Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/2003
06/12/2003US20030109952 Method and apparatus for inspecting defects in a semiconductor wafer
06/12/2003US20030109945 Apparatus and method for automatically controlling semiconductor manufacturing process in semiconductor factory automation system
06/12/2003US20030109393 Method of ashing semiconductor device having metal interconnection
06/12/2003US20030109209 Polishing pad
06/12/2003US20030109205 Substrate treating apparatus
06/12/2003US20030109200 Constant pH polish and scrub
06/12/2003US20030109197 Polishing pad with transparent window having reduced window leakage for a chemical mechanical polishing apparatus
06/12/2003US20030109196 Endpoint detection system for wafer polishing
06/12/2003US20030109195 Oscillating fixed abrasive CMP system and methods for implementing the same
06/12/2003US20030109183 Process for bonding and electrically connecting microsystems integrated in several distinct substrates
06/12/2003US20030109148 Technique for growing single crystal material on top of an insulator
06/12/2003US20030109147 Method of forming silicon oxide layer and method of manufacturing thin film transistor thereby
06/12/2003US20030109146 Oxynitride device and method using non-stoichiometric silicon oxide
06/12/2003US20030109145 Methods of forming semiconductor devices
06/12/2003US20030109144 Selectively etching silicon using fluorine without plasma
06/12/2003US20030109143 Process for selectively etching dielectric layers
06/12/2003US20030109141 Wafer scribing method and wafer scribing device
06/12/2003US20030109140 Buried strap formation method for sub-150 nm best DRAM devices
06/12/2003US20030109139 Silicon semiconductor wafer, and process for producing a multiplicity of semiconductor wafers
06/12/2003US20030109138 Method of etching tantalum
06/12/2003US20030109137 Method for manufacturing semiconductor device
06/12/2003US20030109136 Semiconductor device and method of manufacturing the same
06/12/2003US20030109135 Method for forming capacitor of semiconductor device
06/12/2003US20030109134 Method of manufacturing semiconductor device and method of determining film formation time, chamber, chemical vapor deposition apparatus and boat thereof, etching apparatus, and film formation process system
06/12/2003US20030109133 Process for fabricating an electronic component incorporating an inductive microcomponent
06/12/2003US20030109132 Method for forming dual damascene structure in semiconductor device
06/12/2003US20030109131 Method of reducing plasma charging damage during dielectric etch process for dual damascene interconnect structures
06/12/2003US20030109130 Dual-gate process with CMP
06/12/2003US20030109129 Semiconductor device
06/12/2003US20030109128 Semiconductor device and method of manufacturing the same
06/12/2003US20030109127 Semiconductor device and method for fabricating the same
06/12/2003US20030109126 Method of producing semiconductor integrated circuit device and method of producing multi-chip module
06/12/2003US20030109124 Semiconductor device and method for fabricating the same
06/12/2003US20030109123 Method of forming a via hole in a semiconductor device
06/12/2003US20030109122 Thick thermal oxide layers and isolation regions in a silicon-containing substrate for high voltage applications
06/12/2003US20030109121 Multiple work function gates
06/12/2003US20030109120 Dummy metal pattern method and apparatus
06/12/2003US20030109119 Fabrication of ultra shallow junctions from a solid source with fluorine implantation
06/12/2003US20030109118 Integrated inductor in semiconductor manufacturing
06/12/2003US20030109117 Semiconductor device and manufacturing method thereof
06/12/2003US20030109116 Method of forming silicide
06/12/2003US20030109115 High resistivity silicon wafer with thick epitaxial layer and method of producing same
06/12/2003US20030109114 Method for forming insulative film, a semiconductor device and method for manufacturing the same
06/12/2003US20030109113 Method of making identification code of ROM and structure thereof
06/12/2003US20030109112 Method of manufacturing and structure of semiconductor device with field oxide structure
06/12/2003US20030109111 Method for forming an ONO structure in one chamber
06/12/2003US20030109110 Method for forming capacitor of a semiconductor device
06/12/2003US20030109109 Bipolar device having non-uniform depth base-emitter junction
06/12/2003US20030109108 Self aligned compact bipolar junction transistor layout, and method of making same
06/12/2003US20030109107 Method for forming nitride spacer by using atomic layer deposition
06/12/2003US20030109106 Noval chemistry and method for the selective removal of high-k dielectrics
06/12/2003US20030109105 Transistor with improved source/drain extension dopant concentration
06/12/2003US20030109104 Method for preventing bit line to bit line leakage in memory cell
06/12/2003US20030109103 Method for forming a capacitor of a semiconductor device
06/12/2003US20030109102 Method of manufacturing semiconductor device and semiconductor device
06/12/2003US20030109101 Method for roughening a surface of a semiconductor substrate
06/12/2003US20030109100 Semiconductor device having capacitive element and manufacturing method thereof
06/12/2003US20030109098 Method for making semiconductor device
06/12/2003US20030109097 Method for fabricating semiconductor device
06/12/2003US20030109093 Multi-state non-volatile integrated circuit memory systems that employ dielectric storage elements
06/12/2003US20030109092 Surface smoothing device and method thereof
06/12/2003US20030109091 Quantum size effect type micro electron gun and flat display unit using it and method for manufacturing the same
06/12/2003US20030109090 Intrinsic dual gate oxide mosfet using a damascene gate process
06/12/2003US20030109089 Methods for fabricating low CHC degradation MOSFET transistors
06/12/2003US20030109088 Semiconductor device and method for fabricating the same
06/12/2003US20030109087 Method for manufacturing a thin film transistor of a semiconductor device
06/12/2003US20030109086 Manufacturing method for field-effect transistor
06/12/2003US20030109085 Semiconductor device, and method of forming the same
06/12/2003US20030109084 Semiconductor device and method of manufacturing the same
06/12/2003US20030109081 Ozone treatment of a ground semiconductor die to improve adhesive bonding to a substrate
06/12/2003US20030109080 Flip chip underfill process
06/12/2003US20030109079 Semiconductor device manufacturing method and semiconductor device
06/12/2003US20030109078 Semiconductor device, method for manufacturing the same, and method for mounting the same
06/12/2003US20030109077 Method for fabricating surface acoustic wave filter packages
06/12/2003US20030109076 Method for producing group-III nitride compound semiconductor device
06/12/2003US20030109075 System and method for cleaning ozone oxidation
06/12/2003US20030109074 Display device and a method for manufacturing the same
06/12/2003US20030109072 Process for producing a component module
06/12/2003US20030109071 Method of determining heat treatment conditions
06/12/2003US20030109070 Method and apparatus for inspecting defects in a semiconductor wafer
06/12/2003US20030109069 Seed layer processes for MOCVD of ferroelectric thin films on high-k gate oxides
06/12/2003US20030108823 Use of ethylene carbonate and/or propylene carbonate treatment using ozone, for the stripping and removal of resist films
06/12/2003US20030108822 A positive-working photoresist containing a quinone diazide group containing photosensitizer and an alkali soluble novolak resin developed by a developer using a quaternary ammonium hydroxide
06/12/2003US20030108811 Positive resist composition
06/12/2003US20030108809 An acrylate ester resin that increases a solubility rate in an alkali developing solution by the action of a photoacid generator
06/12/2003US20030108805 Aligning mask segments to provide an assembled mask for producing oled devices
06/12/2003US20030108803 Method of manufacturing phase shift mask, phase shift mask and apparatus
06/12/2003US20030108738 Clear adhesive sheet
06/12/2003US20030108715 Method for bonding and debonding films using a high-temperature polymer
06/12/2003US20030108674 Forming copper/tungsten films with titanium/tantalum-silicon nitride barrier/adhesion layer via pulses of pentakis-(dimethylamino)-tantalum/titanium, silane, and ammonia
06/12/2003US20030108670 Analyzing absorption index of solution of lead acetate/ diethylene glycol, methyl ether; for ferroelectric lead germanium oxide (PGO) thin films for production of integrated circuits
06/12/2003US20030108664 Depositing silver metal precursor into portion of recessed feature, heating to temperature of not greater than 400 degrees C to convert precursor to conductor having resistivity of not greater than 10 times resistivity of metal
06/12/2003US20030108417 Semiconductor chip assembly system with a suction nipple for removing a semiconductor chip
06/12/2003US20030108415 Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
06/12/2003US20030108409 Method for charging and discharging a process tank
06/12/2003US20030108407 Interbay transportation system and method of interbay transportation
06/12/2003US20030108349 Substrate processing apparatus
06/12/2003US20030108235 Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data
06/12/2003US20030108152 X-ray topographic system
06/12/2003US20030107940 Row access information transfer device using internal wiring of a memory cell array
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