| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/30/2003 | US20030022428 Electromechanical memory having cell selection circuitry constructed with nanotube technology |
| 01/30/2003 | US20030022426 Manufacturing method of semiconductor device |
| 01/30/2003 | US20030022425 Structure and method for fabricating semiconductor structures and devices for optical filtering |
| 01/30/2003 | US20030022422 Semiconductor device and its manufacturing method |
| 01/30/2003 | US20030022421 Method and photo mask for manufacturing an array substrate |
| 01/30/2003 | US20030022419 Method of fabricating vias in solder pads of a ball grid array (BGA) substrate |
| 01/30/2003 | US20030022418 Sealing apparatus for semiconductor wafer and method of manufacturing semiconductor device by using the sealing apparatus |
| 01/30/2003 | US20030022416 Apparatus for the transport and equipping of substrates with semiconductor chips |
| 01/30/2003 | US20030022415 Method for manufacturing a semiconductor device haveing a metal-insulator-metal capacitor |
| 01/30/2003 | US20030022411 Nonvolatile semiconductor storage device and storage contents erase method therefor |
| 01/30/2003 | US20030022408 Fabrication of an arrayed waveguide grating device |
| 01/30/2003 | US20030022404 System processing time computation method, system processing time computation device, and recording medium with system processing time computation program recorded thereon |
| 01/30/2003 | US20030022403 Transfer method, method of manufacturing thin film devices, method of manufacturing integrated circuits, circuit board and manufacturing method thereof, electro-optical apparatus and manufacturing method thereof, IC card, and elecronic appliance |
| 01/30/2003 | US20030022402 Substrate processing apparatus and method for manufacturing semiconductor device |
| 01/30/2003 | US20030022401 Semiconductor device inspection method |
| 01/30/2003 | US20030022400 Method and apparatus for measuring thickness of thin film and device manufacturing method using same |
| 01/30/2003 | US20030022399 Method and apparatus of tool matching for a semiconductor manufacturing process |
| 01/30/2003 | US20030022398 Method and apparatus for determining and assessing chamber inconsistency in a tool |
| 01/30/2003 | US20030022397 Monitoring and test structures for silicon etching |
| 01/30/2003 | US20030022396 Exposure apparatus and control method therefor, and semiconductor device manufacturing method |
| 01/30/2003 | US20030022395 Structure and method for fabricating an integrated phased array circuit |
| 01/30/2003 | US20030022112 Photolithographic exposure of a pattern onto a nonplanar surface being structured perpendicular to the surface |
| 01/30/2003 | US20030022110 Degradation-free low-permittivity dielectrics patterning process for damascene |
| 01/30/2003 | US20030022109 Via negative-working radiation sensitive phenolic resin from formalin and bisphenol A; heat resistance; low water absorption; electroluminescent display |
| 01/30/2003 | US20030022103 Such as poly(maleic anhydride/hexafluorobutyl-5-norbornene-2-carboxylate/2,6-difluoro-1 -methylbenzylacrylate); for production of semiconductors/integrated circuits; photolithography |
| 01/30/2003 | US20030022097 High resolution; for use in deep ultraviolet photolithography; improved photosensitivity, line-edge roughness |
| 01/30/2003 | US20030022095 Negative type radiation sensitive resin composition |
| 01/30/2003 | US20030022078 A selected region(in which a gate electrode of transistor, a contact or via hole is formed) is selected from the pattern, and when a minute shape is present in selected region, the selected region is redivided into a pluralilty of ractangles |
| 01/30/2003 | US20030022077 Wafer is located in a plane where spherical aberrations of the projection column reduce a negative defocussing effect caused by chromatic aberrations in the projection column |
| 01/30/2003 | US20030022076 Semiconductive substrate processing methods and methods of processing a semiconductive substrate |
| 01/30/2003 | US20030022073 Fluoropolymer-coated photomasks for photolithography |
| 01/30/2003 | US20030022048 Rare earth oxide-group 2a oxide-manganate oxide composite |
| 01/30/2003 | US20030022008 Cooling plate and production method therefor |
| 01/30/2003 | US20030022003 Controlling distribution of defects |
| 01/30/2003 | US20030021982 Preparation of graded semiconductor films by the layer-by-layer assembly of nanoparticles |
| 01/30/2003 | US20030021971 Use of membrane properties to reduce residual stress in an interlayer region |
| 01/30/2003 | US20030021966 Electromechanical memory array using nanotube ribbons and method for making same |
| 01/30/2003 | US20030021910 Plasma vapor deposition using microwaves |
| 01/30/2003 | US20030021906 Method of coating solution on substrate surface using a slit nozzle |
| 01/30/2003 | US20030021896 Film forming method and film forming apparatus as well as silicon-based film, photovoltaic device and solar cell, sensor and image pick-up device using the same |
| 01/30/2003 | US20030021895 Method for producing coated substrates |
| 01/30/2003 | US20030021732 Multilayer semiconductor laser analyzer; vertical cavities |
| 01/30/2003 | US20030021671 Substrate processing apparatus, method of controlling substrate, and exposure apparatus |
| 01/30/2003 | US20030021658 Substrate transfer shuttle having a magnetic drive |
| 01/30/2003 | US20030021657 Semiconductor-manufacturing device having buffer mechanism and method for buffering semiconductor wafers |
| 01/30/2003 | US20030021571 Structure of and method for fabricating electro-optic devices utilizing a compliant substrate |
| 01/30/2003 | US20030021538 Structure and method for fabricating semiconductor structures and devices utilizing optical waveguides |
| 01/30/2003 | US20030021520 Structure and method of fabrication for an optical switch |
| 01/30/2003 | US20030021515 Semiconductor structure employing a multi-path wave guide to concurrently route signals |
| 01/30/2003 | US20030021479 Ferroelectric memory |
| 01/30/2003 | US20030021464 Semiconductor integrated circuit and testing method for the same |
| 01/30/2003 | US20030021463 Method and apparatus for circuit pattern inspection |
| 01/30/2003 | US20030021462 Defect detection method and its apparatus |
| 01/30/2003 | US20030021309 Method for producing highly accurate frequency and FM of a laser |
| 01/30/2003 | US20030021307 Laser treatment apparatus and method of manufacturing semiconductor device |
| 01/30/2003 | US20030021167 Non-volatile semiconductor memory device |
| 01/30/2003 | US20030021157 Data line disturbance free memory block divided flash memory and microcomputer having flash memory therein |
| 01/30/2003 | US20030021156 Semiconductor memory device and storage method thereof |
| 01/30/2003 | US20030021153 Nonvolatile memory device and data processing system |
| 01/30/2003 | US20030021141 Hybrid circuit having nanotube electromechanical memory |
| 01/30/2003 | US20030021140 Semiconductor memory |
| 01/30/2003 | US20030021138 256 meg dynamic random access memory |
| 01/30/2003 | US20030021079 Ceramic film and manufacturing method therefor, ferroelectric capacitors, semiconductor device and other devices |
| 01/30/2003 | US20030021077 Perimeter seal for backside cooling of substrates |
| 01/30/2003 | US20030021040 Catadioptric reduction lens |
| 01/30/2003 | US20030021026 Intrinsic birefringence compensation for below 200 nanometer wavelength optical lithography components with cubic crystalline structures |
| 01/30/2003 | US20030020928 Methods and apparatus for processing microelectronic workpieces using metrology |
| 01/30/2003 | US20030020917 Apparatus for characterization of microelectronic feature quality |
| 01/30/2003 | US20030020904 Apparatus and method for inspecting pattern |
| 01/30/2003 | US20030020894 Removable Optical pellicle |
| 01/30/2003 | US20030020893 Exposure apparatus and method, and device fabricating method |
| 01/30/2003 | US20030020892 Exposure apparatus and method |
| 01/30/2003 | US20030020890 Debris removing system for use in X-ray light source |
| 01/30/2003 | US20030020845 Protection circuit and method from electrostatic discharge of TFT-LCD |
| 01/30/2003 | US20030020800 Pattern drawing device and manufacturing method of pattern drawing body |
| 01/30/2003 | US20030020684 Device comprising an array of pixels |
| 01/30/2003 | US20030020520 Semiconductor device |
| 01/30/2003 | US20030020510 Evaluating pattern for measuring an erosion of a semiconductor wafer polished by a chemical mechanical polishing |
| 01/30/2003 | US20030020509 Lead formation, assembly strip test, and singulation system |
| 01/30/2003 | US20030020502 Contact probe member and manufacturing method of the same |
| 01/30/2003 | US20030020451 Semiconductor integrated circuit device and device for testing same |
| 01/30/2003 | US20030020445 EMC immune low drop regulator |
| 01/30/2003 | US20030020376 Surface acoustic wave element, surface acoustic wave device using the same, and method for manufacturing surface acoustic wave element and surface acoustic wave device |
| 01/30/2003 | US20030020225 Travelling worktable apparatus |
| 01/30/2003 | US20030020184 Substrate provided with an alignment mark, method of designing a mask, computer program, mask for exposing said mark, device manufacturing method, and device manufactured thereby |
| 01/30/2003 | US20030020183 Semiconductor device without use of chip carrier and method for making the same |
| 01/30/2003 | US20030020180 Copper technology for ULSI metallization |
| 01/30/2003 | US20030020179 Methods and apparatus for aligning an integrated circuit package with an interface |
| 01/30/2003 | US20030020178 Intergrated circuit chip bonding sheet and integrated circuit package |
| 01/30/2003 | US20030020177 Method of manufacturing a semiconductor device having a die pad without a downset |
| 01/30/2003 | US20030020176 Semiconductor device and manufacturing method thereof |
| 01/30/2003 | US20030020175 Semiconductor device and method for fabricating the same |
| 01/30/2003 | US20030020174 Semiconductor device |
| 01/30/2003 | US20030020172 Semiconductor device and process for production thereof |
| 01/30/2003 | US20030020170 Method for fabricating a wiring line assembly for a thin film transistor array panel substrate |
| 01/30/2003 | US20030020169 Copper technology for ULSI metallization |
| 01/30/2003 | US20030020168 Semiconductor device and manufacturing method thereof |
| 01/30/2003 | US20030020167 Semiconductor device having a capacitor and a metal interconnect layer with tungsten as a main constituent material and containing molybdenum |
| 01/30/2003 | US20030020166 BICMOS semiconductor integrated circuit device and fabrication process thereof |
| 01/30/2003 | US20030020165 Semiconductor device, and method for manufacturing the same |