| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/27/2004 | US6683433 Exposure apparatus and method utilizing isolated reaction frame |
| 01/27/2004 | US6683416 Device transfer method, and device array method and image display unit production method using the same |
| 01/27/2004 | US6683388 Method and apparatus for packaging a microelectronic die |
| 01/27/2004 | US6683387 Flip chip carrier package with adapted landing pads |
| 01/27/2004 | US6683384 Air isolated crossovers |
| 01/27/2004 | US6683383 Wirebond structure and method to connect to a microelectronic die |
| 01/27/2004 | US6683382 Semiconductor device having an interconnect layer with a plurality of layout regions having substantially uniform densities of active interconnects and dummy fills |
| 01/27/2004 | US6683381 Semiconductor device having a copper interconnect layer |
| 01/27/2004 | US6683380 Integrated circuit with bonding layer over active circuitry |
| 01/27/2004 | US6683379 Semiconductor device with reinforcing resin layer |
| 01/27/2004 | US6683376 Direct bonding of small parts and module of combined small parts without an intermediate layer inbetween |
| 01/27/2004 | US6683375 Semiconductor die including conductive columns |
| 01/27/2004 | US6683373 Method of modifying connecting leads and thinning bases of encapsulated modular electronic components to obtain a high-density module, and a module obtained thereby |
| 01/27/2004 | US6683371 Methods of and apparatus for manufacturing ball grid array semiconductor device packages |
| 01/27/2004 | US6683369 Semiconductor chip having a supporting member, tape substrate, semiconductor package having the semiconductor chip and the tape substrate |
| 01/27/2004 | US6683368 Lead frame design for chip scale package |
| 01/27/2004 | US6683367 Thin-film opto-electronic device and a method of making it |
| 01/27/2004 | US6683366 Bipolar transistor and related structure |
| 01/27/2004 | US6683365 Edge intensive antifuse device structure |
| 01/27/2004 | US6683364 Integrated circuit devices including an isolation region defining an active region area and methods for manufacturing the same |
| 01/27/2004 | US6683363 Trench structure for semiconductor devices |
| 01/27/2004 | US6683357 Semiconductor constructions |
| 01/27/2004 | US6683356 Semiconductor device with oxygen doped regions |
| 01/27/2004 | US6683355 Semiconductor raised source-drain structure |
| 01/27/2004 | US6683354 Semiconductor device having trench isolation layer and a method of forming the same |
| 01/27/2004 | US6683353 Semiconductor integrated circuit device |
| 01/27/2004 | US6683352 Semiconductor device structure |
| 01/27/2004 | US6683351 Semiconductor device having structures that can avoid deterioration caused by the manufacturing processing |
| 01/27/2004 | US6683350 Transistor and method for manufacturing the same |
| 01/27/2004 | US6683349 Semiconductor device and method of manufacturing the same |
| 01/27/2004 | US6683347 Semiconductor device with alternating conductivity type layer and method of manufacturing the same |
| 01/27/2004 | US6683346 Ultra dense trench-gated power-device with the reduced drain-source feedback capacitance and Miller charge |
| 01/27/2004 | US6683345 Semiconductor device and method for making the device having an electrically modulated conduction channel |
| 01/27/2004 | US6683343 High voltage semiconductor device having two buffer layer |
| 01/27/2004 | US6683342 Memory structure and method for manufacturing the same |
| 01/27/2004 | US6683340 Split gate flash memory |
| 01/27/2004 | US6683339 Stud formed on different layer from bit lines |
| 01/27/2004 | US6683337 Dynamic memory based on single electron storage |
| 01/27/2004 | US6683335 Gate array layout for interconnect |
| 01/27/2004 | US6683334 Compound semiconductor protection device for low voltage and high speed data lines |
| 01/27/2004 | US6683333 Fabrication of electronic circuit elements using unpatterned semiconductor layers |
| 01/27/2004 | US6683332 Heterojunction bipolar transistor and manufacturing method therefor including electrode alloyed reaction layers |
| 01/27/2004 | US6683330 Recessed thyristor control port |
| 01/27/2004 | US6683323 Semiconductor chip |
| 01/27/2004 | US6683312 Ultraviolet cleaning apparatus of a substrate and the method thereof |
| 01/27/2004 | US6683274 Heater mounted within ceramic body and spaced apart from radio frequency electrode; plasma enhanced chemical vapor deposition (pecvd) |
| 01/27/2004 | US6683198 Group(III)-metal-hydrides with a guanidino-type ligand |
| 01/27/2004 | US6683127 Crosslinkable elastromer composition, sealing material produced from the composition, and filler for use therein |
| 01/27/2004 | US6683034 Stripper composition for negative chemically amplified resist |
| 01/27/2004 | US6683013 Method of formation for quantum dots array using tilted substrate |
| 01/27/2004 | US6683012 Method for epitaxially growing crystalline insulation layer on crystalline silicon substrate while simultaneously growing silicon oxide, nitride, or oxynitride |
| 01/27/2004 | US6683011 Process for forming hafnium oxide films |
| 01/27/2004 | US6683010 Method for forming silicon-oxynitride layer on semiconductor device |
| 01/27/2004 | US6683009 Method for local etching |
| 01/27/2004 | US6683008 Process of removing ion-implanted photoresist from a workpiece |
| 01/27/2004 | US6683007 Etching and cleaning methods and etching and cleaning apparatus used therefor |
| 01/27/2004 | US6683006 Film forming method and film forming apparatus |
| 01/27/2004 | US6683005 Method of forming capacitor constructions |
| 01/27/2004 | US6683004 Method of manufacturing a semiconductor device, and semiconductor device manufactured thereby |
| 01/27/2004 | US6683002 Method to create a copper diffusion deterrent interface |
| 01/27/2004 | US6683001 Forming a metal layer on a semiconductor substrate; oxidizing the metal laye so that exposed surface of the metal layer is changed into a mixed phase of metal and oxygen; heating |
| 01/27/2004 | US6683000 Semiconductor-device fabrication method |
| 01/27/2004 | US6682999 Semiconductor device having multilevel interconnections and method of manufacture thereof |
| 01/27/2004 | US6682998 Methods for bumped die and wire bonded board-on-chip package |
| 01/27/2004 | US6682997 Angled implant in a fabrication technique to improve conductivity of a base material |
| 01/27/2004 | US6682996 Method for forming a semiconductor structure using a disposable hardmask |
| 01/27/2004 | US6682995 Iridium conductive electrode/barrier structure and method for same |
| 01/27/2004 | US6682994 Methods for transistor gate formation using gate sidewall implantation |
| 01/27/2004 | US6682993 Effective Vcc to Vss power ESD protection device |
| 01/27/2004 | US6682992 Method of controlling grain size in a polysilicon layer and in semiconductor devices having polysilicon structures |
| 01/27/2004 | US6682991 Growth method of a nitride III-V compound semiconductor, manufacturing method of a semiconductor device, and semiconductor device |
| 01/27/2004 | US6682990 Separation method of semiconductor layer and production method of solar cell |
| 01/27/2004 | US6682989 Plating a conductive material on a dielectric material |
| 01/27/2004 | US6682988 Growth of photoresist layer in photolithographic process |
| 01/27/2004 | US6682987 Methods of forming a trench isolation region in a substrate by removing a portion of a liner layer at a boundary between a trench etching mask and an oxide layer in a trench and integrated circuit devices formed thereby |
| 01/27/2004 | US6682986 Method of forming shallow trench isolation and method of manufacturing a semiconductor device using the same |
| 01/27/2004 | US6682985 Semiconductor device and manufacturing method thereof |
| 01/27/2004 | US6682984 Method of making a concave capacitor |
| 01/27/2004 | US6682983 Method of forming a bottom electrode of a capacitor in a memory device |
| 01/27/2004 | US6682982 Process method for 1T-SRAM |
| 01/27/2004 | US6682981 Stress controlled dielectric integrated circuit fabrication |
| 01/27/2004 | US6682980 Fabrication of abrupt ultra-shallow junctions using angled PAI and fluorine implant |
| 01/27/2004 | US6682979 Methods of forming transistors associated with semiconductor substrates |
| 01/27/2004 | US6682978 Integrated circuit having increased gate coupling capacitance |
| 01/27/2004 | US6682977 Method for fabricating a gate structure of a flash memory |
| 01/27/2004 | US6682976 Forming an isolation layer over a semiconductor substrate having a stacked gate region and a diffusion region, forming gate oxide layer over the gate stacked region and first conductive layer over the isolation layer, removing |
| 01/27/2004 | US6682975 Semiconductor memory device having self-aligned contact and fabricating method thereof |
| 01/27/2004 | US6682974 Fabricating capacitor of semiconductor device |
| 01/27/2004 | US6682973 Formation of well-controlled thin SiO, SiN, SiON layer for multilayer high-K dielectric applications |
| 01/27/2004 | US6682972 Exposing the tungsten nitride to n2 or ammonia plasma |
| 01/27/2004 | US6682971 Method of manufacturing a semiconductor |
| 01/27/2004 | US6682970 Capacitor/antifuse structure having a barrier-layer electrode and improved barrier layer |
| 01/27/2004 | US6682969 Top electrode in a strongly oxidizing environment |
| 01/27/2004 | US6682968 Manufacturing method of Schottky barrier diode |
| 01/27/2004 | US6682967 Semiconductor device and method of making the same |
| 01/27/2004 | US6682966 Semiconductor device and method for producing the same |
| 01/27/2004 | US6682965 Method of forming n-and p- channel field effect transistors on the same silicon layer having a strain effect |
| 01/27/2004 | US6682964 TFT for LCD device and fabrication method thereof |
| 01/27/2004 | US6682963 Semiconductor device and manufacturing method thereof |
| 01/27/2004 | US6682962 GaAs MOSFET having low capacitance and on-resistance and method of manufacturing the same |