| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/22/2004 | US20040014281 Method of manufacturing flash memory device using trench device isolation process |
| 01/22/2004 | US20040014280 Non-Volatile memory cell and fabrication method |
| 01/22/2004 | US20040014279 Methods of fabricating double-sided hemispherical silicon grain electrodes and capacitor modules |
| 01/22/2004 | US20040014278 Method for fabricating semiconductor device |
| 01/22/2004 | US20040014277 Structure of SRAM having asymmetric silicide layer and method for manufacturing the same |
| 01/22/2004 | US20040014276 Method of making a semiconductor transistor |
| 01/22/2004 | US20040014275 Method of manufacturing a semiconductor device |
| 01/22/2004 | US20040014274 Semiconductor device and method of manufacturing such a semiconductor device |
| 01/22/2004 | US20040014273 Techniques to create low K ILD for BEOL |
| 01/22/2004 | US20040014272 Semiconductor device having cell-based basic element aggregate having protruding part in active region |
| 01/22/2004 | US20040014271 Diffused extrinsic base and method for fabrication |
| 01/22/2004 | US20040014269 Method of manufacturing flash memory device |
| 01/22/2004 | US20040014265 Processes for forming backplanes for electro-optic displays |
| 01/22/2004 | US20040014264 Method for fabricating semiconductor device with triple well structure |
| 01/22/2004 | US20040014262 Semiconductor device and its manufacturing method |
| 01/22/2004 | US20040014261 Method for manufacturing thin film transistor |
| 01/22/2004 | US20040014259 Stereolithographic methods for fabricating hermetic semiconductor device packages and semiconductor devices including stereolithographically fabricated hermetic packages |
| 01/22/2004 | US20040014258 Monolithic Microwave Integrated Circuits; for automobile steering systems |
| 01/22/2004 | US20040014256 Method for manufacturing diode subassemblies used in rectifier assemblies of engine driven generators |
| 01/22/2004 | US20040014251 Dual panel-type organic electroluminescent display device and method of fabricating the same |
| 01/22/2004 | US20040014248 Ferroelectric memory device and method of fabricating the same |
| 01/22/2004 | US20040014247 Memory cell array having ferroelectric capacity, method of manufacturing the same and ferroelectric memory device |
| 01/22/2004 | US20040014246 Method for manufacturing MTJ cell of magnetic random access memory |
| 01/22/2004 | US20040014245 Method of manufacturing magnetic memory device, and magnetic memory device |
| 01/22/2004 | US20040014243 Magnetoresistive memory or sensor devices having improved switching properties and method of fabrication |
| 01/22/2004 | US20040013982 Elastomer stamps; patterning using low pressure; curing cycles |
| 01/22/2004 | US20040013981 Positive photoresist residue as protective coating; filling apertures |
| 01/22/2004 | US20040013978 Semiconductors; photopolymerization; development of photosensitive pattern |
| 01/22/2004 | US20040013975 Polymer and photosensitive acid generators |
| 01/22/2004 | US20040013970 Fluoropolymer with monomers formed by cyclopolymerization of a fluorinated diene and polymerization of an acrylic monomer and an acid-generating compound |
| 01/22/2004 | US20040013957 Resist is exposed to light by deviating a focus of the light by a given distance in relation to a semiconductor wafer, and after development of the resist, resist patterns for measurement are formed |
| 01/22/2004 | US20040013956 System for correcting aberrations and distortions in EUV lithography |
| 01/22/2004 | US20040013954 Alignment sensor having an electron beam source for impinging an alignment marker on a substrate and a back-scattered electron detector |
| 01/22/2004 | US20040013950 Photolithographic process used in semiconductor manufacturing |
| 01/22/2004 | US20040013949 Electron beam exposure-use mask and electron beam exposure method |
| 01/22/2004 | US20040013887 Semiconductor wafer including a low dielectric constant thermosetting polymer film and method of making same |
| 01/22/2004 | US20040013886 Heating substrate, implanting oxygen, cooling substrate, implanting into cooled substrate and annealing; implanting may be at several energies to provide plurality of depths and corresponding buried damaged regions; silicon-on-insulator |
| 01/22/2004 | US20040013867 Method for fabricating a semiconductor device |
| 01/22/2004 | US20040013858 Contacting silica dielectric film with plasma comprising at least one surface modification agent, at a concentration, and for a time period, effective to render the silica dielectric film hydrophobic |
| 01/22/2004 | US20040013818 Nitriding with plasma gas hydrogen and nitrogen, removing nitrides film residues with chlorine gas in situ |
| 01/22/2004 | US20040013817 Irradiating and curing the interlayer insulating film on the substrate with electron beams; forming a dielectric film on a wafer, a semiconductor device |
| 01/22/2004 | US20040013808 Apparatus and method for thermally controlled processing of microelectronic workpieces |
| 01/22/2004 | US20040013804 Method and apparatus for pretreating a substrate prior to electroplating |
| 01/22/2004 | US20040013801 Method for depositing in particular crystalline layers, and device for carrying out the method |
| 01/22/2004 | US20040013800 Device and method for feeding a liquid starting material, which has been brought into the gaseous state, into a CVD reactor |
| 01/22/2004 | US20040013797 Centrifugal swing arm spray processor |
| 01/22/2004 | US20040013794 Method for manufacturing piezoelectric element, piezoelectric element, and droplet-ejecting recording head |
| 01/22/2004 | US20040013577 Method and apparatus for providing gas to a processing chamber |
| 01/22/2004 | US20040013503 Robotic hand with multi-wafer end effector |
| 01/22/2004 | US20040013501 Wafer load lock and magnetically coupled linear delivery system |
| 01/22/2004 | US20040013500 Substrate loading and unloading station with buffer |
| 01/22/2004 | US20040013499 Semiconductor substrate damage protection system |
| 01/22/2004 | US20040013498 Apparatus and methods for semiconductor wafer processing equipment |
| 01/22/2004 | US20040013497 Semiconductor transfer and manufacturing apparatus |
| 01/22/2004 | US20040013419 Thermal processing system |
| 01/22/2004 | US20040013418 Thermal processing apparatus performing irradiating a substrate with light |
| 01/22/2004 | US20040013226 Lithographic apparatus and device manufacturing method |
| 01/22/2004 | US20040013027 Non-volatile semiconductor memory device and method of actuating the same |
| 01/22/2004 | US20040013022 Integrated magnetoresistive semiconductor memory configuration |
| 01/22/2004 | US20040013018 Non-volatile semiconductor memory device and method of actuating the same |
| 01/22/2004 | US20040013017 Ferroelectric memory device and read control method thereof |
| 01/22/2004 | US20040013015 Semiconductor integrated circuit |
| 01/22/2004 | US20040013014 Ferroelectric random access memory device and method for fabricating the same |
| 01/22/2004 | US20040013009 Semiconductor memory device having a gate electrode and a method of manufacturing thereof |
| 01/22/2004 | US20040013002 Method of erasing flash memory cells |
| 01/22/2004 | US20040013001 Flash memory cell and method of manufacturing the same and programming/erasing/reading method of flash memory cell |
| 01/22/2004 | US20040012998 Deep wordline trench to shield cross coupling between adjacent cells for scaled NAND |
| 01/22/2004 | US20040012996 Memory system |
| 01/22/2004 | US20040012994 Multi-state magnetoresistance random access cell with improved memory storage density |
| 01/22/2004 | US20040012993 System for using a dynamic reference in a double-bit cell memory |
| 01/22/2004 | US20040012938 Interconnect module with reduced power distribution impedance |
| 01/22/2004 | US20040012911 Integrated circuit metal-insulator-metal capacitors formed of pairs of capacitors connected in antiparallel |
| 01/22/2004 | US20040012866 8-Mirror microlithography projection objective |
| 01/22/2004 | US20040012784 Die attach process using cornercube offset tool |
| 01/22/2004 | US20040012776 Particle inspection device and inspection method using the same |
| 01/22/2004 | US20040012772 Condensation particle counter |
| 01/22/2004 | US20040012767 Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method |
| 01/22/2004 | US20040012766 Illumination optical apparatus and exposure apparatus |
| 01/22/2004 | US20040012765 Electron beam exposure apparatus and semiconductor device manufacturing method |
| 01/22/2004 | US20040012764 Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method |
| 01/22/2004 | US20040012726 Active matrix display device |
| 01/22/2004 | US20040012412 Buffer circuit, buffer tree, and semiconductor device |
| 01/22/2004 | US20040012406 Device for analyzing failure in semiconductor device provided with internal voltage generating circuit |
| 01/22/2004 | US20040012404 Thermal control of a DUT using a thermal contro substrate |
| 01/22/2004 | US20040012400 Test system and methodology |
| 01/22/2004 | US20040012337 Device transfer method, and device array method and image display unit production method using the same |
| 01/22/2004 | US20040012298 MEMS device having electrothermal actuation and release and method for fabricating |
| 01/22/2004 | US20040012214 Detection and handling of semiconductor wafers and wafers-like objects |
| 01/22/2004 | US20040012104 Gas dissolved water producing apparatus and method thereof and ultrasonic cleaning equipment and method thereof |
| 01/22/2004 | US20040012099 Stability of electrical characteristics; heat radiation |
| 01/22/2004 | US20040012098 Conductor bodies attached adhesive sheet, process for producing semiconductor device and semiconductor device |
| 01/22/2004 | US20040012097 Structure and method for fine pitch flip chip substrate |
| 01/22/2004 | US20040012095 Semiconductor integrated device and method for manufacturing semiconductor integrated device |
| 01/22/2004 | US20040012094 Flip-chip integrated circuit package and method of assembly |
| 01/22/2004 | US20040012093 Semiconductor integrated circuit device |
| 01/22/2004 | US20040012091 Semiconductor integrated circuit device having multilevel interconnection |
| 01/22/2004 | US20040012090 Electrochemically depositing a first conductive layer to completely fill first and second features; electrochemically mechanically depositing second conductive layer over first conductive conductive layer to form a planar conductive layer |
| 01/22/2004 | US20040012089 Materials and methods for forming hybrid organic-inorganic dielectric materials for integrated circuit applications |
| 01/22/2004 | US20040012088 Semiconductor device having a ball grid array and a fabrication process thereof |
| 01/22/2004 | US20040012087 Method and apparatus for forming a DMD window frame with molded glass |