random access memory |
| 09/17/2002 | US6451390 Plasma enhanced chemical vapor deposition; silicon dioxide film from tetraethyl silicate |
| 09/17/2002 | US6451388 Method of forming titanium film by chemical vapor deposition |
| 09/17/2002 | US6451381 Electrically insulating crosslinked thin-film-forming organic resin composition and method for forming thin film therefrom |
| 09/17/2002 | US6451223 Thinner composition and methods and systems for using the thinner composition |
| 09/17/2002 | US6451218 Method for the wet chemical pyramidal texture etching of silicon surfaces |
| 09/17/2002 | US6451217 Mixing hydrogen or ammonia to sulfur fluoride to suppress turbidity on the surfaces of silicon; spraying the mixtures from nozzles having feeding pipes; etch selectivity; quality polishing |
| 09/17/2002 | US6451214 Etching, shaping, or patterning layers or films with ceric ammonium nitrate in fabrication of semiconductor systems |
| 09/17/2002 | US6451195 Imersing silicon wafers in electrolytic cells, applying direct current voltages, then stirring the solutions using a magnetic field; protective coatings having uniform thickness |
| 09/17/2002 | US6451181 Method of forming a semiconductor device barrier layer |
| 09/17/2002 | US6451179 Coating aluminum multilayers by applying radio frequency power to coils for ionization of targets before metallization; semiconductors; robotics |
| 09/17/2002 | US6451178 Interference layer system |
| 09/17/2002 | US6451177 Vault shaped target and magnetron operable in two sputtering modes |
| 09/17/2002 | US6451160 Plasma generation apparatus with a conductive connection member that electrically connects the power source to the electrode |
| 09/17/2002 | US6451158 Apparatus for detecting the endpoint of a photoresist stripping process |
| 09/17/2002 | US6451157 Gas distribution apparatus for semiconductor processing |
| 09/17/2002 | US6451135 High-purity copper sputtering targets and thin films |
| 09/17/2002 | US6451127 Conductive paste and semiconductor component having conductive bumps made from the conductive paste |
| 09/17/2002 | US6451124 Process for the chemical treatment of semiconductor wafers |
| 09/17/2002 | US6451120 Apparatus and method for batch processing semiconductor substrates in making semiconductor lasers |
| 09/17/2002 | US6451119 Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition |
| 09/17/2002 | US6451118 Cluster tool architecture for sulfur trioxide processing |
| 09/17/2002 | US6451116 Apparatus for electroless plating a contact pad |
| 09/17/2002 | US6451114 Apparatus for application of chemical process to a workpiece |
| 09/17/2002 | US6451113 Method and apparatus for growing oriented whisker arrays |
| 09/17/2002 | US6450868 Carrier head with multi-part flexible membrane |
| 09/17/2002 | US6450863 Method and apparatus for uniformly planarizing a microelectronic substrate |
| 09/17/2002 | US6450805 Hot plate cooling method and heat processing apparatus |
| 09/17/2002 | US6450803 Heat treatment apparatus |
| 09/17/2002 | US6450757 Conveyor system |
| 09/17/2002 | US6450755 Dual arm substrate handling robot with a batch loader |
| 09/17/2002 | US6450750 Multiple loadlock system |
| 09/17/2002 | US6450682 Method and apparatus for predicting the end of life of a gas scrubber |
| 09/17/2002 | US6450346 Silicon fixtures for supporting wafers during thermal processing |
| 09/17/2002 | US6450200 Flow control of process gas in semiconductor manufacturing |
| 09/17/2002 | US6450181 Heating aqueous solution of oxygen, ammonia and hydrogen peroxide |
| 09/17/2002 | US6450117 Directing a flow of gas in a substrate processing chamber |
| 09/17/2002 | US6450116 Apparatus for exposing a substrate to plasma radicals |
| 09/17/2002 | US6449873 Apparatus and method for dry cleaning of substrates using clusters |
| 09/17/2002 | US6449871 Semiconductor process chamber having improved gas distributor |
| 09/17/2002 | US6449844 Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same |
| 09/17/2002 | US6449838 Method of mounting a semiconductor device to a substrate |
| 09/17/2002 | US6449837 Method for attaching electronic devices to metallized glass printed circuit |
| 09/17/2002 | US6449827 Apparatus for gripping microplates |
| 09/17/2002 | CA2278878C Very large scale immobilized peptide synthesis |
| 09/17/2002 | CA2231852C Substrate processing apparatus and method |
| 09/16/2002 | CA2366718A1 Method of and apparatus for measuring lattice-constant, and computer program |
| 09/14/2002 | CA2375384A1 Method of and apparatus for pulling up crystal |
| 09/14/2002 | CA2340985A1 Interleaved wordline architecture |
| 09/12/2002 | WO2002071611A2 Monotonic dynamic-static pseudo-nmos logic circuit and method of forming a logic gate array |
| 09/12/2002 | WO2002071560A2 Separating of optical integrated modules and structures formed thereby |
| 09/12/2002 | WO2002071495A1 Relaxed silicon germanium platform for high speed cmos electronics and high speed analog circuits |
| 09/12/2002 | WO2002071493A2 Relaxed silicon germanium platform for high speed cmos electronics and high speed analog |
| 09/12/2002 | WO2002071492A1 Bipolar transistor |
| 09/12/2002 | WO2002071491A1 Relaxed silicon germanium platform for high speed cmos electronics and high speed analog circuits |
| 09/12/2002 | WO2002071490A1 A modulation doped thyristor and complementary transistor combination for a monolithic optoelectronic integrated circuit |
| 09/12/2002 | WO2002071489A1 Image sensor and production method therefore |
| 09/12/2002 | WO2002071488A1 Relaxed silicon germanium platform for high speed cmos electronics and high speed analog circuits |
| 09/12/2002 | WO2002071483A2 Conductor track arrangement and method for producing a conductor track arrangement |
| 09/12/2002 | WO2002071482A2 Hollow structure in an integrated circuit and method for producing such a hollow structure in an integrated circuit |
| 09/12/2002 | WO2002071480A2 Electronic package with improved cap design for reduced interfacial stresses |
| 09/12/2002 | WO2002071478A1 Thin film transistors and method of manufacture |
| 09/12/2002 | WO2002071477A1 Single transistor rare earth manganite ferroelectric nonvolatile memory cell |
| 09/12/2002 | WO2002071476A2 Method of forming conductive interconnections in porous insulating films and associated device |
| 09/12/2002 | WO2002071475A1 Method for producing thin layers on a specific support and an application thereof |
| 09/12/2002 | WO2002071474A2 Method for broadening active semiconductor areas |
| 09/12/2002 | WO2002071473A1 Film thichness measuring monitor wafer |
| 09/12/2002 | WO2002071472A2 Method and structure of in-situ wafer scale polymer stud grid array contact formation |
| 09/12/2002 | WO2002071471A2 Traceless flip chip assembly & method |
| 09/12/2002 | WO2002071470A1 Chip mounting method and apparatus therefor |
| 09/12/2002 | WO2002071469A1 Electric device producing method |
| 09/12/2002 | WO2002071468A1 HYBRID LOW-k INTERCONNECT STRUCTURE COMPRISED OF 2 SPIN-ON DIELECTRIC MATERIALS |
| 09/12/2002 | WO2002071467A1 Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics |
| 09/12/2002 | WO2002071465A1 Process for the manufacture of large area arrays of discrete components |
| 09/12/2002 | WO2002071464A1 System and method for forming film |