| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/15/2004 | US20040007716 Versatile system for optimizing current gain in bipolar transistor structures |
| 01/15/2004 | US20040007715 Reducing threading defect density by reducing germanium content in Silicon germanium relaxed buffer layer on which strained silicon channel layer is formed by forming channel layer of silicon-carbon alloy containing 1.5% carbon |
| 01/15/2004 | US20040007714 Current mirror circuit and optical signal circuit using same |
| 01/15/2004 | US20040007713 Bipolar transistor and semiconductor device using same |
| 01/15/2004 | US20040007711 Apparatus carrying electronic device |
| 01/15/2004 | US20040007709 Semiconductor integrated circuit, signal transmitting device, electro-optical device, and electronic apparatus |
| 01/15/2004 | US20040007708 Light emitting element and method of making same |
| 01/15/2004 | US20040007705 Thin film transistor array panel including storage electrode |
| 01/15/2004 | US20040007704 Transflective liquid crystal display device and fabricating method thereof |
| 01/15/2004 | US20040007703 Semiconductor device having a dummy active region for controlling high density plasma chemical vapor deposition |
| 01/15/2004 | US20040007680 Electron beam lithography apparatus using a patterned emitter |
| 01/15/2004 | US20040007678 Adjustable implantation angle workpiece support structure for an ion beam implanter |
| 01/15/2004 | US20040007677 Non-magnetic robotic manipulators for moving objects relative to a charged-particle-beam optical system |
| 01/15/2004 | US20040007611 Asymmetric plating |
| 01/15/2004 | US20040007609 Wire bonding apparatus |
| 01/15/2004 | US20040007592 Precision liquid mixing apparatus and method |
| 01/15/2004 | US20040007581 Removable lid and floating pivot |
| 01/15/2004 | US20040007561 Method for plasma etching of high-K dielectric materials |
| 01/15/2004 | US20040007560 Method for predicting consumption of consumable part, method for predicting deposited-film thickness, and plasma processor |
| 01/15/2004 | US20040007559 Wafer cleaning apparatus |
| 01/15/2004 | US20040007478 Electroetching system and process |
| 01/15/2004 | US20040007474 Electrolytic copper plating method, phosphorous copper anode for electrolytic plating method, and semiconductor wafer having low particle adhesion plated with said method and anode |
| 01/15/2004 | US20040007470 Methods of and apparatus for electrochemically fabricating structures via interlaced layers or via selective etching and filling of voids |
| 01/15/2004 | US20040007469 Forming three-dimensional multilayer structures by electroplating, ammonium citrate is included to improve anode dissolving, prevent deposits defect and short circuits, use low voltage; copper deposits has ductility, noncracking |
| 01/15/2004 | US20040007327 Dicing tape applying apparatus and back-grinding/dicing tape applying system |
| 01/15/2004 | US20040007326 Wafer probe for measuring plasma and surface characteristics in plasma processing enviroments |
| 01/15/2004 | US20040007325 Integrated equipment set for forming a low K dielectric interconnect on a substrate |
| 01/15/2004 | US20040007312 Mounting method |
| 01/15/2004 | US20040007257 Apparatus for treating wafer |
| 01/15/2004 | US20040007252 Label sheet for cleaning and conveying member having cleaning function |
| 01/15/2004 | US20040007248 Preparing an etching and a deposition apparatus each using chlorine series gas, generating a plasma containing hydrogen and nitrogen to remove by-products |
| 01/15/2004 | US20040007247 Plasma film-forming apparatus and cleaning method for the same |
| 01/15/2004 | US20040007188 Gas-purged vacuum valve |
| 01/15/2004 | US20040007187 CVD reactor with substrate holder which is rotatably driven and mounted by a gas stream |
| 01/15/2004 | US20040007186 Heat-treating device |
| 01/15/2004 | US20040007185 Method of manufacturing a semiconductor device and a semiconductor manufacture system |
| 01/15/2004 | US20040007183 Apparatus and method for the formation of thin films |
| 01/15/2004 | US20040007182 Plasma processing apparatus |
| 01/15/2004 | US20040007180 Film-formation apparatus and source supplying apparatus therefor, gas concentration measuring method |
| 01/15/2004 | US20040007179 Reaction apparatus for atomic layer deposition |
| 01/15/2004 | US20040007177 Substrate treating device and substrate treating method, substrate flattening method |
| 01/15/2004 | US20040007176 Gas flow control in a wafer processing system having multiple chambers for performing same process |
| 01/15/2004 | US20040007173 Apparatus and method for drying under reduced pressure, and coating film forming apparatus |
| 01/15/2004 | US20040007171 Method for growing thin oxide films |
| 01/15/2004 | US20040007068 Semiconductor dynamic quantity sensor |
| 01/15/2004 | US20040006996 Workpiece chuck with temperature control assembly having spacers between layers providing clearance for thermoelectric modules |
| 01/15/2004 | US20040006924 For chemical mechanical polishing (CMP) of semiconductors |
| 01/15/2004 | US20040006883 Precise mechanism for load port adjustment |
| 01/15/2004 | US20040006869 Method of manufacturing sheet material and method of manufacturing circuit device using the same |
| 01/15/2004 | DE4415375B4 Filmträger und Verfahren zu dessen Herstellung Film support and process for its preparation |
| 01/15/2004 | DE20316392U1 Process for polishing thin substrates such as semi conductor wafers has rotary turntable with guide strip to protect against substrate damage |
| 01/15/2004 | DE19609202B4 Photomaske zur Strukturierung einer Supraleiterschicht, Supraleiterschicht und Verfahren zur Bestimmung des Ausmaßes einer Unterätzung bei der Strukturierung einer Supraleiterschicht Photomask for patterning a superconducting layer, superconductor layer, and method for determining the extent of under-etching during the patterning of the superconductor layer |
| 01/15/2004 | DE10327945A1 Halbleiterspeichervorrichtungen und Verfahren zur Herstellung derselben unter Verwendung von Seitenwandabstandshaltern Semiconductor memory devices and methods of making the same using sidewall spacers |
| 01/15/2004 | DE10327257A1 Verfahren zur Bildung von Metallkolloidmustern A method of forming metal colloid patterns |
| 01/15/2004 | DE10326351A1 Vorrichtung mit Elektroden für die Bildung einer Kugel am Ende eines Drahts Apparatus with electrodes for the formation of a ball at the end of a wire |
| 01/15/2004 | DE10317151A1 Ätzprozess zum Einsenken von Polysilizium in Grabenstrukturen Etching process for sinking of polysilicon in grave structures |
| 01/15/2004 | DE10258761A1 Verfahren zur Herstellung eines Kontaktlochs A process for producing a contact hole |
| 01/15/2004 | DE10229818A1 Verfahren zur Fokusdetektion und Abbildungssystem mit Fokusdetektionssystem Method of focus detection and imaging system with focus detection system |
| 01/15/2004 | DE10229614A1 Katadioptrisches Reduktionsobjektiv A catadioptric reduction objective |
| 01/15/2004 | DE10229463A1 Halbleiteranordnung Semiconductor device |
| 01/15/2004 | DE10228998A1 Vorrichtung und Verfahren zum elektrochemischen behandeln eines Substrats bei reduzierter Metallkorrosion An apparatus and method for electrochemically treating a substrate with reduced metal corrosion |
| 01/15/2004 | DE10228807A1 Verfahren zum Definieren der Abmessung von Schaltungselementen unter Verwendung von Abscheidetechniken für Abstandselemente A method for defining the dimensions of circuit elements using deposition techniques for distance elements |
| 01/15/2004 | DE10228771A1 Verfahren zur Planarisierung mit definierbarer Planarisierungslänge in integrierten Halbleiterschaltungen und derartige integrierte Halbleiterschaltung Method for planarization with definable planarization length in semiconductor integrated circuits and such semiconductor integrated circuit |
| 01/15/2004 | DE10228593A1 Elektronisches Bauteil mit einer Gehäusepackung Electronic device having a housing package |
| 01/15/2004 | DE10228344A1 Verfahren zur Herstellung von Mikrostrukturen sowie Anordnung von Mikrostrukturen A process for the fabrication of microstructures, and arrangement of microstructures |
| 01/15/2004 | DE10227829A1 Verfahren zum Überwachen der Herstellung und zum Bewerten der Qualität einer Metallisierungsanordnung sowie zugehörige Erfassungsvorrichtung A method for monitoring the manufacture and for evaluating the quality of a sensing device and associated Metallisierungsanordnung |
| 01/15/2004 | DE10227663A1 Verfahren zum Versiegeln poröser Materialien bei der Chipherstellung und Verbindungen hierfür A method for sealing porous materials in chip manufacture and for this compounds |
| 01/15/2004 | DE10227615A1 Schicht-Anordnung und Verfahren zum Herstellen einer Schicht-Anordnung Layer arrangement and method for producing a layer arrangement |
| 01/15/2004 | DE10227605A1 Schicht-Anordnung und Verfahren zum Herstellen einer Schicht-Anordnung Layer arrangement and method for producing a layer arrangement |
| 01/15/2004 | DE10227492A1 Verfahren zur Herstellung eines Deep-Trench-Kondensators für dynamische Speicherzellen A process for producing a deep trench capacitor memory cells for dynamic |
| 01/15/2004 | DE10227342A1 Verfahren zur Verbindung einer integrierten Schaltung mit einem Substrat und entsprechende Schaltungsanordnung A method for bonding an integrated circuit having a substrate and corresponding circuit arrangement |
| 01/15/2004 | DE10227213A1 Umsetzvorrichtung für Mikrosysteme Relocating for microsystems |
| 01/15/2004 | DE10227059A1 Verpackung für Halbleiter-Bauelemente und Verfahren zum Herstellen derselben Packaging for semiconductor devices and methods for manufacturing the same |
| 01/15/2004 | DE10224201A1 Halbleiterbauelement mit Durchbruchstrompfad A semiconductor device with breakdown current path |
| 01/15/2004 | DE10223937A1 Zweischichtverklebung von Sägehilfen auf Siliciumeinkristallstäben Zweischichtverklebung of sawing aids on Siliciumeinkristallstäben |
| 01/15/2004 | DE10125912B4 Molekularstrahl-epitaktische Abscheidung von Halbleiterschichten auf vizinalen GaAs-Substraten Molecular beam epitaxial deposition of semiconductor layers on GaAs substrates vicinal |
| 01/15/2004 | DE10103528B4 Verfahren zur Herstellung und Verwendung eines ferroelektrischen Kondensators A process for the preparation and use of a ferroelectric capacitor |
| 01/15/2004 | DE10032005B4 Waferhalterad mit einer Andrückvorrichtung in einer Waferbeschichtungsanlage Waferhalterad with a pressing device in a wafer coating plant |
| 01/15/2004 | CA2741397A1 Nanostructures and methods for manufacturing the same |
| 01/15/2004 | CA2491915A1 Anomalous expansion materials |
| 01/15/2004 | CA2491514A1 Metal nano-objects, formed on semiconductor surfaces, and method for making said nano-objects |
| 01/14/2004 | EP1381257A2 Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions |
| 01/14/2004 | EP1381159A2 Time limit function utilization apparatus |
| 01/14/2004 | EP1381089A2 Polycrystalline silicon thin film used in a thin film transistor and a device using the same |
| 01/14/2004 | EP1381086A1 Production method for bonded substrates |
| 01/14/2004 | EP1381085A2 Semiconductor integrated circuit device and layout method of patterns for semiconductor integrated circuit device |
| 01/14/2004 | EP1381080A2 Component-embedded board fabrication method and apparatus |
| 01/14/2004 | EP1381079A1 Heat treating method and heat treating device |
| 01/14/2004 | EP1381078A1 Ultraviolet ray assisted processing device for semiconductor processing |
| 01/14/2004 | EP1381077A2 Capacitor and method for fabricating the same |
| 01/14/2004 | EP1381076A2 Dicing tape applying apparatus and back-grinding/dicing tape applying system |
| 01/14/2004 | EP1381074A2 Method and apparatus for observing a semiconductor device using an electron microscope |
| 01/14/2004 | EP1381058A1 Conductive organic thin film and production method therefor, electrode and electric cable using it |
| 01/14/2004 | EP1381055A2 A multiple use memory chip |
| 01/14/2004 | EP1380985A2 Semiconductor device having a built-in contact-type sensor and manufacturing method of such a semiconductor device |
| 01/14/2004 | EP1380895A1 Chemically amplified resist material and patterning method using the same |
| 01/14/2004 | EP1380880A1 Method for manufacturing liquid crystal display |
| 01/14/2004 | EP1380871A2 Relay lens used in an illumination system of a lithography system |
| 01/14/2004 | EP1380848A2 Device for measuring and analyzing electrical signals of an integrated circuit component |
| 01/14/2004 | EP1380665A1 Method of using hydrogen and oxygen gas in sputter deposition of aluminum-containing films and aluminum-containing films derived therefrom |