| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 12/24/2002 | US6498384 Structure and method of semiconductor via testing |
| 12/24/2002 | US6498383 Semiconductors, integrated circuits; resistant to erosion by wet etching |
| 12/24/2002 | US6498382 Semiconductor configuration |
| 12/24/2002 | US6498381 Semiconductor structures having multiple conductive layers in an opening, and methods for fabricating same |
| 12/24/2002 | US6498378 Methods of forming field effect transistors and integrated circuitry |
| 12/24/2002 | US6498376 Semiconductor device and manufacturing method thereof |
| 12/24/2002 | US6498375 Integrated circuitry |
| 12/24/2002 | US6498374 MOS semiconductor device having gate insulating film containing nitrogen |
| 12/24/2002 | US6498372 Conductive coupling of electrical structures to a semiconductor device located under a buried oxide layer |
| 12/24/2002 | US6498371 Body-tied-to-body SOI CMOS inverter circuit |
| 12/24/2002 | US6498369 Electro-optical device and electronic equipment |
| 12/24/2002 | US6498368 Power semiconductor device |
| 12/24/2002 | US6498367 Discrete integrated circuit rectifier device |
| 12/24/2002 | US6498366 Semiconductor device that exhibits decreased contact resistance between substrate and drain electrode |
| 12/24/2002 | US6498365 FET gate oxide layer with graded nitrogen concentration |
| 12/24/2002 | US6498364 Capacitor for integration with copper damascene processes |
| 12/24/2002 | US6498363 Gapped-plate capacitor |
| 12/24/2002 | US6498362 Weak ferroelectric transistor |
| 12/24/2002 | US6498358 Structure and method for fabricating an electro-optic system having an electrochromic diffraction grating |
| 12/24/2002 | US6498352 Method of exposing and apparatus therefor |
| 12/24/2002 | US6498351 Illumination system for shaping extreme ultraviolet radiation used in a lithographic projection apparatus |
| 12/24/2002 | US6498350 Crash prevention in positioning apparatus for use in lithographic projection apparatus |
| 12/24/2002 | US6498349 Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy |
| 12/24/2002 | US6498319 Method and an apparatus for manufacturing multi-layer boards using laser light |
| 12/24/2002 | US6498260 Polyepoxides; electronic packages |
| 12/24/2002 | US6498132 Surface treatment composition comprises a complexing agent as a metal deposition preventive comprising atleast one aromatic hydrocarbon ring containing hydroxy or o-group directly attached with ring carbon and a second complexing agent |
| 12/24/2002 | US6498131 Aqueous solution of nonionic surfactants, simple amines, quaternary amine, sticking agent selected from ethylene glycol, propylene glycol, polyethylene oxide, polypropylene oxide |
| 12/24/2002 | US6498113 Free standing substrates by laser-induced decoherency and regrowth |
| 12/24/2002 | US6498112 Graded oxide caps on low dielectric constant (low K) chemical vapor deposition (CVD) films |
| 12/24/2002 | US6498111 Fabrication of semiconductor materials and devices with controlled electrical conductivity |
| 12/24/2002 | US6498110 Ruthenium silicide wet etch |
| 12/24/2002 | US6498109 System and method for plasma etching |
| 12/24/2002 | US6498108 Method for removing surface contamination on semiconductor substrates |
| 12/24/2002 | US6498107 Interface control for film deposition by gas-cluster ion-beam processing |
| 12/24/2002 | US6498106 Prevention of defects formed in photoresist during wet etching |
| 12/24/2002 | US6498105 Method of forming fine patterns of a semiconductor device |
| 12/24/2002 | US6498103 Method for manufacturing solid-state imaging device |
| 12/24/2002 | US6498102 Method for planarizing a semiconductor device using ceria-based slurry |
| 12/24/2002 | US6498100 Method of manufacturing semiconductor devices |
| 12/24/2002 | US6498099 Leadless plastic chip carrier with etch back pad singulation |
| 12/24/2002 | US6498098 Method of forming embedded wiring in a groove in an insulating layer |
| 12/24/2002 | US6498097 Apparatus and method of forming preferred orientation-controlled platinum film using oxygen |
| 12/24/2002 | US6498096 Borderless contact to diffusion with respect to gate conductor and methods for fabricating |
| 12/24/2002 | US6498095 Cvd method for producing an interconnection film by depositing a lower layer to fill a recess performing a cleaning step to remove dissociated reactant gas, and consequently depositing an upper layer that has a smaller impurity concentration than the lower layer |
| 12/24/2002 | US6498094 Method for providing a contact hole formed in an insulating film |
| 12/24/2002 | US6498093 Formation without vacuum break of sacrificial layer that dissolves in acidic activation solution within interconnect |
| 12/24/2002 | US6498092 Method of making a semiconductor device having dual damascene line structure using a patterned etching stopper |
| 12/24/2002 | US6498091 Method of using a barrier sputter reactor to remove an underlying barrier layer |
| 12/24/2002 | US6498090 Semiconductor devices and methods for manufacturing the same |
| 12/24/2002 | US6498089 Semiconductor integrated circuit device with moisture-proof ring and its manufacture method |
| 12/24/2002 | US6498088 Stacked local interconnect structure and method of fabricating same |
| 12/24/2002 | US6498087 Method of increasing the conductivity of a transparent conductive layer |
| 12/24/2002 | US6498086 Use of membrane properties to reduce residual stress in an interlayer region |
| 12/24/2002 | US6498085 Semiconductor device and method of fabricating the same |
| 12/24/2002 | US6498084 Method of forming high density EEPROM cell |
| 12/24/2002 | US6498083 Process for manufacturing non-volatile memory cells integrated on a semiconductor substrate |
| 12/24/2002 | US6498082 Method of forming a polysilicon layer |
| 12/24/2002 | US6498081 Method of manufacturing self-aligned contact hole |
| 12/24/2002 | US6498080 Transistor fabrication method |
| 12/24/2002 | US6498079 Method for selective source diffusion |
| 12/24/2002 | US6498077 Semiconductor device and method of manufacturing same |
| 12/24/2002 | US6498076 Method for manufacturing a semiconductor laser |
| 12/24/2002 | US6498075 Dicing method |
| 12/24/2002 | US6498074 Thinning and dicing of semiconductor wafers using dry etch, and obtaining semiconductor chips with rounded bottom edges and corners |
| 12/24/2002 | US6498073 Back illuminated imager with enhanced UV to near IR sensitivity |
| 12/24/2002 | US6498072 Process for producing semiconductor device |
| 12/24/2002 | US6498071 Manufacture of trench-gate semiconductor devices |
| 12/24/2002 | US6498070 Air gap semiconductor structure and method of manufacture |
| 12/24/2002 | US6498069 Semiconductor device and method of integrating trench structures |
| 12/24/2002 | US6498067 Integrated approach for controlling top dielectric loss during spacer etching |
| 12/24/2002 | US6498066 Ultra-late programming ROM and method of manufacture |
| 12/24/2002 | US6498064 Flash memory with conformal floating gate and the method of making the same |
| 12/24/2002 | US6498063 Even nucleation between silicon and oxide surfaces for thin silicon nitride film growth |
| 12/24/2002 | US6498062 DRAM access transistor |
| 12/24/2002 | US6498061 Negative ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided vertical device formation |
| 12/24/2002 | US6498060 Semiconductor device and method for making same |
| 12/24/2002 | US6498059 Method for fabricating thin film transistor |
| 12/24/2002 | US6498058 SOI pass-gate disturb solution |
| 12/24/2002 | US6498057 Method for implementing SOI transistor source connections using buried dual rail distribution |
| 12/24/2002 | US6498055 Semiconductor device, method of manufacturing semiconductor device, resin molding die, and semiconductor manufacturing system |
| 12/24/2002 | US6498054 Method of underfilling a flip-chip semiconductor device |
| 12/24/2002 | US6498052 Circuit, method of adhering an integrated circuit device to a substrate, and method of forming a circuit |
| 12/24/2002 | US6498051 Method of packaging semiconductor device using anisotropic conductive adhesive |
| 12/24/2002 | US6498050 Bipolar transistor, semiconductor light emitting device and semiconductor device |
| 12/24/2002 | US6498049 Display devices |
| 12/24/2002 | US6498048 Method of manufacturing crystal of iii-v compounds of the nitride system, crystal substrate of iii-v compounds of the nitride system, crystal film of iii-v compounds of the nitride system, and method of manufacturing device |
| 12/24/2002 | US6498047 Apparatus and method for measuring wafer clamping tension |
| 12/24/2002 | US6498044 Capacitor having perovskite series dielectric film containing copper and manufacturing method thereof |
| 12/24/2002 | US6498030 Greater capacitor area between the control gate and the floating gate, and a higher coupling ratio for the control gate at the same integration as a conventional flash memory is provided. |
| 12/24/2002 | US6497993 Forming apertures in dielectric layers on semiconductor substrates by photoresist removal |
| 12/24/2002 | US6497992 Process for manufacturing semiconductor integrated circuit device |
| 12/24/2002 | US6497987 Photosensitive lithocholate derivative and chemically amplified photoresist composition containing the same |
| 12/24/2002 | US6497982 Method for suppressing optical proximity effect bias within a wafer |
| 12/24/2002 | US6497963 Silicon oxycarbides and films having low dielectric constants and heat resistance, used as joints in integrated circuit chips |
| 12/24/2002 | US6497932 Transport device for electronic components with an anticontamination coating |
| 12/24/2002 | US6497837 Method using a saw tooth mold |
| 12/24/2002 | US6497827 Method for etching dielectric films |
| 12/24/2002 | US6497824 One mask solution for the integration of the thin film resistor |
| 12/24/2002 | US6497805 Method for shorting pin grid array pins for plating |
| 12/24/2002 | US6497802 Self ionized plasma sputtering |