H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2002
12/17/2002	US6495415 Method for fabricating a patterned layer
12/17/2002	US6495414 Forming a laminated structure composed of a TiON film and a doped silicon film for an upper electrode on the crystallized TaON thin film; depletion of oxygen and a leakage current in a dielectric film can be suppressed.
12/17/2002	US6495413 Structure for masking integrated capacitors of particular utility for ferroelectric memory integrated circuits
12/17/2002	US6495412 Semiconductor device having a ferroelectric capacitor and a fabrication process thereof
12/17/2002	US6495411 Technique to improve deep trench capacitance by increasing surface thereof
12/17/2002	US6495410 Semiconductor processing methods of forming integrated circuitry memory devices, methods of forming capacitor containers, methods of making electrical connection to circuit nodes and related integrated circuitry
12/17/2002	US6495409 MOS transistor having aluminum nitride gate structure and method of manufacturing same
12/17/2002	US6495408 Local interconnection process for preventing dopant cross diffusion in shared gate electrodes
12/17/2002	US6495407 Method of making an article comprising an oxide layer on a GaAs-based semiconductor body
12/17/2002	US6495406 Method of forming lightly doped drain MOS transistor including forming spacers on gate electrode pattern before exposing gate insulator
12/17/2002	US6495405 Method of optimizing channel characteristics using laterally-crystallized ELA poly-Si films
12/17/2002	US6495404 Laser processing method
12/17/2002	US6495403 Gate-all-around semiconductor device and process for fabricating the same
12/17/2002	US6495402 Semiconductor-on-insulator (SOI) device having source/drain silicon-germanium regions and method of manufacture
12/17/2002	US6495401 Method of forming an ultra-thin SOI MOS transistor
12/17/2002	US6495397 Fluxless flip chip interconnection
12/17/2002	US6495394 Chip package and method for manufacturing the same
12/17/2002	US6495392 Process for producing a semiconductor device
12/17/2002	US6495390 Thermally induced reflectivity switch for laser thermal processing
12/17/2002	US6495385 Hetero-integration of dissimilar semiconductor materials
12/17/2002	US6495384 Method for manufacturing diffraction grating and method for manufacturing semiconductor laser
12/17/2002	US6495383 Manufacturing method of a thin film transistor
12/17/2002	US6495382 Application-specific optoelectronic integrated circuit
12/17/2002	US6495379 Semiconductor device manufacturing method
12/17/2002	US6495378 Ferroelastic lead germanate thin film and deposition method
12/17/2002	US6495377 Method of fabricating ferroelectric memory transistors
12/17/2002	US6495306 Chemically amplified positive resist composition
12/17/2002	US6495294 Method for manufacturing semiconductor substrate having an epitaxial film in the trench
12/17/2002	US6495264 Composition for film formation, method of film formation, and silica-based film
12/17/2002	US6495233 Apparatus for distributing gases in a chemical vapor deposition system
12/17/2002	US6495215 Method and apparatus for processing substrate
12/17/2002	US6495211 Process for producing a substrate and plating apparatus
12/17/2002	US6495208 Near-room temperature CVD synthesis of organic polymer/oxide dielectric nanocomposites
12/17/2002	US6495205 Circular; uniform, precision, coating; efficient use of a coating material; less waste
12/17/2002	US6495200 Pd/pd acetate seeding layer; copper plug for a semiconductor interconnect
12/17/2002	US6495099 Wet processing methods for the manufacture of electronic components
12/17/2002	US6495083 Method of underfilling an integrated circuit chip
12/17/2002	US6495055 Variable time etching system according to the accumulated number of devices being processed and a method for etching in the same manner
12/17/2002	US6495054 Etching method and cleaning method of chemical vapor growth apparatus
12/17/2002	US6495019 Device comprising micromagnetic components for power applications and process for forming device
12/17/2002	US6495005 Electroplating apparatus
12/17/2002	US6495004 Substrate plating apparatus
12/17/2002	US6494985 Method and apparatus for polishing a substrate
12/17/2002	US6494984 Flat media processing machine
12/17/2002	US6494967 Chemical treating apparatus and flow rate controlling method thereof
12/17/2002	US6494959 Process and apparatus for cleaning a silicon surface
12/17/2002	US6494958 Plasma chamber support with coupled electrode
12/17/2002	US6494956 System for processing a workpiece
12/17/2002	US6494955 Ceramic substrate support
12/17/2002	US6494927 Conditioner and conditioning disk for a CMP pad, and method of fabricating, reworking, and cleaning conditioning disk
12/17/2002	US6494775 Wafer carrier having more support ribs and lighter weight and method
12/17/2002	US6494774 Carrier head with pressure transfer mechanism
12/17/2002	US6494768 Wafer polishing apparatus
12/17/2002	US6494766 Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing
12/17/2002	US6494670 Three chamber load lock apparatus
12/17/2002	US6494666 Simplified and enhanced SCARA arm
12/17/2002	US6494361 Semiconductor module package substrate fabrication method
12/17/2002	US6494359 Thermo-compression bonding apparatus for connecting a liquid crystal panel to an external drive circuit
12/17/2002	US6494358 Bump bonding apparatus and method
12/17/2002	US6494357 Lead penetrating clamping system
12/17/2002	US6494309 Stack support loading and/or offloading system and a corresponding loading and/or offloading system
12/17/2002	US6494308 Integrated roller transport pod and asynchronous conveyor
12/17/2002	US6494229 Pilot-type two-port vacuum valve
12/17/2002	US6494223 Wet cleaning apparatus utilizing ultra-pure water rinse liquid with hydrogen gas
12/17/2002	US6494221 Device for wet etching an edge of a semiconductor disk
12/17/2002	US6494220 Apparatus for cleaning a substrate such as a semiconductor wafer
12/17/2002	US6494219 Apparatus with etchant mixing assembly for removal of unwanted electroplating deposits
12/17/2002	US6494217 Laser cleaning process for semiconductor material and the like
12/17/2002	US6494197 Dicing machine for cutting CSP plate into pellets
12/17/2002	US6494162 Method for annealing a semiconductor
12/17/2002	US6494122 Alignment method and apparatus for aligning cutting blade
12/17/2002	US6493964 Supercritical point drying apparatus for semiconductor device manufacturing and bio-medical sample processing
12/17/2002	US6493961 Processing unit for a substrate
12/17/2002	US6493934 Method for sawing wafers employing multiple indexing techniques for multiple die dimensions
12/14/2002	CA2390730A1 Method for fabricating a set of distributed feedback semiconductor lasers
12/12/2002	WO2002100142A1 Wiring board and its production method
12/12/2002	WO2002099938A1 Injection seeded f2 laser with line selection and discrimination
12/12/2002	WO2002099909A1 Power mosfet having enhanced breakdown voltage
12/12/2002	WO2002099907A1 Organic field effect transistor, method for production and use thereof in the assembly of integrated circuits
12/12/2002	WO2002099906A1 Magnetoresistance element and magnetoresistance storage element and magnetic memory
12/12/2002	WO2002099905A1 Tunnel magnetoresistance element
12/12/2002	WO2002099903A1 Superconductive wire production method
12/12/2002	WO2002099901A1 Method for manufacturing group-iii nitride compound semiconductor device
12/12/2002	WO2002099900A1 Light emitting element
12/12/2002	WO2002099899A1 Conditioning of glass surfaces for the transfer of cigs solar cells onto flexible plastic substrates
12/12/2002	WO2002099898A2 Integrated circuit for optical clock signal distribution
12/12/2002	WO2002099897A1 Optically-communicating integrated circuits
12/12/2002	WO2002099893A1 Nonvolatile semiconductor memory
12/12/2002	WO2002099892A1 Functional device and production method therefor
12/12/2002	WO2002099890A1 Semiconductor layer and forming method therefor, and semiconductor device and production method therefor
12/12/2002	WO2002099889A1 Trench schottky rectifier
12/12/2002	WO2002099887A1 High-speed interface in semiconductor structures
12/12/2002	WO2002099886A1 Semiconductor device
12/12/2002	WO2002099885A1 Radio frequency semiconductor structure
12/12/2002	WO2002099881A2 Heatsink assembly and method of manufacturing the same
12/12/2002	WO2002099879A1 Heat sink and its manufacturing method
12/12/2002	WO2002099875A1 Method for manufacturing a trench capacitor with an isolation trench
12/12/2002	WO2002099874A2 Minimizing resistance and electromigration of interconnect by adjusting anneal temperature and amount of seed layer dopant
12/12/2002	WO2002099873A2 Dual damascene multi-level metallization
12/12/2002	WO2002099872A1 Semiconductor integrated circuit device and its production method

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