Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2002
12/26/2002US20020197779 Method of integrating the fabrication of a diffused shallow well N type JFET device and a P channel MOSFET device
12/26/2002US20020197778 Semiconductor device and method of manufacturing the same
12/26/2002US20020197777 Method of manufacturing code address memory cell
12/26/2002US20020197776 Thin-film transistor, liquid-crystal display device, and method of producing the same
12/26/2002US20020197775 Laminating method for forming integrated circuit microelectronic fabrication
12/26/2002US20020197774 RF LDMOS on partial SOI substrate
12/26/2002US20020197773 High-frequency module, method of manufacturing thereof and method of molding resin
12/26/2002US20020197772 Method of attaching a leadframe to singulated semiconductor dice
12/26/2002US20020197771 Semiconductor package and a method for producing the same
12/26/2002US20020197770 Method of manufacturing semiconductor chips
12/26/2002US20020197768 Flip chip semicondustor device and method of making the same
12/26/2002US20020197767 Apparatus, method and product therefrom, for aligning die to interconnect metal on flex substrate
12/26/2002US20020197766 Method and apparatus for conducting heat in a flip-chip assembly
12/26/2002US20020197763 Method of forming a color filter
12/26/2002US20020197762 Micromechanical and microoptomechanical structures with single crystal silicon exposure step
12/26/2002US20020197761 Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants
12/26/2002US20020197760 Substrate processing apparatus and method and a manufacturing method of a thin film semiconductor device
12/26/2002US20020197759 Amorphous silicon crystallization method
12/26/2002US20020197758 Method for fabricating a CMOS image sensor
12/26/2002US20020197757 Apparatus and method for batch processing semiconductor substrates in making semiconductor lasers
12/26/2002US20020197753 Method of forming a color filter
12/26/2002US20020197750 Method and apparatus for inspecting a semiconductor device
12/26/2002US20020197747 Method for etching organic film, method for fabricating semiconductor device and pattern formation method
12/26/2002US20020197746 Substrate processing apparatus and substrate processing method
12/26/2002US20020197745 Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
12/26/2002US20020197744 Ferroelectric memory devices using a ferroelectric planarization layer and fabrication methods
12/26/2002US20020197743 Method for fabricating an integrated semiconductor circuit having a strongly polarizable dielectric or ferroelectric
12/26/2002US20020197742 Method of forming smooth polycrystalline silicon electrodes for molecular eletronic devices
12/26/2002US20020197567 Method of manufacturing a semiconductor device and designing a mask pattern
12/26/2002US20020197557 Transmittance of a chemically amplified resist against light of a wavelength shorter than a 180 nm band is improved when polymer includes a polyhydroxystyrene derivative having hexafluoroisopropyl alcohol on its side chain
12/26/2002US20020197555 One filter sheet of a self-supported fibrous matrix having immobilized therein a particulate filter aid and a particulate ion exchange resin; other filter sheet of a self supporting matrix of fibers, such as cellulose fibers
12/26/2002US20020197545 X-ray transmission film is held by the holding frame with an even step-like structure defined at its peripheral portion.
12/26/2002US20020197544 Halftone phase shift mask and its manufacturing method
12/26/2002US20020197543 Identifying cutting areas for phase shift regions based upon characteristics of said pattern; assigning phase values to phase shift windows in the phase shift regions by cutting the phase shift regions in selected ones of the cutting areas
12/26/2002US20020197539 Photolithography method for fabricating thin film
12/26/2002US20020197509 Ion-beam deposition process for manufacturing multi-layered attenuated phase shift photomask blanks
12/26/2002US20020197493 Laser ablation; possible to obtain a thin film with the same composition as that of the target material readily, without requiring an introduction of O2 g as and a substrate heating.
12/26/2002US20020197489 Silicon, a buffer layer, template layer comprises a perovskite oxide
12/26/2002US20020197488 Use of a conductor paste containing a silver particle having a specific surface area of 0.3 m2/g to 3.0 m2/g and no glass to enhance the reliability of the electrical connection of a silver-based conductor film
12/26/2002US20020197460 Substrate with an electrode and method of producing the same
12/26/2002US20020197418 Molecular beam epitaxy effusion cell for use in vacuum thin film deposition and a method therefor
12/26/2002US20020197415 Method for the deposition of materials from mesomorphous films
12/26/2002US20020197410 Substrate processing apparatus and substrate processing method
12/26/2002US20020197403 Methods for chemical vapor deposition of titanium-silicon-nitrogen films
12/26/2002US20020197402 System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)
12/26/2002US20020197400 Spin-coater with self-cleaning cup and method of using
12/26/2002US20020197399 Method for production of microcapsule type conductive filler
12/26/2002US20020197393 Process of manufacturing luminescent device
12/26/2002US20020197145 Substrate processing apparatus and a method for fabricating a semiconductor device by using same
12/26/2002US20020197144 Flatted object passive aligner
12/26/2002US20020197139 Transfer device for substrate and storing device therein
12/26/2002US20020197138 Exchanger for tray feeder
12/26/2002US20020197136 Method and apparatus for aligning the loading/unloading of a wafer cassette to/from a loadport by an overhead hoist transport system
12/26/2002US20020197079 Non-water-based resist stripping liquid management apparatus and non-water-based resist stripping liquid management method
12/26/2002US20020196969 Web-based interface with defect database to view and update failure events
12/26/2002US20020196968 Review work supporting system
12/26/2002US20020196896 Exposure method, exposure apparatus, X-ray mask, semiconductor device and microstructure
12/26/2002US20020196698 Symmetric segmented memory array architecture
12/26/2002US20020196681 Semiconductor integrated circuit device and semiconductor memory device reprogrammable after assembly
12/26/2002US20020196672 Semiconductor memory device
12/26/2002US20020196665 Non-volatile memory device
12/26/2002US20020196658 Magnetic recording element, magnetic memory, magnetic recording method, method for a fabricating a magnetic recording element, and method for a fabricating a magnetic memory
12/26/2002US20020196657 Magnetic memory device in which influence of adjacent memory cell is controllable
12/26/2002US20020196654 Semiconductor memory device
12/26/2002US20020196653 Ferroelectric memory devices having expanded plate lines and methods of fabricating the same
12/26/2002US20020196651 Memory cell layout with double gate vertical array transistor
12/26/2002US20020196649 Scalable two transistor memory device
12/26/2002US20020196647 Resistive cross point array of short-tolerant memory cells
12/26/2002US20020196629 Illumination apparatus, illumination-controlling method, exposure apparatus, device fabricating method
12/26/2002US20020196550 Catadioptric objective
12/26/2002US20020196533 Catadioptric optical system and exposure apparatus having the same
12/26/2002US20020196531 Amplifier gain error
12/26/2002US20020196517 Electro-optical device, electronic apparatus, and method for manufacturing electro-optical device
12/26/2002US20020196449 Configuration measuring apparatus and method
12/26/2002US20020196433 System and methods for inspection of transparent mask substrates
12/26/2002US20020196421 Stage device, exposure apparatus and method
12/26/2002US20020196420 Near-field exposure system selectively applying linearly polarized exposure light to exposure mask
12/26/2002US20020196419 Illumination apparatus, exposure apparatus, and device fabricating method using the same
12/26/2002US20020196417 Projection exposure method and apparatus
12/26/2002US20020196389 Light emitting device and method of driving the same
12/26/2002US20020196336 Method and apparatus for substrate imaging
12/26/2002US20020196074 Semiconductor integrated circuit
12/26/2002US20020196038 Press contact structure of probe unit
12/26/2002US20020196005 Data processing system
12/26/2002US20020195984 XYZ-axes table
12/26/2002US20020195952 Power supply including pyroelectric capacitor
12/26/2002US20020195744 Thermoplastic resin satisfying requirements of wetting index, heat shrinkage rate, modulus of elasticity and thickness; does not deform the terminals of the semiconductor
12/26/2002US20020195722 Structure and mounting method
12/26/2002US20020195720 Flip chip type semiconductor device and method of manufacturing the same
12/26/2002US20020195718 Process for mounting electronic device and semiconductor device
12/26/2002US20020195716 Copper plated PTH barrels and methods for fabricating
12/26/2002US20020195715 Backend metallization method and device obtained therefrom
12/26/2002US20020195714 Method for forming conductor reservoir volume for integrated circuit interconnects
12/26/2002US20020195713 Integrated circuit devices with contact hole alignment and methods of fabricating the same
12/26/2002US20020195712 Semiconductor device, semiconductor device pattern designing method, and semiconductor device pattern designing apparatus
12/26/2002US20020195711 Dual damascene circuit with upper wiring and interconnect line positioned in regions formed as two layers including organic polymer layer and low-permittivity layer
12/26/2002US20020195709 Method for forming a metallization layer
12/26/2002US20020195708 Molded ball grid array
12/26/2002US20020195707 Extension of fatigue life for C4 solder ball to chip connection
12/26/2002US20020195706 Semiconductor apparatus with misalignment mounting detection
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