Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/2003
02/27/2003US20030037457 Particle removal apparatus
02/27/2003US20030037456 Processing platform with integrated particle removal system
02/27/2003US20030037433 Base for heat sink
02/27/2003US20030037400 Factory interface particle removal platform
02/27/2003DE20219805U1 Compact electronic processor chip cooling system uses liquid to dissipate heat energy
02/27/2003CA2457691A1 Systems for wafer level burn-in of electronic devices
02/27/2003CA2457690A1 Providing photonic control over wafer borne semiconductor devices
02/27/2003CA2457685A1 Providing current control over wafer borne semiconductor devices using overlayer patterns
02/27/2003CA2457680A1 Methods of conducting wafer level burn-in of electronic devices
02/27/2003CA2457675A1 Providing current control over wafer borne semiconductor devices using trenches
02/27/2003CA2456225A1 Forming a semiconductor structure using a combination of planarizing methods and electropolishing
02/26/2003EP1286579A1 Multilayer printed wiring board
02/26/2003EP1286398A1 Misfet
02/26/2003EP1286392A2 Method for manufacturing semiconductor substrate, semiconductor substrate, electrooptic device and electronic apparatus
02/26/2003EP1286391A1 Method and apparatus for chucking a substrate
02/26/2003EP1286390A1 Ceramic substrate for semiconductor fabricating device
02/26/2003EP1286389A2 Method and apparatus for testing semiconductor wafers
02/26/2003EP1286388A1 Aluminium hardmask for dielectric ETCH
02/26/2003EP1286387A2 Method to reduce photoresist contamination from silicon carbide films
02/26/2003EP1286386A1 Thin film transistor fabrication method
02/26/2003EP1286385A2 Device for debonding thin wafers
02/26/2003EP1286381A2 Means for monitoring process conditions change in electron beam systems and related monitoring methods
02/26/2003EP1286357A1 Thin film transistor memory device
02/26/2003EP1286356A2 One-time programmable memory
02/26/2003EP1286354A1 Multi-bit magnetic memory cells
02/26/2003EP1286221A2 Positioning apparatus
02/26/2003EP1286220A2 Exposure apparatus and exposing method
02/26/2003EP1286218A2 Lithographic patterning using a high transmission attenuated phase-shift mask and multiple exposures of optimised coherence
02/26/2003EP1286217A2 Phase shift mask blanks, their manufacture and use
02/26/2003EP1286168A1 Member exchanger, method of controlling member exchanger, ic inspection method, ic handler, and ic inspector
02/26/2003EP1286131A1 Coordinate measuring table and coordinate measuring machine
02/26/2003EP1285977A2 Apparatus and method for insulating a seal in a process chamber
02/26/2003EP1285466A2 Trench-gate semiconductor device and method of making the same
02/26/2003EP1285464A2 Silicon carbide metal-semiconductor field effect transistors and methods of fabricating silicon carbide metal-semiconductor field effect transistors
02/26/2003EP1285463A2 Fuse link
02/26/2003EP1285461A1 Embrittled substrate and method for making same
02/26/2003EP1285460A2 Method of removing rie lag in a deep trench silicon etching step
02/26/2003EP1285459A2 Method for charging and discharging a process tank
02/26/2003EP1285395A1 Semi-physical modeling of hemt dc-to-high frequency electrothermal characteristics
02/26/2003EP1285392A1 Hybrid, non linear, large signal microwave/millimeter wave model
02/26/2003EP1285312A1 Method of controlling photoresist stripping process and regenerating photoresist stripper composition based on near infrared spectrometer
02/26/2003EP1285311A2 Developing methods for photoresist; apparatuses for coating
02/26/2003EP1285310A1 Method of controlling metallic layer etching process and regenerating etchant for metallic layer etching process based on near infrared spectrometer
02/26/2003EP1285222A1 Interferometric apparatus and method
02/26/2003EP1285221A1 In-situ mirror characterization
02/26/2003EP1284847A1 Wire saw and process for slicing multiple semiconductor ingots
02/26/2003EP1284842A1 Polishing pads for chemical mechanical planarization
02/26/2003EP1284841A1 Grooved polishing pads for chemical mechanical planarization
02/26/2003EP1284840A2 Pneumatic diaphragm head having an independent retaining ring and multi-region pressure control, and method to use the same
02/26/2003EP1284806A1 Gas cabinet assembly comprising sorbent-based gas storage and delivery system
02/26/2003EP1218569B1 Galvanizing solution for the galvanic deposition of copper
02/26/2003EP1175680B1 Ramped or stepped gate channel erase for flash memory application
02/26/2003EP1090335B1 System and method for controlling the manufacture of discrete parts in semiconductor fabrication using model predictive control
02/26/2003EP0985021B1 Non-corrosive stripping and cleaning composition
02/26/2003EP0980588B1 Device based on quantic islands and method for making same
02/26/2003EP0890189B1 Dynamic feedback electrostatic wafer chuck
02/26/2003EP0880818B1 Low voltage electrostatic clamp for substrates such as dielectric substrates
02/26/2003EP0873575B1 Device for producing oxidic thin films
02/26/2003EP0862788B1 Method of producing a vertically integrated semiconductor component
02/26/2003EP0643151B1 Apparatus and system for arc ion plating
02/26/2003CN1399811A Method and apparatus for reducing stress across capacitors used in integrated circuits
02/26/2003CN1399796A Method and apparatus for personalization of semiconductor
02/26/2003CN1399795A Wire for semiconductor and manufacturing method thereof
02/26/2003CN1399794A Power semiconductor die attach process using conductive adhesive film
02/26/2003CN1399793A Method in fabrication of silicon bipolay transistor
02/26/2003CN1399792A Method for etching bismuth-containing oxide films
02/26/2003CN1399791A Methods of formation of silicon nanostructure, silicon quantum wire array and devices based theron
02/26/2003CN1399790A Method and apparatus for supercritical processing of multiple workpieces
02/26/2003CN1399668A Composition and method for planarizing surfaces
02/26/2003CN1399581A High rpm megasonic cleaning
02/26/2003CN1399509A Prepn process of soldering bead lattice array board
02/26/2003CN1399508A Method and fixture for preparing high-performace soldering bead lattic array board
02/26/2003CN1399504A Active matrix organic electroluminescence device and its simplified manufacture process
02/26/2003CN1399465A Remote control signal receiving module and its making process
02/26/2003CN1399407A Bootstrap-complementary transmission gate charge-restoring low-power consumption circuit structure
02/26/2003CN1399350A Vertical channel FET and its manufacture
02/26/2003CN1399349A Vertical channel FET and its manufacture
02/26/2003CN1399346A Structure and manufacture of complementary metal-semiconductor image sensor
02/26/2003CN1399344A 非易失性半导体存储装置 Nonvolatile semiconductor memory device
02/26/2003CN1399343A 非易失性半导体存储装置 Nonvolatile semiconductor memory device
02/26/2003CN1399342A 非易失性半导体存储装置 Nonvolatile semiconductor memory device
02/26/2003CN1399341A Nitride read-only memory unit structure with double top oxide layer and its manufacture
02/26/2003CN1399340A 半导体存储器件 A semiconductor memory device
02/26/2003CN1399339A Memory array with metal silicide isolator
02/26/2003CN1399337A Operation process of semiconductor device
02/26/2003CN1399335A Semiconductor device and its manufacture
02/26/2003CN1399331A Nitride ROM and its manufacture
02/26/2003CN1399330A Manufacture of electrical insulation layer on bit line of flash memory
02/26/2003CN1399329A 半导体器件 Semiconductor devices
02/26/2003CN1399328A 半导体器件 Semiconductor devices
02/26/2003CN1399327A 半导体器件 Semiconductor devices
02/26/2003CN1399326A Double-swing charge-restoring low-power consumption circuit structure
02/26/2003CN1399325A Semiconductor device and its manufacture
02/26/2003CN1399324A Ferroelectric capacitor and its making process and ferroelectric memory unit making process
02/26/2003CN1399322A Test fixture for surface mount device package
02/26/2003CN1399321A Jointer
02/26/2003CN1399320A Binding force controlling device and method
02/26/2003CN1399319A MOS transistor and its manufacture
02/26/2003CN1399318A Method of reducing pore faults in polysilicon layer
02/26/2003CN1399317A Etching process and etching liquid
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