| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/24/2003 | US6583015 Gate technology for strained surface channel and strained buried channel MOSFET devices |
| 06/24/2003 | US6583014 Horizontal surrounding gate MOSFETS |
| 06/24/2003 | US6583013 Method for forming a mixed voltage circuit having complementary devices |
| 06/24/2003 | US6583012 Semiconductor devices utilizing differently composed metal-based in-laid gate electrodes |
| 06/24/2003 | US6583011 Method for forming damascene dual gate for improved oxide uniformity and control |
| 06/24/2003 | US6583010 Trench transistor with self-aligned source |
| 06/24/2003 | US6583009 Innovative narrow gate formation for floating gate flash technology |
| 06/24/2003 | US6583008 Nonvolatile semiconductor memory device and manufacturing method thereof |
| 06/24/2003 | US6583007 Reducing secondary injection effects |
| 06/24/2003 | US6583006 Method to reduce floating grain defects in dual-sided container capacitor fabrication |
| 06/24/2003 | US6583005 Method of manufacturing a semiconductor memory device with a buried bit line |
| 06/24/2003 | US6583004 Semiconductor memory device and method for manufacturing the same |
| 06/24/2003 | US6583003 Method of fabricating 1T1R resistive memory array |
| 06/24/2003 | US6583002 Semiconductor processing methods of forming integrated circuitry memory devices, methods of forming capacitor containers, methods of making electrical connection to circuit nodes and related integrated circuitry |
| 06/24/2003 | US6583001 Method for introducing an equivalent RC circuit in a MOS device using resistive paths |
| 06/24/2003 | US6583000 Process integration of Si1-xGex CMOS with Si1-xGex relaxation after STI formation |
| 06/24/2003 | US6582999 Controlled cleavage process using pressurized fluid |
| 06/24/2003 | US6582998 Method for fabricating nonvolatile semiconductor memory device |
| 06/24/2003 | US6582997 ESD protection scheme for outputs with resistor loading |
| 06/24/2003 | US6582996 Semiconductor thin film forming method |
| 06/24/2003 | US6582995 Method for fabricating a shallow ion implanted microelectronic structure |
| 06/24/2003 | US6582994 Passivation layer for packaged integrated circuits |
| 06/24/2003 | US6582993 Method of underfilling semiconductor device |
| 06/24/2003 | US6582991 Semiconductor device and method for fabricating the same |
| 06/24/2003 | US6582990 Wafer level underfill and interconnect process |
| 06/24/2003 | US6582989 Photolithographically-patterned out-of-plane coil structures and method of making |
| 06/24/2003 | US6582988 Method for forming micro lens structures |
| 06/24/2003 | US6582986 Single step pendeo-and lateral epitaxial overgrowth of group III-nitride epitaxial layers with group III-nitride buffer layer and resulting structures |
| 06/24/2003 | US6582983 Method and wafer for maintaining ultra clean bonding pads on a wafer |
| 06/24/2003 | US6582982 Composition for wiring, a wiring using the composition, manufacturing method thereof, a display using the wiring and a manufacturing method thereof |
| 06/24/2003 | US6582981 Method of using a tunneling diode in optical sensing devices |
| 06/24/2003 | US6582978 Position detection mark and position detection method |
| 06/24/2003 | US6582976 Semiconductor device manufacturing method capable of reliable inspection for hole opening and semiconductor devices manufactured by the method |
| 06/24/2003 | US6582975 Method of controlling the deposition of inter-level dielectric layers based upon electrical performance tests, and system for accomplishing same |
| 06/24/2003 | US6582974 Method for forming a dual damascene aperture while employing a peripherally localized intermediate etch stop layer |
| 06/24/2003 | US6582973 Method for controlling a semiconductor manufacturing process |
| 06/24/2003 | US6582972 Low temperature oxidizing method of making a layered superlattice material |
| 06/24/2003 | US6582891 Process for reducing edge roughness in patterned photoresist |
| 06/24/2003 | US6582889 A two layer structure resist pattern with a T-shaped cross section, overhang portions is heat treated so that it inclines downward |
| 06/24/2003 | US6582883 Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof |
| 06/24/2003 | US6582860 Transferring the images of openings onto photoresists |
| 06/24/2003 | US6582827 Glass; high and low conductivity layers; subsurface melting layer as heat reservoir; semiconductors |
| 06/24/2003 | US6582777 Exposure to radiation |
| 06/24/2003 | US6582767 Microstamping pattern of alkanethiol to surface; surface treating silicon polymer with aqueous solution of metal salt; electroless deposition |
| 06/24/2003 | US6582761 Condensation and coupling of organometallic and/or organosilicon compound |
| 06/24/2003 | US6582757 Method for tungsten deposition without fluorine-contaminated silicon substrate |
| 06/24/2003 | US6582660 Control system for active programmable electronic microbiology system |
| 06/24/2003 | US6582623 CMP composition containing silane modified abrasive particles |
| 06/24/2003 | US6582619 Methods and apparatuses for trench depth detection and control |
| 06/24/2003 | US6582618 Method of determining etch endpoint using principal components analysis of optical emission spectra |
| 06/24/2003 | US6582617 Plasma etching using polycarbonate mask and low-pressure high density plasma |
| 06/24/2003 | US6582616 Method for preparing ball grid array board |
| 06/24/2003 | US6582580 Substrate plating apparatus |
| 06/24/2003 | US6582579 Methods for repairing defects on a semiconductor substrate |
| 06/24/2003 | US6582578 Method and associated apparatus for tilting a substrate upon entry for metal deposition |
| 06/24/2003 | US6582569 A DC magnetron sputter reactor for sputtering copper, its method of use, and shields and other parts promoting self-ionized plasma (SIP) sputtering. Also, a method of coating copper into a narrow and deep via or trench using SIP |
| 06/24/2003 | US6582568 A fixture configured to position a wafer adjacent a plasma; a first target comprising a metal; a second target comprising a first material; and a sputtering device adapted to (i) sputter said metal from said first target onto a surface of said wafer |
| 06/24/2003 | US6582551 Apparatus for plasma etching having rotating coil responsive to slide valve rotation |
| 06/24/2003 | US6582541 Monolithic ceramic substrate, manufacturing and designing methods therefor, and electronic device |
| 06/24/2003 | US6582525 Condensing steam on first surface to form a liquid boundary layer, to heat the surface, ozone diffuses through the boundary layer and reacts with material on the surface, maintaining condensation of steam; cleaning wafers |
| 06/24/2003 | US6582524 Dipping a wafer in a washing solution; replacing the washing solution by first chemical solution containing ammonia, hydrogen peroxide, water, dipping the wafer in this solution, eplacing first with second solution lower in concentration |
| 06/24/2003 | US6582512 Method of forming three-dimensional photonic band structures in solid materials |
| 06/24/2003 | US6582296 Ventilating method and ventilating system for semiconductor manufacturing apparatuses |
| 06/24/2003 | US6582288 Diaphragm for chemical mechanical polisher |
| 06/24/2003 | US6582281 Semiconductor processing methods of removing conductive material |
| 06/24/2003 | US6582280 Fine particulate of quartz and chelating agent is blown mainly against a rear surface opposite from an element forming surface of a wafer to create mechanically induced strain in the wafer |
| 06/24/2003 | US6582279 Apparatus and method for reclaiming a disk substrate for use in a data storage device |
| 06/24/2003 | US6582223 Pickup apparatus for semiconductor chips |
| 06/24/2003 | US6582221 Wafer boat and method for treatment of substrates |
| 06/24/2003 | US6582182 Semiconductor wafer storage kiosk |
| 06/24/2003 | US6582178 Mini-modual manufacturing environmental |
| 06/24/2003 | US6582175 Robot for handling semiconductor wafers |
| 06/24/2003 | US6582174 Substrate processing apparatus and substrate processing method |
| 06/24/2003 | US6582137 Polyimide coating process with dilute TMAH and DI-water backrinse |
| 06/24/2003 | US6582085 Semiconductor chip and its manufacturing method |
| 06/24/2003 | US6581820 Lead bonding method for SMD package |
| 06/24/2003 | US6581817 Die bonding device |
| 06/24/2003 | US6581816 Capillary for bonding copper wires between a semiconductor circuit chip and a corresponding terminal connector of a semiconductor device |
| 06/24/2003 | US6581635 Pilot-type two-port vacuum valve |
| 06/24/2003 | US6581623 Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels |
| 06/24/2003 | US6581586 Cutting machine |
| 06/24/2003 | US6581283 Method for forming pin-form wires and the like |
| 06/24/2003 | US6581280 Method for filling high aspect ratio via holes in electronic substrates |
| 06/24/2003 | US6581279 Method of collectively packaging electronic components |
| 06/24/2003 | US6581278 Process and support carrier for flexible substrates |
| 06/24/2003 | US6581275 Fabricating an electrostatic chuck having plasma resistant gas conduits |
| 06/24/2003 | US6581264 Transportation container and method for opening and closing lid thereof |
| 06/24/2003 | CA2228552C Wafer processing apparatus and method, wafer convey robot, semiconductor substrate fabrication method, and semiconductor fabrication apparatus |
| 06/24/2003 | CA2222602C Electronic modules manufacturing |
| 06/19/2003 | WO2003050909A1 Circuit board device and its manufacturing method |
| 06/19/2003 | WO2003050884A1 Dual gate oxide high-voltage semiconductor device and method for forming the same |
| 06/19/2003 | WO2003050883A2 Silicon on insulator device and method of making the same |
| 06/19/2003 | WO2003050881A2 Super self-aligned collector device for mono-and hetero bipolar junction transistors, and method of making same |
| 06/19/2003 | WO2003050879A1 Trenched semiconductor devices and their manufacture |
| 06/19/2003 | WO2003050876A2 Self aligned compact bipolar junction transistor layout, and method of making same |
| 06/19/2003 | WO2003050871A1 Mos semiconductor device |
| 06/19/2003 | WO2003050870A1 Diffusion barrier |
| 06/19/2003 | WO2003050869A1 Packaged integrated circuit and method therefor |
| 06/19/2003 | WO2003050868A2 Method for producing a layered assembly and a layered assembly |
| 06/19/2003 | WO2003050867A2 Planarity detection methods and apparatus for electrochemical mechanical processing systems |