| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/02/2003 | US20030003848 Edge contact loadcup |
| 01/02/2003 | US20030003845 Optical monitoring in a two-step chemical mechanical polishing process |
| 01/02/2003 | US20030003789 Semiconductor device-socket |
| 01/02/2003 | US20030003774 Substrate processing method, substrate processing apparatus and substrate carrying method |
| 01/02/2003 | US20030003773 Method for manufacturing annealed wafer and annealed wafer |
| 01/02/2003 | US20030003772 Method of manufacturing semiconductor device having insulating film |
| 01/02/2003 | US20030003771 Use of a silicon carbide adhesion promoter layer to enhance the adhesion of silicon nitride to low-k fluorinated amorphous carbon |
| 01/02/2003 | US20030003770 Method for removing foreign matter, method for forming film, semiconductor device and film forming apparatus |
| 01/02/2003 | US20030003769 Method for forming low dielectric constant insulating layer with foamed structure |
| 01/02/2003 | US20030003768 Cvd plasma assisted lower dielectric constant sicoh film |
| 01/02/2003 | US20030003766 Crystalline thin film and process for production thereof, element employing crystalline thin film, circuit employing element, and device employing element or circuit |
| 01/02/2003 | US20030003765 Split barrier layer including nitrogen-containing portion and oxygen-containing portion |
| 01/02/2003 | US20030003764 Method of reducing overetch during the formation of a semiconductor device |
| 01/02/2003 | US20030003763 Substrate for information recording media and manufacturing method thereof |
| 01/02/2003 | US20030003762 Contacting an etched precision surface having vias, cavities, trenches or channels with a liquid or supercritical carbon dioxide and a fluoride-generating compound; cleaning compounds for semiconductor wafer, chip and ceramics |
| 01/02/2003 | US20030003761 Method of forming opening in dielectric layer |
| 01/02/2003 | US20030003760 Photoresist coating method and apparatus |
| 01/02/2003 | US20030003759 Etch selectivity inversion for etching along crystallographic directions in silicon |
| 01/02/2003 | US20030003758 Method of manufacturing semiconductor devices and semiconductor manufacturing apparatus |
| 01/02/2003 | US20030003757 Method of etching tungsten or tungsten nitride in semiconductor structures |
| 01/02/2003 | US20030003756 Method for forming contact by using arf lithography |
| 01/02/2003 | US20030003755 Etching of high aspect ratio structures |
| 01/02/2003 | US20030003754 Method of fabricating semiconductor device and semiconductor device |
| 01/02/2003 | US20030003752 High resist-selectivity etch for silicon trench etch applications |
| 01/02/2003 | US20030003751 Sidewall spacer definition of gates |
| 01/02/2003 | US20030003750 Disposable spacer and method of forming and using same |
| 01/02/2003 | US20030003749 High temperature electrostatic chuck |
| 01/02/2003 | US20030003748 Method of eliminating notching when anisotropically etching small linewidth openings in silicon on insulator |
| 01/02/2003 | US20030003747 Slurry of ceric ammonium nitrate ((NH4)2Ce(NO3)6) providing improved polishing speed under low pressure in one step; deposited as a barrier film for a capacitor using barium strontium titanate as a dielectric layer; semiconductors |
| 01/02/2003 | US20030003746 Process of providing a semiconductor device with electrical interconnection capability |
| 01/02/2003 | US20030003745 New method for improving oxide erosion of tungsten CMP operations |
| 01/02/2003 | US20030003744 Semiconductor chip configuration and fabrication method |
| 01/02/2003 | US20030003743 Method and apparatus for cleaning a web-based chemical mechanical planarization system |
| 01/02/2003 | US20030003742 Gas assisted method for applying resist stripper and gas-resist stripper combinations |
| 01/02/2003 | US20030003741 Method of fabricating semiconductor device |
| 01/02/2003 | US20030003740 Contact structure production method |
| 01/02/2003 | US20030003733 Semiconductor integrated circuit device and fabrication process thereof |
| 01/02/2003 | US20030003732 Method of post treatment for a metal line of semiconductor device |
| 01/02/2003 | US20030003731 Method for manufacturing a silicide layer of semiconductor device |
| 01/02/2003 | US20030003730 Sequential pulse deposition |
| 01/02/2003 | US20030003729 Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring |
| 01/02/2003 | US20030003728 Microstructure array, mold for forming a microstructure array, and method of fabricating the same |
| 01/02/2003 | US20030003727 Method of making a semiconductor device with alloy film between barrier metal and interconnect |
| 01/02/2003 | US20030003726 Metal lines of semiconductor devices and methods for forming |
| 01/02/2003 | US20030003725 Manufacturing method for semiconductor apparatus |
| 01/02/2003 | US20030003724 Manufacturing method of the semiconductor device |
| 01/02/2003 | US20030003723 Method for manufacturing semiconductor device |
| 01/02/2003 | US20030003722 Chemical vapor deposition systems including metal complexes with chelating O- and/or N-donor ligands |
| 01/02/2003 | US20030003721 Thin titanium nitride layers used in conjunction with tungsten |
| 01/02/2003 | US20030003720 Method for forming a bit line of a semiconductor device |
| 01/02/2003 | US20030003719 Method and apparatus for manufacturing a barrier layer of semiconductor device |
| 01/02/2003 | US20030003718 Methods for fabricating a semiconductor device |
| 01/02/2003 | US20030003717 Method for forming a dual damascene line |
| 01/02/2003 | US20030003716 Method for forming dual damascene line structure |
| 01/02/2003 | US20030003715 Method for forming dual damascene line structure |
| 01/02/2003 | US20030003714 Method for forming fine pattern in semiconductor device |
| 01/02/2003 | US20030003713 Semiconductor device and method for manufacturing the same |
| 01/02/2003 | US20030003712 Methods for fabricating a semiconductor device |
| 01/02/2003 | US20030003711 Method of making a semiconductor device with aluminum capped copper interconnect pads |
| 01/02/2003 | US20030003710 Method of making a semiconductor device that includes a dual damascene interconnect |
| 01/02/2003 | US20030003709 Barrier material encapsulation of programmable material |
| 01/02/2003 | US20030003708 Creation of subresolution features via flow characteristics |
| 01/02/2003 | US20030003707 Multi-layer wiring structure of integrated circuit and manufacture of multi-layer wiring |
| 01/02/2003 | US20030003706 Substrate with top-flattened solder bumps and method for manufacturing the same |
| 01/02/2003 | US20030003703 Process for forming fusible links |
| 01/02/2003 | US20030003702 Formation of metal oxide gate dielectric |
| 01/02/2003 | US20030003701 Growing copper vias or lines within a patterned resist using a copper seed layer |
| 01/02/2003 | US20030003700 Methods providing oxide layers having reduced thicknesses at central portions thereof and related devices |
| 01/02/2003 | US20030003699 High withstand voltage semiconductor device and method of manufacturing the same |
| 01/02/2003 | US20030003697 Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers |
| 01/02/2003 | US20030003695 Semiconductor substrate, SOI substrate and manufacturing method therefor |
| 01/02/2003 | US20030003694 Method for forming silicon films with trace impurities |
| 01/02/2003 | US20030003693 Method and apparatus for self-doping contacts to a semiconductor |
| 01/02/2003 | US20030003692 Semiconductor device and method of manufacturing the same |
| 01/02/2003 | US20030003690 Semiconductor device separation using a patterned laser projection |
| 01/02/2003 | US20030003689 Semiconductor device including edge bond pads assemblies including the same and related methods |
| 01/02/2003 | US20030003688 Method and apparatus for marking a bare semiconductor die |
| 01/02/2003 | US20030003687 Method and apparatus for separating member |
| 01/02/2003 | US20030003686 6617227 withdrawn after electronic O.G. published |
| 01/02/2003 | US20030003685 Method for production of a regular multi-layer construction, in particular for electrical double layer capacitors and the corresponding device |
| 01/02/2003 | US20030003684 Method and apparatus for multi-frequency bonding |
| 01/02/2003 | US20030003683 Plasma enhanced method for increasing silicon-containing photoresist selectivity |
| 01/02/2003 | US20030003682 Method for manufacturing an isolation trench filled with a high-density plasma-chemical vapor deposition oxide |
| 01/02/2003 | US20030003681 Trench sidewall profile for device isolation |
| 01/02/2003 | US20030003680 Method for manufacturing isolating structures |
| 01/02/2003 | US20030003679 Creation of high mobility channels in thin-body SOI devices |
| 01/02/2003 | US20030003678 Method of forming shallow trench isolation for thin silicon-on-insulator substrates |
| 01/02/2003 | US20030003677 Alignment method, exposure apparatus and device fabrication method |
| 01/02/2003 | US20030003675 Shared bit line cross point memory array |
| 01/02/2003 | US20030003674 Electrically programmable resistance cross point memory |
| 01/02/2003 | US20030003673 Method for fabricating flash memory device |
| 01/02/2003 | US20030003672 High-pressure anneal process for integrated circuits |
| 01/02/2003 | US20030003671 Method for manufacturing synchronous DRAM device |
| 01/02/2003 | US20030003670 Method for fabricating semiconductor device |
| 01/02/2003 | US20030003669 Process for manufacturing a DMOS transistor |
| 01/02/2003 | US20030003668 Method for manufacturing a semiconductor device |
| 01/02/2003 | US20030003667 Semiconductor device and method of fabricating the same |
| 01/02/2003 | US20030003666 Semiconductor device and method for fabricating the same |
| 01/02/2003 | US20030003665 Process for high-dielectric constant metal-insulator metal capacitor in VLSI multi-level metallization systems |
| 01/02/2003 | US20030003664 Semiconductor device and manufacturing method thereof |