Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2003
12/18/2003US20030230776 System on chip
12/18/2003US20030230775 Split-gate flash memory structure and method of manufacture
12/18/2003US20030230774 Vertical access transistor with curved channel
12/18/2003US20030230773 Ferroelectric capacitor, process for manufacturing thereof and ferroelectric memory
12/18/2003US20030230769 Standard cell for plural power supplies and related technologies
12/18/2003US20030230766 MOS transistor and switching power supply
12/18/2003US20030230764 Display device
12/18/2003US20030230763 Semiconductor device and method of manufacturing the same
12/18/2003US20030230762 Transistor with group III/VI emitter
12/18/2003US20030230760 Vertical nano-size transistor using carbon nanotubes and manufacturing method thereof
12/18/2003US20030230759 80 nanometer diameter resonant tunneling diode with improved peak-to-valley ratio
12/18/2003US20030230755 Compound semiconductor, method for producing the same, semiconductor light-emitting device and method for fabricating the same
12/18/2003US20030230754 Contacting scheme for large and small area semiconductor light emitting flip chip devices
12/18/2003US20030230753 In which the constituent light-emissive devices providing the multiple colors are laterally integrated on the surface of a substrate, emitting light by electroluminescence
12/18/2003US20030230750 Display device and electronic device using the same
12/18/2003US20030230749 Semiconductor device and semiconductor device producing system
12/18/2003US20030230748 Structure of TFT planar display panel and process for manufacturing the same
12/18/2003US20030230733 Semiconductor apparatus
12/18/2003US20030230732 Ion irradiation system
12/18/2003US20030230730 Semiconductor exposure apparatus, control method therefor, and semiconductor device manufacturing method
12/18/2003US20030230729 Positioning stage with stationary and movable magnet tracks
12/18/2003US20030230727 Device for influencing an electron beam
12/18/2003US20030230704 CMOS photodiode having reduced dark current and improved light sensitivity and responsivity
12/18/2003US20030230562 Substrate processing apparatus and semiconductor device producing method
12/18/2003US20030230551 Etching system and etching method
12/18/2003US20030230549 Method for etching chemically inert metal oxides
12/18/2003US20030230548 Etching a silicon substrate using an aqueous acid mixture comprising hydrofluoric acid, reducing water content by adding fluorosulfonic acid, controlling the concentration of hydrogen fluoride
12/18/2003US20030230512 Chip tray
12/18/2003US20030230491 Method and system monitoring and controlling film thickness profile during plating and electroetching
12/18/2003US20030230482 Magnetic control oscillating-scanning sputter
12/18/2003US20030230480 Method for depositing sputtered film
12/18/2003US20030230468 Conveyor for liquid crystal panel
12/18/2003US20030230466 Conveyor belt cleaner scraper blade with sensor and control system therefor
12/18/2003US20030230385 Electro-magnetic configuration for uniformity enhancement in a dual chamber plasma processing system
12/18/2003US20030230384 Wafer transfer robot having wafer blades equipped with sensors
12/18/2003US20030230323 Apparatus and method for improving scrubber cleaning
12/18/2003US20030230322 Method and apparatus for controlling the movement of CVD reaction byproduct gases to adjacent process chambers
12/18/2003US20030230237 Hoop support for semiconductor wafer
12/18/2003US20030230236 Substrate processing apparatus and control method of inert gas concentration
12/18/2003US20030230235 Dislocation reduction in non-polar gallium nitride thin films
12/18/2003US20030230234 Method of forming fine patterns of semiconductor device
12/18/2003US20030230233 Method of producing high quality relaxed silicon germanium layers
12/18/2003US20030230231 Liquid-phase growth process and liquid-phase growth apparatus
12/18/2003US20030229986 Fluxless bumping process
12/18/2003US20030229982 Integrated spiral inductor configured for a reduced pinch effect
12/18/2003DE20122014U1 Etching device used for etching precision surfaces in the semiconductor industry comprises a reaction chamber for receiving and processing a single object
12/18/2003DE10240436C1 Bit line structure comprises a surface bit line, a trenched bit line, a trench isolation layer, a covering isolation layer, covering connecting layers, and self-adjusting connecting layers
12/18/2003DE10216284C1 Vorrichtung und Verfahren zum Positionieren eines plattenförmigen Substrates Apparatus and method for positioning a plate-shaped substrate
12/18/2003CA2488737A1 Microelectronic cleaning and arc remover compositions
12/18/2003CA2488735A1 Microelectronic cleaning compositions containing oxidizers and organic solvents
12/18/2003CA2484791A1 Method for the production of a hetero-bipolar transistor, and hetero-bipolar transistor
12/17/2003EP1372194A1 Method for fabricating shaped blocks
12/17/2003EP1372193A2 Semiconductor device and method of manufacturing the same
12/17/2003EP1372192A2 Method of manufacturing micro-semiconductor element
12/17/2003EP1372191A2 Method for depositing a device feature on a substrate
12/17/2003EP1372190A1 A process for mounting electronic devices onto submounts and submount therefor
12/17/2003EP1372189A1 Oxide film forming method
12/17/2003EP1372188A1 Solid-state device and its manufacturing method
12/17/2003EP1372187A1 Method for manufacturing semiconductor device
12/17/2003EP1372186A2 Apparatus for liquid treatment of wafers
12/17/2003EP1372185A2 Method of applying a treating solution
12/17/2003EP1372160A1 Dielectric constant enhancement of HfO2 comprising compositions
12/17/2003EP1372065A2 System large scale integrated circuit (LSI), method of designing the same, and program therefor
12/17/2003EP1372041A2 Control of an apparatus for exposing a semiconductor device
12/17/2003EP1372040A2 Lithographic apparatus and device manufacturing method
12/17/2003EP1372038A1 Lithographic apparatus and device manufacturing method
12/17/2003EP1372037A2 Exposure apparatus and stage device and device manufacturing method
12/17/2003EP1372036A1 Lithographic apparatus and device manufacturing method
12/17/2003EP1372035A2 Lithographic projection apparatus and device manufacturing method
12/17/2003EP1372034A2 Advanced illumination system for use in microlithography
12/17/2003EP1372032A1 Mask manufacturing method
12/17/2003EP1372010A2 Method for manufacturing optical element
12/17/2003EP1372009A1 Method and apparatus for compensating transients heat loads in a lithography mirror
12/17/2003EP1371755A1 Method of electroless plating and apparatus for electroless plating
12/17/2003EP1371753A1 Pretreating method before plating and composites having a plated coat
12/17/2003EP1371751A1 Film forming device
12/17/2003EP1371750A1 Method of recycling fluorine using an adsorption purification process
12/17/2003EP1371746A1 Film forming method and film forming device
12/17/2003EP1371707A1 Cerium based abrasive material and method for preparation thereof
12/17/2003EP1371620A2 Method for spin coating including sol-gel processing
12/17/2003EP1371617A1 Method for producing a quartz glass tank for use in ultrasonic cleaning used for fabricating semiconductor and quartz glass tank obtainable from that method
12/17/2003EP1371606A1 Method of forming oxide-ceramics film
12/17/2003EP1371449A2 Chemical mechanical polishing head having floating retaining ring and carrier with multi-zone polishing pressure control
12/17/2003EP1371271A1 Plasma installation and method for producing a functional coating
12/17/2003EP1371101A1 Method of creating an electroluminescent device
12/17/2003EP1371100A1 A transpinnor-based switch and applications
12/17/2003EP1371098A1 A modulation doped thyristor and complementary transistor combination for a monolithic optoelectronic integrated circuit
12/17/2003EP1371096A2 Integrated circuit package with a capacitor
12/17/2003EP1371094A1 sUPER-THIN HIGH SPEED FLIP CHIP PACKAGE
12/17/2003EP1371093A2 Method for producing ferroelectric memory cells
12/17/2003EP1371092A1 Method for structuring a flat substrate consisting of a glass-type material
12/17/2003EP1371091A1 Low-k interconnect structure comprised of a multilayer of spin-on porous dielectrics
12/17/2003EP1371090A1 HYBRID LOW-k INTERCONNECT STRUCTURE COMPRISED OF 2 SPIN-ON DIELECTRIC MATERIALS
12/17/2003EP1371089A1 Fabrication method of soi semiconductor devices
12/17/2003EP1371088A2 Metal gate stack with etch stop layer improved through implantation of metallic atoms
12/17/2003EP1371087A1 A device for epitaxially growing objects by cvd
12/17/2003EP1371086A1 Method of etching organic antireflection coating (arc) layers
12/17/2003EP1371080A2 Methods and apparatus for scanned beam uniformity adjustment in ion implanters
12/17/2003EP1371063A2 Passivation layer for molecular electronic device fabrication
12/17/2003EP1370993A2 Block based design methodology with programmable components