Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2002
09/12/2002US20020127405 Diamond semiconductor and method for the fabrication thereof
09/12/2002US20020127352 Irradiating focused ion beam and depositing a film on a narrowly limited strip shape region from ends of sample; sequentially shifting irradiation region in a tip end direction to cause a thin deposition layer to extend
09/12/2002US20020127348 Method for depositing copper or a copper alloy
09/12/2002US20020127340 Supplying a coating solution to the substrate to form a coating layer on substrate; developing treatment for substrate carrying substrate into chamber after forming coating layer and before exposure; reducing pressure to remove impurities
09/12/2002US20020127334 Mounting substrate inside enclosed housing and passing a control gas; controlling a solvent vapor concentration of a control gas; extruding polymer solution onto surface of substrate in housing; spinning the substrate; exhausting gas
09/12/2002US20020127326 Passivation of porous semiconductors
09/12/2002US20020127147 Transfer fluids to or from a fluid-holding vessel, and remain physically and sealably associated during transfer
09/12/2002US20020127091 Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
09/12/2002US20020127050 Platform positioning system
09/12/2002US20020126941 Thick wafer processing and resultant products
09/12/2002US20020126940 Separating of optical integrated modules and structures formed thereby
09/12/2002US20020126939 Isolation device
09/12/2002US20020126931 Optical integrator for an illumination device
09/12/2002US20020126792 Electric or electronic circuit arrangement and method of protecting said circuit arrangement from manipulation and/or abuse
09/12/2002US20020126723 Semiconductor laser device and manufacturing method thereof
09/12/2002US20020126581 Method of analyzing clock skew between signals
09/12/2002US20020126565 Semiconductor integrated circuit device with internal clock generating circuit
09/12/2002US20020126548 Dram bit lines
09/12/2002US20020126543 Storage capacitor for a dram
09/12/2002US20020126532 Non-volatile semiconductor memory device
09/12/2002US20020126524 Semiconductor memory apparatus using tunnel magnetic resistance elements
09/12/2002US20020126521 Semiconductor integrated circuit and nonvolatile memory element
09/12/2002US20020126520 Semiconductor device
09/12/2002US20020126519 Content addressable memory cell
09/12/2002US20020126460 Printed circuit board arrangement
09/12/2002US20020126438 Ultra-small capacitor array
09/12/2002US20020126437 Electrostatic chuck system and method for maintaining the same
09/12/2002US20020126400 Optical arrangement
09/12/2002US20020126380 Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangement
09/12/2002US20020126366 Particle-optical lens arrangement and method employing such a lens arrangement
09/12/2002US20020126283 Method for real-time control of the fabrication of a thin-film structure by ellipsometric measurement
09/12/2002US20020126266 Optical correction plate, and its application in a lithographic projection apparatus
09/12/2002US20020126250 Active-matrix substrate, electro-optical device, method for manufacturing active-matrix substrate, and electronic equipment
09/12/2002US20020126241 Liquid crystal display device
09/12/2002US20020126235 Liquid crystal displays
09/12/2002US20020126231 Electro-optical device and manufacturing method thereof
09/12/2002US20020126108 Semiconductor device
09/12/2002US20020125987 Thin-film resistor
09/12/2002US20020125986 Method for fabricating ultra high-resistive conductors in semiconductor devices and devices fabricated
09/12/2002US20020125980 Photolithographically-patterned out-of-plane coil structures and method of making
09/12/2002US20020125919 Switching circuit utilizing a high voltage transistor protection technique for integrated circuit devices incorporating dual supply voltage sources
09/12/2002US20020125912 Tri-state buffer circuit
09/12/2002US20020125905 Evaluating a multi-layered structure for voids
09/12/2002US20020125901 Probe for inspecting semiconductor device and method of manufacturing the same
09/12/2002US20020125820 Pixel structure of an organic light-emitting diode display device and its fabrication method
09/12/2002US20020125612 Method for production of three-dimensionally arranged conducting and connecting structures for volumetric and energy flows
09/12/2002US20020125584 Semiconductor device and method of manufacturing same
09/12/2002US20020125583 Integrated circuit package with surface mounted pins on an organic substrate
09/12/2002US20020125582 Process for manufacturing integrated devices having connections on a separate wafer, and integrated device thus obtained
09/12/2002US20020125581 Bumpless flip chip assembly with solder via
09/12/2002US20020125579 Semiconductor device having damascene interconnection structure that prevents void formation between interconnections
09/12/2002US20020125577 Semiconductor integrated circuit device with moisture-proof ring and its manufacture method
09/12/2002US20020125576 Semiconductor device
09/12/2002US20020125575 Semiconductor device and method of producing the same
09/12/2002US20020125573 Ferroelectric integrated circuit having hydrogen barrier layer
09/12/2002US20020125572 Semiconductor device having no cracks in one or more layers underlying a metal line layer and method of manufacturing the same
09/12/2002US20020125569 Semiconductor device with bumps for pads
09/12/2002US20020125567 Die support structure
09/12/2002US20020125566 High frequency circuit chip and method of producing the same
09/12/2002US20020125565 Semiconductor device
09/12/2002US20020125564 Semiconductor device reinforced by a highly elastic member made of a synthetic resin
09/12/2002US20020125558 Semiconductor package with stacked substrates and multiple semiconductor dice
09/12/2002US20020125556 Stacking structure of semiconductor chips and semiconductor package using it
09/12/2002US20020125549 Low k dielectric materials with inherent copper ion migration barrier
09/12/2002US20020125546 Semiconductor device, production method therefor, and electrophotographic apparatus
09/12/2002US20020125545 Spherical semiconductor device containing two or more spherical semiconductors combined together
09/12/2002US20020125544 Semiconductor memory device with sidewalls
09/12/2002US20020125543 Semiconductor device having contact using crack-protecting layer and method of forming the same
09/12/2002US20020125542 Semiconductor device having insulated gate bipolar transistor with dielectric isolation structure and method of manufacturing the same
09/12/2002US20020125541 Method of fabricating trench junction barrier rectifier
09/12/2002US20020125540 Semiconductor device, method for manufacturing the same, and liquid jet apparatus
09/12/2002US20020125539 Semiconductor device having contact electrode to semiconductor substrate
09/12/2002US20020125537 Integrated radio frequency circuits
09/12/2002US20020125536 Semiconductor device and a method of manufacturing the same
09/12/2002US20020125535 Thin-film transistor, method for fabricating the same, and liquid crystal display device
09/12/2002US20020125534 Semiconductor device having silicon-on-insulator structure and method of fabricating the same
09/12/2002US20020125533 Thin film transistor substrate and process for producing the same
09/12/2002US20020125532 Field-effect-controlled semiconductor component and method of fabricating a doping layer in a vertically configured semiconductor component
09/12/2002US20020125531 Semiconductor device and method of manufacturing the same
09/12/2002US20020125529 Ultra dense trench-gated power device with the reduced drain-source feedback capacitance and miller charge
09/12/2002US20020125528 Vertical-type power MOSFET with a gate formed in a trench
09/12/2002US20020125527 Trench DMOS transistor structure having a low resistance path to a drain contact located on an upper surface
09/12/2002US20020125526 Semiconductor devices and processes for making them
09/12/2002US20020125525 Nonvolatile semiconductor memory cell and method for fabricating the memory cell
09/12/2002US20020125524 Semiconductor device and method of manufacturing same
09/12/2002US20020125523 FeRAM having bottom electrode connected to storage node and method for forming the same
09/12/2002US20020125522 Semiconductor device and manufacturing method thereof
09/12/2002US20020125521 Trench capacitor with capacitor electrodes and corresponding fabrication method
09/12/2002US20020125520 High gate coupling non-volatile memory structure
09/12/2002US20020125519 Capacitor of semiconductor device and manufacturing method for the same
09/12/2002US20020125518 Ferroelectric transistor
09/12/2002US20020125516 RuSixOy-containing adhesion layers and process for fabricating the same
09/12/2002US20020125512 Semiconductor device and manufacturing method thereof
09/12/2002US20020125511 Semiconductor device, method of manufacturing the same and liquid jet apparatus
09/12/2002US20020125510 Field effect transistor and semiconductor device manufacturing method
09/12/2002US20020125508 Container capacitor structure and method of formation thereof
09/12/2002US20020125506 Semiconductor device and GaN-based field effect transistor for use in the same
09/12/2002US20020125503 Gate oxide stabilization by means of germanium components in gate conductor
09/12/2002US20020125502 Semiconductor device
09/12/2002US20020125498 Method of preparing indium phosphide heterojunction bipolar transistors
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