| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/27/2004 | US6727560 Engineered metal gate electrode |
| 04/27/2004 | US6727559 Compound semiconductor device |
| 04/27/2004 | US6727558 Channel isolation using dielectric isolation structures |
| 04/27/2004 | US6727557 Semiconductor device having well tap provided in memory cell |
| 04/27/2004 | US6727556 Semiconductor device and a method of manufacturing thereof |
| 04/27/2004 | US6727553 Semiconductor device including SOI substrate |
| 04/27/2004 | US6727552 Semiconductor device and method of manufacturing the same |
| 04/27/2004 | US6727551 MOS semiconductor device and method of manufacturing the same |
| 04/27/2004 | US6727550 Integrated circuit device |
| 04/27/2004 | US6727549 Plurality of damaged regions formed in semiconductor substrate corresponding to active devices |
| 04/27/2004 | US6727546 Self-aligned triple gate silicon-on-insulator (SOI) device |
| 04/27/2004 | US6727545 Semiconductor memory array of floating gate memory cells with low resistance source regions and high source coupling |
| 04/27/2004 | US6727544 Semiconductor memory including cell(s) with both charge storage layer(s) and control gate laterally surrounding island-like semiconductor layer |
| 04/27/2004 | US6727543 Method for fabricating a memory structure having required scale spacers |
| 04/27/2004 | US6727542 Semiconductor memory device and method for manufacturing the same |
| 04/27/2004 | US6727541 Diffusion film; random access memory; computers |
| 04/27/2004 | US6727540 Structure and method of fabricating embedded DRAM having a vertical device array and a bordered bitline contact |
| 04/27/2004 | US6727539 Embedded vertical DRAM arrays with silicided bitline and polysilicon interconnect |
| 04/27/2004 | US6727538 Method and structure for improved alignment tolerance in multiple, singularized plugs |
| 04/27/2004 | US6727537 Magnetic memory cell |
| 04/27/2004 | US6727536 Cells arranged ina matrix; intersecting signal electrodes; peripheral circuit for selectivelly writing or reading information |
| 04/27/2004 | US6727534 Electrically programmed MOS transistor source/drain series resistance |
| 04/27/2004 | US6727532 Semiconductor integrated circuit device |
| 04/27/2004 | US6727531 Indium gallium nitride channel high electron mobility transistors, and method of making the same |
| 04/27/2004 | US6727530 Integrated photodetector and heterojunction bipolar transistors |
| 04/27/2004 | US6727529 Semiconductor capacitively-coupled NDR device and related applications in high-density high-speed memories and in power switches |
| 04/27/2004 | US6727528 Thyristor-based device including trench dielectric isolation for thyristor-body regions |
| 04/27/2004 | US6727525 Diode comprising a metal semiconductor contact and a method for the production thereof |
| 04/27/2004 | US6727523 Method of manufacturing crystal of iii-v compounds of the nitride system, crystal substrate of iii-v compounds of the nitride system, crystal film of iii-v compounds of the nitride system, and method of manufacturing device |
| 04/27/2004 | US6727522 Transparent channel layer of zinc oxide zno, zinc magnesium oxide or zinc cadmium oxide |
| 04/27/2004 | US6727517 Three dimensional integrated circuits |
| 04/27/2004 | US6727515 Insulation film forming material, insulation film, method for forming the insulation film, and semiconductor device |
| 04/27/2004 | US6727514 Thin-film semiconductor integrated circuit device and picture display device with using thereof and manufacturing method thereof |
| 04/27/2004 | US6727509 Wafer pedestal tilt mechanism |
| 04/27/2004 | US6727507 Electron beam proximity exposure apparatus and method |
| 04/27/2004 | US6727500 System for imaging a cross-section of a substrate |
| 04/27/2004 | US6727474 Rapid thermal processing chamber for processing multiple wafers |
| 04/27/2004 | US6727461 Silicon wafer protection film trimming method and trimmer |
| 04/27/2004 | US6727458 Energy-efficient, laser-based method and system for processing target material |
| 04/27/2004 | US6727456 Deposited film forming method and deposited film forming apparatus |
| 04/27/2004 | US6727195 Method and system for decreasing the spaces between wordlines |
| 04/27/2004 | US6727194 Wafer batch processing system and method |
| 04/27/2004 | US6727192 Methods of metal doping a chalcogenide material |
| 04/27/2004 | US6727191 High temperature hydrogen anneal of silicon wafers supported on a silicon fixture |
| 04/27/2004 | US6727190 Method of forming fluorine doped boron-phosphorous silicate glass (F-BPSG) insulating materials |
| 04/27/2004 | US6727188 Etchant and method for fabricating a substrate for an electronic device using the same wherein the substrate includes a copper or copper alloy film |
| 04/27/2004 | US6727187 Fabrication method for semiconductor device |
| 04/27/2004 | US6727186 Method for lateral etching with holes for making semiconductor devices |
| 04/27/2004 | US6727185 Dry process for post oxide etch residue removal |
| 04/27/2004 | US6727184 Method for coating a thick spin-on-glass layer on a semiconductor structure |
| 04/27/2004 | US6727183 Prevention of spiking in ultra low dielectric constant material |
| 04/27/2004 | US6727182 Process for the production of semiconductor device |
| 04/27/2004 | US6727181 Etching method and manufacturing method of a structure |
| 04/27/2004 | US6727180 Method for forming contact window |
| 04/27/2004 | US6727179 Method for creating an integrated circuit stage wherein fine and large patterns coexist |
| 04/27/2004 | US6727178 Etchant and method of etching |
| 04/27/2004 | US6727177 Multi-step process for forming a barrier film for use in copper layer formation |
| 04/27/2004 | US6727176 Method of forming reliable Cu interconnects |
| 04/27/2004 | US6727175 Method of controlling metal formation processes using ion implantation, and system for performing same |
| 04/27/2004 | US6727174 Method for fabricating a dual-diameter electrical conductor |
| 04/27/2004 | US6727173 Semiconductor processing methods of forming an utilizing antireflective material layers, and methods of forming transistor gate stacks |
| 04/27/2004 | US6727172 Process to reduce chemical mechanical polishing damage of narrow copper lines |
| 04/27/2004 | US6727171 Diamond pn junction diode and method for the fabrication thereof |
| 04/27/2004 | US6727170 Semiconductor device having an improved interlayer conductor connections and a manufacturing method thereof |
| 04/27/2004 | US6727169 Method of making conformal lining layers for damascene metallization |
| 04/27/2004 | US6727168 Method of forming local interconnects |
| 04/27/2004 | US6727167 Method of making an aligned electrode on a semiconductor structure |
| 04/27/2004 | US6727166 Removal of silicon oxynitride material using a wet chemical process after gate etch processing |
| 04/27/2004 | US6727165 Fabrication of metal contacts for deep-submicron technologies |
| 04/27/2004 | US6727164 Method for fabricating a semiconducting nitride film, susceptor tray, and apparatus for fabricating a semiconducting nitride film |
| 04/27/2004 | US6727163 Method for sawing wafer |
| 04/27/2004 | US6727162 Semiconductor chip assembly system with a suction nipple for removing a semiconductor chip |
| 04/27/2004 | US6727161 Isolation technology for submicron semiconductor devices |
| 04/27/2004 | US6727160 Method of forming a shallow trench isolation structure |
| 04/27/2004 | US6727159 Method of forming a shallow trench isolation in a semiconductor substrate |
| 04/27/2004 | US6727158 Structure and method for forming a faceted opening and a layer filling therein |
| 04/27/2004 | US6727157 Method for forming a shallow trench isolation using air gap |
| 04/27/2004 | US6727156 Semiconductor device including ferroelectric capacitor and method of manufacturing the same |
| 04/27/2004 | US6727155 Method for spin etching sidewall spacers by acid vapor |
| 04/27/2004 | US6727154 Methods for fabricating inductor for integrated circuit or integrated circuit package |
| 04/27/2004 | US6727153 Superlattice fabrication for InAs/GaSb/AlSb semiconductor structures |
| 04/27/2004 | US6727151 Method to fabricate elevated source/drain structures in MOS transistors |
| 04/27/2004 | US6727150 Methods of forming trench isolation within a semiconductor substrate including, Tshaped trench with spacers |
| 04/27/2004 | US6727149 Method of making a hybrid SOI device that suppresses floating body effects |
| 04/27/2004 | US6727148 ULSI MOS with high dielectric constant gate insulator |
| 04/27/2004 | US6727147 MOSFET fabrication method |
| 04/27/2004 | US6727146 Semiconductor device and method of manufacturing thereof |
| 04/27/2004 | US6727145 Method for fabricating post-process one-time programmable read only memory cell |
| 04/27/2004 | US6727144 Manufacturing method for semiconductor storage device |
| 04/27/2004 | US6727143 Method and system for reducing charge gain and charge loss when using an ARC layer in interlayer dielectric formation |
| 04/27/2004 | US6727142 Orientation independent oxidation of nitrided silicon |
| 04/27/2004 | US6727141 DRAM having offset vertical transistors and method |
| 04/27/2004 | US6727140 Capacitor with high dielectric constant materials and method of making |
| 04/27/2004 | US6727139 Methods of electrically contacting to conductive plugs, methods of forming contact openings, and methods of forming dynamic random access memory circuitry |
| 04/27/2004 | US6727138 Process for fabricating an electronic component incorporating an inductive microcomponent |
| 04/27/2004 | US6727137 Processing methods of forming integrated circuitry memory devices, methods of forming DRAM arrays, and related semiconductor masks |
| 04/27/2004 | US6727136 Formation of ultra-shallow depth source/drain extensions for MOS transistors |
| 04/27/2004 | US6727135 All-in-one disposable/permanent spacer elevated source/drain, self-aligned silicide CMOS |
| 04/27/2004 | US6727134 Method of forming a nitride gate dielectric layer for advanced CMOS devices |
| 04/27/2004 | US6727133 Integrated circuit resistors in a high performance CMOS process |