H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2002
12/26/2002	US20020195703 Semiconductor electronic parts
12/26/2002	US20020195702 Method and apparatus for conducting heat in a flip-chip assembly
12/26/2002	US20020195701 Electronic component and method for producing the electronic component
12/26/2002	US20020195699 Packaged die on PCB with heat sink encapsulant
12/26/2002	US20020195692 Semiconductor device having an improved structure for preventing cracks, improved small sized semiconductor and method of manufacturing the same
12/26/2002	US20020195687 Integrated circuit device having cyanate ester buffer coat and method of fabricating same
12/26/2002	US20020195686 Semiconductor device having shared contact and fabrication method thereof
12/26/2002	US20020195683 Semiconductor device and method for manufacturing the same
12/26/2002	US20020195682 Semiconductor device
12/26/2002	US20020195680 Semiconductor memory and method for fabricating the same
12/26/2002	US20020195679 Metal gate engineering for surface p-channel devices
12/26/2002	US20020195678 Semiconductor integrated circuit device
12/26/2002	US20020195677 Multi color detector
12/26/2002	US20020195673 Low-temperature patterned wafer bonding with photosensitive benzocyclobutene (BCB) and 3D MEMS (microelectromechanical systems) structure fabrication
12/26/2002	US20020195672 Method of forming a MOS transistor in a semiconductor device and a MOS transistor fabricated thereby
12/26/2002	US20020195671 Semiconductor device
12/26/2002	US20020195670 Semiconductor processing methods of forming transistors, semiconductor processing methods of forming dynamic random access memory circuitry, and related integrated circuitry
12/26/2002	US20020195669 Semiconductor integrated circuit device and method of manufacturing the same, and cell size calculation method for DRAM memory cells
12/26/2002	US20020195668 Semiconductor memory and its production process
12/26/2002	US20020195667 Semiconductor device and fabrication method thereof
12/26/2002	US20020195666 Method of forming a MOS transistor in a semiconductor device and a MOS transistor fabricated thereby
12/26/2002	US20020195665 Novel umos-like gate-controlled thyristor structure for ESD protection
12/26/2002	US20020195664 Electrostatic discharge protection device
12/26/2002	US20020195661 Semiconductor device having an integral resistance element
12/26/2002	US20020195660 Transistor in semiconductor device and method of manufacturing the same
12/26/2002	US20020195658 Semiconductor element and method of manufacture
12/26/2002	US20020195657 Super-self-aligned trench-gated DMOS with reduced on-resistance
12/26/2002	US20020195656 Semiconductor power device
12/26/2002	US20020195655 Symmetric trench MOSFET device and method of making same
12/26/2002	US20020195654 DMOS transistor and fabricating method thereof
12/26/2002	US20020195653 Semiconductor structures with trench contacts
12/26/2002	US20020195652 Semiconductor device and method of manufacturing the same
12/26/2002	US20020195651 Metal oxide semiconductor transistor and manufacturing method for the same
12/26/2002	US20020195650 Semiconductor memory device and method of manufacturing the same
12/26/2002	US20020195649 Field programmable logic arrays with vertical transistors
12/26/2002	US20020195648 Semiconductor device having an ESD protective circuit
12/26/2002	US20020195647 Nonvolatile semiconductor memory and manufacturing method thereof
12/26/2002	US20020195646 Stacked gate flash with recessed floating gate
12/26/2002	US20020195645 Semiconductor device and method of manufacturing the same
12/26/2002	US20020195644 Organic polarizable gate transistor apparatus and method
12/26/2002	US20020195643 Semiconductor device and method for producing the same
12/26/2002	US20020195642 Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same
12/26/2002	US20020195641 Semiconductor integrated circuit device and process for manufacturing the same
12/26/2002	US20020195640 Semiconductor device
12/26/2002	US20020195639 Method and structure for reducing contact aspect ratios
12/26/2002	US20020195638 Formation of a frontside contact on silicon-on-insulator substrate
12/26/2002	US20020195637 Semiconductor device having trench capacitor formed in SOI substrate, and method of manufacturing the same
12/26/2002	US20020195636 Semiconductor memory with trench capacitor and method of manufacturing the same
12/26/2002	US20020195635 Methods of fabricating buried digit lines and semiconductor devices including same
12/26/2002	US20020195634 Semiconductor integrated circuit
12/26/2002	US20020195633 Capacitor, semiconductor memory device, and method for manufacturing the same
12/26/2002	US20020195632 Semiconductor memory device
12/26/2002	US20020195631 Semiconductor device and manufacturing method thereof
12/26/2002	US20020195630 Semiconductor device
12/26/2002	US20020195626 Double LDD devices for improved DRAM refresh
12/26/2002	US20020195625 Semiconductor chip with fuse unit
12/26/2002	US20020195623 Semiconductor integrated circuit and method for manufacturing the same
12/26/2002	US20020195620 Compound semiconductor device having heterojunction bipolar transister and other component integrated together and process for fabrication thereof
12/26/2002	US20020195619 Nitride semiconductor stack and its semiconductor device
12/26/2002	US20020195618 Semiconductor device and manufacturing method of the same
12/26/2002	US20020195617 Compound semiconductor device
12/26/2002	US20020195615 Solid state image sensor and method for fabricating the same
12/26/2002	US20020195613 Low cost fast recovery diode and process of its manufacture
12/26/2002	US20020195605 Thin film resistor and manufacturing method thereof
12/26/2002	US20020195603 Semiconductor device and method for manufacturing the same
12/26/2002	US20020195602 Structure and method for fabricating double-sided semiconductor structures and devices utilizing the formation of a compliant substrate for materials used to form the same
12/26/2002	US20020195599 Low-defect semiconductor structure, device including the structure and method for fabricating structure and device
12/26/2002	US20020195574 Method and apparatus for inspecting a semiconductor device
12/26/2002	US20020195539 Focus monitoring method, focus monitoring apparatus, and method of manufacturing semiconductor device
12/26/2002	US20020195476 Head assembly of a disk apparatus having a head IC chip mounted on a suspension by ultrasonic bonding
12/26/2002	US20020195455 Sealing element, hemetic container and sealing method thereof
12/26/2002	US20020195440 Method for producing flat wafer chucks
12/26/2002	US20020195438 Method for substrate thermal management
12/26/2002	US20020195437 Heat treating apparatus and method
12/26/2002	US20020195424 Method of and apparatus for chemical mechanical polishing, and slurry supplying device
12/26/2002	US20020195422 Absorbing halogen gas onto exposed surface, removing , then etching/milling; semiconductors
12/26/2002	US20020195421 In preference to silicon nitride; includes abrasives and amino acids; semiconductors
12/26/2002	US20020195419 Antireflective hard mask compositions
12/26/2002	US20020195416 Method of etching a tantalum nitride layer in a high density plasma
12/26/2002	US20020195351 Copper electroplating composition for integrated circuit interconnection
12/26/2002	US20020195347 Process for depositing a layer of material on a substrate and a plating system
12/26/2002	US20020195313 Part transfer apparatus, control method for part transfer apparatus, IC test method, IC handler, and IC test apparatus
12/26/2002	US20020195268 Thick film circuit connection
12/26/2002	US20020195263 ESD resistant device
12/26/2002	US20020195202 Electrode member for plasma treating apparatus, plasma treating apparatus and plasma treating method
12/26/2002	US20020195201 Apparatus and method for thermally isolating a heat chamber
12/26/2002	US20020195200 Gas assisted method for applying resist stripper and gas-resist stripper combinations
12/26/2002	US20020195199 Method for thermally releasing adherend and apparatus for thermally releasing adherend
12/26/2002	US20020195197 Structure and method for improved adhesion between two polymer films
12/26/2002	US20020195171 Conductive paste and semiconductor component having conductive bumps made from the conductive paste
12/26/2002	US20020195133 Bath system with sonic transducers on vertical and angled walls
12/26/2002	US20020195132 Motor drive assembly for a semiconductor wafer processing system
12/26/2002	US20020195130 Electrostatic charge-free solvent-type dryer for semiconductor wafers
12/26/2002	US20020195129 Micro-environment chamber and system for rinsing and drying a semiconductor workpiece
12/26/2002	US20020195128 Single wafer type substrate cleaning method and apparatus
12/26/2002	US20020195125 Wafer drying methods of marangoni type and apparatus suitable therefor
12/26/2002	US20020195124 Cleaning apparatus of a high density plasma chemical vapor deposition chamber and cleaning method thereof
12/26/2002	US20020195121 Surface cleaning, chemical treatment and drying of semiconductor substrates using foam as a medium
12/26/2002	US20020195058 Apparatus for holding a wafer for use in a process chamber for fabricating a semiconductor device
12/26/2002	US20020194995 First and second filters; noncontamination by hydrocarbon in air and a hydrocarbon such as phthalate ester generated from a retaining box and the like

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