Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2002
10/01/2002US6458662 Method of fabricating a semiconductor device having an asymmetrical dual-gate silicon-germanium (SiGe) channel MOSFET and a device thereby formed
10/01/2002US6458661 Method of forming NROM
10/01/2002US6458660 Method of flash cell formation
10/01/2002US6458659 Method of fabricating non-volatile memory devices integrated in a semiconductor substrate and organized into memory matrices
10/01/2002US6458658 Control of floating gate oxide growth by use of an oxygen barrier
10/01/2002US6458657 Method of fabricating gate
10/01/2002US6458656 Process for creating a flash memory cell using a photoresist flow operation
10/01/2002US6458655 Method of manufacturing semiconductor device and flash memory
10/01/2002US6458654 Large surface area capacitor and methods for fabricating same
10/01/2002US6458653 Method for forming lower electrode of cylinder-shaped capacitor preventing twin bit failure
10/01/2002US6458652 Methods of forming capacitor electrodes
10/01/2002US6458651 Method of forming a capacitor and an electrical connection thereto
10/01/2002US6458650 CU second electrode process with in situ ashing and oxidation process
10/01/2002US6458649 Methods of forming capacitor-over-bit line memory cells
10/01/2002US6458648 Method for in-situ removal of side walls in MOM capacitor formation
10/01/2002US6458647 Process flow for sacrificial collar with poly mask
10/01/2002US6458646 Asymmetric gates for high density DRAM
10/01/2002US6458645 Capacitor having tantalum oxynitride film and method for making same
10/01/2002US6458644 Data bus architecture for integrated circuit devices having embedded dynamic random access memory (DRAM) with a large aspect ratio providing reduced capacitance and power requirements
10/01/2002US6458643 Method of fabricating a MOS device with an ultra-shallow junction
10/01/2002US6458642 Method of fabricating a sonos device
10/01/2002US6458641 Method for fabricating MOS transistors
10/01/2002US6458640 GaAs MESFET having LDD and non-uniform P-well doping profiles
10/01/2002US6458639 MOS transistor with stepped gate insulator
10/01/2002US6458638 Method for fabricating a semiconductor memory device having silicon-on-insulator (SOI) structure
10/01/2002US6458637 Thin film semiconductor and method for manufacturing the same, semiconductor device and method for manufacturing the same
10/01/2002US6458636 Method for forming polycrystalline silicon layer and method for fabricating thin film transistor
10/01/2002US6458635 Method of manufacturing a thin film semiconductor device
10/01/2002US6458634 Reduction of induced charge in SOI devices during focused ion beam processing
10/01/2002US6458633 Thin film transistor and method for fabricating the same
10/01/2002US6458632 UMOS-like gate-controlled thyristor structure for ESD protection
10/01/2002US6458629 High-frequency module, method of manufacturing thereof and method of molding resin
10/01/2002US6458628 Methods of encapsulating a semiconductor chip using a settable encapsulant
10/01/2002US6458627 Semiconductor chip package and method of fabricating same
10/01/2002US6458625 Multi chip semiconductor package and method of construction
10/01/2002US6458624 Resistance-reducing conductive adhesives for attachment of electronic components
10/01/2002US6458623 Conductive adhesive interconnection with insulating polymer carrier
10/01/2002US6458622 Stress compensation composition and semiconductor component formed using the stress compensation composition
10/01/2002US6458615 Method of fabricating micromachined structures and devices formed therefrom
10/01/2002US6458614 Opto-electronic integrated circuit
10/01/2002US6458613 Method for manufacturing a liquid crystal display using a selective etching method
10/01/2002US6458610 Method and apparatus for optical film stack fault detection
10/01/2002US6458609 Semiconductor device and method for manufacturing thereof
10/01/2002US6458607 Using UV/VIS spectrophotometry to regulate developer solution during a development process
10/01/2002US6458604 Method for fabricating capacitor
10/01/2002US6458602 Method for fabricating semiconductor integrated circuit device
10/01/2002US6458518 Photoresist stripper composition and method for stripping photoresist using the same
10/01/2002US6458517 Mixture of organonitrogen compound, alkylene glycol, monoalkyl ether, sugar(or sugar alcohol) and phosphorous compound
10/01/2002US6458516 Method of etching dielectric layers using a removable hardmask
10/01/2002US6458515 Solution includes a photosensitive material and a plurality of masking particles within the photosenstive material; screen printing the solution over a substrate
10/01/2002US6458508 Method of protecting acid-catalyzed photoresist from chip-generated basic contaminants
10/01/2002US6458497 Mask for manufacturing semiconductor device and method of manufacture thereof
10/01/2002US6458496 Blank for halftone phase shift photomask and halftone phase shift photomask
10/01/2002US6458494 For semiconductors
10/01/2002US6458472 Fluxing underfill compositions
10/01/2002US6458445 Quartz glass jig having large irregularities on the surface and method for producing the same
10/01/2002US6458431 Embedding particles; photochemistry
10/01/2002US6458430 Ionizing gas; reacting electrically active ions with photoresist; continuous evacuation of outgas; curing before doping
10/01/2002US6458411 Method of making a mechanically compliant bump
10/01/2002US6458291 Light sensitive chemical-mechanical polishing aggregate
10/01/2002US6458290 Isolation and/or removal of ionic contaminants from planarization fluid compositions using macrocyclic polyethers
10/01/2002US6458289 CMP slurry for polishing semiconductor wafers and related methods
10/01/2002US6458284 Method of etching and etch mask
10/01/2002US6458263 Cantilevered multilevel LIGA devices and methods
10/01/2002US6458255 Ultra-low resistivity tantalum films and methods for their deposition
10/01/2002US6458254 Making a low-resistance contact by placing a cadmium sulfide/cadmium telleride layer into chamber, evacuating, filling with argon, generating plasma ignition by energizing a cathode
10/01/2002US6458252 High target utilization magnetic arrangement for a truncated conical sputtering target
10/01/2002US6458251 Pressure modulation method to obtain improved step coverage of seed layer
10/01/2002US6458239 Plasma processing apparatus
10/01/2002US6458237 Mounting method of semiconductor device
10/01/2002US6458208 Film forming apparatus
10/01/2002US6458205 Silicon epitaxial wafer and its manufacturing method
10/01/2002US6458204 Method of producing high-quality silicon single crystals
10/01/2002US6458203 System for manufacturing a single-crystal ingot employing czochralski technique, and method of controlling the system
10/01/2002US6458200 Method for fabricating thin-film transistor
10/01/2002US6458023 Multi characterized chemical mechanical polishing pad and method for fabricating the same
10/01/2002US6458013 Method of chemical mechanical polishing
10/01/2002US6458012 Polishing apparatus
10/01/2002US6457963 Resin-sealing apparatus
10/01/2002US6457929 Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment
10/01/2002US6457882 Substrate processing method and substrate processing apparatus
10/01/2002US6457864 Omni-directional high precision friction drive positioning stage
10/01/2002US6457852 Apparatus and method for supplying chemicals
10/01/2002US6457759 Adsorption pen improved in operability
10/01/2002US6457633 Method of forming a BGA-type semiconductor device having reliable electrical connection for solder balls
10/01/2002US6457631 Rework and underfill nozzle for electronic components
10/01/2002US6457627 Bonding capillary and semiconductor device
10/01/2002US6457598 Module cover assembly with door latch transmission mechanism for wafer transport module
10/01/2002US6457587 Integrated reticle sorter and stocker
10/01/2002US6457506 Decapsulating method and apparatus for integrated circuit packages
10/01/2002US6457479 Method of metal oxide thin film cleaning
10/01/2002US6457478 Method for treating an object using ultra-violet light
10/01/2002US6457477 Method of cleaning a copper/porous low-k dual damascene etch
10/01/2002US6457253 Vacuum processing apparatus
10/01/2002US6457235 Method of wire-bonding circuit chip to bonding pad
10/01/2002US6457234 Process for manufacturing self-aligned corrosion stop for copper C4 and wirebond
10/01/2002US6457233 Solder bonding method, and process of making electronic device
10/01/2002US6457228 Method for sealing liquid coolant into module
10/01/2002US6457224 Dambar punch setup jig
10/01/2002US6457199 Substrate processing in an immersion, scrub and dry system
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