| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/04/2003 | US6514822 Method and system for reducing thinning of field isolation structures in a flash memory device |
| 02/04/2003 | US6514821 Method for planarizing dielectric layer of flash memory |
| 02/04/2003 | US6514819 High capacity stacked DRAM device and process for making a smaller geometry |
| 02/04/2003 | US6514818 Nonvolatile ferroelectric memory without a separate cell plate line and method of manufacturing the same |
| 02/04/2003 | US6514817 Method of forming shallow trench |
| 02/04/2003 | US6514816 Method of fabricating a self-aligned shallow trench isolation |
| 02/04/2003 | US6514815 Method for fabricating polysilicon capacitor |
| 02/04/2003 | US6514814 Capacitor containing amorphous and polycrystalline ferroelectric films and fabrication method therefor, and method for forming amorphous ferroelectric film |
| 02/04/2003 | US6514813 Method of fabricating a semiconductor device |
| 02/04/2003 | US6514812 Structure and manufacturing method of semiconductor device having uneven surface at memory cell capacitor part |
| 02/04/2003 | US6514811 Method for memory masking for periphery salicidation of active regions |
| 02/04/2003 | US6514810 Buried channel PMOS transistor in dual gate CMOS with reduced masking steps |
| 02/04/2003 | US6514809 SOI field effect transistors with body contacts formed by selective etch and fill |
| 02/04/2003 | US6514808 Transistor having a high K dielectric and short gate length and method therefor |
| 02/04/2003 | US6514807 Method for fabricating semiconductor device applied system on chip |
| 02/04/2003 | US6514805 Trench sidewall profile for device isolation |
| 02/04/2003 | US6514804 Thin-film transistor and fabrication method thereof |
| 02/04/2003 | US6514803 Process for making an amorphous silicon thin film semiconductor device |
| 02/04/2003 | US6514802 Method of providing a frontside contact to a substrate of SOI device |
| 02/04/2003 | US6514801 Method for manufacturing thin-film transistor |
| 02/04/2003 | US6514800 When channel etching for removing predetermined portions of an ohmic layer and a diffusion layer thereof by plasma etching is to be performed, a surface of a semiconductor layer of a channel portion is formed to have predetermined steps |
| 02/04/2003 | US6514799 Method for substrate noise distribution |
| 02/04/2003 | US6514798 Stereolithographic methods for fabricating hermetic semiconductor device packages and semiconductor devices including stereolithographically fabricated hermetic packages |
| 02/04/2003 | US6514797 Underfill applications using film technology |
| 02/04/2003 | US6514796 Fixing by selectively heating and press-contacting a dicing tape of separated integrated circuit chips to an oppositely facing substrate with a wire attached to one of the chips on the tape; thinness; cards; nonbreaking; noncracking; strength |
| 02/04/2003 | US6514795 Packaged stacked semiconductor die and method of preparing same |
| 02/04/2003 | US6514790 Method for handling a plurality of circuit chips |
| 02/04/2003 | US6514788 Method for manufacturing contacts for a Chalcogenide memory device |
| 02/04/2003 | US6514783 Method for determining a layout for a flip-chip transition interface structure |
| 02/04/2003 | US6514780 Method for manufacturing an integrated circuit having a particular functionality required by a user of the circuit and having first structures to produce the particular functionality and second structures |
| 02/04/2003 | US6514779 Large area silicon carbide devices and manufacturing methods therefor |
| 02/04/2003 | US6514778 Method for measuring effective gate channel length during C-V method |
| 02/04/2003 | US6514776 Instrument and method for measuring contamination of wafer surface |
| 02/04/2003 | US6514676 Method for forming micropattern of resist |
| 02/04/2003 | US6514674 Method of forming an optical element |
| 02/04/2003 | US6514673 Rule to determine CMP polish time |
| 02/04/2003 | US6514671 Interconnect line formed by dual damascene using dielectric layers having dissimilar etching characteristics |
| 02/04/2003 | US6514667 Lithography structure |
| 02/04/2003 | US6514666 Photoresist monomers, polymers thereof and photoresist compositions containing it |
| 02/04/2003 | US6514665 Additives for improving post exposure delay stability of photoresist |
| 02/04/2003 | US6514664 Radiation sensitive compositions containing image quality and profile enhancement additives |
| 02/04/2003 | US6514663 Bottom resist |
| 02/04/2003 | US6514658 Polyimide or precursor thereof soluble in alkaline solution, a photosensitive acid generator, and a compound having a phenolic hydroxyl group; positive-type, heat resistance |
| 02/04/2003 | US6514642 Phase shift mask and method of manufacture |
| 02/04/2003 | US6514582 Quartz glass member for use in dry etching and dry etching system equipped with the same |
| 02/04/2003 | US6514570 Solution processing apparatus and method |
| 02/04/2003 | US6514566 Ion processing element with composite media |
| 02/04/2003 | US6514564 Dynamic blending gas delivery system and method |
| 02/04/2003 | US6514560 Blend of thermosetting resin and conductive particles |
| 02/04/2003 | US6514425 Forming patterns on silicon dioxide films using plasma gases comprising acyclic fluoroethers, having short half-life; pollution control; integrated circuits |
| 02/04/2003 | US6514424 Using plates which rotate in opposite directions and are covered with polishing cloth, so that at least 2 mu m of semiconductor material is removed; accuracy |
| 02/04/2003 | US6514423 Method for wafer processing |
| 02/04/2003 | US6514390 Induction coupled plasma (ICP) generators, for coating semiconductor wafers by coupling electromagnetic energy and magnetically shielding targets; noncontamination |
| 02/04/2003 | US6514389 Method of processing a workpiece |
| 02/04/2003 | US6514378 Method for improving uniformity and reducing etch rate variation of etching polysilicon |
| 02/04/2003 | US6514377 Apparatus for and method of processing an object to be processed |
| 02/04/2003 | US6514376 Thermal control apparatus for inductively coupled RF plasma reactor having an overhead solenoidal antenna |
| 02/04/2003 | US6514375 Dry etching endpoint detection system |
| 02/04/2003 | US6514355 Preventing damage to electronics, by detecting malfunctions associated with power sources, robots, computer software or hardware, then draining the chemical reactor and rinsing with water |
| 02/04/2003 | US6514352 Cleaning method using an oxidizing agent, chelating agent and fluorine compound |
| 02/04/2003 | US6514348 Substrate processing apparatus |
| 02/04/2003 | US6514347 Apparatus and method for plasma treatment |
| 02/04/2003 | US6514345 Processing apparatus and managing method of operational condition parameter thereof |
| 02/04/2003 | US6514344 Reduced slide resistance to restrain the vibration when discharge nozzle is moved |
| 02/04/2003 | US6514343 Coating apparatus |
| 02/04/2003 | US6514126 Pad conditioner coupling and end effector for a chemical mechanical planarization system and method therefor |
| 02/04/2003 | US6514124 Carrier head for chemical mechanical polishing a substrate |
| 02/04/2003 | US6514122 System for manufacturing semiconductor device utilizing photolithography technique |
| 02/04/2003 | US6514073 Resist processing method and resist processing apparatus |
| 02/04/2003 | US6514033 Mechanical gripper for wafer handling robots |
| 02/04/2003 | US6514032 Substrate transfer system |
| 02/04/2003 | US6513848 Hydraulically actuated wafer clamp |
| 02/04/2003 | US6513796 Wafer chuck having a removable insert |
| 02/04/2003 | US6513694 Semiconductor wafer cleaving method and apparatus |
| 02/04/2003 | US6513654 SMIF container including an electrostatic dissipative reticle support structure |
| 02/04/2003 | US6513564 Nozzle for cleaving substrates |
| 02/04/2003 | US6513540 System and method for using bent pipes in high-purity fluid handling systems |
| 02/04/2003 | US6513538 Containing hydrogen peroxide, chelate compound, hydrogen and fluorine gases |
| 02/04/2003 | US6513537 Substrate processing method and substrate processing apparatus |
| 02/04/2003 | US6513452 Adjusting DC bias voltage in plasma chamber |
| 02/04/2003 | US6513389 Technique for determining curvatures of embedded line features on substrates |
| 02/04/2003 | US6513374 Apparatus to quantify the adhesion of film |
| 02/04/2003 | US6513250 Micro positioning device with shared actuators |
| 02/04/2003 | US6513239 Providing liquid retainer surrounding heat exchanger's face and compliant member which forms seal between heat exchanger and retainer; dispensed liquid which falls from face is retained and kept from leaking until removal |
| 02/04/2003 | US6513236 Method of manufacturing bump-component mounted body and device for manufacturing the same |
| 02/04/2003 | US6513214 Method of producing plural device chips from a thin plate of a pyroelectric material |
| 02/04/2003 | CA2279229C Method and apparatus to produce large inductive plasma for plasma processing |
| 02/04/2003 | CA2240701C Apparatus and method of separating sample and substrate fabrication method |
| 01/30/2003 | WO2003009421A1 Apparatus for effecting transfer of electromagnetic energy |
| 01/30/2003 | WO2003009404A2 Transistor and method for making a transistor on a sige/soi substrate |
| 01/30/2003 | WO2003009399A1 Gallium nitride-based led and a production method therefor |
| 01/30/2003 | WO2003009398A2 Structure and method for fabricating an optical bus |
| 01/30/2003 | WO2003009396A2 Algaas or ingap low turn-on voltage gaas-based heterojunction bipolar transistor |
| 01/30/2003 | WO2003009395A2 Multijunction solar cell |
| 01/30/2003 | WO2003009392A1 Semiconductor device and method for fabricating the same and semiconductor device application system |
| 01/30/2003 | WO2003009391A1 Trench-gate semiconductor device and its manufacturing method |
| 01/30/2003 | WO2003009390A1 Mis type transistor and its manufacturing method |
| 01/30/2003 | WO2003009388A2 Bipolar transistors and high electron mobility transistors |
| 01/30/2003 | WO2003009387A1 Semiconductor structure for edge mounting applications |
| 01/30/2003 | WO2003009386A1 Method for producing bonding wafer |