Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2003
10/23/2003US20030197858 Method and apparatus for article inspection including speckle reduction
10/23/2003US20030197857 Defect inspection apparatus
10/23/2003US20030197851 Patterned substrate; stretched optical film; confining frame; sealing
10/23/2003US20030197850 Driving apparatus, exposure apparatus, and device manufacturing method
10/23/2003US20030197847 Illumination optical system, exposure apparatus having the same, and device fabricating method
10/23/2003US20030197846 System and method for improving line width control in a lithography device using an illumination system having pre-numerical aperture control
10/23/2003US20030197845 Active damping apparatus, exposure apparatus and device manufacturing method
10/23/2003US20030197844 Lithographic apparatus and device manufacturing method
10/23/2003US20030197843 Lithographic apparatus and device manufacturing method
10/23/2003US20030197842 System and method for improving linewidth control in a lithography device by varying the angular distribution of light in an illuminator as a function of field position
10/23/2003US20030197838 Ilumination optical system and method, and exposure apparatus
10/23/2003US20030197827 Method for connecting a printed circuit to a liquid crystal display
10/23/2003US20030197816 Liquid crystal display devices having fill holes and electrical contacts on the back side of the die
10/23/2003US20030197764 Method of manufacturing semiconductor device, semiconductor device, narrow-pitch connector, electrostatic actuator, piezoelectric actuator, ink jet head, ink jet printer, micromachine, liquid crystal panel, and electronic device
10/23/2003US20030197664 Electro-optical device
10/23/2003US20030197634 Variable-output-characteristic semiconductor integrated circuit device
10/23/2003US20030197587 Solid-state inductor and method for same
10/23/2003US20030197586 Parallel spiral stacked inductor on semiconductor material
10/23/2003US20030197543 Load-driving semiconductor device
10/23/2003US20030197520 Systems and methods for facilitating driver strength testing of integrated circuits
10/23/2003US20030197515 Fault tolerant semiconductor system
10/23/2003US20030197501 Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor
10/23/2003US20030197456 Devices containing a carbon nanotube
10/23/2003US20030197388 Robot arm having wafer-scratching prevention function
10/23/2003US20030197288 Positioning to reduce axial displacement of wire bonding
10/23/2003US20030197286 Flip-chip package containing a chip and a substrate having differing pitches for electrical connections
10/23/2003US20030197283 Multi-chip package and method for manufacturing the same
10/23/2003US20030197280 Unique feature design enabling structural integrity for advanced low K semiconductor chips
10/23/2003US20030197279 Integrated circuit with self-aligned line and via and manufacturing method therefor
10/23/2003US20030197277 Semiconductor device and a method of manufacturing the same
10/23/2003US20030197275 Semiconductor device and method for manufacturing same
10/23/2003US20030197274 Semiconductor device and method of manufacturing the same
10/23/2003US20030197273 Integrated circuit contact
10/23/2003US20030197272 Semiconductor integrated circuit device
10/23/2003US20030197270 Semiconductor device and method of fabrication of the same
10/23/2003US20030197268 Semiconductor device with stacked memory and logic substrates and method for fabricating the same
10/23/2003US20030197267 Ultrathin leadframe BGA circuit package
10/23/2003US20030197266 Cooling of optoelectronic elements
10/23/2003US20030197263 Semiconductor chip package with direction-flexible mountability
10/23/2003US20030197258 Integrated circuit device packaging structure and packaging method
10/23/2003US20030197253 Method and apparatus for connecting vertically stacked integrated circuit chips
10/23/2003US20030197251 Semiconductor device with staggered hexagonal electrodes and increased wiring width
10/23/2003US20030197243 Low noise inductor using electrically floating high resistive and grounded low resistive patterned shield
10/23/2003US20030197242 Structure and fabrication method of electrostatic discharge protection circuit
10/23/2003US20030197241 Shallow trench isolation type semiconductor device and method of manufacturing the same
10/23/2003US20030197240 Lateral type power MOS transistor and fabrication method thereof
10/23/2003US20030197239 Clock distribution networks and conductive lines in semiconductor integrated circuits
10/23/2003US20030197238 CMOS image sensor integrated together with memory device
10/23/2003US20030197234 Low dielectric constant shallow trench isolation
10/23/2003US20030197232 Semiconductor device and method of producing the same
10/23/2003US20030197231 Semiconductor device and method of manufacturing the same
10/23/2003US20030197230 High performance CMOS device structure with mid-gap metal gate
10/23/2003US20030197229 Semiconductor device having transistor and method of manufacturing the same
10/23/2003US20030197227 Method of forming retrograde n-well and p-well
10/23/2003US20030197226 Structure and fabrication method of electrostatic discharge protection circuit
10/23/2003US20030197225 Structure and fabrication method of electrostatic discharge protection circuit
10/23/2003US20030197224 Methods for fabricating field effect transistors having elevated source/drain regions
10/23/2003US20030197222 Method for manufacturing semiconductor device, semiconductor device, electro-optical device, and electronic apparatus
10/23/2003US20030197221 Non-volatile semiconductor memory and method of manufacturing the same
10/23/2003US20030197220 High-voltage vertical transistor with a multi-layered extended drain structure
10/23/2003US20030197219 Flash memory device and fabricating method therefor
10/23/2003US20030197217 Electrically-programmable non-volatile memory cell
10/23/2003US20030197216 pn Varactor
10/23/2003US20030197215 A dual stacked metal-insulator-metal capacitor and method for making same
10/23/2003US20030197214 Monolithic integrated crystal-structure-processed mechanical, and combined mechanicaland electrical devices, and methods and systems for making
10/23/2003US20030197213 Semiconductor integrated circuit device with connections formed using a conductor embedded in a contact hole
10/23/2003US20030197212 Preventing contact resistance between capacitor lower electrode and plug from increasing by definitely preventing oxidation of plug
10/23/2003US20030197211 Magnetic shielding for MRAM devices
10/23/2003US20030197209 CCD wafers with titanium refractory metal
10/23/2003US20030197207 Method of fabricating CMOS thin film transistor
10/23/2003US20030197206 Semiconductor device and method for fabricating the same
10/23/2003US20030197205 Capacitor having RuSixOy-containing adhesion layers
10/23/2003US20030197203 Array of flash memory cells and data program and erase methods of the same
10/23/2003US20030197202 Semiconductor integrated circuit device and manufacturing method thereof
10/23/2003US20030197200 TAB tape for semiconductor package
10/23/2003US20030197199 Semiconductor device and semiconductor module
10/23/2003US20030197196 Methods of gas switching in rapid thermal process for improving the reliability of the insulation layer
10/23/2003US20030197194 Fin memory cell and method of fabrication
10/23/2003US20030197193 Method of fabricating a bipolar transistor
10/23/2003US20030197190 Semiconductor device with reduced parasitic capacitance between impurity diffusion regions
10/23/2003US20030197187 Thin film transistor array substrate and manufacturing method thereof
10/23/2003US20030197185 Thin-film semiconductor epitaxial substrate and process for production thereof
10/23/2003US20030197182 Thin film transistor array substrate, manufacturing method thereof, and mask
10/23/2003US20030197181 Thin film transistor array substrate and manufacturing method thereof
10/23/2003US20030197180 Thin film transistor formed by an etching process with high anisotropy
10/23/2003US20030197179 Overlapping barrier wires; transistors
10/23/2003US20030197178 Semiconductor device and display element using semiconductor device
10/23/2003US20030197177 Thin film transistor array panel for a liquid crystal display
10/23/2003US20030197167 Ferroelectric capacitor plasma charging monitor
10/23/2003US20030197166 Semiconductor Device and Semiconductor Substrate, and Method of Fabricating the Same
10/23/2003US20030197135 Electron beam exposure apparatus, electron beam exposure method, semiconductor device manufacturing method, and electron beam shape measuring method
10/23/2003US20030197134 Electron beam drawing apparatus
10/23/2003US20030197133 Method and apparatus for scanning a workpiece in a vacuum chamber
10/23/2003US20030197132 Method and apparatus for measuring inclination angle of ion beam
10/23/2003US20030197048 Position-, speed- and force-controllable chip accessing apparatus
10/23/2003US20030197038 Low volume dispense unit and method of using
10/23/2003US20030197007 Apparatuses for heat-treatment of semiconductor films under low temperature
10/23/2003US20030196996 Thermal flux processing by scanning
10/23/2003US20030196995 Annealing a semiconductor substrate with high ramp-up and ramp-down rates for good control and homogenous heat exposure on the wafer by using a continuous wave electromagnetic radiation source, a stage, optics, and translation mechanism
10/23/2003US20030196993 Thermal flux deposition by scanning
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