H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2002
10/24/2002	US20020155263 Method for forming interconnect structure with low dielectric constant
10/24/2002	US20020155262 Ceramic heater
10/24/2002	US20020155261 Method for forming interconnect structure with low dielectric constant
10/24/2002	US20020155219 From titanium chloride and ammonia; aftertreatment with hydrogen gas
10/24/2002	US20020154988 Microelectronic fabrication tool loading method providing enhanced microelectronic fabrication tool operating efficiency
10/24/2002	US20020154977 Wafer transport system and method
10/24/2002	US20020154976 Automated semiconductor immersion processing system
10/24/2002	US20020154975 Method and apparatus for wafer exchange employing stacked robot blades
10/24/2002	US20020154974 Automatic guided vehicle, automatic guided vehicle system and wafer carrying method
10/24/2002	US20020154971 Wafer transport mechanism
10/24/2002	US20020154970 Wafer boat elevator system and method
10/24/2002	US20020154839 Kinematic stage assembly
10/24/2002	US20020154730 Methods and devices for holding a mirror for use in X-ray optical systems
10/24/2002	US20020154671 Line selected F2 two chamber laser system
10/24/2002	US20020154669 Laser wavelength control unit with piezoelectric driver
10/24/2002	US20020154556 Semiconductor memory and its production process
10/24/2002	US20020154554 Ferroelectric memory and electronic apparatus
10/24/2002	US20020154549 Bus driving circuit and memory device having same
10/24/2002	US20020154541 Non-volatile memory embedded in a conventional logic process
10/24/2002	US20020154537 Memory cell configuration and method for operating the configuration
10/24/2002	US20020154536 Multi-function serial I/O circuit
10/24/2002	US20020154533 Ferroelectric memory and operating method therefor
10/24/2002	US20020154532 Ferroelectric memory element and electronic apparatus
10/24/2002	US20020154529 Semiconductor memory device capable of realizing a chip with high operation reliability and high yield
10/24/2002	US20020154482 Press - contact type semiconductor device
10/24/2002	US20020154468 Method of forming a capacitor
10/24/2002	US20020154463 Electrostatic discharge protection structures for high speed technologies with mixed and ultra-low voltage supplies
10/24/2002	US20020154455 Magnetic device with a coupling layer and method of manufacturing and operation of such device
10/24/2002	US20020154395 8-Mirror microlithography projection objective
10/24/2002	US20020154297 Apparatus and method for inspecting defects
10/24/2002	US20020154296 Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool
10/24/2002	US20020154295 Method and apparatus for classifying defects occurring at or near a surface of a smooth substrate
10/24/2002	US20020154284 Illumination optical system and projection exposure apparatus
10/24/2002	US20020154283 Position measuring method and apparatus
10/24/2002	US20020154282 Correction apparatus that corrects optical shift in two optical units, and exposure apparatus having the same
10/24/2002	US20020154281 Lithographic manufacturing process, lithographic projection apparatus, and device manufactured thereby
10/24/2002	US20020154279 Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
10/24/2002	US20020154267 Liquid crystal display (LCD) cell transport apparatus
10/24/2002	US20020154253 Active matrix device and display
10/24/2002	US20020154252 Image display and manufacturing method of the same
10/24/2002	US20020154234 X-ray detecting device and fabricating method thereof
10/24/2002	US20020154187 Apparatus for printing etch masks using phase-change materials
10/24/2002	US20020153917 Semiconductor integrated circuit and a method of testing the same
10/24/2002	US20020153916 Method of identifying and analyzing semiconductor chip defects
10/24/2002	US20020153913 Probe for the probe card
10/24/2002	US20020153911 Probe structure for testing semiconductor devices and method for fabricating the same
10/24/2002	US20020153877 Indexing rotatable chuck for a probe station
10/24/2002	US20020153832 Device transfer method and panel
10/24/2002	US20020153676 Wafer holding device
10/24/2002	US20020153637 Liquid transfer molding system for encapsulating semiconductor integrated circuits
10/24/2002	US20020153620 Semiconductor wafer edge marking
10/24/2002	US20020153619 Semiconductor chip having pads with plural junctions for different assembly methods
10/24/2002	US20020153618 Semiconductor device
10/24/2002	US20020153617 Flip chip interconnected structure and a fabrication method thereof
10/24/2002	US20020153616 High-frequency semiconductor device
10/24/2002	US20020153615 Multi-chip package type semiconductor device
10/24/2002	US20020153614 Semiconductor storage device and method for fabricating the same
10/24/2002	US20020153612 Silicide pattern structures and methods of fabricating the same
10/24/2002	US20020153610 Electronic devices with cesium barrier film and process for making same
10/24/2002	US20020153609 Semiconductor circuit device having gate array area and method of making thereof
10/24/2002	US20020153608 Land grid array semiconductor device and method of mounting land grid array semiconductor devices
10/24/2002	US20020153607 Ceramic substrate
10/24/2002	US20020153598 Device for attaching a semiconductor chip to a chip carrier
10/24/2002	US20020153597 Fine pitch lead frame lead and method
10/24/2002	US20020153596 Lead frame and semiconductor package formed using it
10/24/2002	US20020153595 Semiconductor substrate and thin-film semiconductive member, and method for making thereof
10/24/2002	US20020153594 Layered dielectric on silicon carbide semiconductor structures
10/24/2002	US20020153593 Bypass circuits for reducing plasma damage
10/24/2002	US20020153590 High-speed stacked capacitor in SOI structure
10/24/2002	US20020153589 Contact structure with a lower interconnection having t-shaped portion in cross section and method for forming the same
10/24/2002	US20020153588 Semiconductor device provided with fuse and method of disconnecting fuse
10/24/2002	US20020153587 Double planar gated SOI MOSFET structure
10/24/2002	US20020153586 Semiconductor device
10/24/2002	US20020153585 Semiconductor switching device
10/24/2002	US20020153580 Semiconductor memory device using megneto resistive element and method of manufacturing the same
10/24/2002	US20020153579 Semiconductor device with thin film having high permittivity and uniform thickness
10/24/2002	US20020153578 Wafer buffering system
10/24/2002	US20020153577 Non-volatile semiconductor memory device and its manufacturing method
10/24/2002	US20020153576 Semiconductor device
10/24/2002	US20020153575 Semiconductor devices and methods for manufacturing the same
10/24/2002	US20020153573 MIS field effect transistor and manufacturing method thereof
10/24/2002	US20020153572 Semiconductor device
10/24/2002	US20020153571 Electrostatic discharge protection structures having high holding current for latch-up immunity
10/24/2002	US20020153569 Electrooptical substrate device and manufacturing method for same, electrooptical apparatus, electronic apparatus and manufacturing method for a substrate device
10/24/2002	US20020153568 Semiconductor device
10/24/2002	US20020153567 Thin-film transistor and method of manufacturing the same
10/24/2002	US20020153566 Thin film transistor having a short channel formed by using an exposure mask with slits
10/24/2002	US20020153565 Insulating film and method of producing semiconductor device
10/24/2002	US20020153564 Semiconductor device
10/24/2002	US20020153563 Silicon-on-insulator(soi)substrate
10/24/2002	US20020153562 Method for fabricating semiconductor device
10/24/2002	US20020153561 High-voltage transistor with buried conduction layer
10/24/2002	US20020153560 High-voltage transistor with buried conduction layer
10/24/2002	US20020153559 Integrated circuit structure and method therefore
10/24/2002	US20020153558 Semiconductor device and method for manufacturing the same
10/24/2002	US20020153557 Method for creating thick oxide on the bottom surface of a trench structure in silicon
10/24/2002	US20020153556 Method of making a high-voltage transistor with buried conduction regions
10/24/2002	US20020153555 Nonvolatile semiconductor memory
10/24/2002	US20020153554 Semiconductor device having a capacitor and manufacturing method thereof
10/24/2002	US20020153553 Integrated semiconductor memory configuration

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