| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/19/2002 | US20020130105 Process for etching bismuth-containing oxide films |
| 09/19/2002 | US20020130102 Method of forming a thin-film resistor employed in a semiconductor water |
| 09/19/2002 | US20020130061 Apparatus and method of making a slip free wafer boat |
| 09/19/2002 | US20020130049 Forming a passivation layer on a substrate surface; polishing substrate in an electrolyte solution; applying an anodic bias to substrate surface; removing material from portion of substrate surface |
| 09/19/2002 | US20020130046 Positioning substrate in an electroplating bath; forming doped copper layer on substrate; wherein the doped copper layer comprises an amount of non-metal that is controlled for increasing electromigration resistance in doped copper layer |
| 09/19/2002 | US20020129973 Single sided adhesive tape for compound diversion on BOC substrates |
| 09/19/2002 | US20020129970 Portable electronic medium and manufacturing method thereof |
| 09/19/2002 | US20020129904 Plasma treatment apparatus and method of producing semiconductor device using the apparatus |
| 09/19/2002 | US20020129903 Variable efficiency faraday shield |
| 09/19/2002 | US20020129901 High-temperature and high-pressure treatment device |
| 09/19/2002 | US20020129900 Method for processing specimens, an apparatus therefor and a method of manufacture of a magnetic head |
| 09/19/2002 | US20020129899 Die pickup method and die pickup apparatus |
| 09/19/2002 | US20020129894 Method for joining and an ultra-high density interconnect |
| 09/19/2002 | US20020129879 Device produced by a process of controlling grain growth in metal films |
| 09/19/2002 | US20020129838 For drying wafer substrates in tank |
| 09/19/2002 | US20020129770 Vacuum deposition system |
| 09/19/2002 | US20020129769 Chemical vapor deposition apparatus |
| 09/19/2002 | US20020129762 Relaxed InxGa1-xAs layers integrated with Si |
| 09/19/2002 | US20020129760 Method of and apparatus for pulling up crystal |
| 09/19/2002 | US20020129707 Substrate transport container |
| 09/19/2002 | US20020129560 Acidic polishing slurry for the chemical-mechanical polishing of SiO2 isolation layers |
| 09/19/2002 | US20020129513 Drying vapor generation |
| 09/19/2002 | US20020129487 Auxiliary tool for assembling a scrubber |
| 09/19/2002 | US20020129476 Device for manufacturing semiconductor device and method of manufacturing the same |
| 09/19/2002 | US20020129475 Pedestal assembly with enhanced thermal conductivity |
| 09/19/2002 | EP1144716A3 Cvd process using bi alcoxides |
| 09/19/2002 | DE10210903A1 Halbleiterpackungsbauelement geringer Dicke, Verfahren zu seiner Herstellung und zugehörige Elektronikkomponente Semiconductor package device of small thickness, process for its preparation and its associated electronics component |
| 09/19/2002 | DE10210662A1 Power semiconducting component has length of gate electrode layer on first isolation film and total isolation film thickness directly beneath gate electrode tip that exceed/equal lower limits |
| 09/19/2002 | DE10200671A1 Halbleitereinrichtung mit elektrischem Schmelzverbindungselement Semiconductor device with electrical fuse element |
| 09/19/2002 | DE10164192A1 Vorrichtung und Verfahren zur Bearbeitung von Substraten Apparatus and method for processing substrates |
| 09/19/2002 | DE10154411A1 Wärmebehandlungsvorrichtung, die Vorrichtung verwendendes Wärmebehandlungsverfahren, und Verfahren zur Herstellung einer Halbleitervorrichtung Heat treatment device, the device-use heat treatment method, and method for manufacturing a semiconductor device |
| 09/19/2002 | DE10153560A1 Memory arrangement with additional free space for data reading process has approximately constant sum of electrical resistances in reference voltage line and selected bit line |
| 09/19/2002 | DE10116062A1 Electronic component removal from lead frame cuts down in sectors to removal depth by pulsed solid-state laser beam passed repeatedly along parting line |
| 09/19/2002 | DE10111462A1 Thyristorstruktur und Überspannungsschutzanordnung mit einer solchen Thyristorstruktur And thyristor surge protection device with such a thyristor |
| 09/19/2002 | DE10110150A1 Verfahren zum Herstellen von metallischen Bitleitungen für Speicherzellenarrays, Verfahren zum Herstellen von Speicherzellenarrays und Speicherzellenarray A method of manufacturing of metallic bit lines for memory cell arrays, methods of making arrays of memory cells and memory cell array |
| 09/19/2002 | DE10109877A1 Leiterbahnanordnung und Verfahren zur Herstellung einer Leiterbahnanordnung Interconnect arrangement and method for fabricating a wiring arrangement |
| 09/19/2002 | DE10109778A1 Hohlraumstruktur und Verfahren zum Herstellen einer Hohlraumstruktur Cavity structure and method of making a hollow structure |
| 09/19/2002 | CA2451882A1 Nanofabrication |
| 09/19/2002 | CA2440328A1 Atmospheric pressure plasma etching reactor |
| 09/19/2002 | CA2440254A1 Combined plasma/liquid cleaning of substrates |
| 09/18/2002 | EP1241745A2 Laser apparatus |
| 09/18/2002 | EP1241711A2 Semiconductor element, and method of forming silicon-based film |
| 09/18/2002 | EP1241709A2 Semiconductor memory and process for fabricating the same |
| 09/18/2002 | EP1241707A2 SOI substrate, annealing method therefor, semiconductor device having the SOI substrate, and method of manufacturing the same |
| 09/18/2002 | EP1241706A2 A gas cooled electrostatic pin chuck for vacuum applications |
| 09/18/2002 | EP1241705A1 Process of manufacturing electron microscopic sample for analysing a semiconductor device |
| 09/18/2002 | EP1241704A1 Fabrication method of a double polysilicon bipolar transistor with heterojunction base and corresponding transistor |
| 09/18/2002 | EP1241703A1 Method for masking silicon during anisotropic wet etching |
| 09/18/2002 | EP1241702A1 Method for producing group iii nitride compound semiconductor and group iii nitride compound semiconductor device |
| 09/18/2002 | EP1241527A1 Positive type photosensitive polyimide resin composition |
| 09/18/2002 | EP1241525A2 An optical proximity correction method utilizing ruled ladder bars as sub-resolution assist features |
| 09/18/2002 | EP1241524A2 Photomask blank, Photomask and method of manufacture |
| 09/18/2002 | EP1241481A2 Contact structure for interconnections, interposer, semiconductor assembly and method |
| 09/18/2002 | EP1241465A1 Method and apparatus for classifying defects occuring at or near a surface of a smooth substrate |
| 09/18/2002 | EP1241282A1 Method of and apparatus for pulling up crystal |
| 09/18/2002 | EP1240977A2 Polishing apparatus |
| 09/18/2002 | EP1240937A1 Method and apparatus for treating perfluorocompounds |
| 09/18/2002 | EP1240932A2 Filter unit, chemical liquid supply system, and chemical liquid supply method |
| 09/18/2002 | EP1240691A2 Field effect transistor (fet) and fet circuitry |
| 09/18/2002 | EP1240673A1 Method for raw etching silicon solar cells |
| 09/18/2002 | EP1240672A1 Production of single-pole components |
| 09/18/2002 | EP1240671A1 Retrograde doped buried layer transistor and method for producing the same |
| 09/18/2002 | EP1240667A2 Integrated circuit package |
| 09/18/2002 | EP1240666A2 GROWTH OF ULTRATHIN NITRIDE ON Si(100) BY RAPID THERMAL N 2? TREATMENT |
| 09/18/2002 | EP1240665A1 Metal mask etching of silicon |
| 09/18/2002 | EP1240664A1 Integrated memory cell and method of fabrication |
| 09/18/2002 | EP1240663A2 Substrate holder |
| 09/18/2002 | EP1240662A1 Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module |
| 09/18/2002 | EP1240661A1 Hollow core spindle and spin, rinse, and dry module including the same |
| 09/18/2002 | EP1240653A1 Method for production of a regular multi-layer construction, in particular for electrical double layer capacitors and the corresponding device |
| 09/18/2002 | EP1240557A1 Imaging method using phase boundary masking with modified illumination |
| 09/18/2002 | EP1240556A1 Photolithography method, photolithography mask blanks, and method of making |
| 09/18/2002 | EP1240555A1 Thinner for rinsing photoresist and method of treating photoresist layer |
| 09/18/2002 | EP1240554A2 Nitrile/fluoroalcohol polymer-containing photoresists and associated processes for microlithography |
| 09/18/2002 | EP1240553A2 Photoresist composition for deep uv radiation |
| 09/18/2002 | EP1240552A1 Water-processable photoresist compositions |
| 09/18/2002 | EP1240551A2 Lithography device which uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range |
| 09/18/2002 | EP1240550A2 High precision orientation alignment and gap control stages for imprint lithography processes |
| 09/18/2002 | EP1240529A2 Method for producing micromechanical structures |
| 09/18/2002 | EP1240366A2 Chemical vapor deposition reactor and process chamber for said reactor |
| 09/18/2002 | EP1196939A4 Object inspection and/or modification system and method |
| 09/18/2002 | EP1088332B1 Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber |
| 09/18/2002 | EP1060027B1 Circuit and method for specifying performance parameters in integrated circuits |
| 09/18/2002 | EP0903754B1 Nonvolatile semiconductor memory |
| 09/18/2002 | EP0893223B1 A method for obtaining a seamless engraving cylinder for producing sheets with optical effects, and a plant including said cylinder |
| 09/18/2002 | EP0862791B1 Method of manufacturing and transferring metallic droplets |
| 09/18/2002 | EP0830707B1 Plasma sputter etching system with reduced particle contamination |
| 09/18/2002 | EP0826131B1 Unibody crucible |
| 09/18/2002 | EP0803542B1 Electrically conductive silicone elastomer compositions and use for manufacturing semiconductor devices |
| 09/18/2002 | EP0789934B1 Ballast monitoring for radio frequency power transistors |
| 09/18/2002 | EP0766604B1 Method and apparatus for controlled particle deposition on wafers |
| 09/18/2002 | EP0740757B1 Chemical refill system for high purity chemicals |
| 09/18/2002 | CN2512113Y Test device for electronic component |
| 09/18/2002 | CN2512112Y Test device for electronic components |
| 09/18/2002 | CN1370325A Plasma reaction chamber component having improved temp uniformity |
| 09/18/2002 | CN1370322A Inductor element |
| 09/18/2002 | CN1370306A Device and method for making devices comprising at least chip mounted on support |
| 09/18/2002 | CN1370305A Electronic device comprising chip fixed on support and method for making same |
| 09/18/2002 | CN1370304A Integrated circuit and circuit arrangement for supplying intergrated circuit with electricity |
| 09/18/2002 | CN1370245A Copper electroplating bath, pre-treating liquid before copper electroplating and copdper electroplating method |