| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/30/2003 | WO2003009385A1 Semiconductor device, semiconductor storage device and production methods therefor |
| 01/30/2003 | WO2003009384A1 Semiconductor storage |
| 01/30/2003 | WO2003009382A2 Semiconductor structures with integrated control components |
| 01/30/2003 | WO2003009380A2 Carbon-graded layer for improved adhesion of low-k dielectrics to silicon substrates |
| 01/30/2003 | WO2003009379A2 Semiconductive device and method of formation |
| 01/30/2003 | WO2003009378A1 Solder-free pcb assembly |
| 01/30/2003 | WO2003009377A2 Semiconductor structures with coplaner surfaces |
| 01/30/2003 | WO2003009376A2 Semiconductor structures and devices |
| 01/30/2003 | WO2003009375A2 Semiconductor back side processing |
| 01/30/2003 | WO2003009374A1 Production method of semiconductor device |
| 01/30/2003 | WO2003009372A2 Low resistivity tantalum nitride/tantalum bilayer stack |
| 01/30/2003 | WO2003009371A1 Method of forming a conductive interconnect |
| 01/30/2003 | WO2003009370A2 Substrate support pedestal |
| 01/30/2003 | WO2003009369A2 Sol solution for producing glass coatings for electrically conductive materials that can be used in anodic bonding |
| 01/30/2003 | WO2003009368A2 Low emitter resistance contacts to gaas high speed hbt |
| 01/30/2003 | WO2003009367A1 Hafnium silicide target for forming gate oxide film and method for preparation thereof |
| 01/30/2003 | WO2003009366A1 Method for enhancing surface condition of a semiconductor wafer |
| 01/30/2003 | WO2003009365A1 Silicon wafer manufacturing method, silicon epitaxial wafer manufacturing method, and silicon epitaxial wafer |
| 01/30/2003 | WO2003009364A2 Low dielectric constant layers |
| 01/30/2003 | WO2003009362A1 Polishing element, cmp polishing device and productionj method for semiconductor device |
| 01/30/2003 | WO2003009361A2 Planar metal electroprocessing |
| 01/30/2003 | WO2003009360A2 Method and apparatus for depositing tungsten after surface treatment to improve film characteristics |
| 01/30/2003 | WO2003009359A1 Method for forming a multilayer structure provided with predetermined parameters |
| 01/30/2003 | WO2003009358A1 Thermal treatment apparatus and thermal treatment method |
| 01/30/2003 | WO2003009357A2 Epitaxial semiconductor on insulator (soi) structures and devices |
| 01/30/2003 | WO2003009356A1 Fabrication of buried devices within a semiconductor structure |
| 01/30/2003 | WO2003009355A1 Rf, optical, photonic, analog, and digital functions in a semiconductor structure |
| 01/30/2003 | WO2003009354A1 Semiconductor structure including a monocrystalline compound semiconductor layer |
| 01/30/2003 | WO2003009353A1 Selective base etching |
| 01/30/2003 | WO2003009352A1 Reactor for thin film deposition and method for depositing thin film on wafer using the reactor |
| 01/30/2003 | WO2003009351A1 Thin-film semiconductor device and its production method |
| 01/30/2003 | WO2003009350A2 Flash anneal |
| 01/30/2003 | WO2003009349A2 Methods and compositions for chemical mechanical polishing substrates covered with at least two dielectric materials |
| 01/30/2003 | WO2003009348A2 Facilities connection bucket for pre/facilitation of wafer fabrication equipment |
| 01/30/2003 | WO2003009347A2 Integrated system for tool front-end workpiece handling |
| 01/30/2003 | WO2003009346A2 Processing system |
| 01/30/2003 | WO2003009345A2 Integration of fault detection with run-to-run control |
| 01/30/2003 | WO2003009344A2 Iii-v arsenide nitride semiconductor substrate |
| 01/30/2003 | WO2003009343A2 Plating apparatus |
| 01/30/2003 | WO2003009342A2 Data carrier for contactless communication with an integrated component |
| 01/30/2003 | WO2003009341A2 Damascene structure with integral etch stop layer |
| 01/30/2003 | WO2003009340A2 Device and method for harmonised positioning of wafer disks |
| 01/30/2003 | WO2003009339A2 Graded base gaassb for high speed gaas hbt |
| 01/30/2003 | WO2003009337A2 Ferroelectric circuit element that can be fabricated at low temperatures and method for making same |
| 01/30/2003 | WO2003009335A2 Ultra fine pitch capillary |
| 01/30/2003 | WO2003009318A2 Support with getter-material for microelectronic, microoptoelectronic or micromechanical device |
| 01/30/2003 | WO2003009317A2 Support with integrated deposit of gas absorbing material for manufacturing microelectronic, microoptoelectronic or micromechanical devices |
| 01/30/2003 | WO2003009182A1 A method and apparatus for generating a solid state circuit layout with in-design variability associated to the setting of analog signal processing parameters, and an integrated circuit design and an integrated circuit produced by applying such method |
| 01/30/2003 | WO2003009063A2 Real time analysis of periodic structures on semiconductors |
| 01/30/2003 | WO2003009062A1 Compensation of birefringence in a lens composed of crystal lenses |
| 01/30/2003 | WO2003009057A1 Thin film transistors suitable for use in flat panel displays |
| 01/30/2003 | WO2003009050A1 Intrinsic birefringence compensation for below 200 nanometer wavelength optical lithography components with cubic crystalline structures |
| 01/30/2003 | WO2003009021A1 Delay element made from a cubic crystal and corresponding optical system |
| 01/30/2003 | WO2003008984A2 Test head docking system and method |
| 01/30/2003 | WO2003008955A1 Monitoring process for oxide removal |
| 01/30/2003 | WO2003008940A1 Confocal 3d inspection system and process |
| 01/30/2003 | WO2003008666A1 Electrostatic chuck with dielectric coating |
| 01/30/2003 | WO2003008665A1 Method and apparatus for bpsg deposition |
| 01/30/2003 | WO2003008663A1 Formation of titanium nitride films using a cyclical deposition process |
| 01/30/2003 | WO2003008660A1 Depositing a tantalum film |
| 01/30/2003 | WO2003008483A1 Aromatic fluoropolymer and use thereof |
| 01/30/2003 | WO2003008359A1 Ceramic connection body, method of connecting the ceramic bodies, and ceramic structural body |
| 01/30/2003 | WO2003008352A1 Device and method for scribing fragile material substrate |
| 01/30/2003 | WO2003008323A2 Lifting and supporting device |
| 01/30/2003 | WO2003008304A1 Protective shipper |
| 01/30/2003 | WO2003008303A1 Tray for semiconductors |
| 01/30/2003 | WO2003008301A1 300mm single stackable film frame carrier |
| 01/30/2003 | WO2003008157A2 Centering double side edge grip end effector with integrated mapping sensor |
| 01/30/2003 | WO2003008151A1 Fixed abrasive articles with wear indicators |
| 01/30/2003 | WO2003008144A1 Resistance welding method and resistance welding machine |
| 01/30/2003 | WO2003008140A2 Apparatus for processing a workpiece |
| 01/30/2003 | WO2003008139A2 Etching process for micromachining crystalline materials and devices fabricated thereby |
| 01/30/2003 | WO2003008115A1 Megasonic cleaner probe system with gasified fluid |
| 01/30/2003 | WO2003008114A1 Systems and methods for processing workpieces |
| 01/30/2003 | WO2003008110A1 A method of depositing an inorganic film on an organic polymer |
| 01/30/2003 | WO2002095804A8 Method and device for the thermal treatment of substrates |
| 01/30/2003 | WO2002091488A3 Semiconductor device including an optically-active material |
| 01/30/2003 | WO2002091434A3 Wide bandgap semiconductor structure |
| 01/30/2003 | WO2002088413A3 Sputter targets comprising ti and zr |
| 01/30/2003 | WO2002087293A3 Support for electrical circuit elements |
| 01/30/2003 | WO2002080275A3 Memory cell arrays and method for the production thereof |
| 01/30/2003 | WO2002069390A9 Grating test patterns and methods for overlay metrology |
| 01/30/2003 | WO2002052625A3 Process of forming p-n layer |
| 01/30/2003 | WO2002047157A3 Negative ion implant mask formation for self-aligned, sublithographic resolution patterning for single-sided verticle device formation |
| 01/30/2003 | WO2002037524A3 Bi mode ion implantation with non-parallel ion beams |
| 01/30/2003 | WO2002027767A3 Fluid delivery ring and methods for making and implementing the same |
| 01/30/2003 | WO2002019397A3 Keyed wafer lift system |
| 01/30/2003 | WO2002009242A3 Optical structure on compliant substrate |
| 01/30/2003 | WO2001094640A3 Bio-mediated assembly of micrometer-scale and nanometer-scale structures |
| 01/30/2003 | WO2001001442A9 A plasma reaction chamber component having improved temperature uniformity |
| 01/30/2003 | US20030023938 LSI layout method and apparatus for cell arrangement in which timing is prioritized |
| 01/30/2003 | US20030023913 Testing device of semiconductor integrated circuit and test method therefor |
| 01/30/2003 | US20030023912 Integrated testing of serializer/deserializer in FPGA |
| 01/30/2003 | US20030023805 Memory module and system, an information processing apparatus and a mehtod of use |
| 01/30/2003 | US20030023402 Wafer shape evaluating method and device producing method, wafer and wafer selecting method |
| 01/30/2003 | US20030023343 Wafer transfer system, wafer transfer method and automatic guided vehicle system |
| 01/30/2003 | US20030023340 Substrate processing system managing apparatus information of substrate processing apparatus |
| 01/30/2003 | US20030023339 Mask pattern magnification correction method, magnification correction apparatus, and mask structure |
| 01/30/2003 | US20030022953 Antireflective porogens |
| 01/30/2003 | US20030022801 Applying composition comprising at least one reducing agent for reducing ions of transition metal to a lower valence state, at least one pH adjusting agent, at least one metal corrosion inhibitor and water |