Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/2004
05/11/2004US6734458 Test pattern for measuring contact resistance and method of manufacturing the same
05/11/2004US6734456 Ferroelectric film and semiconductor device
05/11/2004US6734451 Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same
05/11/2004US6734444 Substrate treatment device using a dielectric barrier discharge lamp
05/11/2004US6734439 Wafer pedestal tilt mechanism and cooling system
05/11/2004US6734416 Fabrication of low leakage-current backside illuminated photodiodes
05/11/2004US6734388 Dry surface cleaning apparatus
05/11/2004US6734372 Gate area relief strip for a molded I/C package
05/11/2004US6734370 Multilayer modules with flexible substrates
05/11/2004US6734258 Protective coating composition for dual damascene process
05/11/2004US6734121 Methods of treating surfaces of substrates
05/11/2004US6734120 Method of photoresist ash residue removal
05/11/2004US6734119 Electro-optical apparatus and method for fabricating a film, semiconductor device and memory device at near atmospheric pressure
05/11/2004US6734118 Dielectric material treatment
05/11/2004US6734117 Periodic clamping method and apparatus to reduce thermal stress in a wafer
05/11/2004US6734116 Damascene method employing multi-layer etch stop layer
05/11/2004US6734115 Oxidizing silicon compounds with oxygen containing compound at a constant rf power level; electrodeposition
05/11/2004US6734114 Method for manufacturing semiconductor integrated circuit device
05/11/2004US6734113 Method for forming multiple gate oxide layers
05/11/2004US6734111 Method to GaAs based lasers and a GaAs based laser
05/11/2004US6734110 Damascene method employing composite etch stop layer
05/11/2004US6734109 Method of building a CMOS structure on thin SOI with source/drain electrodes formed by in situ doped selective amorphous silicon
05/11/2004US6734108 Semiconductor structure and method of making contacts in a semiconductor structure
05/11/2004US6734107 Pitch reduction in semiconductor fabrication
05/11/2004US6734106 Method of buried strap out-diffusion formation by gas phase doping
05/11/2004US6734104 Method of manufacturing a semiconductor device and a semiconductor device
05/11/2004US6734103 Method of polishing a semiconductor device
05/11/2004US6734102 Plasma treatment for copper oxide reduction
05/11/2004US6734101 Solution to the problem of copper hillocks
05/11/2004US6734100 Method of forming ruthenium thin film using plasma enhanced process
05/11/2004US6734099 System for preventing excess silicon consumption in ultra shallow junctions
05/11/2004US6734098 Method for fabricating cobalt salicide contact
05/11/2004US6734097 Liner with poor step coverage to improve contact resistance in W contacts
05/11/2004US6734096 Fine-pitch device lithography using a sacrificial hardmask
05/11/2004US6734095 Method for producing cavities with submicrometer patterns in a semiconductor device using a freezing process liquid
05/11/2004US6734094 Method of forming an air gap within a structure by exposing an ultraviolet sensitive material to ultraviolet radiation
05/11/2004US6734092 Semiconductor device and manufacturing method thereof
05/11/2004US6734091 Electrode for p-type gallium nitride-based semiconductors
05/11/2004US6734090 Method of making an edge seal for a semiconductor device
05/11/2004US6734089 Techniques for improving wordline fabrication of a memory device
05/11/2004US6734088 Control of two-step gate etch process
05/11/2004US6734086 Semiconductor integrated circuit device and method of manufacturing the same
05/11/2004US6734085 Anti-type dosage as LDD implant
05/11/2004US6734084 Method of manufacturing a semiconductor device with recesses using anodic oxide
05/11/2004US6734083 Dicing method and dicing apparatus for dicing plate-like workpiece
05/11/2004US6734082 Method of forming a shallow trench isolation structure featuring a group of insulator liner layers located on the surfaces of a shallow trench shape
05/11/2004US6734081 Shallow trench isolation structure for laser thermal processing
05/11/2004US6734080 Semiconductor isolation material deposition system and method
05/11/2004US6734079 Microelectronic fabrication having sidewall passivated microelectronic capacitor structure fabricated therein
05/11/2004US6734078 Process for manufacturing semiconductors with a trench capacitor
05/11/2004US6734077 Method for fabricating a trench capacitor for a semiconductor memory
05/11/2004US6734076 Method for thin film resistor integration in dual damascene structure
05/11/2004US6734075 CMOS device having high-density resistance elements
05/11/2004US6734074 Micro fabrication with vortex shaped spirally topographically tapered spirally patterned conductor layer and method for fabrication thereof
05/11/2004US6734073 Method for manufacturing a bipolar junction transistor
05/11/2004US6734072 Method of fabricating a MOSFET device using a spike rapid thermal oxidation procedure
05/11/2004US6734071 Methods of forming insulative material against conductive structures
05/11/2004US6734070 Method of fabricating a semiconductor device with field-effect transistors having shallow source and drain junctions
05/11/2004US6734069 Method of forming a high dielectric constant insulating film and method of producing semiconductor device using the same
05/11/2004US6734068 Forming a layer of suboxide material comprising hafnium, zirconium, lanthanum, scandium or cerium silicates on a semiconductor substrate and forming a structure on the suboxide; transistors
05/11/2004US6734067 Method of forming a semiconductor storage device
05/11/2004US6734066 Method for fabricating split gate flash memory cell
05/11/2004US6734065 Method of forming a non-volatile memory device having a metal-oxide-nitride-oxide-semiconductor gate structure
05/11/2004US6734064 Method for fabricating read only memory including forming masking layers with openings and pre-coding the cell and peripheral regions
05/11/2004US6734063 Non-volatile memory cell and fabrication method
05/11/2004US6734062 Methods of forming DRAM cells
05/11/2004US6734061 Semiconductor memory device having a plug contacted to a capacitor electrode and method for fabricating the capacitor
05/11/2004US6734060 Semiconductor integrated circuit device and process for manufacturing
05/11/2004US6734059 Semiconductor device with deep trench isolation and method of manufacturing same
05/11/2004US6734058 Method for fabricating a semiconductor device
05/11/2004US6734057 Method of patterning capacitors and capacitors made thereby
05/11/2004US6734056 Self-aligned punch through stop for 6F2 rotated hybrid DRAM cell
05/11/2004US6734055 Multi-level (4 state/2-bit) stacked gate flash memory cell
05/11/2004US6734053 Effective MIM fabrication method and apparatus to avoid breakdown and leakage on damascene copper process
05/11/2004US6734052 Method of manufacturing thin film transistor
05/11/2004US6734050 Method of manufacturing a crystalline semiconductor film
05/11/2004US6734049 Array substrate for liquid crystal display device and the fabrication method of the same
05/11/2004US6734048 Thin film transistor liquid crystal display and fabrication method thereof
05/11/2004US6734047 Thinning of fuse passivation after C4 formation
05/11/2004US6734041 Semiconductor chip module and method for manufacturing the same
05/11/2004US6734040 Method of manufacturing semiconductor devices
05/11/2004US6734039 Semiconductor chip grid array package design and method of manufacture
05/11/2004US6734038 Method of manufacturing high-mobility organic thin films using organic vapor phase deposition
05/11/2004US6734036 Semiconductor device and method of fabrication
05/11/2004US6734035 Method for manufacturing light-emitting device using a group III nitride compound semiconductor
05/11/2004US6734034 Transistor and associated driving device
05/11/2004US6734032 Method and apparatus for marking a bare semiconductor die
05/11/2004US6734031 Solid-state imaging device and manufacturing method for solid-state imaging device
05/11/2004US6734030 Semiconductor light emitting device and method of fabricating semiconductor light emitting device
05/11/2004US6734029 Method for forming conductive film pattern, and electro-optical device and electronic apparatus
05/11/2004US6734027 Inspection system for process devices for treating substrates, sensor intended for such inspection system, and method for inspecting process devices
05/11/2004US6734020 Valve control system for atomic layer deposition chamber
05/11/2004US6733977 Generation of solid support for biopolymer analysis; form probe arrays on substrate, separate substrate, join substrate to package, recover package
05/11/2004US6733955 Regulating deposition rate by adjusting precursor to ozone ratio
05/11/2004US6733954 Semiconductor module substrate sheet, semiconductor module substrate sheet fabricating method and semiconductor module
05/11/2004US6733953 Semitransparent phase shifting mask has, in the periphery of a pattern element area, a light shielding portion which is formed by a semitransparent phase shifting portion and a transparent portion with the optimal size combination.
05/11/2004US6733933 Mask for manufacturing semiconductor device and method of manufacture thereof
05/11/2004US6733932 Mask lithography data generation method
05/11/2004US6733931 Symmetrical mask system and method for laser irradiation
05/11/2004US6733930 Photomask blank, photomask and method of manufacture