| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/06/2004 | US20040084678 Method of controlling storage capacitor's capacitance of thin film transistor liquid crystal display |
| 05/06/2004 | US20040084677 Method of fabricating a polysilicon layer |
| 05/06/2004 | US20040084676 Semiconductor memory device using vertical-channel transistors |
| 05/06/2004 | US20040084675 Semiconductor device and manufacturing method thereof |
| 05/06/2004 | US20040084674 Multiple gate transistor employing monocrystalline silicon walls |
| 05/06/2004 | US20040084673 Semiconductor device and method of fabricating the same |
| 05/06/2004 | US20040084672 Active matrix substrate and manufacturing method therefor |
| 05/06/2004 | US20040084667 Semiconductor device and method of crystal growth |
| 05/06/2004 | US20040084666 Switchable circuit devices |
| 05/06/2004 | US20040084637 Electron projection lithography apparatus using secondary electrons |
| 05/06/2004 | US20040084636 System and method for implanting a wafer with an ion beam |
| 05/06/2004 | US20040084633 Substrate holder for retaining a substrate within a processing chamber |
| 05/06/2004 | US20040084632 Illumination system and exposure apparatus and method |
| 05/06/2004 | US20040084622 Specimen current mapper |
| 05/06/2004 | US20040084621 Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system |
| 05/06/2004 | US20040084511 Method to achieve continuous hydrogen saturation in sparingly used electroless nickel plating process |
| 05/06/2004 | US20040084508 Method for constraining the spread of solder during reflow for preplated high wettability lead frame flip chip assembly |
| 05/06/2004 | US20040084437 Apparatus and method for reducing stray light in substrate processing chambers |
| 05/06/2004 | US20040084422 Plasma source |
| 05/06/2004 | US20040084416 Plasma treatment, ashing treatment and/or hot water rinse treatment |
| 05/06/2004 | US20040084415 CMP process leaving no residual oxide layer or slurry particles |
| 05/06/2004 | US20040084414 Polishing method and polishing composition used for polishing |
| 05/06/2004 | US20040084413 Etching method |
| 05/06/2004 | US20040084412 Plasma ashing process |
| 05/06/2004 | US20040084411 Method of etching a silicon-containing dielectric material |
| 05/06/2004 | US20040084410 Methods for etching dielectric materials |
| 05/06/2004 | US20040084409 Controlled polymerization on plasma reactor wall |
| 05/06/2004 | US20040084408 Method for surface preparation to enable uniform etching of polycrystalline materials |
| 05/06/2004 | US20040084407 Method for surface preparation to enable uniform etching of polycrystalline materials |
| 05/06/2004 | US20040084406 Apparatus and method for controlling etch depth |
| 05/06/2004 | US20040084398 Module, especially a wafer module |
| 05/06/2004 | US20040084320 Electroplating silicon wafer; free of seeding or chemical mechanical polishing; integrated circuits |
| 05/06/2004 | US20040084319 Method for electrochemical fabrication |
| 05/06/2004 | US20040084318 Electrofilling; immersing substrate in wetting solution; applying ultrasonic or megasonic vibrations; applying high pressure electrolyte jets of metal or alloy; electroplating |
| 05/06/2004 | US20040084317 Periodic vibration of spatial position of cathode electrode, lamp, and/or targe substrate holder |
| 05/06/2004 | US20040084316 Voltage applied between cathode electrode in contact with edge of substrate and vertically moveable anode; copper films of uniform thickness |
| 05/06/2004 | US20040084315 Plating apparatus and plating method |
| 05/06/2004 | US20040084301 Electro-chemical deposition system |
| 05/06/2004 | US20040084209 Flip chips; separating top and bottom flow fronts to prevent wrapping around sides and trapping air |
| 05/06/2004 | US20040084206 Fine pad pitch organic circuit board for flip chip joints and board to board solder joints and method |
| 05/06/2004 | US20040084153 Plasma source assembly and method of manufacture |
| 05/06/2004 | US20040084151 Magnetron plasma etching apparatus |
| 05/06/2004 | US20040084150 Photoresist implant crust removal |
| 05/06/2004 | US20040084149 Bubbler for substrate processing |
| 05/06/2004 | US20040084148 Low pressure plasma processing apparatus and method |
| 05/06/2004 | US20040084146 Plasma treatment apparatus, upper electrode cover, and upper electrode cover window member |
| 05/06/2004 | US20040084145 System and method for integrated oxide removal and processing of a semiconductor wafer |
| 05/06/2004 | US20040084144 Substrate processing apparatus and substrate processing method |
| 05/06/2004 | US20040084143 Temperature-controlled substrate holder for processing in fluids |
| 05/06/2004 | US20040084137 Method and structure for producing Z-axis interconnection assembly of printed wiring board elements |
| 05/06/2004 | US20040084066 Spray nozzles in enclosure for spraying fluid toward rotor; box holder; retainer bar; semiconductor wafers, flat panel media |
| 05/06/2004 | US20040084061 Comprising base, sugar alchol and/or saccharide; corrosion resistance of copper wiring; |
| 05/06/2004 | US20040084059 Applying deionized water solution comprising nitric acid, hydrofluoric acid, and phosphoric acid while subjected to megasonic sound waves; brush scrubbing, rinsing of semiconductor wafers |
| 05/06/2004 | US20040083978 Double slit-valve doors for plasma processing |
| 05/06/2004 | US20040083977 Lower pedestal shield |
| 05/06/2004 | US20040083975 Apparatus for reducing polymer deposition on a substrate and substrate support |
| 05/06/2004 | US20040083974 Hermetically-evacuated reaction vessel, substrate holders, gas source supply , and a high-frequency power supply; an end covering provided at an end of each of the substrate holders, the the source gas supply and the power supply; quality |
| 05/06/2004 | US20040083973 Film forming method and film forming device |
| 05/06/2004 | US20040083970 Vacuum processing device |
| 05/06/2004 | US20040083969 Film forming apparatus, substrate for forming oxide thin film, and production method thereof |
| 05/06/2004 | US20040083967 Plasma CVD apparatus for large area CVD film |
| 05/06/2004 | US20040083966 Support device and manufacturing method thereof, stage device, and exposure apparatus |
| 05/06/2004 | US20040083965 Vapor delivery system for solid precursors and method of using same |
| 05/06/2004 | US20040083955 Vacuum chamber load lock structure and article transport mechanism |
| 05/06/2004 | US20040083953 Spin-coating methods and apparatus for spin-coating, including pressure sensor |
| 05/06/2004 | US20040083949 Sequential chemical vapor deposition |
| 05/06/2004 | US20040083929 Driving means to position a load |
| 05/06/2004 | US20040083868 Cutting device |
| 05/06/2004 | US20040083863 Method for cutting hard and brittle material |
| 05/06/2004 | US20040083787 Method of monitoring evaporation rate of source material in a container |
| 05/06/2004 | US20040083621 Forced convection assisted rapid thermal furnace |
| 05/06/2004 | US20040083606 Circuit wiring board and method of manufacturing the same |
| 05/06/2004 | US20040083605 Press-fit chip package |
| 05/06/2004 | US20040083602 Method and apparatus for separating semiconductor chips |
| 05/06/2004 | US20040083588 Materials handling of semiconductor manufacturing, controlling the pressure, monitoring the gas flow, reducing the gas speed between the exhausting gas and purge gas |
| 05/06/2004 | US20040083568 Device for cleaning tip and side surfaces of a probe |
| 05/06/2004 | EP1416711A1 Signal processing circuit and solid-state image pickup device |
| 05/06/2004 | EP1416548A2 Organic gate insulating film and organic thin film transistor using the same |
| 05/06/2004 | EP1416540A1 Semiconductor device |
| 05/06/2004 | EP1416539A2 Heterojunction bipolar transistor |
| 05/06/2004 | EP1416537A2 Switching circuit device |
| 05/06/2004 | EP1416535A2 Tape carrier for tab |
| 05/06/2004 | EP1416532A1 Module component |
| 05/06/2004 | EP1416531A2 Memory device and method of fabrication and programming |
| 05/06/2004 | EP1416530A2 Treatment of a tunnel barrier layer |
| 05/06/2004 | EP1416529A1 Manufacturing method of semiconductor device |
| 05/06/2004 | EP1416528A2 Method of forming cavity between multilayered wirings |
| 05/06/2004 | EP1416527A1 Method for forming a stepped profile from stacked layers |
| 05/06/2004 | EP1416526A2 Semiconducteur device and manufacturing method of a semiconductor device |
| 05/06/2004 | EP1416525A2 Method for fabricating semiconductor device |
| 05/06/2004 | EP1416524A2 Method of planarizing a semiconductor die |
| 05/06/2004 | EP1416523A1 Heat treatment method and heat treatment device |
| 05/06/2004 | EP1416522A1 THIN−FILM SEMICONDUCTOR DEVICE AND ITS PRODUCTION METHOD |
| 05/06/2004 | EP1416521A2 Manufacturing method of semiconductor device |
| 05/06/2004 | EP1416520A1 Heating apparatus with electrostatic attraction function and method for producing it |
| 05/06/2004 | EP1416504A2 Ferromagnetic layer for magnetoresistive element |
| 05/06/2004 | EP1416501A2 Composition for preparing porous dielectric thin film containing saccharides porogen |
| 05/06/2004 | EP1416495A1 Treatment of a tunnel barrier layer |
| 05/06/2004 | EP1416285A2 Mechanism for fixing probe card |
| 05/06/2004 | EP1416025A1 Aqueous dispersion for chemical mechanical polishing, chemical mechanical polishing process, production process of semiconductor device and material for preparing an aqueous dispersion for chemical mechanical polishing |