| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/02/2003 | US20030003663 Flash memory cell and method of manufacturing the same |
| 01/02/2003 | US20030003662 Nonvolatile storage device and method for manufacturing nonvolatile storage device |
| 01/02/2003 | US20030003661 Method of manufacturing semiconductor devices |
| 01/02/2003 | US20030003660 Structure of an embedded channel write/erase flash memory cell and fabricating method thereof |
| 01/02/2003 | US20030003659 Method for manufacturing semiconductor memory device by using photoresist pattern exposed with ArF laser beam |
| 01/02/2003 | US20030003658 Method of fabricating a non-volatile memory device to eliminate charge loss |
| 01/02/2003 | US20030003657 Method of manufacturing nonvolatile memory cell |
| 01/02/2003 | US20030003656 Method of manufacturing flash memory device |
| 01/02/2003 | US20030003655 Methods of forming DRAM cells |
| 01/02/2003 | US20030003654 Processing methods of forming integrated circuitry memory devices, methods of forming DRAM arrays, and related semiconductor masks |
| 01/02/2003 | US20030003653 Structure and methods for process integration in vertical DRAM cell fabrication |
| 01/02/2003 | US20030003652 Method and installation for fabricating one-sided buried straps |
| 01/02/2003 | US20030003651 Embedded vertical dram arrays with silicided bitline and polysilicon interconnect |
| 01/02/2003 | US20030003650 Method for fabricating capacitor containing zirconium oxide dielectric layer |
| 01/02/2003 | US20030003649 Method for forming a capacitor of a semiconductor device |
| 01/02/2003 | US20030003648 Method of fabricating capacitor having hafnium oxide |
| 01/02/2003 | US20030003647 Reduced area intersection between electrode and programming element |
| 01/02/2003 | US20030003646 Phosphorus dopant control in low-temperature Si and SiGe epitaxy |
| 01/02/2003 | US20030003645 Metal gate stack with etch stop layer having implanted metal species |
| 01/02/2003 | US20030003644 Semiconductor integrated circuit device and method of fabricating the same |
| 01/02/2003 | US20030003643 Process for doping a semiconductor body |
| 01/02/2003 | US20030003642 Semiconductor device including cylinder-type capacitor and a manufacturing method thereof |
| 01/02/2003 | US20030003641 Method of forming memory device |
| 01/02/2003 | US20030003640 Advanced contact integration scheme for deep-sub-150 NM devices |
| 01/02/2003 | US20030003639 Method of manufacturing a semiconductor integrated circuit device |
| 01/02/2003 | US20030003638 Process for manufacturing a DMOS transistor |
| 01/02/2003 | US20030003637 Semiconductor device and its manufacturing method |
| 01/02/2003 | US20030003636 Thin film crystal growth by laser annealing |
| 01/02/2003 | US20030003635 Atomic layer deposition for fabricating thin films |
| 01/02/2003 | US20030003634 Utilizing atomic layer deposition for programmable device |
| 01/02/2003 | US20030003631 Ball grid array (BGA) encapsulation mold |
| 01/02/2003 | US20030003630 Hybrid integrated circuit device |
| 01/02/2003 | US20030003629 Hybrid integrated circuit device and manufacturing method thereof |
| 01/02/2003 | US20030003628 Lead frame and method for fabricating resin-encapsulated semiconductor device |
| 01/02/2003 | US20030003627 Method for manufacturing a resin-sealed semiconductor device |
| 01/02/2003 | US20030003624 Single-melt enhanced reliability solder element interconnect |
| 01/02/2003 | US20030003623 Electronic component mounted on a flat substrate and padded with a fluid filler |
| 01/02/2003 | US20030003622 Semiconductor device fabrication method and semiconductor device fabrication device |
| 01/02/2003 | US20030003621 Integrated capacitors fabricated with conductive metal oxides |
| 01/02/2003 | US20030003620 Semiconductor device and manufacturing method of the same |
| 01/02/2003 | US20030003617 Semiconductor device and method of fabricating the same |
| 01/02/2003 | US20030003616 Method of manufacturing thin-film transistor, and liquid-crystal display |
| 01/02/2003 | US20030003613 Light emitting diode having a transparent substrate and a method for manufacturing the same |
| 01/02/2003 | US20030003608 Semiconductor wafer with ID mark, equipment for and method of manufacturing semiconductor device from them |
| 01/02/2003 | US20030003607 Disturbance-free, recipe-controlled plasma processing system and method |
| 01/02/2003 | US20030003606 Reduced terminal testing system |
| 01/02/2003 | US20030003604 Method for removing foreign matter, method for forming film, semiconductor device and film forming apparatus |
| 01/02/2003 | US20030003603 Thin film multi-layer high Q transformer formed in a semiconductor substrate |
| 01/02/2003 | US20030003499 Generation of solid support for biopolymer analysis; form probe arrays on substrate, separate substrate, join substrate to package, recover package |
| 01/02/2003 | US20030003404 Method for manufacturing multi-level interconnections with dual damascene process |
| 01/02/2003 | US20030003402 Developed in a near vertical orientation with developer solution showered onto the layer, rinsed and dried by flowing air or nitrogen over the surface |
| 01/02/2003 | US20030003401 Technique for the size reduction of vias and other images in semiconductor chips |
| 01/02/2003 | US20030003397 Organic anti-reflective coating polymer, anti-reflective coating composition comprising the same and methods of preparation thereof |
| 01/02/2003 | US20030003393 Photoresist, photolithography method using the same, and method for producing photoresist |
| 01/02/2003 | US20030003388 Photosensitive resin composition |
| 01/02/2003 | US20030003384 Aligning method, exposure method, exposure apparatus, and device manufacturing method |
| 01/02/2003 | US20030003383 Device manufacturing method, device manufactured thereby and a mask for use in the method |
| 01/02/2003 | US20030003379 Photoresist monomers, polymers thereof and photoresist compositons containing the same |
| 01/02/2003 | US20030003375 Block mask making method, block mask and exposure apparatus |
| 01/02/2003 | US20030003374 Generating a plasma of a processing gas comprising carbon monoxide and a chlorine containing gas, and etching exposed portions of the metal layer of a metal photomask |
| 01/02/2003 | US20030003371 Removed by employing methods which provide a gradual sloped region in the transparent or semi-transparent substrate which is formed in an area of the substrate opposite to that of the opaque image which is formed thereon. |
| 01/02/2003 | US20030003320 Plating film onto an object at a first current density in a plating bath having a cathode capable of varying current and an anode and; and maintaining the object to be plated at a second current density lower than the first current density. |
| 01/02/2003 | US20030003303 UV light irradiation process on a metal oxide film in vacuum or in an atmosphere of reducing gas at a temperature maintained between 25 degrees C. and 300 degrees C to reduce resistance |
| 01/02/2003 | US20030003300 Light-emitting nanoparticles and method of making same |
| 01/02/2003 | US20030003288 Semiconductor integrated circuit having a fast response can be produced by using the film formed from a polysiloxane crosslinked with a polycarbosilane |
| 01/02/2003 | US20030003244 Staggered in-situ deposition and etching of a dielectric layer for HDP CVD |
| 01/02/2003 | US20030003243 Method for forming film |
| 01/02/2003 | US20030003242 Pulse width method for controlling lateral growth in crystallized silicon films |
| 01/02/2003 | US20030003241 Depositing method and a surface modifying method for nano-particles in a gas stream |
| 01/02/2003 | US20030003235 From reaction product of a tantalum alkoxide and an amino alcohol, polyalcohol, beta-diketone or ketoester, ester of of beta-dicarboxylic acid, lactic acid, ethyl lactate or 1,5-cyclooctadiene or a hydrolyzate of reaction product |
| 01/02/2003 | US20030003231 Pattern formation method and substrate manufacturing apparatus |
| 01/02/2003 | US20030003230 Method for manufacturing thin film |
| 01/02/2003 | US20030003053 Spin exciting method and magnetic resonance imaging system |
| 01/02/2003 | US20030002973 Wafer handling system and wafer handling method |
| 01/02/2003 | US20030002970 End effector for lifting semiconductor wafer carrier |
| 01/02/2003 | US20030002964 Handler system incorporating a semi-automatic tray replacement apparatus and method of use |
| 01/02/2003 | US20030002961 Semiconductor wafer processing apparatus having improved wafer input/output handling system |
| 01/02/2003 | US20030002960 Dual cassette load lock |
| 01/02/2003 | US20030002959 Dual cassette load lock |
| 01/02/2003 | US20030002958 Fast swap dual substrate transport for load lock |
| 01/02/2003 | US20030002553 Semiconductor laser device and manufacturing method therefor |
| 01/02/2003 | US20030002360 Device for and method of storing identification data in an integrated circuit |
| 01/02/2003 | US20030002359 Method of forming a bitline and a bitline contact, and dynamic memory cell including a bitline and bitline made contact according to the method |
| 01/02/2003 | US20030002348 Operating techniques for reducing effects of coupling between storage elements of a non-volatile memory operated in multiple data states |
| 01/02/2003 | US20030002345 Programming and erasing methods for an NROM array |
| 01/02/2003 | US20030002340 NAND-type memory array and method of reading, programming and erasing using the same |
| 01/02/2003 | US20030002333 Thin film magnetic memory device with memory cells including a tunnel magnetic resistive element |
| 01/02/2003 | US20030002330 Magnetoresistive element and MRAM using the same |
| 01/02/2003 | US20030002328 SRAM device |
| 01/02/2003 | US20030002237 Electrostatic clamping |
| 01/02/2003 | US20030002130 Compositions and methods involving direct write optical lithography |
| 01/02/2003 | US20030002043 Periodic patterns and technique to control misalignment |
| 01/02/2003 | US20030002035 Semiconductor analysis apparatus, semiconductor analysis method and method for manufacturing semiconductor device |
| 01/02/2003 | US20030002032 Method and apparatus for production line screening |
| 01/02/2003 | US20030002031 Determination of center of focus by diffraction signature analysis |
| 01/02/2003 | US20030002026 Apparatus for monitoring discharge of photoresist |
| 01/02/2003 | US20030002024 Exposure apparatus and illumination apparatus |
| 01/02/2003 | US20030002023 Projection exposure system as well as a process for compensating image defects occurring in the projection optics of a projection exposure system, in particular for microlithography |
| 01/02/2003 | US20030002022 Control of a distribution of illumination in an exit pupil of an EUV illumination system |
| 01/02/2003 | US20030002021 Exposure apparatus and exposure method |