| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/05/2002 | US20020123198 Method of fabricating a self-aligned shallow trench isolation |
| 09/05/2002 | US20020123197 Method of fabricating CMOS inverter and integrated circuits utilizing strained silicon surface channel mosfets |
| 09/05/2002 | US20020123196 Method of making trench-gated MOSFET having cesium gate oxide layer |
| 09/05/2002 | US20020123195 MOS technology power device with low output resistance and low capacity, and related manufacturing process |
| 09/05/2002 | US20020123194 Non-volatile memory device having a silicide layer and fabrication method thereof |
| 09/05/2002 | US20020123193 Semiconductor memory device and method for manufacturing the same |
| 09/05/2002 | US20020123192 Selective salicide process by reformation of silicon nitride sidewall spacers |
| 09/05/2002 | US20020123191 Method for fabricating a capacitor device with BiCMOS process and the capacitor device formed thereby |
| 09/05/2002 | US20020123190 Semiconductor integrated circuit device and method of manufacturing the same |
| 09/05/2002 | US20020123189 Method of manufacturing a transistor in a semiconductor device |
| 09/05/2002 | US20020123188 Compensation component and method for fabricating the compensation component |
| 09/05/2002 | US20020123185 Semiconductor device having a voltage-regulator device |
| 09/05/2002 | US20020123184 Method For Fabricating an Integrated Circuit with a Transistor Electrode |
| 09/05/2002 | US20020123183 Relaxed silicon germanium platform for high speed CMOS electronics and high speed analog circuits |
| 09/05/2002 | US20020123182 Transistor with ulta-short gate feature and method of fabricating the same |
| 09/05/2002 | US20020123181 Method for manufacturing semiconductor device and semiconductor device manufactured thereby |
| 09/05/2002 | US20020123180 Transistor and memory cell with ultra-short gate feature and method of fabricating the same |
| 09/05/2002 | US20020123179 MIS semiconductor device and method of fabricating the same |
| 09/05/2002 | US20020123178 Semiconductor device and process for fabrication thereof |
| 09/05/2002 | US20020123176 Method for fabricating electric interconnections and interconnection substrate having electric interconnections fabricated by the same method |
| 09/05/2002 | US20020123174 Complementary accumulation-mode JFET integrated circuit topology using wide (>2eV) bandgap semiconductors |
| 09/05/2002 | US20020123173 Apparatus and process for precise encapsulation of flip chip interconnnects |
| 09/05/2002 | US20020123172 Methods for forming a die package |
| 09/05/2002 | US20020123171 Semiconductor device including edge bond pads and methods |
| 09/05/2002 | US20020123170 PCRAM cell manufacturing |
| 09/05/2002 | US20020123169 Methods of forming non-volatile resistance variable devices, and non-volatile resistance variable devices |
| 09/05/2002 | US20020123168 Apparatus and methods for blocking highly scattered charged particles in a patterned beam in a charged-particle-beam microlithography system |
| 09/05/2002 | US20020123167 Relaxed silicon germanium platform for high speed CMOS electronics and high speed analog circuits |
| 09/05/2002 | US20020123166 Method for manufacturing semiconductor and method for manufacturing semiconductor device |
| 09/05/2002 | US20020123162 Nitride-based semiconductor element and method of forming nitride-based semiconductor |
| 09/05/2002 | US20020123161 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device |
| 09/05/2002 | US20020123159 Structure of merged vertical capacitor inside spiral conductor for RF and mixed-signal applications |
| 09/05/2002 | US20020123158 Method for manufactuing ferroelectric thin film device, ink jet recording head, and ink jet printer |
| 09/05/2002 | US20020123157 Method for fabricating group III-V compound semiconductor substrate |
| 09/05/2002 | US20020123012 For simultaneously imaging at least two reticles onto a substrate; lithographic system |
| 09/05/2002 | US20020123011 Heating apparatus for a substrate to be processed with a coating film |
| 09/05/2002 | US20020123010 Providing on substrate a layer of a negative photoresist comprising a polymer having methacrylate recurring groups; imagewise exposing layer to irradiation; developing photoresist by removing portions of layer not exposed |
| 09/05/2002 | US20020123008 Depositing a conductive layer over metal-insulator-metal(MIMcap) dielectric; and exposing at least the conductive layer to an isotropic etchant to form a top plate |
| 09/05/2002 | US20020122994 Identifying features in layout to be defined using phase shifting, placing shifter shapes to edges of of features; assigning phase to shifter shapes according to phase dependencies and costs to create a of phase shifters; refining |
| 09/05/2002 | US20020122993 Stencil reticles for charged-particle-beam microlithography, and fabrication methods for making same |
| 09/05/2002 | US20020122992 Preparing a photomask substrate with a mask pattern; forming a reference hole; applying an ion beam to release charged particles; position of the reference hole; calculating a positional relationship; correcting the defect |
| 09/05/2002 | US20020122991 Halftone phase shift mask and mask blank |
| 09/05/2002 | US20020122990 For inspecting the presence of the defect of the pattern formed on, for example, photomask |
| 09/05/2002 | US20020122879 Forming a crystalline thin film on inner surfaces of voids in a porous amorphous film; generating image data representing porous amorphous film having said crystalline thin film with using a transmission electron microscope |
| 09/05/2002 | US20020122584 Image processing method and device |
| 09/05/2002 | US20020122447 Semiconductor laser device having inGaAs compressive-strain active layer, GaAsP tensile-strain barrier layers, and InGaP optical waveguide layers |
| 09/05/2002 | US20020122346 High speed signal path and method |
| 09/05/2002 | US20020122344 Sense amplifiers having reduced Vth deviation |
| 09/05/2002 | US20020122338 Magnetic random access memory with write and read circuits using magnetic tunnel junction ( MTJ) devices |
| 09/05/2002 | US20020122284 Oxidation resistance; memory cells, integrated circuits, semiconductors |
| 09/05/2002 | US20020122283 Capacitor, circuit board with built-in capacitor and method for producing the same |
| 09/05/2002 | US20020122255 Method of manufacturing diffractive optical element |
| 09/05/2002 | US20020122174 .Apparatus and method for inspecting defects |
| 09/05/2002 | US20020122164 Lithographic objective having a first lens group including only lenses having a positive refractive power |
| 09/05/2002 | US20020122163 Position Detecting method optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method |
| 09/05/2002 | US20020122162 Wavefront aberration measurement method and projection exposure apparatus |
| 09/05/2002 | US20020121947 Monolithic microwave integrated circuit and method of manufacturing the same |
| 09/05/2002 | US20020121915 Automated pattern clustering detection for wafer probe maps |
| 09/05/2002 | US20020121888 Circuit configuration for the generation of a reference voltage |
| 09/05/2002 | US20020121863 Semiconductor light-emitting device |
| 09/05/2002 | US20020121709 External connection terminal and semiconductor device |
| 09/05/2002 | US20020121708 Method of manufacturing semiconductor device |
| 09/05/2002 | US20020121707 Super-thin high speed flip chip package |
| 09/05/2002 | US20020121706 Semiconductor-chip mounting substrate and method of manufacturing the same |
| 09/05/2002 | US20020121704 Method of fabricating conductive straps to interconnect contacts to corresponding digit lines by employing an angled sidewall implant and semiconductor devices fabricated thereby |
| 09/05/2002 | US20020121703 Semiconductor device and manufacturing method of semiconductor device |
| 09/05/2002 | US20020121702 Method and structure of in-situ wafer scale polymer stud grid array contact formation |
| 09/05/2002 | US20020121701 Semiconductor devices and methods for manufacturing the same |
| 09/05/2002 | US20020121699 Dual damascene Cu contact plug using selective tungsten deposition |
| 09/05/2002 | US20020121697 Process for the formation of RuSixOy-containing barrier layers for high-k dielectrics |
| 09/05/2002 | US20020121695 Molded ball grid array |
| 09/05/2002 | US20020121694 Coupled-cap flip chip BGA package with improved cap design for reduced interfacial stresses |
| 09/05/2002 | US20020121693 Stacked die package |
| 09/05/2002 | US20020121692 Low fabrication cost, fine pitch and high reliability solder bump |
| 09/05/2002 | US20020121691 High temperature circuit apparatus |
| 09/05/2002 | US20020121689 Flip chip type semiconductor device and method for manufacturing the same |
| 09/05/2002 | US20020121686 Rearrangement sheet, semiconductor device and method of manufacturing thereof |
| 09/05/2002 | US20020121684 Surface-mounting semiconductor device and method of making the same |
| 09/05/2002 | US20020121681 Condition sensitive adhesive tape for singulated die transport devices |
| 09/05/2002 | US20020121680 Ultra-thin semiconductor package device and method for manufacturing the same |
| 09/05/2002 | US20020121677 Semiconductor device including edge bond pads and methods |
| 09/05/2002 | US20020121676 Incorporation of carbon in silicon/silicon germanium epitaxial layer to enhance yield for Si-Ge bipolar technology |
| 09/05/2002 | US20020121675 Semiconductor device and method of producing the same |
| 09/05/2002 | US20020121674 Biopolar transistor with lattice matched base layer |
| 09/05/2002 | US20020121673 Methods of forming an isolation trench in a semiconductor, methods of forming an isolation trench in a surface of a silicon wafer, methods of forming an isolation trench-isolated transistor, trench-isolated transistor, trench isolation structures formed in a semiconductor, memory cells and DRAMs |
| 09/05/2002 | US20020121672 Receiver comprising a variable capacitance diode |
| 09/05/2002 | US20020121670 Lead frame |
| 09/05/2002 | US20020121667 Thin film transistor and fabricating method thereof |
| 09/05/2002 | US20020121666 Thin film transistor array panel and method for fabricating the same |
| 09/05/2002 | US20020121665 Semiconductor device and method of manufacturing the same |
| 09/05/2002 | US20020121664 Lateral semiconductor component in thin-film SOI technology |
| 09/05/2002 | US20020121663 Semiconductor device and method |
| 09/05/2002 | US20020121662 Method for producing a vertical semiconductor transistor component and vertical semiconductor transistor component |
| 09/05/2002 | US20020121661 Semiconductor device having a stacked gate insulation film and a gate electrode and manufacturing method thereof |
| 09/05/2002 | US20020121660 Semiconductor device |
| 09/05/2002 | US20020121659 Transfer circuit of semiconductor device and structure thereof |
| 09/05/2002 | US20020121658 DRAM having a guard ring and process of fabricating the same |
| 09/05/2002 | US20020121657 Double-bit non-volatile memory structure and corresponding method of manufacture |
| 09/05/2002 | US20020121656 Alternate method for photodiode formation in CMOS image sensors |
| 09/05/2002 | US20020121654 Semiconductor device and manufacturing method thereof |