Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2004
05/05/2004CN1494156A Operating control according to temp change of integrated circuit
05/05/2004CN1494155A Semiconductor device and its mfg. method
05/05/2004CN1494154A Semiconductor device and its mfg. method
05/05/2004CN1494153A Semiconductor device structure and its manufacturing method
05/05/2004CN1494152A Semiconductor device and its mfg. method
05/05/2004CN1494151A Single electron storage having multiple stabilizing storage state and its making method
05/05/2004CN1494147A Semiconductor device
05/05/2004CN1494145A Fuse element and integrated circuit device using said element
05/05/2004CN1494144A 半导体装置 Semiconductor device
05/05/2004CN1494143A Semiconductor device and its mfg. method, circuidboard, electronic device and apparatus for mfg. semiconductor device
05/05/2004CN1494142A Lead wire, resin closed semiconductor device and its mfg. method
05/05/2004CN1494139A Camera assembly for small electronic apparatus
05/05/2004CN1494130A Manufacturing method of double self aligning silicide
05/05/2004CN1494129A Semiconductor device and mfg. method thereof
05/05/2004CN1494128A Method of forming insulating film on silicon substrate
05/05/2004CN1494127A Semiconductor device and mfg. method thereof
05/05/2004CN1494126A Method of forming shallow groove spacing object in semiconductor substrate
05/05/2004CN1494125A Forming method of shallow groove spacing structure
05/05/2004CN1494124A Method for designing semiconductor device
05/05/2004CN1494123A Integrated circuit packing testing equipment
05/05/2004CN1494122A Observable covering evaluation method of parameter quoted fixed value chain based on reinforcing type
05/05/2004CN1494121A Wire clamp used in integrated circuit
05/05/2004CN1494120A Metal electroplating method of integrated circuit packaging substrate
05/05/2004CN1494119A Semiconductor device mfg. method
05/05/2004CN1494118A Dielectric layer reetching method
05/05/2004CN1494117A Method for etching polycrystalline silicon
05/05/2004CN1494116A Surface roughing treatment method of semiconductor device active region possessing low internal resistance
05/05/2004CN1494115A 湿蚀刻装置 Wet etching apparatus
05/05/2004CN1494114A Cleaning device and sponge roller used in semi-conductor manufacturing process
05/05/2004CN1494113A Method for mfg. semiconductor device with differential thickness grid insulation film
05/05/2004CN1494112A Semiconductor device mfg. method
05/05/2004CN1494111A Semiconductor device mfg. method
05/05/2004CN1494110A Electrooptic apparatus and its mfg. method, copying chip, copying source substrate and electronic apparatus
05/05/2004CN1494109A Circuit apparatus mfg. method
05/05/2004CN1494108A Circuit apparatus providing system and server computer
05/05/2004CN1494107A Silicon film crystallization method, thin film transistor using said method and its plate display
05/05/2004CN1494096A Fusing circuit and display driving circuit
05/05/2004CN1494087A Control grid of bimetal oxide-nitride-oxide semiconductor and word line voltage boost design
05/05/2004CN1494086A Bimetal oxide-nitride-oxide semiconductor array metal position structure and single unit operation
05/05/2004CN1494084A Digit line precharging circuit of semiconductor storage device
05/05/2004CN1494027A Power wiring method for semiconductor integrated circuit and semiconductor integrated circuit
05/05/2004CN1493924A Projection optical system, exposure device and its assembly mfg. method
05/05/2004CN1493923A Inspecting method and photomask
05/05/2004CN1493922A Reflection refraction photoetching system having light lid table vertical to crystal wafer desk and method
05/05/2004CN1493921A Photoetching equipment having vacuum mask plate store connected with vacuum chamber
05/05/2004CN1493908A Electrooptical apparatus and electronic apparatus
05/05/2004CN1493905A Method for mfg. colour lattice of liquid crystal
05/05/2004CN1493890A Apparatus and method for exposure of imcro-lens array
05/05/2004CN1493870A Apparatus and method for inspecting pattern defect
05/05/2004CN1148810C Gallium nitride monocrystal substrate and its manufacturing method
05/05/2004CN1148806C Capacitor and method of manufacturing the same
05/05/2004CN1148805C Ferroelectric capacitor, ferroelectric/CMOS integrated structure and its mfg. method
05/05/2004CN1148803C 功率晶体管 Power Transistors
05/05/2004CN1148802C Low alpha emission interconnect system of electronic device and its forming method
05/05/2004CN1148800C Process for preparing lower electrode of capacitor in memory
05/05/2004CN1148799C Method for manufacturing DRAM unit capacitor
05/05/2004CN1148798C Locating ring for chip carrier
05/05/2004CN1148797C Process for finding out unity coupling coefficient of flash memory by GIDL method
05/05/2004CN1148796C Semiconductor chip device and package method thereof
05/05/2004CN1148795C Manufacturing method of semi-conductor device
05/05/2004CN1148792C Method for directly fixing heat radiator onto chip carrier by using flexile epoxy resin
05/05/2004CN1148791C Structure of transistor having parameters capable of adjusting independently, and process integration
05/05/2004CN1148790C Semiconductor device with waved deep slot and technology for preparing waved deep slot
05/05/2004CN1148789C Method and apparatus for etching semiconductor wafer
05/05/2004CN1148788C Semiconductor device self-aligned contact structure and methods of forming same
05/05/2004CN1148787C Method for producing lower electrode of capacitor and capacitor
05/05/2004CN1148786C Foreign-body elminating method, film forming method
05/05/2004CN1148785C Method for using hard mask for critical dimension growth containment
05/05/2004CN1148784C Method for miximizing chip yield for semiconductor wafers
05/05/2004CN1148644C Automatized system and method for use in semi-conductor factory
05/05/2004CN1148621C Integrated circuit and integrated circuit memory capable of rapid on chip voltage generation
05/05/2004CN1148609C Antireflective coatings for photosensitive resin compositions
05/05/2004CN1148600C Thin film transistor substrate and manufacturing methods thereof
05/05/2004CN1148581C Connector apparatus for microelectronic apparatus and its probe device
05/05/2004CN1148563C Method and apparatus for in-situ monitoring of plasma etch and deposition processes using pulsed broadband light source
05/05/2004CN1148466C Apparatus and method of removing residual reaction gas from dry etcher
05/05/2004CN1148267C Cleaning method and apparatus for the same
05/04/2004USRE38510 Manufacturing process for a monolithic semiconductor device comprising at least one transistor of an integrated control circuit and one power transistor integrated on the same chip
05/04/2004US6732351 Method of forming mask for charged particle beam exposure and processing program of pattern data for forming mask for charged particle beam exposure
05/04/2004US6732345 Layout method using created via cell data in automated layout
05/04/2004US6732344 Semiconductor integrated circuit device and standard cell placement design method
05/04/2004US6732340 Method for designing a semiconductor integrated circuit which includes consideration of parasitic elements on critical data paths
05/04/2004US6732295 Method and system of frequency modulated end-point detection
05/04/2004US6732062 Apparatus for analyzing a failure of a semiconductor device and method thereof
05/04/2004US6732017 System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
05/04/2004US6732007 Method and apparatus for implementing dynamic qualification recipes
05/04/2004US6732006 Method and system to process semiconductor wafers
05/04/2004US6732004 Program controlling measuring tool to measure position of alignment mark on substrate overlaid with deposited material, calculating corrected position of mark on basis of measured position and model of process apparatus involved in deposition
05/04/2004US6732001 Production management method
05/04/2004US6731561 Semiconductor memory and method of testing semiconductor memory
05/04/2004US6731547 Semiconductor integrated circuit including a plurality of macros that can be operated although their operational voltages are different from each other
05/04/2004US6731541 Low voltage single poly deep sub-micron flash EEPROM
05/04/2004US6731535 Nonvolatile semiconductor memory device
05/04/2004US6731533 Loadless 4T SRAM cell with PMOS drivers
05/04/2004US6731529 Variable capacitances for memory cells within a cell group
05/04/2004US6731496 Electrostatic chuck
05/04/2004US6731494 Capacitor and method for fabricating the same and semiconductor device
05/04/2004US6731480 Protection circuit for field effect transistor
05/04/2004US6731438 System comprising substrate that has been subjected to mass transport process, lens alignment structure on substrate that yields light pattern when substrate or near plane is imaged, and metal layer aligned to light pattern from lens structure
05/04/2004US6731432 Off-axis diffractive beam shapers and splitters for reducing sensitivity to manufacturing tolerances