| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/06/2003 | US20030025118 Light emitting device, semiconductor device, and method of fabricating the devices |
| 02/06/2003 | US20030025116 Semiconductor laminate configured for dividing into predetermined parts and method of manufacture therefor |
| 02/06/2003 | US20030025115 III nitride compound semiconductor device |
| 02/06/2003 | US20030025114 Semiconductor device and method for fabricating the same |
| 02/06/2003 | US20030025113 Semiconductor structures having reduced contact resistance |
| 02/06/2003 | US20030025085 Low-aberration deflectors for use in charged-particle-beam optical systems, and methods for fabricating such deflectors |
| 02/06/2003 | US20030024965 Friction stir welding method and component part welded by the method |
| 02/06/2003 | US20030024964 Die bonder for die-bonding a semiconductor chip to lead frame and method of producing a semiconductor device using the die bonder |
| 02/06/2003 | US20030024963 Die bonding apparatus |
| 02/06/2003 | US20030024920 Hot wall rapid thermal processor |
| 02/06/2003 | US20030024905 Laser irradiating device, laser irradiating method and manufacturing method of semiconductor device |
| 02/06/2003 | US20030024902 Method of plasma etching low-k dielectric materials |
| 02/06/2003 | US20030024901 Method of reducing plasma charge damage for plasma processes |
| 02/06/2003 | US20030024899 Exposure method utilizing optical proximity corrected exposure patterns, an apparatus for generating optical proximity corrected exposure data, and an exposure apparatus for optical proximity corrected exposure data |
| 02/06/2003 | US20030024898 Method of forming noble metal thin film pattern |
| 02/06/2003 | US20030024896 Methods of etching silicon-oxide-containing compositions |
| 02/06/2003 | US20030024888 Wafer holding apparatus |
| 02/06/2003 | US20030024826 Electro-chemical polishing apparatus |
| 02/06/2003 | US20030024808 Methods of sputtering using krypton |
| 02/06/2003 | US20030024735 Protective device for subassemblies and method for producing a protective device |
| 02/06/2003 | US20030024731 Vertical electrical interconnections in a stack |
| 02/06/2003 | US20030024680 Substrate support and method of fabricating the same |
| 02/06/2003 | US20030024647 Plasma processing apparatus |
| 02/06/2003 | US20030024646 Plasma etching apparatus and plasma etching method |
| 02/06/2003 | US20030024645 Substrate processing apparatus |
| 02/06/2003 | US20030024644 Method and apparatus for measuring and dispensing a wafer etchant |
| 02/06/2003 | US20030024643 Plasma etching system and method |
| 02/06/2003 | US20030024642 Method and apparatus for processing semiconductor substrates |
| 02/06/2003 | US20030024635 Method for transferring element, method for producing element, integrated circuit, circuit board, electro-optical device, IC card, and electronic appliance |
| 02/06/2003 | US20030024582 Valve for a slurry outlet opening of a chemical mechanical polishing device and chemical mechanical polishing device having a valve |
| 02/06/2003 | US20030024557 Apparatus for wafer rinse and clean and edge etching |
| 02/06/2003 | US20030024553 For treating substrates such as a semiconductor wafer, in which chemical fluids can spread uniformly over the substrate without substantially decomposing and changing their compositions, to prevent volatilization |
| 02/06/2003 | US20030024477 Substrate processing apparatus |
| 02/06/2003 | US20030024475 Method and apparatus for producing group-III nitrides |
| 02/06/2003 | US20030024471 Fabrication of semiconductor structures and devices forms by utilizing laser assisted deposition |
| 02/06/2003 | US20030024431 Containing dihydric copper ions, a complexing agent, an aldehyde acid, and an organic alkali; forming a thin film copper interconnection for a semiconductor device |
| 02/06/2003 | US20030024216 Position sensing system for inspection handling system |
| 02/06/2003 | US20030024120 Heat exchanger cast in metal matrix composite and method of making the same |
| 02/06/2003 | DE10151657C1 Process for assembling a chip with contacts on a substrate comprises applying adhesion agent points and an adhesive mark, joining the chip and the substrate, and allowing the adhesives to harden |
| 02/06/2003 | DE10137398C1 Method for producing a punched multi-hole mask produces a desired pattern of holes for the projection of particle radiation by cutting holes in a flattened stretched blank subjected to distorting forces after cutting. |
| 02/06/2003 | CA2454797A1 Flip-chip bonding of light emitting devices and light emitting devices suitable for flip-chip bonding |
| 02/06/2003 | CA2453237A1 Photosensitive resin composition |
| 02/06/2003 | CA2452281A1 Electronic device using carbon nanotubes |
| 02/05/2003 | EP1282173A2 Field effect transistor and method of manufacturing the same as well as liquid crystal display using the same as well as method of manufacturing the same |
| 02/05/2003 | EP1282172A2 Bipolar semiconductor device and method for fabrication thereof |
| 02/05/2003 | EP1282168A2 Semiconductor device and its fabrication method |
| 02/05/2003 | EP1282166A2 Metal casing for semiconductor device having high thermal conductivity and thermal expansion coefficient similar to that of semiconductor and method for manufacturing the same |
| 02/05/2003 | EP1282165A2 Semiconductor device and manufacturing method thereof |
| 02/05/2003 | EP1282164A2 Method to improve the adhesion of dielectric layers to copper |
| 02/05/2003 | EP1282163A1 Semiconductor device and manufacturing method thereof |
| 02/05/2003 | EP1282162A2 Method for fabricating semiconductor-mounting body and apparatus for fabricating semiconductor-mounting body |
| 02/05/2003 | EP1282161A1 LOW RELATIVE PERMITTIVITY SIO x? FILM, PRODUCTION METHOD, SEMICONDUCTOR DEVICE COMPRISING THE FILM |
| 02/05/2003 | EP1282160A1 Process for forming nitride-oxide dielectric layers |
| 02/05/2003 | EP1282159A1 Method of forming an isolation layer and method of manufacturing a trench capacitor |
| 02/05/2003 | EP1282158A1 Method of manufacturing a bipolar transistor in an integrated CMOS circuit |
| 02/05/2003 | EP1282157A2 Apparatus and method for controlling the temperature of a substrate |
| 02/05/2003 | EP1282156A2 Transporting apparatus |
| 02/05/2003 | EP1282155A1 Apparatus for transporting and placing substrates comprising semiconductor chips |
| 02/05/2003 | EP1282139A1 Multilayer-coated reflective mirrors for x-ray optical systems, and methods for producing same |
| 02/05/2003 | EP1282135A2 Sector protection circuit and method for flash memory devices |
| 02/05/2003 | EP1282132A2 Data storage device |
| 02/05/2003 | EP1282065A1 Information managing method and system and processing apparatus |
| 02/05/2003 | EP1282011A2 Reflective projection lens for EUV photolithography |
| 02/05/2003 | EP1281973A1 Probe card device and probe for use therein |
| 02/05/2003 | EP1281691A1 Ceramic substrate |
| 02/05/2003 | EP1281680A2 Method for making glass by plasma deposition and so obtained photomask material |
| 02/05/2003 | EP1281679A2 Method for making glass by plasma deposition using silica powder, silica powder and photomask obtained by the method |
| 02/05/2003 | EP1281666A1 Method for precisely machining microstructure |
| 02/05/2003 | EP1281477A1 Polishing pads |
| 02/05/2003 | EP1281440A1 Device for receiving a chip shaped carrier and process for assembling a plurality of such devices |
| 02/05/2003 | EP1281439A1 Device for receiving a chip shaped carrier and process for assembling a plurality of such devices |
| 02/05/2003 | EP1281204A1 One-time uv-programmable non-volatile semiconductor memory and method of programming such a semiconductor memory |
| 02/05/2003 | EP1281200A2 Method of making a semiconductor device having a recessed insulating layer of varying thickness |
| 02/05/2003 | EP1281199A2 Metal chemical mechanical polishing process for minimizing dishing during semiconductor wafer fabrication |
| 02/05/2003 | EP1281198A1 REPAIR OF FILM HAVING AN Si-O BACKBONE |
| 02/05/2003 | EP1281197A1 Method of modifying the surface of a semiconductor wafer |
| 02/05/2003 | EP1281196A1 Method of doping silicon with phosphorus and growing oxide on silicon in the presence of steam |
| 02/05/2003 | EP1281195A1 Semiconductor manufacturing system and control method thereof |
| 02/05/2003 | EP1281194A1 Longitudinal conveyor |
| 02/05/2003 | EP1281193A2 Method of high selectivity sac etching |
| 02/05/2003 | EP1281179A1 Semiconductor device |
| 02/05/2003 | EP1281108A2 Method and system for self-replicating manufacturing stations |
| 02/05/2003 | EP1212783A4 Systems and methods using sequential lateral solidification for producing single or polycrystalline silicon thin films at low temperatures |
| 02/05/2003 | EP1082470A4 Microchamber |
| 02/05/2003 | EP0965133A4 Nonvolatile pmos two transistor memory cell and array |
| 02/05/2003 | EP0925497B1 Apparatus and method for detecting micro defects in semi-conductors |
| 02/05/2003 | EP0837966B1 Method for overall regulation of the headbox and/or the former of a paper machine or equivalent |
| 02/05/2003 | CN2534677Y Connect-disconnect integrated circuit apparatus |
| 02/05/2003 | CN1395747A Dual bit multi-level ballistic MONOS memory, and manufacturing method, programming, and operation process for memory |
| 02/05/2003 | CN1395746A Semiconductor device and its manufacturing method |
| 02/05/2003 | CN1395745A Silicon/germanium bipolar transistor with optimized germanium profile |
| 02/05/2003 | CN1395744A Anneal wafer manufacturing method and anneal wafer |
| 02/05/2003 | CN1395743A Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring |
| 02/05/2003 | CN1395602A Wafer machining adhesive tape, and its manufacturing method and using method |
| 02/05/2003 | CN1395515A In situ module for particle removal from solid state surface |
| 02/05/2003 | CN1395464A Method for mfg. multilayer ceramic plate |
| 02/05/2003 | CN1395351A Power supply including thermoelectric capacity |
| 02/05/2003 | CN1395322A Method for manufacturing nitride semiconductor and method for making semiconductor device |
| 02/05/2003 | CN1395319A 半导体器件及其制造方法 Semiconductor device and manufacturing method thereof |
| 02/05/2003 | CN1395318A Electronic device with non-luminous display |