| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/15/2004 | US20040009433 Pattern formation method |
| 01/15/2004 | US20040009432 Substrate oscillating system oscillates substrate in one-dimensional direction paralleled with a main surface of substrate by means of oscillating whole of substrate rotating system in one dimensional direaction; uniform pattern |
| 01/15/2004 | US20040009431 Method of exposing semiconductor device |
| 01/15/2004 | US20040009427 A sulfonium compound which generates an acid upon exposure to radiation, and a resin component (acrylic monomer containing a lactone group which becomes insoluble in alkali under the action of an acid generated from sulfonium compound) |
| 01/15/2004 | US20040009415 Optical apparatus comprising lenses and light sources positioned such that image distortion is suppressed, used to form lelctronics such as semiconductors or liquid crystal displays |
| 01/15/2004 | US20040009412 Method of manufacturing chromeless phase shift mask |
| 01/15/2004 | US20040009411 In-situ pellicle monitor |
| 01/15/2004 | US20040009336 Titanium silicon nitride (TISIN) barrier layer for copper diffusion |
| 01/15/2004 | US20040009307 Vapor depositing a metal oxide layer on a substrate, by oxidation with a generated plasma of metal compounds and oxygen; plasma enhanced chemical vapor deposition |
| 01/15/2004 | US20040009295 Spin-coating method, determination method for spin-coating condition and mask blank |
| 01/15/2004 | US20040008981 In-line fluid heater |
| 01/15/2004 | US20040008980 Light heating apparatus and method therefor |
| 01/15/2004 | US20040008880 Device and method for inspecting photomasks and products fabricated using the same |
| 01/15/2004 | US20040008879 Method for detecting wafer level defect |
| 01/15/2004 | US20040008812 Ball grid array x-ray orientation mark |
| 01/15/2004 | US20040008747 Surface emitting semiconductor laser, and method and apparatus for fabricating the same |
| 01/15/2004 | US20040008561 Stacked gate flash memory cell with reduced distrub conditions |
| 01/15/2004 | US20040008556 Memory device reading data according to difference in electrical resistance between selected memory cell and reference cell |
| 01/15/2004 | US20040008551 Non-volatile semiconductor memory device |
| 01/15/2004 | US20040008542 Shared volatile and non-volatile memory |
| 01/15/2004 | US20040008541 Multiple use memory chip |
| 01/15/2004 | US20040008538 Semiconductor memory cell and memory array using a breakdown phenomena in an ultra-thin dielectric |
| 01/15/2004 | US20040008537 Magnetic memory device and method |
| 01/15/2004 | US20040008534 Embedded ROM device using substrate leakage |
| 01/15/2004 | US20040008453 Magnetic layer system and a component comprising such a layer system |
| 01/15/2004 | US20040008433 Wavefront aberration correction system |
| 01/15/2004 | US20040008408 Relay lens used in an illumination system of a lithography system |
| 01/15/2004 | US20040008402 Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields |
| 01/15/2004 | US20040008341 Lighting optical machine and defect inspection system |
| 01/15/2004 | US20040008336 Method and system of determining chamber seasoning condition by optical emission |
| 01/15/2004 | US20040008334 Step and repeat imprint lithography systems |
| 01/15/2004 | US20040008331 Lithographic apparatus and device manufacturing method |
| 01/15/2004 | US20040008330 Electrostatically driven lithography |
| 01/15/2004 | US20040008329 Exposure condition determination system |
| 01/15/2004 | US20040008294 Liquid crystal display device and method for manufacturing the same |
| 01/15/2004 | US20040008076 Semiconductor device having substrate potential detection circuit less influenced by change in manufacturing conditions |
| 01/15/2004 | US20040008075 Semiconductor integrated circuit with stabilizing capacity |
| 01/15/2004 | US20040008073 Output circuit, input circuit, electronic circuit, multiplexer, demultiplexer, wired-or circuit, wired-and circuit, pulse-processing circuit, multiphase-clock processing circuit, and clock-multiplier circuit |
| 01/15/2004 | US20040008072 Semiconductor integrated circuit and method of driving the same |
| 01/15/2004 | US20040008070 Clamp circuit |
| 01/15/2004 | US20040008051 Semiconductor characteristic evaluation apparatus |
| 01/15/2004 | US20040008037 Capacity measuring device and capacity measuring method |
| 01/15/2004 | US20040008033 Apparatus for determining doping concentration of a semiconductor wafer |
| 01/15/2004 | US20040007990 Light generation apparatus, exposure apparatus, and device manufacturing method |
| 01/15/2004 | US20040007985 Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions |
| 01/15/2004 | US20040007984 Multirate processing for metrology of plasma rf source |
| 01/15/2004 | US20040007945 Matching circuit for megasonic transducer device |
| 01/15/2004 | US20040007799 Formation of discontinuous films during an imprint lithography process |
| 01/15/2004 | US20040007786 Semiconductor led device and producing method |
| 01/15/2004 | US20040007785 Semiconductor memory having access transistors formed in a single well and driver transistors formed in wells different from the single well |
| 01/15/2004 | US20040007784 Self-healing polymer compositions |
| 01/15/2004 | US20040007783 Semiconductor device with terminals, and method of manufacturing the same |
| 01/15/2004 | US20040007782 Connecting circuit devices and assemblies thereof |
| 01/15/2004 | US20040007781 Single sided adhesive tape for compound diversion on BOC substrates |
| 01/15/2004 | US20040007780 Particle-filled semiconductor attachment material |
| 01/15/2004 | US20040007779 Wafer-level method for fine-pitch, high aspect ratio chip interconnect |
| 01/15/2004 | US20040007778 Semiconductor integrated circuit device |
| 01/15/2004 | US20040007777 Semiconductor integrated circuit |
| 01/15/2004 | US20040007776 Multi-substrate layer semiconductor packages and method for making same |
| 01/15/2004 | US20040007773 Ceramic substrate for semiconductor fabricating device |
| 01/15/2004 | US20040007769 Solvent-free thermosetting resin composition, process for producing the same, and product therefrom |
| 01/15/2004 | US20040007767 Semiconductor device and liquid jetting device using the same |
| 01/15/2004 | US20040007766 Semiconductor device and method for manufacturing the same |
| 01/15/2004 | US20040007765 Semiconductor device and method of fabricating the same |
| 01/15/2004 | US20040007764 Semiconductor memory devices including different thickness dielectric layers for the cell transistors and refresh transistors thereof, and methods for fabricating same |
| 01/15/2004 | US20040007763 Method and resulting structure for manufacturing semiconductor substrates |
| 01/15/2004 | US20040007762 Method for fabricating adaptor for aligning and electrically coupling circuit devices having dissimilar connectivity patterns |
| 01/15/2004 | US20040007761 Implementation of Si-Ge HBT with CMOS process |
| 01/15/2004 | US20040007760 Inductor device with patterned ground shield and ribbing |
| 01/15/2004 | US20040007757 Semiconductor device and manufacturing method thereof |
| 01/15/2004 | US20040007756 Semiconductor device and fabrication method therefor |
| 01/15/2004 | US20040007755 Field oxide profile of an isolation region associated with a contact structure of a semiconductor device |
| 01/15/2004 | US20040007753 Photoelectric conversion device and manufacturing process thereof |
| 01/15/2004 | US20040007752 Active matrix substrate having column spacers integral with protective layer and process for fabrication thereof |
| 01/15/2004 | US20040007751 Magnetoresistive memory devices |
| 01/15/2004 | US20040007748 Insulating layer is a first layer of silicon oxynitride film formed by using silane (SiH4), nitrous oxide (N2O), and hydrogen (H2), and a second film of silicon oxynitride formed by using SiH4 and N2O; thin film transistors |
| 01/15/2004 | US20040007747 Gate structure and method |
| 01/15/2004 | US20040007745 Semiconductor device haivng silicide film formed in a part of source-drain diffusion layers and method of manufacturing the same |
| 01/15/2004 | US20040007744 Semiconductor device having a merged region and method of fabrication |
| 01/15/2004 | US20040007743 Inverter, semiconductor logic circuit, static random access memory and data latch circuit |
| 01/15/2004 | US20040007741 Semiconductor substrate, seminconductor device, and manufacturing method thereof |
| 01/15/2004 | US20040007739 For forming a circuit pattern of a semiconductor chip; an insulating film on a substrate, and a semiconductor layer formed on said insulating film, which is isolated by the insulating film for every region of formation of a circuit |
| 01/15/2004 | US20040007738 Self-aligned dog-bone structure for FinFET applications and methods to fabricate the same |
| 01/15/2004 | US20040007736 High-voltage semiconductor component |
| 01/15/2004 | US20040007735 High-voltage semiconductor component |
| 01/15/2004 | US20040007734 Nonvolatile semiconductor memory device |
| 01/15/2004 | US20040007733 Floating gate memory cell and forming method |
| 01/15/2004 | US20040007732 Compact nonvolatile memory using substrate hot carrier injection |
| 01/15/2004 | US20040007731 Semiconductor memory device and fabrication method thereof using damascene gate and epitaxial growth |
| 01/15/2004 | US20040007730 Plasma damage protection circuit for a semiconductor device |
| 01/15/2004 | US20040007729 Semiconductor device and manufacturing method thereof |
| 01/15/2004 | US20040007728 Memory cell with vertical transistor and trench capacitor |
| 01/15/2004 | US20040007727 Semiconductor memory device and fabrication method thereof using damascene bitline process |
| 01/15/2004 | US20040007726 DRAM cell and space-optimized memory array |
| 01/15/2004 | US20040007725 Method forms a storage capacitor that has a structure of a double cylinder that is extended by a constant depth from an upper part of a contact plug to a lower part; electrostatic capacity |
| 01/15/2004 | US20040007724 Silicon on oxide (SOI); a transistor that includes an ultra-thin body epitaxial layer that forms an embedded junction with a channel that has a length dictated by an undercut under the gate stack for the transistor |
| 01/15/2004 | US20040007723 Trench schottky barrier diode |
| 01/15/2004 | US20040007721 Improved memory densities while avoiding undesirable short-channel effects such as drain-induced barrier lowering; threshold voltage roll off, and sub-threshold conduction, increased leakage and reduced carrier mobility |
| 01/15/2004 | US20040007720 Compact SRAM cell incorporating refractory metal-silicon-nitrogen resistive elements and method for fabricating |
| 01/15/2004 | US20040007717 Memory device having a transistor and one resistant element as a storing means and method for driving the memory device |