Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2004
01/14/2004EP1380627A1 Cerium based abrasive material and abrasive material slurry, and method for producing cerium based abrasive material
01/14/2004EP1380418A2 Semiconductor device and liquid jetting device using the same
01/14/2004EP1380412A1 Heat reflecting material and heating device using the material
01/14/2004EP1380055A1 Semiconductor power component and corresponding production method
01/14/2004EP1380053A2 Nanoelectronic devices and circuits
01/14/2004EP1380051A1 Contact structure for an integrated semiconductor device
01/14/2004EP1380050A2 Method for producing a chalcogenide-semiconductor layer of the abc2 type with optical process monitoring
01/14/2004EP1380049A1 Transistors having optimized source-drain structures and methods for making the same
01/14/2004EP1380048A1 Method and composition for polishing by cmp
01/14/2004EP1380047A2 Method for producing a semiconductor component comprising a t-shaped contact electrode
01/14/2004EP1380046A1 Methods for forming ultrashallow junctions with low sheet resistance
01/14/2004EP1380000A2 Method and device for vibration control
01/14/2004EP1379978A2 Extraction method of defect density and size distributions
01/14/2004EP1379923A2 Substrate alignment
01/14/2004EP1379922A2 Grating test patterns and methods for overlay metrology
01/14/2004EP1379921A1 Process for producing acid sensitive liquid composition containing a carbonate
01/14/2004EP1379920A2 Photoresist compositions comprising bases and surfactants for microlithography
01/14/2004EP1379710A1 Variable efficiency faraday shield
01/14/2004EP1379471A2 Gas dissolved water producing apparatus and method thereof for use in ultrasonic cleaning equipment
01/14/2004EP1379382A1 Compliant pre-form interconnect
01/14/2004EP1379357A2 Method and apparatus for avoiding particle accumulation during an electrochemical mechanical process
01/14/2004EP1379356A1 Method and apparatus for end point triggering with integrated steering
01/14/2004EP1379340A1 Layered stacks and methods of production thereof
01/14/2004EP1379331A2 Process for producing film forming resins for photoresist compositions
01/14/2004EP1222196B1 Deposition of films using organosilsesquioxane-precursors
01/14/2004EP1126952B1 Belt for polishing semiconductors
01/14/2004EP1023139B1 Quality control method
01/14/2004EP0990268B1 Latch-up free power mos-bipolar transistor
01/14/2004EP0963600B1 Thin titanium film as self-regulating filter for silicon migration into aluminum metal lines
01/14/2004EP0874390B1 Polishing method
01/14/2004CN2599747Y Resistance regulating device in integrated circuit
01/14/2004CN2599746Y Image sensor packaged locating mechanism
01/14/2004CN1468467A Thick film millimeter wave transceiver module
01/14/2004CN1468451A Tmr material having ultra-thin magnetic layer
01/14/2004CN1468450A Method for making thin-film constitution
01/14/2004CN1468449A Trench dmos transistor with embedded trench schottky rectifier
01/14/2004CN1468447A Non-volatile memory with source side boron implantation
01/14/2004CN1468446A Slurry for use with fixed-abrasive polishing pads in polishing semiconductor device conductive structures that include copper and tungsten and polishing methods
01/14/2004CN1468445A Method for selective etching of oxides
01/14/2004CN1468444A 真空处理装置 Vacuum processing apparatus
01/14/2004CN1468443A Method of manufacturing a semiconductor component and semiconductor component thereof
01/14/2004CN1468442A Method for producing a microelectronic circuit and a microelectronic circuit
01/14/2004CN1468441A Gas distribution apparatus for semiconductor processing
01/14/2004CN1468440A System, apparatus, and method for processing wafer using single frequency rf power in plasma processing chamber
01/14/2004CN1468437A Method and apparatus for boosting bitlines for low vcc read
01/14/2004CN1468435A Flash memory architecture employing three layer metal interconnect
01/14/2004CN1468406A Digital photolithography system for making smooth diagonal components
01/14/2004CN1468390A Photoinitiated reactions
01/14/2004CN1468367A Differential numerical aperture methods and device
01/14/2004CN1468329A Atomic layer doping apparatus and method
01/14/2004CN1468322A Electrostatically clamped edge ring for plasma processing
01/14/2004CN1468162A Polishing pad comprising a filled translucent region
01/14/2004CN1468133A Fluid media particle isolating system
01/14/2004CN1468044A Normal atmosphere plasma producer
01/14/2004CN1467934A Bi-directional wavelength optical function module
01/14/2004CN1467863A Semiconductor chip, semiconductor device and method for manufacturing same
01/14/2004CN1467859A Thin-film semiconductor device, manufacturing method of the same and image display apparatus
01/14/2004CN1467856A 半导体装置及其制造方法 Semiconductor device and manufacturing method thereof
01/14/2004CN1467854A Semiconductor memory device with improved soft-error resistance
01/14/2004CN1467853A Capacitor with oxidation barrier layer and method for manufacturing the same
01/14/2004CN1467851A Nonvolatile semiconductor memory device
01/14/2004CN1467849A 半导体存储器 Semiconductor memory
01/14/2004CN1467848A Memory structure and method for manufacturing the same
01/14/2004CN1467847A Memory device and method for driving the memory device
01/14/2004CN1467846A Single electron memory having high integration level and method for making the same
01/14/2004CN1467845A Single electron memory workable under room temperature and method for making the same
01/14/2004CN1467844A 半导体集成电路器件 The semiconductor integrated circuit device
01/14/2004CN1467842A Semiconductor integrated circuit, signal transmitting device, electro-optical device, and electronic apparatus
01/14/2004CN1467840A Semiconductor device and method of manufacturing the same
01/14/2004CN1467839A 半导体集成电路 The semiconductor integrated circuit
01/14/2004CN1467838A Semiconductor device having multilevel copper wiring layers and its manufacture method
01/14/2004CN1467837A Semiconductor device and method for manufacturing the same
01/14/2004CN1467836A Semiconductor device, semiconductor package, and method for testing semiconductor device
01/14/2004CN1467832A Recovery processing method of an electrode
01/14/2004CN1467831A Multilayer circuit board, process of manufacturing same, board for multilayer circuitry, and electronic apparatus
01/14/2004CN1467830A Semiconductor device and method of manufacturing the same
01/14/2004CN1467827A Improved mask ROM process and element
01/14/2004CN1467826A Method of forming capacitor in semiconductor device
01/14/2004CN1467825A Semiconductor device and method of fabricating the same
01/14/2004CN1467824A Semiconductor device and method for manufacturing thereof
01/14/2004CN1467823A Method for fabricating capacitor in semiconductor device
01/14/2004CN1467822A Manufacturing method for capacitor
01/14/2004CN1467821A Manufacturing method of semiconductor device and semiconductor device
01/14/2004CN1467820A Method for forming wiring structure
01/14/2004CN1467819A Method of plugging through-holes in silicon substrate
01/14/2004CN1467818A Method of manufacturing semiconductor device having multilevel wiring
01/14/2004CN1467817A Semiconductor device manufacture method preventing dishing and erosion during chemical mechanical polishing
01/14/2004CN1467816A Method for making copper damascene structure in porous dielectric
01/14/2004CN1467815A Method of forming a fuse
01/14/2004CN1467814A Method for making semiconductor element having embedding wire
01/14/2004CN1467813A Semiconductor device and fabrication method therefor
01/14/2004CN1467812A Semiconductor device containing insulator and method for manufacturing the same
01/14/2004CN1467811A Method for detecting wafer level defect
01/14/2004CN1467810A Semiconductor device and test method for the same
01/14/2004CN1467809A Method and device for determining backgate characteristics
01/14/2004CN1467808A Semiconductor memory device with reduced package test time
01/14/2004CN1467806A Contactor block and apparatus for electrical connection
01/14/2004CN1467805A Method and system for monitoring ion implantation to semiconductor basic material
01/14/2004CN1467804A Via deflection detecting equipment
01/14/2004CN1467803A Substrate having a plurality of bumps, method of forming the same, and method of bonding substrate to another