| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/18/2003 | US6521513 Silicon wafer configuration and method for forming same |
| 02/18/2003 | US6521512 Method for fabricating a thin, free-standing semiconductor device layer and for making a three-dimensionally integrated circuit |
| 02/18/2003 | US6521511 Thin film device transfer method, thin film device, thin film integrated circuit device, active matrix board, liquid crystal display, and electronic apparatus |
| 02/18/2003 | US6521510 Method for shallow trench isolation with removal of strained island edges |
| 02/18/2003 | US6521509 Semiconductor device and method of manufacturing the same |
| 02/18/2003 | US6521508 Method of manufacturing a contact plug in a semiconductor device using selective epitaxial growth of silicon process |
| 02/18/2003 | US6521507 Selective deposition of undoped silicon film seeded in chlorine and hydride gas for a stacked capacitor |
| 02/18/2003 | US6521506 Varactors for CMOS and BiCMOS technologies |
| 02/18/2003 | US6521505 Radio frequency plasma etching |
| 02/18/2003 | US6521504 Semiconductor device and method of fabricating the same |
| 02/18/2003 | US6521503 Pretreatment to prevent substrate thermal shock, reduce wafer warping, breaking |
| 02/18/2003 | US6521502 Solid phase epitaxy activation process for source/drain junction extensions and halo regions |
| 02/18/2003 | US6521501 Method of forming a CMOS transistor having ultra shallow source and drain regions |
| 02/18/2003 | US6521500 Semiconductor device and method of manufacturing the same |
| 02/18/2003 | US6521499 Method for forming non-volatile memory with self-aligned contact |
| 02/18/2003 | US6521498 Manufacture or trench-gate semiconductor devices |
| 02/18/2003 | US6521497 Method of manufacturing a field effect transistor |
| 02/18/2003 | US6521496 Non-volatile memory semiconductor device including a graded, grown, high quality control gate oxide layer and associated methods |
| 02/18/2003 | US6521495 Method of fabricating a non-volatile memory device |
| 02/18/2003 | US6521494 Method of manufacturing semiconductor devices utilizing underlayer-dependency of deposition of capacitor electrode film, and semiconductor device |
| 02/18/2003 | US6521493 Semiconductor device with STI sidewall implant |
| 02/18/2003 | US6521492 Thin-film semiconductor device fabrication method |
| 02/18/2003 | US6521489 Preferred methods for producing electrical circuit elements used to control an electronic display |
| 02/18/2003 | US6521487 Method for making a thyristor |
| 02/18/2003 | US6521486 Method and system to reduce switching signal noise on a device and a device as result thereof |
| 02/18/2003 | US6521484 Mold injection method for semiconductor device |
| 02/18/2003 | US6521481 Method for controlling adhesive distribution in a flip-chip semiconductor product |
| 02/18/2003 | US6521480 Method for making a semiconductor chip package |
| 02/18/2003 | US6521478 Method for manufacturing a low-profile semiconductor device |
| 02/18/2003 | US6521475 Method of fabricating a liquid crystal-on-silicon backplane |
| 02/18/2003 | US6521474 Manufacturing method for reflection type liquid crystal display |
| 02/18/2003 | US6521473 Method of fabricating a liquid crystal display |
| 02/18/2003 | US6521470 Method of measuring thickness of epitaxial layer |
| 02/18/2003 | US6521469 Line monitoring of negative bias temperature instabilities by hole injection methods |
| 02/18/2003 | US6521466 Apparatus and method for semiconductor wafer test yield enhancement |
| 02/18/2003 | US6521393 Pattern formation method |
| 02/18/2003 | US6521392 Methods for measuring and adjusting illumination uniformity obtained from a charged-particle illumination-optical system |
| 02/18/2003 | US6521385 Using computers |
| 02/18/2003 | US6521355 Fluorescent dye, electronic component |
| 02/18/2003 | US6521324 Thermal transfer of microstructured layers |
| 02/18/2003 | US6521316 single crystalline silicon wafer, ingot, and producing method thereof |
| 02/18/2003 | US6521302 Method of reducing plasma-induced damage |
| 02/18/2003 | US6521300 Depositing a protective layer of silicon nitride (SiN) or silicon carbide (SiC), oxygen-containing plasma treating the surface at low radio frequency power, forming an adhesion promoter coating, and spin coating the dielectric layer |
| 02/18/2003 | US6521292 JMF type wafers |
| 02/18/2003 | US6521192 Mixtures of scavangers and transition metals, alloys and/or oxides in enclosures having inlets and outlets, used for purification of gases; reuse |
| 02/18/2003 | US6521118 Semiconductor etching process and apparatus |
| 02/18/2003 | US6521109 Device for detecting an analyte in a sample based on organic materials |
| 02/18/2003 | US6521105 Discharge is stable and film deposition speed and film thickness distribution are uniform even when a plurality of dielectric films are formed consecutively by using an opposing electrode, held at earth potential |
| 02/18/2003 | US6521102 Perforated anode for uniform deposition of a metal layer |
| 02/18/2003 | US6521081 Deposition shield for a plasma reactor |
| 02/18/2003 | US6521080 Method and apparatus for monitoring a process by employing principal component analysis |
| 02/18/2003 | US6521078 Sample separating apparatus and method, and substrate manufacturing method |
| 02/18/2003 | US6521069 Green sheet and manufacturing method thereof, manufacturing method of multi-layer wiring board, and manufacturing method of double-sided wiring board |
| 02/18/2003 | US6521050 Methods for evaluating advanced wafer drying techniques |
| 02/18/2003 | US6521049 Method for reducing gaseous species of contamination in wet processes |
| 02/18/2003 | US6521047 Process and apparatus for liquid delivery into a chemical vapor deposition chamber |
| 02/18/2003 | US6521042 Semiconductor growth method |
| 02/18/2003 | US6521041 Comprising a graded layer of silicon-germanium and a uniform etch-stop layer of silicon-germanium; for use on a monocrystalline silicon substrate |
| 02/18/2003 | US6521010 Filter, filtering frame, and semiconductor device manufacturing method and apparatus |
| 02/18/2003 | US6521007 Clean box |
| 02/18/2003 | US6520847 Polishing pad having a grooved pattern for use in chemical mechanical polishing |
| 02/18/2003 | US6520844 Method of thinning semiconductor wafer capable of preventing its front from being contaminated and back grinding device for semiconductor wafers |
| 02/18/2003 | US6520840 CMP slurry for planarizing metals |
| 02/18/2003 | US6520839 Load and unload station for semiconductor wafers |
| 02/18/2003 | US6520833 Oscillating fixed abrasive CMP system and methods for implementing the same |
| 02/18/2003 | US6520778 Microelectronic contact structures, and methods of making same |
| 02/18/2003 | US6520733 Substrate transport and apparatus |
| 02/18/2003 | US6520727 Modular sorter |
| 02/18/2003 | US6520726 Apparatus and method for using a robot to remove a substrate carrier door |
| 02/18/2003 | US6520348 Multiple inclined wafer holder for improved vapor transport and reflux for sealed ampoule diffusion process |
| 02/18/2003 | US6520338 Wafer carrier having a low tolerance build-up |
| 02/18/2003 | US6520315 Gripper assembly |
| 02/18/2003 | US6520248 Heat sink having bonded cooling fins |
| 02/18/2003 | US6520191 Carrier for cleaning silicon wafers |
| 02/18/2003 | US6520189 CVD apparatus |
| 02/18/2003 | US6520015 Tuning fork gyroscope |
| 02/18/2003 | US6519869 Method and apparatus for drying semiconductor wafers |
| 02/18/2003 | US6519846 Chip size package and method of fabricating the same |
| 02/18/2003 | US6519845 Wire bonding to dual metal covered pad surfaces |
| 02/18/2003 | US6519843 Method of forming a chip carrier by joining a laminate layer and stiffener |
| 02/18/2003 | US6519842 Method for mounting semiconductor device |
| 02/18/2003 | US6519840 Apparatus and method for mounting semiconductor chips on a substrate |
| 02/18/2003 | CA2229975C Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method |
| 02/13/2003 | WO2003013198A1 Antenna structure for inductively coupled plasma generator |
| 02/13/2003 | WO2003012951A2 Esd protection devices for a differential pair of transistors |
| 02/13/2003 | WO2003012944A1 Semiconductor structures and devices utilizing optical waveguides |
| 02/13/2003 | WO2003012882A2 Effecting intersignal treatment with a plurality of signals |
| 02/13/2003 | WO2003012879A1 Semiconductor device with inductive component and method of making |
| 02/13/2003 | WO2003012878A1 Semiconductor device |
| 02/13/2003 | WO2003012876A1 Gate electrodes and the formation thereof |
| 02/13/2003 | WO2003012873A1 Soi wafer producing method, and wafer separating jig |
| 02/13/2003 | WO2003012872A1 Semiconductor integrated circuit device |
| 02/13/2003 | WO2003012871A1 Compound semiconductor devices and silicon devices |
| 02/13/2003 | WO2003012870A1 Semiconductor device |
| 02/13/2003 | WO2003012868A1 Semiconductor device and its manufacturing method |
| 02/13/2003 | WO2003012864A1 Electronic assembly including a die having an integrated circu it and a layer of diamond and methods of producing the same |
| 02/13/2003 | WO2003012863A1 Semiconductor device and its manufacturing method |
| 02/13/2003 | WO2003012862A1 Integrating compound semiconductor structures and devices |
| 02/13/2003 | WO2003012861A1 Semiconductor apparatus |
| 02/13/2003 | WO2003012860A2 Boron-doped titanium nitride layer for high aspect ratio semiconductor devices |