Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2002
10/03/2002US20020139235 Singulation apparatus and method for manufacturing semiconductors
10/03/2002US20020139125 Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices
10/03/2002US20020139055 Polishing composition and polishing method employing it
10/03/2002US20020139005 Ozone conversion in semiconductor manufacturing
10/03/2002US20020139001 Method for aligning a cassette pod to an overhead hoist transport system
10/03/2002EP1145298A3 Method for producing schottky diodes
10/03/2002EP1144158A3 Stiffly bonded thin abrasive wheel
10/03/2002CA2442394A1 Compliant pre-form interconnect
10/03/2002CA2440366A1 A device for epitaxially growing objects by cvd
10/02/2002EP1246367A2 Semiconductor integrated circuit and manufacturing method thereof
10/02/2002EP1246266A2 Light emission apparatus and method of fabricating the same
10/02/2002EP1246258A1 Semiconductor device, method of manufacture thereof, and information processing device
10/02/2002EP1246256A2 Nitride field effect transistor
10/02/2002EP1246255A2 Insulated gate bipolar transistor and method of making the same
10/02/2002EP1246254A2 MFOS memory transistor and method of fabricating same
10/02/2002EP1246253A2 MFMOS transistor memory structures with high dielectric constant materials and a method of making the same
10/02/2002EP1246252A2 Electrode for silicon carbide semiconductor, silicon carbide semiconductor element comprising the electrode, and production method therefor
10/02/2002EP1246251A2 Infrared sensor device and manufacturing method thereof
10/02/2002EP1246248A2 SOI semiconductor wafer and semiconductor device formed therein
10/02/2002EP1246247A2 A semiconductor memory and its production process
10/02/2002EP1246241A2 Semiconductor package
10/02/2002EP1246240A2 Method and apparatus for forming improved metal interconnects
10/02/2002EP1246239A1 Method of forming dual damascene structure
10/02/2002EP1246238A2 Method of fabricating a bonded substrate
10/02/2002EP1246237A2 A method of forming isolation trenches between active regions for an E2PROM cell
10/02/2002EP1246236A1 Semiconductor chip carrying adhesive tape/sheet, semiconductor chip carrier, semiconductor chip mounting method and semiconductor chip packaging body
10/02/2002EP1246235A1 Method for encapsulating a chip having a sensitive surface
10/02/2002EP1246234A2 Method of manufacturing thin film transistor
10/02/2002EP1246233A2 Semiconductor substrate made of group III nitride, and process for manufacture thereof
10/02/2002EP1246232A2 Method for manufacturing thin film capacitor for performing temperature compensation of junction capacitance of semiconductor device
10/02/2002EP1246231A2 Electrode materials with improved hydrogen degradation resistance and fabrication method
10/02/2002EP1246230A2 Sealing apparatus for semiconductor wafer, mold of sealing apparatus, semiconductor wafer and method for manufacturing semiconductor device by use of sealing apparatus
10/02/2002EP1246229A2 Semiconductor production system
10/02/2002EP1246228A1 Method and apparatus for detaching a semiconductor wafer from a support member
10/02/2002EP1246224A2 Plasma processing methods and apparatus
10/02/2002EP1246196A2 Twin MONOS memory cell usage for wide program bandwidth
10/02/2002EP1246195A2 Non-volatile semiconductor memory and its driving method
10/02/2002EP1246014A1 Lithographic apparatus
10/02/2002EP1246010A2 Photomask manufacturing method, photomask manufactured by said manufacturing method, and semiconductor device method using said photomask
10/02/2002EP1245984A2 A projection optical system, a projection exposure apparatus, and a projection exposure method
10/02/2002EP1245983A2 Device for adjusting objects and travel ranges
10/02/2002EP1245982A2 Apparatus for holding an optical element in an optical device
10/02/2002EP1245922A1 System for measuring a phase difference between light signals reflected from both sides of an object
10/02/2002EP1245896A1 Method and device for forming required gas atmosphere
10/02/2002EP1245702A2 Process for producing a gallium nitride crystal substrate
10/02/2002EP1245701A2 A method of fabricating a Group III nitride film
10/02/2002EP1245697A2 Process for electroles silver plating
10/02/2002EP1245696A2 Plasma resistant member
10/02/2002EP1245695A2 Method for depositing a copper film
10/02/2002EP1245642A1 Siloxane-based resin and method for forming an insulating film between interconnecting layers in wafers
10/02/2002EP1245638A1 Composition for insulating film formation
10/02/2002EP1245628A1 Composition for preparing substances having nano-pores
10/02/2002EP1245051A1 Dmos transistor protected against polarity reversal
10/02/2002EP1245050A1 Controllable semiconductor switching element that blocks in both directions
10/02/2002EP1245049A2 Field effect transistor structure with partially isolated source/drain junctions and methods of making same
10/02/2002EP1245048A1 Apparatus for current ballasting esd sensitive devices
10/02/2002EP1245047A2 Integrated circuit die having bond pads near adjacent sides to allow stacking of dice without regard to dice size
10/02/2002EP1245045A1 A semiconductor device having a reduced signal processing time and a method of fabricating the same
10/02/2002EP1245044A1 Method for determining optimal process targets in microelectronic fabrication
10/02/2002EP1245043A1 Process control system
10/02/2002EP1245042A2 A method for requesting trace data reports from fault detection controlled semiconductor fabrication processes
10/02/2002EP1245041A1 Method and apparatus for determining measurement frequency based on hardware age and usage
10/02/2002EP1245040A1 In-situ control of a dry etcher
10/02/2002EP1245039A2 Three dimensional device integration method and integrated device
10/02/2002EP1245038A2 A microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
10/02/2002EP1245037A1 Automated high-density plasma (hdp) workpiece temperature control
10/02/2002EP1245036A1 Ion implantation ion source, system and method
10/02/2002EP1244939A1 Device and method in connection with the production of structures
10/02/2002EP1244937A2 Alternating phase mask
10/02/2002EP1244821A1 Articles coated with aluminum nitride by chemical vapor deposition
10/02/2002EP1244534A1 Energy-efficient, laser-based method and system for processing target material
10/02/2002EP1244495A1 Method of forming vertical, hollow needles within a semiconductor substrate
10/02/2002EP1116180B1 Method for contacting a circuit chip
10/02/2002EP1105780A4 Reaction force isolation system for a planar motor
10/02/2002EP1092145A4 A system and method for analyzing topological features on a surface
10/02/2002EP1090409B1 High sputter and etch resistant window for plasma processing chambers
10/02/2002EP1082725B1 Magnetoresistive random access memory and method for reading/writing digital information to such a memory
10/02/2002EP1047744B1 Curable epoxy-based compositions
10/02/2002EP1018291B1 Flexible circuits and carriers and process for manufacture
10/02/2002EP0866735B1 Process for the fabrication of a silicon/integrated circuit wafer
10/02/2002EP0842532B1 Process for generating a spacer in a structure
10/02/2002EP0699345B1 A fast access amg eprom with segment select transistors which have an increased width and method of manufacture
10/02/2002DE10213287A1 Verfahren zur Ausbildung einer Wolframsilizidschicht A method of forming a tungsten silicide
10/02/2002DE10212629A1 Verfahren zum Herstellen eines Mehrlagen-Keramiksubstrats A method for manufacturing a ceramic multi-layer substrate
10/02/2002DE10205330A1 Verfahren zur Korrektur optischer Nachbarschaftseffekte A method for correcting optical proximity effects
10/02/2002DE10205122A1 Halbleitervorrichtung und Verfahren zur Herstellung derselben A semiconductor device and method of manufacturing the same
10/02/2002DE10204847A1 Halbleitervorrichtung Semiconductor device
10/02/2002DE10201992A1 Device for plasma-mediated working of surfaces of planar substrates using HF/VHF low pressure discharge lamps comprises a flat electrode connected to a frequency generator in a chamber containing an electrically insulated tunnel
10/02/2002DE10201314A1 Feldeffekttransitor und Verfahren zum Herstellen eines Halbleiterbauteils mit einem solchen Field effect transistor and method of manufacturing a semiconductor device with such a
10/02/2002DE10164666A1 Semiconductor device for electrostatic discharge protection comprises transistors having multi-fingered structure, multilayer interconnections separated from one another, pad conductive layer, and contact plugs
10/02/2002DE10154835A1 Verfahren zur Herstellung einer Halbleitervorrichtung A process for producing a semiconductor device
10/02/2002DE10152536A1 Verfahren und Vorrichtung zum Reduzieren einer Emission von Perfluorverbindungen (PFC-Emission) während der Halbleiterherstellung Method and apparatus for reducing the emission of perfluorocompounds (PFC emissions) during semiconductor manufacture
10/02/2002DE10146013A1 Halbleitervorrichtung und Verfahren zu ihrer Herstellung Semiconductor device and process for their preparation
10/02/2002DE10136152A1 Semiconductor component with numerous discrete raised points on component main side
10/02/2002DE10134100A1 Production of integrated semiconductor circuit comprises forming first electrically insulating layer on semiconductor substrate, applying and structuring mask layer, etching trenches in insulating layer, and further processing
10/02/2002DE10120766C1 Depositing a layer in a reactor comprises feeding a sputtering gas into the reactor, igniting a plasma, growing a layer on a deposition surface
10/02/2002DE10115915A1 Vorrichtung zur Justierung von Einrichtungen und zum Einstellen von Verstellwegen Device for adjusting devices and setting adjustment paths
10/02/2002DE10115914A1 Vorrichtung zur Lagerung eines optischen Elementes in einer Optik Device for storing an optical element in an optical system
10/02/2002DE10114963A1 Halbleiterelement mit einem semimagnetischen Kontakt Semiconductor element with a semi-magnetic contact
10/02/2002DE10114717A1 Vorrichtung zum Einbringen von elektrischen Bauelementen in einen Gurt Device for inserting of electrical components in a belt
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