| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 10/01/2002 | CA2273356C Bump-bonded semiconductor imaging device |
| 10/01/2002 | CA2265916C Process for manufacturing semiconductor wafer, process for manufacturing semiconductor chip, and ic card |
| 10/01/2002 | CA2218518C Slip free vertical rack design |
| 09/30/2002 | CA2379921A1 Twisted wordline strapping arrangement |
| 09/30/2002 | CA2342496A1 Twisted wordline straps |
| 09/26/2002 | WO2002076161A1 Method of manufacturing electronic part and electronic part obtained by the method |
| 09/26/2002 | WO2002075926A2 Antifuse reroute of dies |
| 09/26/2002 | WO2002075905A1 Armature unit, motor, stage device, exposure device, and method of manufacturing device |
| 09/26/2002 | WO2002075892A1 Electrostatic discharge protection structures having high holding current for latch-up immunity |
| 09/26/2002 | WO2002075891A1 Electrostatic discharge protection structures for high speed technologies with mixed and ultra-low voltage supplies |
| 09/26/2002 | WO2002075818A2 Inductive storage capacitor |
| 09/26/2002 | WO2002075814A1 Bipolar transistor |
| 09/26/2002 | WO2002075813A1 High k dielectric film and method for making |
| 09/26/2002 | WO2002075812A1 Method of producing semiconductor integrated circuit device and semiconductor integrated circuit device |
| 09/26/2002 | WO2002075811A2 Method for fabricating a metal resistor in an ic chip and related structure |
| 09/26/2002 | WO2002075810A2 Integrated circuit comprising electric connecting elements |
| 09/26/2002 | WO2002075809A1 Mask sheet for assembling semiconductor device and method for assembling semiconductor device |
| 09/26/2002 | WO2002075808A2 Self-aligned mram contact and method of fabrication |
| 09/26/2002 | WO2002075807A1 Probing method and device |
| 09/26/2002 | WO2002075806A1 Method for inspecting wafer, focused ion beam apparatus and transmission electron beam apparatus |
| 09/26/2002 | WO2002075805A1 A high performance bipolar transistor |
| 09/26/2002 | WO2002075804A2 Planarization of substrates using electrochemical mechanical polishing |
| 09/26/2002 | WO2002075803A2 Ruthenium silicide processing methods |
| 09/26/2002 | WO2002075802A1 Oxide film forming method |
| 09/26/2002 | WO2002075801A2 Method of fabricating oxides with low defect densities |
| 09/26/2002 | WO2002075800A1 Method and apparatus for electrochemical etching, and electrochemically-etched product |
| 09/26/2002 | WO2002075799A1 Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface |
| 09/26/2002 | WO2002075798A1 Water and method for storing silicon wafer |
| 09/26/2002 | WO2002075797A2 Method of forming copper interconnects |
| 09/26/2002 | WO2002075796A1 Method of etching organic antireflection coating (arc) layers |
| 09/26/2002 | WO2002075795A1 Method and device for exposure, and method of manufacturing device |
| 09/26/2002 | WO2002075793A2 System and method of providing mask defect printability analysis |
| 09/26/2002 | WO2002075792A2 Method of sealing wafer backside for full-face electronchemical plating |
| 09/26/2002 | WO2002075791A2 Metal gate stack with etch stop layer improved through implantation of metallic atoms |
| 09/26/2002 | WO2002075790A2 Method and apparatus for transferring heat from a substrate to a chuck |
| 09/26/2002 | WO2002075789A1 Automatic continue wafer processing system and method for using the same |
| 09/26/2002 | WO2002075788A1 Automatic continue wafer processing system and method for using the same |
| 09/26/2002 | WO2002075787A2 Method of manufacturing a semiconductor device with metallization layers interconnected by tungsten plugs |
| 09/26/2002 | WO2002075784A2 Drying vapor generation |
| 09/26/2002 | WO2002075782A2 Self-aligned, trenchless magnetoresistive random-access memory (mram) structure with sidewall containment of mram structure |
| 09/26/2002 | WO2002075781A2 Method of forming silicide contacts and device incorporating same |
| 09/26/2002 | WO2002075780A2 Electronic device having dielectric material of high dielectric constant |
| 09/26/2002 | WO2002075773A1 Focused ion beam system enabling observation/machining of large sample |
| 09/26/2002 | WO2002075689A1 Semiconductor wafer imaging system |
| 09/26/2002 | WO2002075611A2 Block based design methodology with programmable components |
| 09/26/2002 | WO2002075456A1 Enchanced bright peak clear phase shifting mask and method of use |
| 09/26/2002 | WO2002075455A1 Negative photosensitive resin composition and display device using the same |
| 09/26/2002 | WO2002075344A2 Semiconductor element comprising a semimagnetic contact |
| 09/26/2002 | WO2002075341A1 Semiconductor device and its test method |
| 09/26/2002 | WO2002075329A2 Support member assembly for electroconductive contact members |
| 09/26/2002 | WO2002075297A1 Method and device for measuring thermoelectric characteristics of combinatorial specimen |
| 09/26/2002 | WO2002075291A1 Method and instrument for optically measuring constant of optical property of dielectric substance, and manufacturing system incorporating the device |
| 09/26/2002 | WO2002075264A1 Temperature measuring method and apparatus and semiconductor heat treatment apparatus |
| 09/26/2002 | WO2002075020A1 Plating method of metal film on the surface of polymer |
| 09/26/2002 | WO2002075019A1 Processing system for semiconductor |
| 09/26/2002 | WO2002075011A2 Thin film forming method and apparatus |
| 09/26/2002 | WO2002074686A2 A method and device for protecting micro electromechanical systems structures during dicing of a wafer |
| 09/26/2002 | WO2002074669A1 Air track conveyor system for disk production |
| 09/26/2002 | WO2002074668A1 Sputter pallet loader |
| 09/26/2002 | WO2002074490A1 Fixed abrasive article for use in modifying a semiconductor wafer |
| 09/26/2002 | WO2002074473A2 Method of producing tantalum and niobium alkoxides |
| 09/26/2002 | WO2002074445A2 Atomizer |
| 09/26/2002 | WO2002059905A3 Narrow-band spectral filter and the use thereof |
| 09/26/2002 | WO2002059898A3 Mram arrangement |
| 09/26/2002 | WO2002059231A3 Azeotrope-like composition of 1,2-dichloro-3,3,3-trifluoropropene and hydrogen fluoride |
| 09/26/2002 | WO2002058105A3 Direct detection of low-energy charged particles using metal oxide semiconductor circuitry |
| 09/26/2002 | WO2002056669A3 Thin film dielectric composite materials |
| 09/26/2002 | WO2002056349A3 Chamber for uniform substrate heating |
| 09/26/2002 | WO2002049109B1 Stacked die package |
| 09/26/2002 | WO2002046507A3 Onium salts and the use therof as latent acids |
| 09/26/2002 | WO2002039796A8 Definable integrated passives for circuitry |
| 09/26/2002 | WO2002003431A3 Apparatus and methods for semiconductor wafer processing equipment |
| 09/26/2002 | WO2001089091A3 Method and apparatus for incorporating a multiplier into an fpga |
| 09/26/2002 | WO2001027980A9 Single step pendeo- and lateral epitaxial overgrowth of group iii-nitride layers |
| 09/26/2002 | WO2001025562A9 Backerboard sheet including aerated concrete core |
| 09/26/2002 | WO2001025561A9 Wallboard sheet including aerated concrete core |
| 09/26/2002 | WO2001024255A9 Interferometric method for endpointing plasma etch processes |
| 09/26/2002 | WO2001024216A3 Pretreated gas distribution plate |
| 09/26/2002 | WO2001020656A9 Dmos transistor having a trench gate electrode and method of making the same |
| 09/26/2002 | WO2001020252A9 Method and apparatus for performing optical measurements of layers and surface properties |
| 09/26/2002 | WO2000072372A8 Trench semiconductor device having gate oxide layer with multiple thicknesses and processes of fabricating the same |
| 09/26/2002 | WO2000041224A3 Lithographic method for creating damascene metallization layers |
| 09/26/2002 | WO2000041218A3 Hand tool for the assembly of small, notably electronic, components |
| 09/26/2002 | WO1999066337A3 Device for measuring and analyzing electrical signals of an integrated circuit component |
| 09/26/2002 | WO1999036931A3 Low ceiling temperature process for a plasma reactor with heated source of a polymer-hardening precursor material |
| 09/26/2002 | US20020138814 Virtual component having a detachable verification-supporting circuit, a method of verifying the same, and a method of manufacturing an integrated circuit |
| 09/26/2002 | US20020138752 Semiconductor integrated circuit and business method therewith |
| 09/26/2002 | US20020138172 Traffic management system and method for materials handling using traffic balancing and traffic density |
| 09/26/2002 | US20020137826 Organic anti-reflective polymer and method for manufacturing thereof |
| 09/26/2002 | US20020137645 Azeotrope-like composition of 1,2-dichloro-3,3,3-trifluoropropene and hydrogen fluoride |
| 09/26/2002 | US20020137450 Polishing pad having a grooved pattern for use in chemical mechanical polishing apparatus |
| 09/26/2002 | US20020137448 Apparatus and method for chemical mechanical polishing of substrates |
| 09/26/2002 | US20020137441 Calibration device for pad conditioner head of a CMP machine |
| 09/26/2002 | US20020137440 Polishing apparatus |
| 09/26/2002 | US20020137439 Apparatus of and method for polishing the outer circumferential portions of a circular plate-shaped work |
| 09/26/2002 | US20020137436 System and method for controlled polishing and planarization of semiconductor wafers |
| 09/26/2002 | US20020137434 Method and apparatus for measuring properties of a polishing pad |
| 09/26/2002 | US20020137364 Apparatus having a static eliminator for manufacturing semiconductor devices and a method for eliminating a static electricity on a semiconductor wafer |
| 09/26/2002 | US20020137363 Methods to form electronic devices |
| 09/26/2002 | US20020137362 Method for forming crystalline silicon nitride |