Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2002
09/10/2002US6447898 Tackifying resins, epoxy resins with hardeners, metallized particles,nondeformable spacer particles; electronic components
09/10/2002US6447853 Method and apparatus for processing semiconductor substrates
09/10/2002US6447850 Polycrystalline silicon thin film forming method
09/10/2002US6447846 Electrically insulating thin-film-forming resin composition and method for forming thin film therefrom
09/10/2002US6447838 Integrated circuit capacitors with barrier layer and process for making the same
09/10/2002US6447695 Aqueous dispersion composition for chemical mechanical polishing for use in manufacture of semiconductor devices
09/10/2002US6447694 Composition for chemical mechanical polishing
09/10/2002US6447693 Slurries of abrasive inorganic oxide particles and method for polishing copper containing surfaces
09/10/2002US6447691 Method for detecting end point of plasma etching, and plasma etching apparatus
09/10/2002US6447688 Method for fabricating a stencil mask
09/10/2002US6447668 Methods and apparatus for end-point detection
09/10/2002US6447637 Process chamber having a voltage distribution electrode
09/10/2002US6447634 Method and apparatus for selective removal of material from wafer alignment marks
09/10/2002US6447633 Reactor for processing a semiconductor wafer
09/10/2002US6447632 Apparatus and nozzle device for gaseous polishing
09/10/2002US6447626 Method for producing joined body of ALN substrates and joining agent used for the joining
09/10/2002US6447613 Substrate dechucking device and substrate dechucking method
09/10/2002US6447608 Spin coating apparatus
09/10/2002US6447606 Method for producing a single-crystalline film of KLN or KLNT
09/10/2002US6447605 Method for preparing heteroepitaxial thin film
09/10/2002US6447604 Depositing nitride homoepitaxial layer by vapor phase epitaxy (vpe)
09/10/2002US6447600 Method of removing defects of single crystal material and single crystal material from which defects are removed by the method
09/10/2002US6447563 Chemical mechanical polishing slurry system having an activator solution
09/10/2002US6447385 Polishing apparatus
09/10/2002US6447382 Apparatus for removing semiconductor wafers from within the runner disks of a double-sided polishing machine
09/10/2002US6447375 Chemical mechanical polishing; drying, solidifying, batch processing, packaging
09/10/2002US6447374 Chemical mechanical planarization system
09/10/2002US6447373 Chemical mechanical polishing slurries for metal
09/10/2002US6447372 Polishing agent for semiconductor substrates
09/10/2002US6447371 Chemical mechanical polishing slurry useful for copper/tantalum substrates
09/10/2002US6447370 Inline metrology device
09/10/2002US6447233 Automated door assembly for use in semiconductor wafer manufacturing
09/10/2002US6447232 Semiconductor wafer processing apparatus having improved wafer input/output handling system
09/10/2002US6447217 Substrate transfer device and operating method thereof
09/10/2002US6446950 Travelling worktable apparatus
09/10/2002US6446948 Vacuum chuck for reducing distortion of semiconductor and GMR head wafers during processing
09/10/2002US6446933 Film on a surface of a mold used during semiconductor device fabrication
09/10/2002US6446818 Boat for cleaning ball grid array packages
09/10/2002US6446806 Transportation container and method for opening and closing lid thereof
09/10/2002US6446709 Combination heat radiator
09/10/2002US6446647 Cassette holder for cleaning equipment
09/10/2002US6446646 Substrate processing apparatus
09/10/2002US6446645 Dip cleaning system for a substrate, system for evaluating the amount of particles and method of evaluating the amount of particles adhering to a substrate
09/10/2002US6446644 Chemical solutions system for processing semiconductor materials
09/10/2002US6446643 By the action of centrifugal force generated during rotation of the housing
09/10/2002US6446641 Method of manufacturing semiconductor device, and semiconductor device manufactured thereby
09/10/2002US6446573 Plasma process device
09/10/2002US6446572 Embedded plasma source for plasma density improvement
09/10/2002US6446358 Drying nozzle and drying device and cleaning device using the same
09/10/2002US6446355 Disk drying apparatus and method
09/10/2002US6446354 Handler system for cutting a semiconductor package device
09/10/2002US6446353 Vacuum processing apparatus
09/10/2002US6446296 Substrate cleaning apparatus with brush force control and method
09/06/2002WO2002069681A1 A method of soldering
09/06/2002WO2002069677A1 Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method
09/06/2002WO2002069466A1 Iii group nitride semiconductor element and iii group nitride semiconductor substrate
09/06/2002WO2002069461A1 Laser wavelength control unit with piezoelectric driver
09/06/2002WO2002069410A2 Gallium nitride material devices including backside vias and methods of fabrication
09/06/2002WO2002069408A2 Soi ldmos transistor having a field plate and method of making the same
09/06/2002WO2002069401A1 Semiconductor device, its manufacturing method, and electronic apparatus
09/06/2002WO2002069399A1 Super-thin high speed flip chip package
09/06/2002WO2002069394A1 Process for depositing and planarizing bpsg for dense trench mosfet application
09/06/2002WO2002069393A1 Device for detecting wafer positioning failure on semiconductor processing device and method thereof
09/06/2002WO2002069392A1 Lift type substrate treatment device, and substrate treatment system with the substrate treatment device
09/06/2002WO2002069390A2 Grating test patterns and methods for overlay metrology
09/06/2002WO2002069389A2 Semiconductor wafer with process control modules
09/06/2002WO2002069388A1 Electrical apparatus and method of manufacturing electrical apparatus
09/06/2002WO2002069387A2 Die attaching adhesive with a low curing temperature
09/06/2002WO2002069386A1 Semiconductor chip and production method for a housing
09/06/2002WO2002069385A2 Arrangement with a chip comprising an integrated circuit and a support or a support element
09/06/2002WO2002069384A1 Chip scale package with flip chip interconnect
09/06/2002WO2002069383A2 Method of forming a notched silicon-containing gate structure
09/06/2002WO2002069382A1 Solid-state device and its manufacturing method
09/06/2002WO2002069381A2 Method of fabricating low-dielectric constant interlevel dielectric films for beol interconnects with enhanced adhesion and low-defect density
09/06/2002WO2002069380A2 Atomically thin highly resistive barrier layer in a copper via
09/06/2002WO2002069379A1 X-ray reflective mask, method of protecting the reflective mask, x-ray exposure device, and method of manufacturing semiconductor device
09/06/2002WO2002069378A1 Method for removing a mask layer from a semiconductor substrate
09/06/2002WO2002069377A1 Apparatus and process for precise encapsulation of flip chip interconnects
09/06/2002WO2002069376A1 Hybrid deposition system & methods
09/06/2002WO2002069375A2 Trench condenser and method for production thereof
09/06/2002WO2002069372A2 Self-coplanarity bumping shape for flip chip
09/06/2002WO2002069368A2 Multiple material stacks with a stress relief layer between a metal structure and a passivation layer and method
09/06/2002WO2002069365A2 Vessel for processing microelectronic workpieces
09/06/2002WO2002069354A2 Current-responsive resistive component
09/06/2002WO2002069345A2 Method for production of a memory capacitor
09/06/2002WO2002069284A1 Time-detection device and time- detection method by using a semi-conductor element
09/06/2002WO2002069251A1 Memory card and its manufacturing method
09/06/2002WO2002069207A1 Method and system for designing circuit layout
09/06/2002WO2002069132A2 Improved high speed data capture circuit for a digital device
09/06/2002WO2002069131A1 Traffic management system and method for materials handling using traffic balancing and traffic density
09/06/2002WO2002069065A2 Flow controller
09/06/2002WO2002069063A2 Method and apparatus for controlling a tool using a baseline control script
09/06/2002WO2002069054A1 Vacuum ultraviolet transmitting silicon oxyfluoride lithography glass
09/06/2002WO2002069052A1 Semiconductor developing agent
09/06/2002WO2002069049A2 Simultaneous imaging of two reticles
09/06/2002WO2002069047A1 Method for exposing at least one or at least two semiconductor wafers
09/06/2002WO2002069046A1 Adhesion-promoting film and process of forming patterns by using the film
09/06/2002WO2002069045A2 Anti-reflective coating material, semiconductor product with an arc layer and methods
09/06/2002WO2002069044A2 Polymers and photoresist compositions
09/06/2002WO2002069040A1 Novel polymers, processes for polymer synthesis and photoresist compositions