Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2003
10/30/2003US20030203577 Non-oxidizing spacer densification method for manufacturing semiconductor devices
10/30/2003US20030203576 Method of manufacturing a transistor
10/30/2003US20030203575 Single-poly eprom and method for forming the same
10/30/2003US20030203574 Method of manufacturing nonvolatile memory cell
10/30/2003US20030203573 Semiconductor device including trench with at least one of an edge of an opening and a bottom surface being round
10/30/2003US20030203572 Nonvolatile semiconductor memory device and its manufacturing method
10/30/2003US20030203571 Non-volatile memory cells with selectively formed floating gate
10/30/2003US20030203570 Method for fabricating capacitor using electrochemical deposition and wet etching
10/30/2003US20030203569 Dram cell
10/30/2003US20030203568 Semiconductor device manufacturing method and semiconductor device
10/30/2003US20030203567 Method of fabricating capacitor with two step annealing in semiconductor device
10/30/2003US20030203566 Semiconductor constructions, and methods of forming semiconductor constructions
10/30/2003US20030203565 Use of gate electrode workfunction to improve DRAM refresh
10/30/2003US20030203564 Methods of forming semiconductor constructions
10/30/2003US20030203563 SRAM cell and method for fabricating the same
10/30/2003US20030203562 Power switching transistor and method of manufacture for a fluid ejection device
10/30/2003US20030203561 Dual-gate CMOS semiconductor device and dual-gate CMOS semiconductor device manufacturing method
10/30/2003US20030203560 CMOS transistor having different PMOS and NMOS gate electrode structures and method of fabrication thereof
10/30/2003US20030203559 BI-CMOS integrated circuit
10/30/2003US20030203557 Method and structure for an improved floating gate memory cell
10/30/2003US20030203556 Semiconductor device and method for facticating the same
10/30/2003US20030203555 Reduced area intersection between electrode and programming element
10/30/2003US20030203554 Semiconductor device and method for fabricating the same
10/30/2003US20030203553 Method of cleaning damascene structure of semiconductor wafer during fabrication of semiconductor device
10/30/2003US20030203552 High voltage power MOSFET having a voltage sustaining region that includes doped columns formed by trench etching and diffusion from regions of oppositely doped polysilicon
10/30/2003US20030203550 Method of angle implant to improve transistor reverse narrow width effect
10/30/2003US20030203548 Method of fabricating integrated circuitry, method of forming a local interconnect, and method of forming a conductive line.
10/30/2003US20030203547 Process for producing semiconductor article
10/30/2003US20030203546 SOI transistor element having an improved backside contact and method of forming the same
10/30/2003US20030203545 Method of manufacturing a semiconductor device
10/30/2003US20030203543 Method of manufacturing surface shape recognition sensor
10/30/2003US20030203542 Protected bond fingers
10/30/2003US20030203541 Lead frame and method for fabricating resin-encapsulated semiconductor device using the same
10/30/2003US20030203539 Partially patterned lead frames and methods of making and using the same in semiconductor packaging
10/30/2003US20030203538 Method and apparatus for cutting semiconductor wafers
10/30/2003US20030203536 Flip chip underfill process
10/30/2003US20030203535 Flip-chip package with optimized encapsulant adhesion and method
10/30/2003US20030203534 Method for making interactive information devices with spacer elements
10/30/2003US20030203533 Single mask trench fred with enlarged schottky area
10/30/2003US20030203531 Defect-free semiconductor templates for epitaxial growth and method of making same
10/30/2003US20030203528 Method for manufacturing a dynamic quantity detection device
10/30/2003US20030203526 Two layer mirror for LCD-on -silicon products and method of fabrication thereof
10/30/2003US20030203523 Method of driving a light emitting device
10/30/2003US20030203521 Semiconductor device and manufacturing method thereof including a probe test step and a burn-in test step
10/30/2003US20030203519 Evaluation method of IG effectivity in semiconductor silicon substrates
10/30/2003US20030203517 Method of manufacturing semiconductor device
10/30/2003US20030203516 Method to determine a complete etch in integrated devices
10/30/2003US20030203515 Method of forming a shallow trench isolation structure
10/30/2003US20030203514 Method for determining a preceding wafer, method for determining a measuring wafer, and method for adjusting the number of wafers
10/30/2003US20030203513 Chemical vapor deposition process for fabricating layered superlattice materials
10/30/2003US20030203512 Method for fabricating semiconductor memory device
10/30/2003US20030203511 Method of manufacture of ferroelectric memory
10/30/2003US20030203510 Protective layers for MRAM devices
10/30/2003US20030203509 Method of fabricating a self-aligned magnetic tunneling junction and via contact
10/30/2003US20030203508 Method for enhancing electrode surface area in DRAM cell capacitors
10/30/2003US20030203321 Method for dual-damascene formation using a via plug
10/30/2003US20030203320 Lithography pattern shrink process and articles
10/30/2003US20030203319 Method of fabricating sub-lithographic sized line and space patterns for nano-imprinting lithography
10/30/2003US20030203318 Exposure method based on multiple exposure process
10/30/2003US20030203316 Capable of forming a high resolution resist pattern with good shape and little film thinning
10/30/2003US20030203314 Applying initiator component to substrate; applying a resist to initiator layer; patterning resist resulting in patterned resist; applying a hard mask material to the patterned resist; selectively curing parts of the hard mask; removing
10/30/2003US20030203306 For forming photoresist patterns to be used in photolithography
10/30/2003US20030203305 For use in an ultra-micro lithography
10/30/2003US20030203295 Wafer exposure apparatus includes special wafer cooling unit, an air showerhead, for controlling temperature of wafer which is to be transferred from wafer pre-alignment system to wafer stage of photolithography exposure equipmment
10/30/2003US20030203288 Method and apparatus capable of accurately measuring overlay shift between overlay measuring pattern used for transfer to lower target transfer film and overlay measuring pattern used for transfer to upper target transfer film
10/30/2003US20030203287 Such as a photo mask and a reticle, and particularly to a method of forming a required pattern on the original plate by means of an electron beam exposure
10/30/2003US20030203286 Relates to structure of a high-transmittance halftone phase shift mask used to form a small pattern in a process of manufacturing semiconductor devices; capable of transferring desired pattern to photosensitive resin clearly and precisely
10/30/2003US20030203284 Using holographic technique; particularly relates to method of forming micropores by off-axis exposure process by which a pattern having high resolution can be formed using diagonally applied light
10/30/2003US20030203237 Photoresists; thin film magnetic tape heads
10/30/2003US20030203225 Improved mechanical strength/adhesion; for producing/examining semiconductor/hot plate
10/30/2003US20030203217 For use in electronic devices
10/30/2003US20030203209 System and method of laser sintering dies and dies sintered by laser sintering
10/30/2003US20030203192 Heat-peelable adhesive sheet
10/30/2003US20030203175 Greensheet carriers and processing thereof
10/30/2003US20030203172 Constructions comprising solder bumps
10/30/2003US20030203169 Ceramic structure using a support sheet
10/30/2003US20030203157 Carbon-doped hard mask and method of passivating structures during semiconductor device fabrication
10/30/2003US20030203126 Organometal complex and method of depositing a metal silicate thin layer using same
10/30/2003US20030203124 Heating substrate within chamber with gas flow via forced convection; chemical vapor deposition; for production of integrated circuits, solar cells
10/30/2003US20030203123 Plasma enhanced chemical vapor deposition (PECVD)
10/30/2003US20030203112 Chemical vapor deposition method and related material
10/30/2003US20030203111 Copper metal precursor
10/30/2003US20030202872 Robot arm mechanism and robot apparatus
10/30/2003US20030202871 Semiconductor processing system with wafer container docking and loading station
10/30/2003US20030202868 Actuatable loadport system
10/30/2003US20030202867 Pod transfer system having retractable mast and rotatable and vertically movable hoist
10/30/2003US20030202866 Method and apparatus for identifying a wafer cassette
10/30/2003US20030202865 Substrate transfer apparatus
10/30/2003US20030202792 Substrate processing apparatus and substrate processing method
10/30/2003US20030202703 Apparatus and computer-readable medium for assisting image classification
10/30/2003US20030202568 Interference canceling device and method in mobile communication system
10/30/2003US20030202449 Detection apparatus, detection method and electron beam irradiation apparatus
10/30/2003US20030202412 Semiconductor memory device with internal data reading timing set precisely
10/30/2003US20030202407 Memory device having wide margin of data reading operation, for storing data by change in electric resistance value
10/30/2003US20030202397 Semiconductor memory device and manufacturing method therefor
10/30/2003US20030202393 Semiconductor memory device and control method thereof
10/30/2003US20030202390 Boosted potential generation circuit and control method
10/30/2003US20030202387 Flexible redundancy for memories
10/30/2003US20030202382 Nonvolatile memory and semiconductor device
10/30/2003US20030202377 Flash EEprom system
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