Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2004
05/04/2004US6730590 Semiconductor integrated circuit device and fabrication process thereof
05/04/2004US6730589 Electronic component and semiconductor device, method of making the same and method of mounting the same, circuit board, and electronic instrument
05/04/2004US6730588 Method of forming SiGe gate electrode
05/04/2004US6730587 Titanium barrier for nickel silicidation of a gate electrode
05/04/2004US6730586 Semiconductor device having an overhanging structure and method for fabricating the same
05/04/2004US6730585 Method of fabricating high-voltage transistor with buried conduction layer
05/04/2004US6730584 Methods for forming wordlines, transistor gates, and conductive interconnects, and wordline, transistor gate, and conductive interconnect structures
05/04/2004US6730583 Method for fabricating semiconductor device
05/04/2004US6730582 Transistor circuit with varying resistance lightly doped diffused regions for electrostatic discharge (ESD) protection
05/04/2004US6730581 Semiconductor device and method of manufacture thereof
05/04/2004US6730580 Silicon substrate wafer fabrication method employing halogen gettering material and/or plasma annealing
05/04/2004US6730579 Method of manufacturing a semiconductor dice by partially dicing the substrate and subsequent chemical etching
05/04/2004US6730578 Separating machine for thinned semiconductor substrate and separation method
05/04/2004US6730576 Method of forming a thick strained silicon layer and semiconductor structures incorporating a thick strained silicon layer
05/04/2004US6730575 Methods of forming perovskite-type material and capacitor dielectric having perovskite-type crystalline structure
05/04/2004US6730574 Semiconductor device and method for fabricating the same
05/04/2004US6730573 MIM and metal resistor formation at CU beol using only one extra mask
05/04/2004US6730572 Method of forming silicide
05/04/2004US6730571 Method to form a cross network of air gaps within IMD layer
05/04/2004US6730570 Method for forming a self-aligned contact of a semiconductor device and method for manufacturing a semiconductor device using the same
05/04/2004US6730569 Field effect transistor with improved isolation structures
05/04/2004US6730568 Method for fabricating semiconductor device with ultra-shallow super-steep-retrograde epi-channel by boron-fluoride compound doping
05/04/2004US6730567 Dynamic memory based on single electron storage
05/04/2004US6730566 Method for non-thermally nitrided gate formation for high voltage devices
05/04/2004US6730565 Method of forming flash memory
05/04/2004US6730564 Salicided gate for virtual ground arrays
05/04/2004US6730563 Method of manufacturing semiconductor device
05/04/2004US6730562 Method of patterning ferroelectric layers
05/04/2004US6730561 Method of forming a cup capacitor
05/04/2004US6730560 Method for fabricating semiconductor device
05/04/2004US6730559 Capacitors and methods of forming capacitors
05/04/2004US6730557 Semiconductor device and production thereof
05/04/2004US6730556 Complementary transistors with controlled drain extension overlap
05/04/2004US6730555 Transistors having selectively doped channel regions
05/04/2004US6730554 Multi-layer silicide block process
05/04/2004US6730553 Methods for making semiconductor structures having high-speed areas and high-density areas
05/04/2004US6730552 MOSFET with decoupled halo before extension
05/04/2004US6730551 Formation of planar strained layers
05/04/2004US6730550 Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device
05/04/2004US6730549 Semiconductor device and method for its preparation
05/04/2004US6730548 Method of fabricating a thin film transistor
05/04/2004US6730546 Molded component and method of producing the same
05/04/2004US6730545 Method of performing back-end manufacturing of an integrated circuit device
05/04/2004US6730542 Polybenzoxazine based wafer-level underfill material
05/04/2004US6730541 Wafer-scale assembly of chip-size packages
05/04/2004US6730540 Clock distribution networks and conductive lines in semiconductor integrated circuits
05/04/2004US6730539 Method of manufacturing semiconductor device package
05/04/2004US6730538 Fabricating electronic devices using actinide oxide semiconductor materials
05/04/2004US6730537 Coupling arrays of metal, alloy, semiconductor or magnetic clusters scaffold comprising, for example, polynucleotides and/or polypeptides
05/04/2004US6730534 Method of manufacturing three-dimensional structure and method of manufacturing oscillator
05/04/2004US6730532 Method and system for universal packaging in conjunction with a back-end integrated circuit manufacturing process
05/04/2004US6730531 Method for forming quantum dot
05/04/2004US6730528 Mask set for measuring an overlapping error and method of measuring an overlapping error using the same
05/04/2004US6730527 Chip and defect tolerant method of mounting same to a substrate
05/04/2004US6730525 Method of manufacturing a electrode of capacitor
05/04/2004US6730524 Method for manufacturing ferroelectric thin film device, ink jet recording head, and ink jet printer
05/04/2004US6730523 Low temperature chemical vapor deposition process for forming bismuth-containing ceramic thin films useful in ferroelectric memory devices
05/04/2004US6730522 Method of forming solid of a ferroelectric or high dielectric material and method of manufacturing semiconductor device employing the same
05/04/2004US6730458 Forming arf resist pattern, reducing the size of pattern openings by exposing resist pattern to radiation from an vuv (vacuum ultraviolet) excimer laser or e-beam radiation during thermal treatment
05/04/2004US6730454 Antireflective SiO-containing compositions for hardmask layer
05/04/2004US6730452 To generate resist images on a substrate in the manufacture of integrated circuits
05/04/2004US6730445 Attenuated embedded phase shift photomask blanks
05/04/2004US6730395 Magnetic tunnel junction using nanoparticle monolayers and applications therefor
05/04/2004US6730369 Using electron cyclotron resonance; bent waveguide maintaining constant relative positioning
05/04/2004US6730368 Method of preparing a poly-crystalline silicon film
05/04/2004US6730354 Thin films; vapor deposition
05/04/2004US6730276 Multilayer; uniform adhesion
05/04/2004US6730245 Slurry includes abrasive particles have a small particle size, narrow size distribution and a spherical morphology, and the particles are substantially unagglomerated, selected from silica, alumina, zirconia, ceria etc. and mixture
05/04/2004US6730239 Ethylene oxide-propylene oxide copolymer and an etherified eo-po copolymer in a water solution with a hydroxide
05/04/2004US6730237 Absorbing halogen gas onto exposed surface, removing , then etching/milling; semiconductors
05/04/2004US6730208 Biological or chemical sensors; dna chips
05/04/2004US6730196 Auxiliary electromagnets in a magnetron sputter reactor
05/04/2004US6730191 Coaxial dressing for chemical mechanical polishing
05/04/2004US6730176 Single wafer megasonic cleaner method, system, and apparatus
05/04/2004US6730175 Ceramic substrate support
05/04/2004US6730170 Encapsulant material applicator for semiconductor wafers and method of use thereof
05/04/2004US6730164 Systems and methods for forming strontium- and/or barium-containing layers
05/04/2004US6730163 Aluminum-containing material and atomic layer deposition methods
05/04/2004US6729950 Chemical mechanical polishing pad having wave shaped grooves
05/04/2004US6729947 Semiconductor wafer handler
05/04/2004US6729946 Polishing apparatus
05/04/2004US6729944 Chemical mechanical polishing apparatus with rotating belt
05/04/2004US6729943 System and method for controlled polishing and planarization of semiconductor wafers
05/04/2004US6729941 Process for manufacturing semiconductor wafer and semiconductor wafer
05/04/2004US6729886 Method of fabricating a drain isolated LDMOS device
05/04/2004US6729875 Susceptor pocket profile to improve process performance
05/04/2004US6729850 Applied plasma duct system
05/04/2004US6729834 Wafer manipulating and centering apparatus
05/04/2004US6729824 Dual robot processing system
05/04/2004US6729823 Processing system for object to be processed
05/04/2004US6729561 Cleaning nozzle and substrate cleaning apparatus
05/04/2004US6729528 Recognition device, bonding device, and method of manufacturing a circuit device
05/04/2004US6729527 Bonding tool with polymer coating
05/04/2004US6729462 Edge grip aligner with buffering capabilities
05/04/2004US6729353 Modular fluid delivery apparatus
05/04/2004US6729261 Plasma processing apparatus
05/04/2004US6729215 Dicing machine
05/04/2004US6729213 Manufacturing method of monolithic electronic components
05/04/2004US6729201 Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus
05/04/2004US6729041 Substrate processing apparatus and substrate processing method