Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/2003
11/27/2003US20030217762 Efficient supplying of water; spraying nozzle; removal photoresists
11/27/2003US20030217697 Liquid material evaporation supply apparatus
11/27/2003US20030217695 Substrate processing apparatus
11/27/2003US20030217694 Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus
11/27/2003US20030217693 Substrate support assembly having an edge protector
11/27/2003US20030217689 Method of producing crystal and apparatus for producing crystal
11/27/2003US20030217518 Abrasive, a method of polishing with the abrasive, and a method of washing a polished object
11/27/2003US20030217517 Polishing pad
11/27/2003US20030217462 Method for improving electromigration performance of metallization features through multiple depositions of binary alloys
11/27/2003US20030217460 Semiconductor manufacturing apparatus
11/27/2003DE10223719C1 Layer arrangement comprises first substrate having first main surface containing first thermally dissolvable delamination layer, and second substrate having second main surface containing second thermally dissolvable delamination layer
11/27/2003DE10211544C1 Verfahren zur Herstellung einer Kondensatorelektrode eines Grabenkondensators aus flüssiger Phase A method for producing a capacitor electrode of a capacitor grave from the liquid phase
11/27/2003CA2486178A1 Process for manufacturing a gallium rich gallium nitride film
11/27/2003CA2485640A1 High-reliability group iii-nitride light emitting diode
11/27/2003CA2484700A1 Susceptor for mocvd reactor
11/26/2003EP1365636A1 Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method
11/26/2003EP1365513A2 General-purpose logic-cell, logic array using the same, and ASIC using this logic array
11/26/2003EP1365488A2 Submount assembly packaging method
11/26/2003EP1365479A1 Anisotropic conductive connector, its manufacture method and probe member
11/26/2003EP1365453A1 Image sensor and production method therefore
11/26/2003EP1365452A2 Non-volatile semiconductor memory device and method of fabricating thereof
11/26/2003EP1365451A1 Module component
11/26/2003EP1365450A1 An improved wire-bonded chip on board package
11/26/2003EP1365449A2 Metallic strain-absorbing layer for improved fatigue resistance of solder-attached devices
11/26/2003EP1365447A2 Manufacturing method of semiconductor substrate
11/26/2003EP1365446A1 Plasma treatment device and plasma treatment method
11/26/2003EP1365445A1 Working shape prediction method, working requirement determination method, working method, working system, method of manufacturing semiconductor device, computer program, and computer program storage medium
11/26/2003EP1365444A1 Trench capacitor having two electrodes independent from the substrate
11/26/2003EP1365442A2 Gripper and orienter arm for wafer
11/26/2003EP1365441A1 Process and composition for removing residues from the microstructure of an object
11/26/2003EP1365416A1 Memory cell isolation
11/26/2003EP1365415A1 MRAM with voltage sources for selected and non-selected word lines and selected and non-selected bit lines
11/26/2003EP1365333A1 Method and system for designing circuit layout
11/26/2003EP1365288A1 Photo mask, production method of the same, pattern forming method using the photo mask
11/26/2003EP1365277A2 Electro-optical device and electronic apparatus
11/26/2003EP1365264A2 Objective with polarisation compensation
11/26/2003EP1365263A1 Optical element, and light source unit and exposure apparatus having the same
11/26/2003EP1365229A1 Method and apparatus for measuring physical properties of micro region
11/26/2003EP1365042A1 Method for passivating a semiconductor substrate
11/26/2003EP1365041A1 Purgeable manifold
11/26/2003EP1365040A1 Assembly for processing substrates
11/26/2003EP1364979A1 Thermosetting resin composition and semiconductor device obtained with the same
11/26/2003EP1364566A2 Electronic component, component mounting equipment, and component mounting method
11/26/2003EP1364564A2 Cooling device, method for the production thereof, and device for carrying out this method
11/26/2003EP1364417A2 Keepers for mram electrodes
11/26/2003EP1364411A1 Relaxed silicon germanium platform for high speed cmos electronics and high speed analog circuits
11/26/2003EP1364410A2 Semiconductor devices and their peripheral termination
11/26/2003EP1364409A2 Method for the production of metallic bitlines for memory cell arrays, method for the production of memory cell arrays and memory cell arrays
11/26/2003EP1364408A2 Electrode arrangement for charge storage and corresponding production method
11/26/2003EP1364407A1 A semiconductor circuit regulator
11/26/2003EP1364405A1 High voltage semiconductor device
11/26/2003EP1364404A2 Hollow structure in an integrated circuit and method for producing such a hollow structure in an integrated circuit
11/26/2003EP1364401A2 Microelectronic package having bumpless laminated interconnection layer
11/26/2003EP1364400A1 Method for producing thin layers on a specific support and an application thereof
11/26/2003EP1364399A1 Semiconductor chip and production method for a housing
11/26/2003EP1364398A1 Method for microfabricating structures using silicon-on-insulator material
11/26/2003EP1364397A2 High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques
11/26/2003EP1364395A2 Method for patterning silicides in the submicrometer range and components so produced
11/26/2003EP1364394A2 Method for producing structures on the nanometric scale
11/26/2003EP1364393A1 Flash memory with ultra thin vertical body transistors
11/26/2003EP1364391A1 Method for removing a mask layer from a semiconductor substrate
11/26/2003EP1364390A2 Trench condenser and method for production thereof
11/26/2003EP1364373A2 Method for production of a memory capacitor
11/26/2003EP1364257A1 Simultaneous imaging of two reticles
11/26/2003EP1364256A2 Method of uniformly coating a substrate
11/26/2003EP1364255A2 Method for uniformly coating a substrate
11/26/2003EP1364254A2 Antireflective layer for use in microlithography
11/26/2003EP1364250A1 Active matrix liquid crystal displays and methods of manufacturing such
11/26/2003EP1364231A2 A self-cleaning optic for extreme ultraviolet lithography
11/26/2003EP1364221A1 Planarizing interposer
11/26/2003EP1364190A2 Optoelectronic device with wavelength filtering by cavity coupling
11/26/2003EP1364076A1 Device and method for supplying a cvd reactor with a liquid starting material entering into a gaseous phase
11/26/2003EP1364075A1 Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof
11/26/2003EP1363859A1 Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
11/26/2003EP1363745A2 Atomizer
11/26/2003EP1141793B1 Method and apparatus for controlling a system using hierarchical state machines
11/26/2003EP1046185B1 Projection lithography device utilizing charged particles
11/26/2003EP0972299B1 Method and apparatus for control of deposit build-up on an inner surface of a plasma processing chamber
11/26/2003EP0734586B1 Method for fabricating self-assembling microstructures
11/26/2003EP0643151B9 Apparatus and system for arc ion plating
11/26/2003CN2588529Y Semiconductor package device tester
11/26/2003CN2588528Y Identifier for semiconductor carried tray
11/26/2003CN2588527Y Clamp mechanism for fastening aligned mask and wafer
11/26/2003CN1459126A Method for forming dielectric film
11/26/2003CN1459125A High speed silicon etching method
11/26/2003CN1459123A High efficiency capacitor structure with enhanced matching properties
11/26/2003CN1459117A Method for producing electronic parts, and member for production thereof
11/26/2003CN1459113A MTJ MRAM parallel-parallel architecture
11/26/2003CN1459052A Adaptive sampling method for improved control in semiconductor manufacturing
11/26/2003CN1459050A Negative photosensitive resin composition and display device using the same
11/26/2003CN1459048A Dual layer reticle bland and manufacturing process
11/26/2003CN1459033A Diffraction lens element and lighting system using the lens element
11/26/2003CN1459017A System and method to control radial delta temperature
11/26/2003CN1458947A Process for preparing organic silicate polymer
11/26/2003CN1458945A Compositions and methods for thermosetting molecules in organic compositions
11/26/2003CN1458812A Display device
11/26/2003CN1458743A Latch circuit
11/26/2003CN1458698A Film semiconductor device
11/26/2003CN1458697A Semiconductor device and its producing method
11/26/2003CN1458696A Electric charge coupling device barrier width partly rducing in communication path
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