H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2002
12/24/2002	US6497800 Device providing electrical contact to the surface of a semiconductor workpiece during metal plating
12/24/2002	US6497798 Applying a conductive material in a predetermined pattern to surface, polishing, measuring one of resistance and electric current across the conductive material to determine degree of polishing
12/24/2002	US6497785 Wet chemical process tank with improved fluid circulation
12/24/2002	US6497784 Semiconductor wafer edge bead removal method and tool
12/24/2002	US6497768 Process for treating a workpiece with hydrofluoric acid and ozone
12/24/2002	US6497767 Thermal processing unit for single substrate
12/24/2002	US6497763 Electronic device with composite substrate
12/24/2002	US6497761 Apparatus and method of growing single crystal of semiconductor
12/24/2002	US6497734 Utilizing a pass-through configuration that allows for the simultaneous exchange of wafers; uniformly heats wafers vertically aligned in their holders
12/24/2002	US6497613 Methods and apparatus for chemical mechanical planarization using a microreplicated surface
12/24/2002	US6497518 Miniature opto-electronic transceiver
12/24/2002	US6497403 Semiconductor wafer holder
12/24/2002	US6497357 Apparatus and method for removing interconnections
12/24/2002	US6497356 Controlled attenuation capillary with planar surface
12/24/2002	US6497354 Bonding apparatus and bonding tool for component
12/24/2002	US6497241 Hollow core spindle and spin, rinse, and dry module including the same
12/24/2002	US6497240 Ultrasound cleaning device and resist-stripping device
12/24/2002	US6497239 Inverted pressure vessel with shielded closure mechanism
12/24/2002	US6497238 Method of manufacturing electronic devices and apparatus for carrying out such a method
12/24/2002	US6497194 Focused particle beam systems and methods using a tilt column
12/24/2002	US6497055 System and method for controlling a vapor dryer process
12/24/2002	US6497048 Resist-dispenser nozzle calibration tool and method thereof
12/24/2002	US6497026 System and method for the remanufacturing of a sealed module
12/24/2002	CA2061796C High mobility integrated drivers for active matrix displays
12/19/2002	WO2002102127A1 Device for assembling components on a substrate
12/19/2002	WO2002101926A2 Integrated circuit and method for testing the integrated circuit
12/19/2002	WO2002101840A1 Iii group nitride based semiconductor element and method for manufacture thereof
12/19/2002	WO2002101835A1 Method for manufacturing channel gate type field effect transistor
12/19/2002	WO2002101834A2 An intermediate manufacture for a dual gate logic device
12/19/2002	WO2002101831A1 Semiconductor device and its manufacturing method
12/19/2002	WO2002101828A2 Method for melting down solder material that is applied to connection points
12/19/2002	WO2002101826A1 Semiconductor structure with resistive path
12/19/2002	WO2002101825A1 Method and structure for buried circuits and devices
12/19/2002	WO2002101824A2 Dram memory cell with a trench capacitor and method for production thereof
12/19/2002	WO2002101823A1 Method of forming variable oxide thicknesses across semiconductor chips
12/19/2002	WO2002101822A2 Interconnection in semiconductor device and method for manufacturing the same
12/19/2002	WO2002101821A1 Method for manufacture of semiconductor integrated circuit device
12/19/2002	WO2002101820A2 Conductor track arrangement and method for production of an encapsulated conductor coupling
12/19/2002	WO2002101819A2 Leaky, thermally conductive insulator material (ltcim) in a semiconductor-on-insulator (soi) structure
12/19/2002	WO2002101818A2 Method for isolating semiconductor devices
12/19/2002	WO2002101817A2 Method and apparatus for controlling a thickness of a copper film
12/19/2002	WO2002101815A1 Electronic part compression-bonding apparatus and method
12/19/2002	WO2002101814A2 Method for the formation of contact holes for a number of contact regions for components integrated in a substrate
12/19/2002	WO2002101813A1 A substrate for mounting a semiconductor device thereon
12/19/2002	WO2002101812A1 Chip lead frames
12/19/2002	WO2002101811A1 Soi mosfet with hyperabrupt source and drain junctions
12/19/2002	WO2002101810A1 C implants for improved sige bipolar transistors yield
12/19/2002	WO2002101809A1 Method for forming an oxide layer
12/19/2002	WO2002101808A1 Cleaning/processing device for unprocessed element and cleaning/processing method
12/19/2002	WO2002101806A1 Method and device for short-term thermal treatment of flat objects
12/19/2002	WO2002101805A1 Thin film forming apparatus cleaning method
12/19/2002	WO2002101804A1 Exposure device, device manufacturing method, and temperature stabilization flow passage device
12/19/2002	WO2002101803A1 Mask and production method therefor and production method for semiconductor device
12/19/2002	WO2002101802A1 Electron beam exposure system, electron beam exposing method, and method for fabricating semiconductor element
12/19/2002	WO2002101800A1 Semiconductor manufacturing method and apparatus
12/19/2002	WO2002101799A2 Stackable process chambers
12/19/2002	WO2002101798A2 Method of applying liquid to a megasonic apparatus for improved cleaning control
12/19/2002	WO2002101797A2 Megasonic cleaner and dryer system
12/19/2002	WO2002101796A2 Megasonic cleaner and dryer system
12/19/2002	WO2002101795A2 Megasonic cleaner and dryer system
12/19/2002	WO2002101794A2 Variable method and apparatus for alignment of automated workpiece handling systems
12/19/2002	WO2002101793A2 Systems and methods for calibrating integrated inspection tools
12/19/2002	WO2002101792A2 Method and apparatus for alignment of automated workpiece handling systems
12/19/2002	WO2002101791A2 Semiconductor wafer storage kiosk
12/19/2002	WO2002101784A1 Plasma processor
12/19/2002	WO2002101767A2 High voltage, high temperature capacitor structures and methods of fabricating same
12/19/2002	WO2002101750A2 Digital magnetic storage cell device
12/19/2002	WO2002101748A2 Sense amplifier and architecture for open digit arrays
12/19/2002	WO2002101602A1 Apparatus and methods for modeling process effects and imaging effects in scanning electron microscopy
12/19/2002	WO2002101600A2 Method for generating design constraints for modulates in a hierarchical integrated circuit design system
12/19/2002	WO2002101527A1 Low power clock distribution methodology
12/19/2002	WO2002101468A2 Design and layout of phase shifting photolithographic masks
12/19/2002	WO2002101467A1 Method of forming thick resist pattern
12/19/2002	WO2002101466A2 Exposure control for phase shifting photolithographic masks
12/19/2002	WO2002101465A2 Phase conflict resolution for photolithographic masks
12/19/2002	WO2002101464A2 Optical proximity correction for phase shifting photolithographic masks
12/19/2002	WO2002101419A2 Optical element with full complex modulation
12/19/2002	WO2002101377A1 Apparatus and method for determining clamping status of semiconductor wafer
12/19/2002	WO2002101332A2 Method and apparatus for predicting sporting success conditions
12/19/2002	WO2002101326A1 Device and method for substrate displacement detection
12/19/2002	WO2002101122A1 Method for forming thin film crystal and semiconductor element employing that method
12/19/2002	WO2002101121A1 High surface quality gan wafer and method of fabricating same
12/19/2002	WO2002101116A1 Method of and apparatus for tailoring an etch profile
12/19/2002	WO2002101114A1 Mocvd method for tungsten deposition
12/19/2002	WO2002101105A1 Unleaded solder
12/19/2002	WO2002100963A1 Use of a gettering agent in a chemical mechanical polishing and rinsing operation and apparatus therefor
12/19/2002	WO2002100903A1 Oxime ester photoinitiators having a combined structure
12/19/2002	WO2002100771A2 Low-temperature patterned wafer bonding with photosensitive benzocylobutene (bcb) and 3d microelectromechanical systems fabrication
12/19/2002	WO2002100631A1 Thermal interface, method of making and using
12/19/2002	WO2002100619A1 Device and method for determining the orientation of a crystallographic plane in relation to a crystal surface and device for cutting a single crystal in a cutting machine
12/19/2002	WO2002100594A1 Improved method and apparatus for bi-directionally polishing a workpiece
12/19/2002	WO2002100593A2 Polishing pads with polymer filled fibrous web, and methods for fabricating and using same
12/19/2002	WO2002100589A1 Integrated solder bump deposition apparatus and method
12/19/2002	WO2002100587A1 Laser segmented cutting
12/19/2002	WO2002086932B1 Magnetic mirror plasma source
12/19/2002	WO2002080227A3 Memory address and decode circuits with ultra thin body transistors
12/19/2002	WO2002079537A3 W-cvd with fluorine-free tungsten nucleation
12/19/2002	WO2002078407A3 Neutral particle beam processing apparatus
12/19/2002	WO2002078061A3 RECESSED SILICON OXIDATION FOR DEVICES SUCH AS A CMOS SOI ICs
12/19/2002	WO2002078040A3 Neutral particle beam processing apparatus

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