| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/02/2003 | EP1271622A2 Method and apparatus for separating member |
| 01/02/2003 | EP1271621A2 Separating apparatus and processing method for plate member |
| 01/02/2003 | EP1271620A1 Method and apparatus for heat treatment of semiconductor films |
| 01/02/2003 | EP1271619A1 Notched wafer aligning apparatus |
| 01/02/2003 | EP1271607A2 Chemical vapor deposition apparatus and method |
| 01/02/2003 | EP1271553A2 Operating techniques for reducing effects of coupling between storage elements of a non-volatile memory in multiple-data states |
| 01/02/2003 | EP1271550A2 Method and device for reading dual bit memory cells using multiple reference cells with two side read |
| 01/02/2003 | EP1271547A1 Semiconductor device and DRAM |
| 01/02/2003 | EP1271546A2 Resitive crosspoint memory array |
| 01/02/2003 | EP1271249A1 Method for forming resist pattern in reverse-tapered shape |
| 01/02/2003 | EP1271246A1 Method for monitoring the quality of a lithographic structuring step |
| 01/02/2003 | EP1271245A2 Applying apparatus and method of controlling film thickness for enabling uniform thickness |
| 01/02/2003 | EP1271244A1 Method for fabricating an organic thin film |
| 01/02/2003 | EP1271242A2 Mask pattern magnification correction method, magnification correction apparatus, and mask structure |
| 01/02/2003 | EP1271158A2 Press contact structure of probe unit |
| 01/02/2003 | EP1270769A1 Method for producing silicon single crystal having no flaw |
| 01/02/2003 | EP1270763A1 Exhaust pipe with reactive by-product adhesion preventing means and method of preventing the adhesion |
| 01/02/2003 | EP1270697A2 Integrated circuit chip bonding sheet and integrated circuit package |
| 01/02/2003 | EP1270696A2 Adhesive sheet for dicing |
| 01/02/2003 | EP1270694A1 Porous adhesive sheet, semiconductor wafer with porous adhesive sheet, and method of manufacture thereof |
| 01/02/2003 | EP1270505A2 Anti-stiction method and apparatus for drying wafer using centrifugal force |
| 01/02/2003 | EP1270504A1 Semiconductor device joint to a wafer |
| 01/02/2003 | EP1270148A1 Arrangement and method for conditioning a polishing pad |
| 01/02/2003 | EP1269812A2 Apparatus and method for mounting component |
| 01/02/2003 | EP1269548A1 A high voltage thin film transistor with improved on-state characteristics and method for making same |
| 01/02/2003 | EP1269547A1 High power capacitors from thin layers of metal powder or metal sponge particles |
| 01/02/2003 | EP1269546A1 Bipolar mosfet device |
| 01/02/2003 | EP1269545A1 Silicon-carbon layer in emitter for silicon-germanium heterojunction bipolar transistors |
| 01/02/2003 | EP1269544A2 Method of manufacturing a charge-coupled image sensor |
| 01/02/2003 | EP1269541A1 An integrated circuit architecture with standard blocks |
| 01/02/2003 | EP1269539A1 Semiconductor component with contacts provided on the lower side thereof, and method for producing the same |
| 01/02/2003 | EP1269538A2 Method of forming a stacked-die integrated circuit chip package on a wafer level |
| 01/02/2003 | EP1269537A1 Fabricating a high coupling flash cell |
| 01/02/2003 | EP1269536A1 In situ and ex situ etching process for sti with oxide collar application |
| 01/02/2003 | EP1269535A1 Method for cutting an object and for further processing the cut material and a carrier for holding the object or the cut material |
| 01/02/2003 | EP1269534A2 Uniform recess depth of recessed resist layers in trench structures |
| 01/02/2003 | EP1269533A1 Method for producing a heat-conducting connection between two work pieces |
| 01/02/2003 | EP1269532A1 Housing assembly for an electronic component |
| 01/02/2003 | EP1269531A1 Electronic device packaging |
| 01/02/2003 | EP1269530A2 Method of making a trench gate dmos transistor |
| 01/02/2003 | EP1269529A2 Method for improving uniformity and reducing etch rate variation of etching polysilicon |
| 01/02/2003 | EP1269528A1 Method of forming a dielectric film |
| 01/02/2003 | EP1269527A1 Fluorinated solvent compositions containing hydrogen fluoride |
| 01/02/2003 | EP1269526A2 Method for depositing polycrystalline sige suitable for micromachining and devices obtained thereof |
| 01/02/2003 | EP1269525A1 Resist nozzle calibration tool and method therefor |
| 01/02/2003 | EP1269524A1 Semiconductor wafer pod |
| 01/02/2003 | EP1269523A1 Wafer preparation systems and methods for preparing wafers |
| 01/02/2003 | EP1269522A1 Wafer preparation apparatus |
| 01/02/2003 | EP1269521A1 WAFER ORIENTATION SENSOR FOR GaAs WAFERS |
| 01/02/2003 | EP1269520A2 Fabrication of semiconductor materials and devices with controlled electrical conductivity |
| 01/02/2003 | EP1269514A2 An enhanced resist strip in a dielectric etcher using downstream plasma |
| 01/02/2003 | EP1269511A2 Plasma reactor with overhead rf electrode tuned to the plasma |
| 01/02/2003 | EP1269492A1 Magnetic element with an improved magnetoresistance ratio |
| 01/02/2003 | EP1269491A2 Multi-layer tunneling device with a graded stoichiometry insulating layer |
| 01/02/2003 | EP1269479A1 Bi-directional capable bucket brigade circuit |
| 01/02/2003 | EP1269477A2 Memory cell with doped nanocrystals, method of formation, and operation |
| 01/02/2003 | EP1269468A1 Apparatus having line source of radiant energy for exposing a substrate |
| 01/02/2003 | EP1269276A2 Plug and play sensor integration for a process module |
| 01/02/2003 | EP1269266A1 A method of improving photomask geometry |
| 01/02/2003 | EP1269264A2 Method for evaluation of reticle image using aerial image simulator |
| 01/02/2003 | EP1269258A1 Organic polymeric antireflective coatings deposited by chemical vapor deposition |
| 01/02/2003 | EP1269251A2 Liquid crystal displays |
| 01/02/2003 | EP1269112A1 Thickness measurement using afm for next generation lithography |
| 01/02/2003 | EP1268884A1 Method and device for making substrates |
| 01/02/2003 | EP1268882A2 Axial gradient transport apparatus and process for producing large size, single crystals of silicon carbide |
| 01/02/2003 | EP1268881A1 Device providing electrical contact to the surface of a semiconductor workpiece during metal plating |
| 01/02/2003 | EP1268877A2 Visibly marked parts and method for using same |
| 01/02/2003 | EP1268875A2 Method and apparatus for reducing contamination in a loadlock |
| 01/02/2003 | EP1268734A1 Fluorinated solvent compositions containing ozone |
| 01/02/2003 | EP1268457A1 Reworkable composition of oxirane(s) or thiirane(s)-containing resin and curing agent |
| 01/02/2003 | EP1268134A1 Method of manufacturing a polymer or polymer composite polishing pad |
| 01/02/2003 | EP1268133A1 Polishing head for wafer, and method for polishing |
| 01/02/2003 | EP1268132A1 Method and apparatus for fixed-abrasive substrate manufacturing and wafer polishing in a single process path |
| 01/02/2003 | EP1268131A2 Carrier head providing uniform upward and downward force on a wafer |
| 01/02/2003 | EP1268130A1 Fixed abrasive linear polishing belt and system using the same |
| 01/02/2003 | EP1268129A1 Method of polishing wafers |
| 01/02/2003 | EP1268109A2 Non-contact workpiece holder |
| 01/02/2003 | EP1268087A2 Nanocylinder arrays |
| 01/02/2003 | EP1268079A2 Drip manifold for uniform chemical delivery |
| 01/02/2003 | EP1268039A2 Chamber cleaning mechanism |
| 01/02/2003 | EP1177451A4 Sensor |
| 01/02/2003 | EP1138111B1 Electrostatic maintaining device |
| 01/02/2003 | EP1082763A4 Nrom cell with improved programming, erasing and cycling |
| 01/02/2003 | EP1070381B1 Electrostatic wafer clamp having low particulate contamination of wafers |
| 01/02/2003 | EP0954875B1 Modulator for plasma-immersion ion implantation |
| 01/02/2003 | EP0944708B1 Non-corrosive cleaning composition for removing plasma etching residues |
| 01/02/2003 | EP0880799B1 Methods for etching semiconductor wafers |
| 01/02/2003 | EP0862664B1 Method and apparatus for the deposition of parylene af4 onto semiconductor wafers |
| 01/02/2003 | EP0588944B1 An improved miniature transponder device |
| 01/01/2003 | CN2529385Y Continuous laser ceramic cutting machine |
| 01/01/2003 | CN1389007A 激光系统 Laser System |
| 01/01/2003 | CN1389005A High reliability interposer of low-cost and high reliability application |
| 01/01/2003 | CN1388990A Memory cell array with ferroelectric capacitor, method for manufacturing the same, and ferroelectric memory device |
| 01/01/2003 | CN1388989A Method of manufactring a semi conductor device having a porous dielectric layer and air gaps |
| 01/01/2003 | CN1388988A Substrate transporting device |
| 01/01/2003 | CN1388987A Chip image display device for semiconductor testing system anel its method |
| 01/01/2003 | CN1388986A A method of forming a bottom-gate thin film transistor |
| 01/01/2003 | CN1388985A Fabrication process of a semiconductor device |
| 01/01/2003 | CN1388977A Semiconductor inductor and methods for making the same |
| 01/01/2003 | CN1388972A 磁存储器 Magnetic memory |