H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2002
10/17/2002	US20020150844 Method for formation of semiconductor device pattern, method for designing photo mask pattern, photo mask and process for photo mask
10/17/2002	US20020150838 Conductive posts are disposed in the dielectric layers and can be stacked to form a generally vertical conduction pathway which passes atleast partially through multilayer circuit structure, thus occupy less space
10/17/2002	US20020150834 An acrylate or methacrylate resin reacting in the presence of an acid, a photo acid generator which generates acid upon exposure, and a compound having the combination of an acetal group and a site which is eliminated by acid in its molecule
10/17/2002	US20020150824 Mask for adjusting transmittance of a light and method for manufacturing the same
10/17/2002	US20020150789 Ceramic sunstrate
10/17/2002	US20020150743 Method for manufacturing ceramic substrate and non-fired ceramic substrate
10/17/2002	US20020150740 Cover with gapped adhesive preform
10/17/2002	US20020150697 Polymers with high internal free volume
10/17/2002	US20020150695 Method of forming a thin film
10/17/2002	US20020150691 Substrate processing method and substrate processing system
10/17/2002	US20020150682 High pressure plasma vapor deposition
10/17/2002	US20020150679 Coating film forming method and apparatus
10/17/2002	US20020150592 Mycobacterium vaccine
10/17/2002	US20020150459 Substrate transfer apparatus and substrate transfer method
10/17/2002	US20020150456 Method and apparatus for transferring a wafer
10/17/2002	US20020150449 Automated semiconductor processing system
10/17/2002	US20020150448 Conveyance system
10/17/2002	US20020150447 Conveyance system
10/17/2002	US20020150398 Flexure based macro motion translation stage
10/17/2002	US20020150395 Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer
10/17/2002	US20020150137 Long wavelength laser diodes on metamorphic buffer modified gallium arsenide wafers
10/17/2002	US20020150136 Group III nitride compound semiconductor laser and manufacturing method thereof
10/17/2002	US20020149991 Test circuit for testing semiconductor memory
10/17/2002	US20020149985 Semiconductor memory device having refreshing function
10/17/2002	US20020149984 Semiconductor physical quantity sensing device
10/17/2002	US20020149983 Methods for testing a group of semiconductor devices simultaneously, and devices amenable to such methods of testing
10/17/2002	US20020149977 Semiconductor memory device and method of fabricating the same
10/17/2002	US20020149975 Testing device for testing a memory
10/17/2002	US20020149973 Semiconductor memory device
10/17/2002	US20020149970 Bus driving circuit and memory device having same
10/17/2002	US20020149969 Bus driving circuit and memory device having same
10/17/2002	US20020149962 Magnetic random access memory
10/17/2002	US20020149958 Non-volatile semiconductor memory
10/17/2002	US20020149957 256 meg dynamic random access memeory
10/17/2002	US20020149921 Construction and method for interconnecting flexible printed circuit and wiring board, liquid crystal display device, and method for manufacturing the same
10/17/2002	US20020149855 Projection objection for microlithography
10/17/2002	US20020149782 Line profile asymmetry measurment using scatterometry
10/17/2002	US20020149765 Defect detection system
10/17/2002	US20020149754 Lithographic apparatus, device manufacturing method, and device manufacturing thereby
10/17/2002	US20020149753 Exposure apparatus and device manufacturing method
10/17/2002	US20020149729 Liquid crystal display apparatus
10/17/2002	US20020149724 Liquid crystal display device
10/17/2002	US20020149722 Liquid crystal display device
10/17/2002	US20020149711 Active matrix display device
10/17/2002	US20020149710 Flat panel display device and method of manufacturing the same
10/17/2002	US20020149405 Semiconductor integrated circuit device including a clock synchronous type logical processing circuit
10/17/2002	US20020149391 Antifuse reroute of dies
10/17/2002	US20020149386 Blade-like connecting needle
10/17/2002	US20020149385 Semiconductor element test apparatus, and method of testing semiconductor element using the apparatus
10/17/2002	US20020149383 Apparatus for electrical testing of a substrate having a plurality of terminals
10/17/2002	US20020149382 Distance change output device and method
10/17/2002	US20020149381 Voltage contrast method and apparatus for semiconductor inspection using low voltage particle beam
10/17/2002	US20020149319 Packing apparatus for plasma display panel module
10/17/2002	US20020149298 Electronic component and method of production thereof
10/17/2002	US20020149209 Laterally floating latch hub assembly
10/17/2002	US20020149136 Ultraviolet laser ablative patterning of microstructures in semiconductors
10/17/2002	US20020149122 Alignment mark and aligning method using the same
10/17/2002	US20020149121 Base interconnection substrate, manufacturing method thereof, semiconductor device and manfacturing method thereof
10/17/2002	US20020149120 Semiconductor device having TEG elements
10/17/2002	US20020149119 Semiconductor device
10/17/2002	US20020149118 Semiconductor device and bump formation method
10/17/2002	US20020149117 Semiconductor device and its manufacturing method
10/17/2002	US20020149116 Integrated circuit device and method for forming the same
10/17/2002	US20020149115 Bonding pad and method for manufacturing it
10/17/2002	US20020149114 Product using Zn-Al alloy solder
10/17/2002	US20020149113 Lead-free solder structure and method for high fatigue life
10/17/2002	US20020149110 Multilevel interconnect structure with low-k dielectric and method of fabricating the structure
10/17/2002	US20020149109 A semiconductor device including damascene wiring and a manufacturing method thereof
10/17/2002	US20020149107 Method of making a flexible substrate containing self-assembling microstructures
10/17/2002	US20020149106 Method of eliminating uncontrolled voids in sheet adhesive layer
10/17/2002	US20020149105 Flip chip type semiconductor device and method of fabricating the same
10/17/2002	US20020149104 Integrated circuit package configuration having an encapsulating body with a flanged portion and an encapsulating mold for molding the encapsulating body
10/17/2002	US20020149103 Multi-chip semiconductor package
10/17/2002	US20020149099 Semiconductor device and package, and method of manufacture therefor
10/17/2002	US20020149093 Method for manufacturing a semiconductor device
10/17/2002	US20020149092 Carrier frame and semiconductor package including carrier frame
10/17/2002	US20020149090 Lead frame and semiconductor package
10/17/2002	US20020149088 Inductance device formed on semiconductor substrate
10/17/2002	US20020149086 Semiconductor device
10/17/2002	US20020149085 Method of manufacturing air gap in multilevel interconnection
10/17/2002	US20020149084 Semiconductor device and method for fabricating the same
10/17/2002	US20020149083 Semiconductor device having capacitor which assures sufficient capacity without requiring large space and method of producing the same
10/17/2002	US20020149082 Semiconductor device and method for fabricating the same
10/17/2002	US20020149081 Semiconductor device and method of fabricating the same
10/17/2002	US20020149080 Semiconductor device including a well divided into a plurality of parts by a trench
10/17/2002	US20020149075 Solid-state image pickup apparatus and fabricating method thereof
10/17/2002	US20020149068 Method of manufacturing semiconductor device, and semiconductor device having memory cell
10/17/2002	US20020149067 Isolated high voltage MOS transistor
10/17/2002	US20020149066 Twin bit cell flash memory device
10/17/2002	US20020149065 MIS field effect transistor and method of manufacturing the same
10/17/2002	US20020149064 Method of reducing polysilicon depletion in a polysilicon gate electrode by depositing polysilicon of varying grain size
10/17/2002	US20020149063 N-channel metal oxide semiconductor (NMOS) driver circuit and method of making same
10/17/2002	US20020149062 Semiconductor device
10/17/2002	US20020149061 Nonvolatile memory cell, operating method of the same and nonvolatile memory array
10/17/2002	US20020149060 Nonvolatile memory cell, operating method of the same and nonvolatile memory array
10/17/2002	US20020149058 Halo-free non-rectifying contact on chip with halo source/drain diffusion
10/17/2002	US20020149057 Semiconductor device and the fabricating method therefor
10/17/2002	US20020149056 Electro-optical device and semiconductor device
10/17/2002	US20020149055 Semiconductor device including insulating substrate formed of single-crystal silicon chip
10/17/2002	US20020149054 Flat panel display device and method of manufacturing the same

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