| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/27/2004 | US6727132 Method of manufacturing a dual gate semiconductor device with a poly-metal electrode |
| 04/27/2004 | US6727131 System and method for addressing junction capacitances in semiconductor devices |
| 04/27/2004 | US6727130 Method of forming a CMOS type semiconductor device having dual gates |
| 04/27/2004 | US6727129 Method for manufacturing a semiconductor device |
| 04/27/2004 | US6727128 Method of preparing polysilicon FET built on silicon carbide diode substrate |
| 04/27/2004 | US6727127 Laterally diffused MOS transistor (LDMOS) and method of making same |
| 04/27/2004 | US6727126 Masking member for forming fine electrode and manufacturing method therefor, method for forming electrode, and field effect transistor |
| 04/27/2004 | US6727125 Multi-pattern shadow mask system and method for laser annealing |
| 04/27/2004 | US6727124 Method of manufacturing a TFT using a catalytic element to promote crystallization of a semiconductor film and gettering the catalytic element |
| 04/27/2004 | US6727123 Method for manufacturing a thin-film transistor comprising a recombination center |
| 04/27/2004 | US6727122 Method of fabricating polysilicon thin film transistor |
| 04/27/2004 | US6727121 Method for crystallizing a silicon layer and fabricating a TFT using the same |
| 04/27/2004 | US6727119 Method of encapsulating a semiconductor device attached to a wiring substrate using sealing resin |
| 04/27/2004 | US6727118 Power distribution design method for stacked flip-chip packages |
| 04/27/2004 | US6727115 Back-side through-hole interconnection of a die to a substrate |
| 04/27/2004 | US6727114 Semiconductor device and a method of manufacturing the same |
| 04/27/2004 | US6727108 Apparatus and method for optical evaluation, apparatus and method for manufacturing semiconductor device, method of controlling apparatus for manufacturing semiconductor device, and semiconductor device |
| 04/27/2004 | US6727107 Method of testing the processing of a semiconductor wafer on a CMP apparatus |
| 04/27/2004 | US6727106 System and software for statistical process control in semiconductor manufacturing and method thereof |
| 04/27/2004 | US6727105 Method of fabricating an MRAM device including spin dependent tunneling junction memory cells |
| 04/27/2004 | US6727047 Method of extending the stability of a photoresist during direct writing of an image upon the photoresist |
| 04/27/2004 | US6727040 Positive resist composition to be irradiated with one of an electron beam and X-ray |
| 04/27/2004 | US6727033 Positive resist composition |
| 04/27/2004 | US6727032 Useful in micro-processing using various radiations, e.g., far-ultraviolet radiation such as krf excimer laser or arf excimer laser, x rays such as synchrotron radiation, charged particle radiation such as electron beam, etc. |
| 04/27/2004 | US6727028 Separating masking pattern into zones; overcoating semiconductor wafer |
| 04/27/2004 | US6727027 Seed layer is formed of a chromium material containing atleast one of oxygen, nitrogen and carbon, disposed between the transparent substrate and the light-shielding film or the antireflective film |
| 04/27/2004 | US6727026 Semiconductor integrated circuit patterns |
| 04/27/2004 | US6726996 Useful as a dielectric capping layer for interconnect structures that include wiring regions that are surrounded by organic interlevel dielectrics, or porous dielectrics (including organic and inorganic) |
| 04/27/2004 | US6726984 Ceramic structure using a support sheet |
| 04/27/2004 | US6726955 Method of controlling the crystal structure of polycrystalline silicon |
| 04/27/2004 | US6726954 Method and system for forming copper thin film |
| 04/27/2004 | US6726886 Apparatus for cleaning semiconductor device |
| 04/27/2004 | US6726880 Device comprising support substrate, array of microlocations comprising electronically addressable electrodes, two collection electrodes adjacent to opposite sides of array, and flow cell adapted to be supported on substrate |
| 04/27/2004 | US6726848 Enclosing only one substrate within process chamber proportioned to process only one substrate at time, exposing substrate to chemical treatment fluid, exposing to rinse fluid, exposing to drying vapor |
| 04/27/2004 | US6726826 Method of manufacturing a semiconductor component |
| 04/27/2004 | US6726815 Electrochemical etching cell |
| 04/27/2004 | US6726814 Process for producing optical article |
| 04/27/2004 | US6726805 Pedestal with integral shield |
| 04/27/2004 | US6726803 Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity |
| 04/27/2004 | US6726802 Plasma processing apparatus |
| 04/27/2004 | US6726801 Dry etching apparatus for manufacturing semiconductor devices |
| 04/27/2004 | US6726800 Ashing apparatus, ashing methods, and methods for manufacturing semiconductor devices |
| 04/27/2004 | US6726799 Plasma etching apparatus with focus ring and plasma etching method |
| 04/27/2004 | US6726776 Low temperature integrated metallization process and apparatus |
| 04/27/2004 | US6726771 Treatment solution supply method and treatment solution supply unit |
| 04/27/2004 | US6726769 Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
| 04/27/2004 | US6726768 Method of crystallizing amorphous silicon |
| 04/27/2004 | US6726554 Guide ring removal device |
| 04/27/2004 | US6726550 Polishing apparatus |
| 04/27/2004 | US6726540 Polishing cloth and method of manufacturing semiconductor device using the same |
| 04/27/2004 | US6726538 Sample polishing apparatus and sample polishing method |
| 04/27/2004 | US6726537 Polishing carrier head |
| 04/27/2004 | US6726535 Method for preventing localized Cu corrosion during CMP |
| 04/27/2004 | US6726534 Preequilibrium polishing method and system |
| 04/27/2004 | US6726533 Automatic, masking |
| 04/27/2004 | US6726529 Low temperature chemical mechanical polishing of dielectric materials |
| 04/27/2004 | US6726528 Polishing pad with optical sensor |
| 04/27/2004 | US6726526 Cutting machine |
| 04/27/2004 | US6726429 Local store for a wafer processing station |
| 04/27/2004 | US6726319 Method for inspecting surface of semiconductor wafer |
| 04/27/2004 | US6725869 Protective barrier for cleaning chamber |
| 04/27/2004 | US6725868 Liquid processing apparatus |
| 04/27/2004 | US6725565 Heating a semiconductor substrate and vaccuming the removed vapor |
| 04/27/2004 | US6725564 Multistage semiconductor processing tool |
| 04/27/2004 | US6725557 Thickness measuring apparatus and method |
| 04/27/2004 | US6725536 Methods for the fabrication of electrical connectors |
| 04/27/2004 | CA2351568C Method for forming transparent conductive film by using chemically amplified resist |
| 04/27/2004 | CA2260489C Process of reclamation of soi substrate and reproduced substrate |
| 04/25/2004 | WO2004038805A1 Lateral short-channel dmos, method for manufacturing same and semiconductor device |
| 04/25/2004 | CA2458992A1 Lateral short-channel dmos, method of manufacturing the same, and semiconductor device |
| 04/22/2004 | WO2004034758A1 Process for producing ceramic multilayer board |
| 04/22/2004 | WO2004034478A2 Layer arrangement of hetero-connected semiconductor layers, comprising at least one intermediate separation layer, and method for the production thereof |
| 04/22/2004 | WO2004034476A2 Flip chip imaging sensor |
| 04/22/2004 | WO2004034475A1 Plasma oscillation switching device |
| 04/22/2004 | WO2004034474A1 Semiconductor storage |
| 04/22/2004 | WO2004034470A2 Dual-port memory cell and layout design |
| 04/22/2004 | WO2004034469A1 Magnetic storage device using ferromagnetic tunnel junction element |
| 04/22/2004 | WO2004034468A2 Flash memory array with increased coupling between floating and control gates |
| 04/22/2004 | WO2004034467A2 Sublithographic nanoscale memory architecture |
| 04/22/2004 | WO2004034464A1 Forming polysilicon structures |
| 04/22/2004 | WO2004034462A1 Trench insulation in substrate disks comprising logic semiconductors and power semiconductors |
| 04/22/2004 | WO2004034461A1 Electrode configuration for retaining cooling gas on electrostatic wafer clamp |
| 04/22/2004 | WO2004034460A2 Method for eliminating voiding in plated solder |
| 04/22/2004 | WO2004034459A2 Method for producing a thinned down stack of chips |
| 04/22/2004 | WO2004034458A1 Field effect transistor with local source/drain insulation and associated method of production |
| 04/22/2004 | WO2004034457A1 Annealed wafer and annealed wafer manufacturing method |
| 04/22/2004 | WO2004034456A1 Method of forming wiring |
| 04/22/2004 | WO2004034455A1 Plasma processing apparatus, processing vessel used in plasma processing apparatus, dielectric plate used in plasma processing apparatus |
| 04/22/2004 | WO2004034454A1 Substrate treating appratus |
| 04/22/2004 | WO2004034453A1 Method for treating semiconductor material |
| 04/22/2004 | WO2004034451A1 Substrate detergent |
| 04/22/2004 | WO2004034449A2 Transparent oxide semiconductor thin film transistors |
| 04/22/2004 | WO2004034446A1 Exposure device, alignment method, and semiconductor device manufacturing method |
| 04/22/2004 | WO2004034445A2 A method for plasma etching performance enhancement |
| 04/22/2004 | WO2004034444A1 Heated substrate support |
| 04/22/2004 | WO2004034443A1 Atomic layer deposition methods and atomic layer deposition tools |
| 04/22/2004 | WO2004034442A2 Method for semiconductor gate width reduction |
| 04/22/2004 | WO2004034441A2 Apparatus and method for assembling arrays of functional elements to substrates |
| 04/22/2004 | WO2004034438A2 Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position |
| 04/22/2004 | WO2004034437A2 Improved performance of electronic and optoelectronic devices using a surfactant during epitaxial growth |